[Scan]
initial_time=2016-01-18T18:14:04
final_time=2016-01-18T18:14:24
ip_count=19
run=1024
dataset=3
scan=209
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08773E-4
ql1_vset=
ql1_vmon=-8.80384E-1
ql1_imon=1.3342E-8
ql2_vset=
ql2_vmon=-8.95977E-1
ql2_imon=1.8894E-9
ql3_vset=
ql3_vmon=-9.04677E0
ql3_imon=1.57988E-10
ql4_vset=
ql4_vmon=-9.04183E0
ql4_imon=4.05312E-12
mult1=-9.97518E-9
mult2=-2.63727E-9
rf_tmon=-5.06862E-3
rf_agc=3.31233E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.88622E-3
ql5_imon=1.66E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62889E0
bslens_imon=2.134E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19508E1
lens5a_imon=1.99713E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.0501E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=2.82377E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02189E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04501E1
cs_ea1_imon=2.53607E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35574E0
lens1_imon=2.86941E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6459E1
os_ef1alow_imon=2.98234E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03828E1
cs_ea2_imon=1.48991E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84616E1
cs_ef1a_imon=2.93657E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.34678E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11394E1
os_restr1_imon=4.24985E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15402E1
os_ea1_imon=2.34933E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63425E1
os_ef1bup_imon=3.08758E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22806E0
cs_ionrep_imon=1.19683E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91966E2
cs_nozzle_imon=1.93503E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01737E1
cs_anode1_imon=2.97802E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20399E0
olens4_imon=3.338E-8
tplens_vset=1.4E-1
tplens_vmon=1.66727E0
tplens_imon=-2.27247E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26353E1
iondef3_imon=1.5065E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26677E1
iondef2_imon=1.55336E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03061E2
lens6_imon=2.98274E-4
ql6_vset=1.0E-1
ql6_vmon=9.56059E-2
ql6_imon=4.07741E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2515E0
ionrepsh_imon=1.77507E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33634E1
lens5b_imon=2.16007E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.11533E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56453E0
os_ea2_imon=-6.05767E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06146E2
lens4b_imon=2.00327E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.16254E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06297E0
os_ef2alow_imon=-2.41047E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0283E-1
os_ef2bup_imon=-5.29725E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11123E1
os_restr2_imon=3.4368E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.27801E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01419E1
cs_anode2_imon=2.24641E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73063E1
iondef1_imon=1.10346E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68325E1
iondef4_imon=1.10612E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.06856E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.87347E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10852E0
cs_ionaccel_imon=-1.73653E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02089E2
cs_ionfocb_imon=1.47331E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56405E1
einzel_imon=7.76713E-6
window_vset=0.0E0
window_vmon=2.10735E-1
window_imon=-7.45441E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82683E2
mask1_imon=2.38936E-4
mask2_vset=0.0E0
mask2_vmon=-1.86434E1
mask2_imon=-7.13005E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92681E3
multa_neg_imon=7.87308E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.51402E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50101E3
multb_neg_imon=6.89975E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44969E0
defgridb_imon=6.0634E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33321E1
os_fil1_imon=9.43261E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07347E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6568E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30914E1
cs_fil1_imon=9.96558E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63273E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67253E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30586E-2
os_fil2_imon=-2.81613E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95912E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.80874E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34183E-1
cs_fil2_imon=-3.25462E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.01628E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22813E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.77912E-1
res40_imon=-2.37083E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09364E0	-8.80218E-1	-8.96168E-1	-9.04744E0	-9.04183E0	3.45707E-3	9.55105E-2	2.73123E1	-3.26885E1	-3.26434E1	2.68593E1	1.19809E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.03185E-1
2.0E0	2.0E1	0.0E0	3.16E2	1.6E2	-2.09387E0	-8.80146E-1	-8.96311E-1	-9.04729E0	-9.04186E0	3.74317E-3	9.57727E-2	2.73297E1	-3.26675E1	-3.26014E1	2.6828E1	1.19861E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01347E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.80361E-1	-8.96597E-1	-9.0471E0	-9.04231E0	3.55244E-3	9.56059E-2	2.73287E1	-3.2659E1	-3.26307E1	2.68725E1	1.19757E-7	2.52647E-3	2.52647E-3	6.31837E-3	2.98222E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.80098E-1	-8.96573E-1	-9.04696E0	-9.04207E0	3.74317E-3	9.58443E-2	2.73177E1	-3.26561E1	-3.26044E1	2.68412E1	1.20311E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.98665E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.80146E-1	-8.9674E-1	-9.04713E0	-9.04214E0	4.05312E-3	9.57489E-2	2.73069E1	-3.26506E1	-3.26242E1	2.68352E1	1.20122E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.80289E-1	-8.96525E-1	-9.0472E0	-9.04238E0	4.05312E-3	9.56059E-2	2.73057E1	-3.26741E1	-3.26693E1	2.68388E1	1.20226E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0934E0	-8.79908E-1	-8.96454E-1	-9.04715E0	-9.04222E0	4.05312E-3	9.60112E-2	2.72939E1	-3.26585E1	-3.25953E1	2.68512E1	1.19965E-7	2.51552E-3	2.51552E-3	6.34588E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.8017E-1	-8.96454E-1	-9.0471E0	-9.042E0	3.71933E-3	9.56297E-2	2.73822E1	-3.26601E1	-3.26129E1	2.68297E1	1.20209E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.0071E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0934E0	-8.7986E-1	-8.96597E-1	-9.04679E0	-9.04191E0	3.71933E-3	9.59396E-2	2.73192E1	-3.26763E1	-3.2613E1	2.68444E1	1.20202E-7	2.51326E-3	2.51326E-3	6.31509E-3	2.99503E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.79622E-1	-8.96668E-1	-9.0466E0	-9.04214E0	3.88622E-3	9.55105E-2	2.73103E1	-3.26754E1	-3.26164E1	2.68207E1	1.19944E-7	2.51596E-3	2.51596E-3	6.31727E-3	3.01373E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.79741E-1	-8.96788E-1	-9.04653E0	-9.04195E0	3.83854E-3	9.55343E-2	2.73209E1	-3.26734E1	-3.26476E1	2.68325E1	1.19991E-7	2.5123E-3	2.5123E-3	6.31413E-3	3.01931E-1
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.80075E-1	-8.96358E-1	-9.04675E0	-9.04217E0	3.79086E-3	9.53674E-2	2.73586E1	-3.26663E1	-3.26242E1	2.68635E1	1.20009E-7	2.51233E-3	2.51233E-3	6.3531E-3	2.9962E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.79908E-1	-8.96168E-1	-9.04667E0	-9.04198E0	3.76701E-3	9.5582E-2	2.73129E1	-3.26573E1	-3.26236E1	2.6816E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01871E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.7986E-1	-8.96668E-1	-9.04691E0	-9.04207E0	4.12464E-3	9.55343E-2	2.73141E1	-3.26476E1	-3.26164E1	2.6843E1	1.20278E-7	2.52209E-3	2.52209E-3	6.34037E-3	3.00563E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09371E0	-8.79979E-1	-8.96406E-1	-9.04694E0	-9.04193E0	4.12464E-3	9.55582E-2	2.73279E1	-3.26771E1	-3.26771E1	2.68076E1	1.19705E-7	2.52867E-3	2.52867E-3	6.32936E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.7986E-1	-8.96525E-1	-9.04694E0	-9.04188E0	4.02927E-3	9.56059E-2	2.73328E1	-3.26809E1	-3.26095E1	2.68653E1	1.19757E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.9926E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.79812E-1	-8.96358E-1	-9.04675E0	-9.04167E0	3.69549E-3	9.58681E-2	2.73241E1	-3.26731E1	-3.26444E1	2.68232E1	1.19953E-7	2.52492E-3	2.52492E-3	6.3074E-3	3.00197E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.79908E-1	-8.96072E-1	-9.04675E0	-9.04181E0	3.83854E-3	9.56059E-2	2.73758E1	-3.26614E1	-3.25611E1	2.68209E1	1.20031E-7	2.51248E-3	2.51248E-3	6.33538E-3	3.00144E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.80122E-1	-8.96049E-1	-9.04703E0	-9.04179E0	3.93391E-3	9.5439E-2	2.73243E1	-3.26801E1	-3.26224E1	2.68328E1	1.19841E-7	2.51603E-3	2.51603E-3	6.3445E-3	2.99093E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.80384E-1	-8.95977E-1	-9.04677E0	-9.04183E0	3.88622E-3	9.56059E-2	2.73063E1	-3.26677E1	-3.26353E1	2.68325E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00824E-1