[Scan]
initial_time=2016-01-18T18:12:44
final_time=2016-01-18T18:13:04
ip_count=19
run=1024
dataset=3
scan=206
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08755E-4
ql1_vset=
ql1_vmon=-8.79955E-1
ql1_imon=1.32409E-8
ql2_vset=
ql2_vmon=-8.96931E-1
ql2_imon=1.89487E-9
ql3_vset=
ql3_vmon=-9.0466E0
ql3_imon=1.54769E-10
ql4_vset=
ql4_vmon=-9.04198E0
ql4_imon=-3.31402E-12
mult1=-9.57182E-9
mult2=-2.7765E-9
rf_tmon=-3.99571E-3
rf_agc=3.42528E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.02927E-3
ql5_imon=1.71211E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67575E0
bslens_imon=2.4296E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19634E1
lens5a_imon=2.00146E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.04985E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53989E1
cs_ef1b_imon=2.84034E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.02272E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04531E1
cs_ea1_imon=2.53175E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36174E0
lens1_imon=2.71439E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64873E1
os_ef1alow_imon=2.96901E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03846E1
cs_ea2_imon=1.48198E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84382E1
cs_ef1a_imon=2.93188E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.34388E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11754E1
os_restr1_imon=4.26031E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15119E1
os_ea1_imon=2.36015E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63833E1
os_ef1bup_imon=3.07532E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23227E0
cs_ionrep_imon=1.19287E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91972E2
cs_nozzle_imon=1.93561E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01389E1
cs_anode1_imon=2.9636E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.34512E-8
tplens_vset=1.4E-1
tplens_vmon=1.62461E0
tplens_imon=-5.08433E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.50361E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26729E1
iondef2_imon=1.55192E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03073E2
lens6_imon=2.98245E-4
ql6_vset=1.0E-1
ql6_vmon=9.53197E-2
ql6_imon=4.09067E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26051E0
ionrepsh_imon=1.78191E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3409E1
lens5b_imon=2.18459E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74699E1
cs_ef2b_imon=3.13082E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49964E0
os_ea2_imon=-6.81471E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00648E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71624E1
cs_ef2a_imon=3.15965E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05636E0
os_ef2alow_imon=-2.5258E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87213E-1
os_ef2bup_imon=-5.19273E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11478E1
os_restr2_imon=3.41482E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.29171E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01965E1
cs_anode2_imon=2.23235E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73339E1
iondef1_imon=1.07679E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68178E1
iondef4_imon=1.08413E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71775E1
olens3_imon=5.16005E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=7.88297E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16798E0
cs_ionaccel_imon=-1.88429E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02109E2
cs_ionfocb_imon=1.47518E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56519E1
einzel_imon=7.79236E-6
window_vset=0.0E0
window_vmon=2.81013E-1
window_imon=-8.96807E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82731E2
mask1_imon=2.39171E-4
mask2_vset=0.0E0
mask2_vmon=-1.86638E1
mask2_imon=-7.41837E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.29629E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.45634E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50096E3
multb_neg_imon=7.35757E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31134E0
defgridb_imon=6.08142E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33295E1
os_fil1_imon=9.42696E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07113E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65535E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30851E1
cs_fil1_imon=9.95404E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61939E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6684E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35745E-2
os_fil2_imon=-2.58188E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86902E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.85514E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35608E-1
cs_fil2_imon=-2.20947E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32843E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22695E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32112E-3
inlet_lpb_pmon=3.01216E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.97134E-1
res40_imon=-2.56905E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=147
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.7986E-1	-8.96406E-1	-9.04689E0	-9.04193E0	4.22001E-3	9.5582E-2	2.73294E1	-3.26729E1	-3.26231E1	2.68209E1	1.20278E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01609E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09387E0	-8.80122E-1	-8.96382E-1	-9.04691E0	-9.04181E0	4.26769E-3	9.56535E-2	2.73296E1	-3.26621E1	-3.26156E1	2.68448E1	1.20042E-7	2.52131E-3	2.52131E-3	6.33388E-3	3.006E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.80003E-1	-8.96287E-1	-9.04684E0	-9.04176E0	4.24385E-3	9.57012E-2	2.73104E1	-3.26797E1	-3.2626E1	2.68256E1	1.20084E-7	2.52809E-3	2.52809E-3	6.31299E-3	3.01742E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09325E0	-8.79788E-1	-8.96287E-1	-9.0471E0	-9.042E0	4.05312E-3	9.57489E-2	2.73098E1	-3.26785E1	-3.26201E1	2.6854E1	1.19902E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09294E0	-8.79717E-1	-8.96525E-1	-9.04694E0	-9.04198E0	3.93391E-3	9.56535E-2	2.73694E1	-3.26602E1	-3.2616E1	2.68094E1	1.20004E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.02511E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09387E0	-8.80027E-1	-8.96311E-1	-9.04689E0	-9.04241E0	4.1008E-3	9.57966E-2	2.73598E1	-3.26771E1	-3.26248E1	2.6831E1	1.19851E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.80051E-1	-8.96382E-1	-9.04725E0	-9.0421E0	3.76701E-3	9.56059E-2	2.73129E1	-3.26494E1	-3.26014E1	2.68334E1	1.20278E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.80361E-1	-8.96454E-1	-9.04706E0	-9.04226E0	4.00543E-3	9.5582E-2	2.73369E1	-3.26494E1	-3.26963E1	2.68508E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9952E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.80194E-1	-8.96263E-1	-9.04717E0	-9.04188E0	4.14848E-3	9.55343E-2	2.73316E1	-3.26697E1	-3.26307E1	2.68389E1	1.20031E-7	2.51581E-3	2.51581E-3	6.33538E-3	2.98819E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.80098E-1	-8.96335E-1	-9.04706E0	-9.04214E0	3.98159E-3	9.53674E-2	2.73277E1	-3.26493E1	-3.26389E1	2.68469E1	1.19902E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.00966E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.79955E-1	-8.96096E-1	-9.04689E0	-9.04176E0	3.86238E-3	9.52959E-2	2.73269E1	-3.26862E1	-3.26095E1	2.68094E1	1.19705E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.03185E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.79884E-1	-8.95858E-1	-9.04694E0	-9.04145E0	4.14848E-3	9.54866E-2	2.73415E1	-3.26602E1	-3.26254E1	2.68412E1	1.20004E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00966E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.79836E-1	-8.96096E-1	-9.04658E0	-9.04179E0	3.95775E-3	9.54866E-2	2.7328E1	-3.26534E1	-3.25917E1	2.68138E1	1.1988E-7	2.5199E-3	2.5199E-3	6.3126E-3	3.00741E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.80194E-1	-8.96192E-1	-9.04684E0	-9.04205E0	3.95775E-3	9.53436E-2	2.73387E1	-3.26747E1	-3.26344E1	2.68466E1	1.19794E-7	2.51085E-3	2.51085E-3	6.3074E-3	3.01043E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.80027E-1	-8.96692E-1	-9.04653E0	-9.04183E0	3.8147E-3	9.55105E-2	2.72901E1	-3.26693E1	-3.26434E1	2.68454E1	1.20106E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.80075E-1	-8.96788E-1	-9.04672E0	-9.04174E0	3.86238E-3	9.55582E-2	2.73334E1	-3.26921E1	-3.25977E1	2.68472E1	1.19913E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.00302E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.80122E-1	-8.96645E-1	-9.0467E0	-9.04176E0	3.86238E-3	9.55582E-2	2.72997E1	-3.26302E1	-3.26266E1	2.68454E1	1.20055E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.01738E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.80051E-1	-8.96382E-1	-9.04686E0	-9.04169E0	3.52859E-3	9.52482E-2	2.73057E1	-3.26655E1	-3.26366E1	2.68395E1	1.19809E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01871E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.80146E-1	-8.96406E-1	-9.04679E0	-9.04179E0	3.71933E-3	9.53436E-2	2.73243E1	-3.26825E1	-3.2644E1	2.68358E1	1.19697E-7	2.51739E-3	2.51739E-3	6.29128E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.79955E-1	-8.96931E-1	-9.0466E0	-9.04198E0	4.02927E-3	9.53197E-2	2.73339E1	-3.26729E1	-3.26248E1	2.68178E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32112E-3	3.01216E-1