[Scan]
initial_time=2016-01-18T18:12:18
final_time=2016-01-18T18:12:37
ip_count=19
run=1024
dataset=3
scan=205
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.08749E-4
ql1_vset=
ql1_vmon=-8.80098E-1
ql1_imon=1.33577E-8
ql2_vset=
ql2_vmon=-8.9705E-1
ql2_imon=1.90727E-9
ql3_vset=
ql3_vmon=-9.04684E0
ql3_imon=1.30212E-10
ql4_vset=
ql4_vmon=-9.04167E0
ql4_imon=8.51154E-12
mult1=-9.89692E-9
mult2=-2.83039E-9
rf_tmon=-4.6386E-3
rf_agc=3.31173E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.31538E-3
ql5_imon=1.70386E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6963E0
bslens_imon=2.43708E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1996E1
lens5a_imon=1.99324E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.05189E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53911E1
cs_ef1b_imon=2.82953E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02202E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04416E1
cs_ea1_imon=2.52202E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35368E0
lens1_imon=2.84765E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64813E1
os_ef1alow_imon=2.97405E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03708E1
cs_ea2_imon=1.52108E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84544E1
cs_ef1a_imon=2.94486E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.33903E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11466E1
os_restr1_imon=4.2585E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14851E1
os_ea1_imon=2.35992E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63485E1
os_ef1bup_imon=3.0728E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25859E0
cs_ionrep_imon=1.17847E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91989E2
cs_nozzle_imon=1.93441E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01509E1
cs_anode1_imon=2.97802E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20401E0
olens4_imon=3.35274E-8
tplens_vset=1.4E-1
tplens_vmon=1.65677E0
tplens_imon=-2.28099E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26122E1
iondef3_imon=1.50445E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26855E1
iondef2_imon=1.57099E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03052E2
lens6_imon=2.98049E-4
ql6_vset=1.0E-1
ql6_vmon=9.53913E-2
ql6_imon=4.07367E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28454E0
ionrepsh_imon=1.77663E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34106E1
lens5b_imon=2.17693E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74748E1
cs_ef2b_imon=3.11929E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47803E0
os_ea2_imon=-6.91762E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06137E2
lens4b_imon=2.00694E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.15785E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07618E0
os_ef2alow_imon=-2.45012E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.32262E-1
os_ef2bup_imon=-5.29365E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11418E1
os_restr2_imon=3.43608E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.29468E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01719E1
cs_anode2_imon=2.25001E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73147E1
iondef1_imon=1.09918E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68623E1
iondef4_imon=1.09963E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.12508E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=7.87503E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15957E0
cs_ionaccel_imon=-1.73653E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02112E2
cs_ionfocb_imon=1.47313E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56333E1
einzel_imon=7.60855E-6
window_vset=0.0E0
window_vmon=2.56986E-1
window_imon=-8.67976E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82704E2
mask1_imon=2.39149E-4
mask2_vset=0.0E0
mask2_vmon=-1.86524E1
mask2_imon=-6.12094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.19404E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.66667E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.02061E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26086E0
defgridb_imon=6.10036E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33303E1
os_fil1_imon=9.42943E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07185E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65439E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30878E1
cs_fil1_imon=9.96119E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62786E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67027E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20526E-2
os_fil2_imon=-2.73805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98315E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.90905E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36384E-1
cs_fil2_imon=-2.4197E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02209E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22731E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=2.9926E-1
chamber_ion_pmon=1.20122E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.07345E-1
res40_imon=-2.47895E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.80146E-1	-8.96454E-1	-9.04713E0	-9.04198E0	4.24385E-3	9.5892E-2	2.73541E1	-3.26543E1	-3.25977E1	2.68377E1	1.20106E-7	2.51954E-3	2.51954E-3	6.29665E-3	2.99686E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.80003E-1	-8.96788E-1	-9.04717E0	-9.04222E0	4.22001E-3	9.56774E-2	2.73382E1	-3.26456E1	-3.26456E1	2.68344E1	1.19653E-7	2.52209E-3	2.52209E-3	6.28552E-3	3.01347E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.79955E-1	-8.96335E-1	-9.04713E0	-9.04188E0	4.22001E-3	9.56297E-2	2.73352E1	-3.26773E1	-3.2613E1	2.68505E1	1.19861E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.02922E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.79955E-1	-8.96549E-1	-9.04703E0	-9.04193E0	4.07696E-3	9.60112E-2	2.73102E1	-3.26612E1	-3.26339E1	2.68475E1	1.20106E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.79908E-1	-8.96382E-1	-9.04696E0	-9.04202E0	4.41074E-3	9.59396E-2	2.73375E1	-3.26736E1	-3.26444E1	2.68655E1	1.19857E-7	2.51906E-3	2.51906E-3	6.32632E-3	2.99808E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09379E0	-8.80075E-1	-8.96716E-1	-9.04708E0	-9.04253E0	4.45843E-3	9.57489E-2	2.73082E1	-3.26399E1	-3.2599E1	2.6819E1	1.20196E-7	2.51736E-3	2.51736E-3	6.29786E-3	2.99109E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.80432E-1	-8.9643E-1	-9.04701E0	-9.04226E0	4.48227E-3	9.59158E-2	2.73015E1	-3.26645E1	-3.2608E1	2.68232E1	1.20159E-7	2.5199E-3	2.5199E-3	6.31445E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.80456E-1	-8.96358E-1	-9.04694E0	-9.04233E0	4.02927E-3	9.56059E-2	2.73198E1	-3.26331E1	-3.26366E1	2.68464E1	1.20174E-7	2.52538E-3	2.52538E-3	6.30192E-3	2.99E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.80075E-1	-8.96215E-1	-9.04691E0	-9.04231E0	4.43459E-3	9.59635E-2	2.73075E1	-3.26597E1	-3.25985E1	2.68194E1	1.19809E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.02133E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09387E0	-8.79955E-1	-8.96263E-1	-9.04706E0	-9.04174E0	4.43459E-3	9.58443E-2	2.73499E1	-3.26514E1	-3.2606E1	2.68267E1	1.20174E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-8.79955E-1	-8.96287E-1	-9.0472E0	-9.04174E0	4.17233E-3	9.58204E-2	2.73201E1	-3.26633E1	-3.2608E1	2.68268E1	1.19544E-7	2.51096E-3	2.51096E-3	6.32356E-3	3.01223E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.79955E-1	-8.9612E-1	-9.04684E0	-9.04205E0	3.98159E-3	9.56535E-2	2.73207E1	-3.26675E1	-3.26464E1	2.68202E1	1.20069E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.02396E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.79812E-1	-8.96168E-1	-9.04708E0	-9.042E0	4.57764E-3	9.54628E-2	2.73257E1	-3.26649E1	-3.26012E1	2.68569E1	1.20226E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.02133E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.79955E-1	-8.96311E-1	-9.04682E0	-9.04198E0	4.33922E-3	9.52721E-2	2.73087E1	-3.26579E1	-3.26554E1	2.68466E1	1.19902E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.99941E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09371E0	-8.80003E-1	-8.96811E-1	-9.04679E0	-9.04205E0	4.05312E-3	9.54866E-2	2.72809E1	-3.26561E1	-3.26083E1	2.68785E1	1.19861E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.01609E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09371E0	-8.80051E-1	-8.96859E-1	-9.04675E0	-9.04155E0	4.17233E-3	9.57489E-2	2.73237E1	-3.26464E1	-3.26506E1	2.6829E1	1.20069E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.00563E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.80003E-1	-8.96597E-1	-9.04665E0	-9.04152E0	4.05312E-3	9.55105E-2	2.73598E1	-3.2629E1	-3.2587E1	2.68563E1	1.19953E-7	2.51417E-3	2.51417E-3	6.33436E-3	2.99941E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09371E0	-8.80098E-1	-8.96645E-1	-9.04698E0	-9.04174E0	4.12464E-3	9.56297E-2	2.73511E1	-3.26337E1	-3.26461E1	2.68004E1	1.20174E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.02133E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09333E0	-8.80003E-1	-8.96478E-1	-9.04694E0	-9.04193E0	4.19617E-3	9.5582E-2	2.73429E1	-3.26945E1	-3.26074E1	2.68478E1	1.20106E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.99175E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-8.80098E-1	-8.9705E-1	-9.04684E0	-9.04167E0	4.31538E-3	9.53913E-2	2.73147E1	-3.26855E1	-3.26122E1	2.68623E1	1.20122E-7	2.5199E-3	2.5199E-3	6.33486E-3	2.9926E-1