[Scan]
initial_time=2016-01-18T18:13:11
final_time=2016-01-18T18:13:30
ip_count=19
run=1024
dataset=3
scan=207
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09387E0
qbias_imon=-1.08806E-4
ql1_vset=
ql1_vmon=-8.79908E-1
ql1_imon=1.33967E-8
ql2_vset=
ql2_vmon=-8.96287E-1
ql2_imon=1.93216E-9
ql3_vset=
ql3_vmon=-9.04698E0
ql3_imon=7.23124E-11
ql4_vset=
ql4_vmon=-9.042E0
ql4_imon=-7.33137E-12
mult1=-9.54888E-9
mult2=-2.81141E-9
rf_tmon=-4.09922E-3
rf_agc=3.32733E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.6478E-3
ql5_imon=1.67831E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67506E0
bslens_imon=2.43708E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19836E1
lens5a_imon=2.02509E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.04959E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53953E1
cs_ef1b_imon=2.84755E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04663E2
lens23_imon=1.0205E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0428E1
cs_ea1_imon=2.51849E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38082E0
lens1_imon=2.5114E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=2.97585E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03389E1
cs_ea2_imon=1.49277E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84322E1
cs_ef1a_imon=2.93369E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.34299E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11514E1
os_restr1_imon=4.26787E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1507E1
os_ea1_imon=2.34258E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63833E1
os_ef1bup_imon=3.07424E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23558E0
cs_ionrep_imon=1.18342E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91953E2
cs_nozzle_imon=1.937E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=2.97045E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20399E0
olens4_imon=3.3493E-8
tplens_vset=1.4E-1
tplens_vmon=1.67978E0
tplens_imon=-2.95348E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26334E1
iondef3_imon=1.4956E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26891E1
iondef2_imon=1.56143E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03037E2
lens6_imon=2.98151E-4
ql6_vset=1.0E-1
ql6_vmon=9.55105E-2
ql6_imon=4.08655E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29575E0
ionrepsh_imon=1.7791E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33392E1
lens5b_imon=2.19463E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74711E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49632E0
os_ea2_imon=-8.8289E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06116E2
lens4b_imon=2.00701E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71438E1
cs_ef2a_imon=3.15821E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05996E0
os_ef2alow_imon=-2.53301E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13041E-1
os_ef2bup_imon=-5.29004E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11274E1
os_restr2_imon=3.42851E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.29291E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.24353E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73333E1
iondef1_imon=1.12467E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68232E1
iondef4_imon=1.09206E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=5.1154E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81355E-1
olens1_imon=7.86586E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12594E0
cs_ionaccel_imon=-1.8014E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02135E2
cs_ionfocb_imon=1.47558E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56477E1
einzel_imon=7.67342E-6
window_vset=0.0E0
window_vmon=2.74405E-1
window_imon=-8.75184E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8272E2
mask1_imon=2.39163E-4
mask2_vset=0.0E0
mask2_vmon=-1.86416E1
mask2_imon=-6.84173E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.63647E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.77285E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=6.99937E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36717E0
defgridb_imon=6.15345E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33294E1
os_fil1_imon=9.40678E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07539E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65645E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30874E1
cs_fil1_imon=9.95489E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6299E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67087E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.4332E-2
os_fil2_imon=-2.76207E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.68505E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36902E-1
cs_fil2_imon=-2.12537E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04612E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22648E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.03891E-1
chamber_ion_pmon=1.20042E-7
chamber_cvt_pmon=2.52342E-3
foreline_cvt_pmon=2.52342E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.98936E-1
res40_imon=-2.47174E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.8017E-1	-8.9612E-1	-9.04701E0	-9.04171E0	3.88622E-3	9.5582E-2	2.73015E1	-3.26567E1	-3.26536E1	2.684E1	1.20004E-7	2.52169E-3	2.52169E-3	6.33436E-3	2.9943E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09418E0	-8.79931E-1	-8.96478E-1	-9.04703E0	-9.04164E0	4.14848E-3	9.5582E-2	2.73584E1	-3.2645E1	-3.26101E1	2.68424E1	1.20017E-7	2.51552E-3	2.51552E-3	6.34588E-3	3.01347E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.80075E-1	-8.96239E-1	-9.04703E0	-9.0421E0	4.12464E-3	9.56297E-2	2.73265E1	-3.26585E1	-3.26115E1	2.68435E1	1.19766E-7	2.51915E-3	2.51915E-3	6.29624E-3	3.03081E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.80146E-1	-8.96168E-1	-9.04694E0	-9.04186E0	4.12464E-3	9.57489E-2	2.73381E1	-3.2663E1	-3.26721E1	2.68377E1	1.19941E-7	2.51919E-3	2.51919E-3	6.29684E-3	2.98592E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.80003E-1	-8.96478E-1	-9.04694E0	-9.04191E0	4.14848E-3	9.56059E-2	2.7335E1	-3.26362E1	-3.26018E1	2.68194E1	1.19831E-7	2.51369E-3	2.51369E-3	6.3126E-3	2.9926E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.80027E-1	-8.96478E-1	-9.04675E0	-9.04186E0	3.91006E-3	9.56297E-2	2.7334E1	-3.26478E1	-3.26461E1	2.68569E1	1.19895E-7	2.51758E-3	2.51758E-3	6.34231E-3	2.98985E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.80146E-1	-8.96597E-1	-9.0467E0	-9.04233E0	3.67165E-3	9.56297E-2	2.73105E1	-3.26266E1	-3.2632E1	2.68424E1	1.20106E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.80003E-1	-8.96311E-1	-9.04696E0	-9.04224E0	3.43323E-3	9.54866E-2	2.73273E1	-3.26579E1	-3.26398E1	2.68196E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.02396E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.80027E-1	-8.96215E-1	-9.04691E0	-9.04226E0	3.83854E-3	9.57251E-2	2.73204E1	-3.26526E1	-3.25995E1	2.68059E1	1.20017E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.80194E-1	-8.96144E-1	-9.04675E0	-9.0415E0	3.86238E-3	9.56297E-2	2.73287E1	-3.26561E1	-3.26738E1	2.67998E1	1.20055E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.97901E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.80051E-1	-8.96049E-1	-9.04691E0	-9.04205E0	3.71933E-3	9.53913E-2	2.73204E1	-3.26597E1	-3.26046E1	2.68214E1	1.20174E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.80384E-1	-8.95905E-1	-9.04701E0	-9.04224E0	3.95775E-3	9.5129E-2	2.73375E1	-3.26741E1	-3.25996E1	2.68436E1	1.20017E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.80337E-1	-8.96215E-1	-9.04703E0	-9.04174E0	3.74317E-3	9.54151E-2	2.73369E1	-3.26476E1	-3.2623E1	2.68178E1	1.19861E-7	2.52428E-3	2.52428E-3	6.30192E-3	3.02396E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.80265E-1	-8.96168E-1	-9.0472E0	-9.04186E0	3.69549E-3	9.56774E-2	2.73151E1	-3.26679E1	-3.26343E1	2.68545E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00302E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-8.80408E-1	-8.96287E-1	-9.04729E0	-9.04174E0	4.00543E-3	9.55582E-2	2.73124E1	-3.26774E1	-3.25911E1	2.68394E1	1.20017E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.01609E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.80361E-1	-8.96239E-1	-9.0471E0	-9.04167E0	3.67165E-3	9.53913E-2	2.73081E1	-3.26524E1	-3.26044E1	2.68496E1	1.19809E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00041E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09364E0	-8.80408E-1	-8.96215E-1	-9.04689E0	-9.04217E0	3.62396E-3	9.57012E-2	2.73317E1	-3.26874E1	-3.26214E1	2.68667E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.80289E-1	-8.96406E-1	-9.04696E0	-9.04183E0	3.76701E-3	9.54628E-2	2.73323E1	-3.2688E1	-3.26069E1	2.68172E1	1.19991E-7	2.51919E-3	2.51919E-3	6.33919E-3	3.01356E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.80146E-1	-8.96215E-1	-9.04713E0	-9.04191E0	3.76701E-3	9.54151E-2	2.73257E1	-3.26437E1	-3.26467E1	2.68435E1	1.19953E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09387E0	-8.79908E-1	-8.96287E-1	-9.04698E0	-9.042E0	3.6478E-3	9.55105E-2	2.73333E1	-3.26891E1	-3.26334E1	2.68232E1	1.20042E-7	2.52342E-3	2.52342E-3	6.3074E-3	3.03891E-1