[Scan]
initial_time=2016-01-18T18:14:31
final_time=2016-01-18T18:14:50
ip_count=19
run=1024
dataset=3
scan=210
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09325E0
qbias_imon=-1.08757E-4
ql1_vset=
ql1_vmon=-8.79741E-1
ql1_imon=1.34125E-8
ql2_vset=
ql2_vmon=-8.96454E-1
ql2_imon=1.90784E-9
ql3_vset=
ql3_vmon=-9.04717E0
ql3_imon=1.15108E-10
ql4_vset=
ql4_vmon=-9.04181E0
ql4_imon=1.31965E-11
mult1=-1.01614E-8
mult2=-2.73306E-9
rf_tmon=-5.45332E-3
rf_agc=3.19759E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.98159E-3
ql5_imon=1.70561E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65652E0
bslens_imon=2.49089E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19725E1
lens5a_imon=1.99713E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.04996E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54127E1
cs_ef1b_imon=2.8371E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.02233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04646E1
cs_ea1_imon=2.51624E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34793E0
lens1_imon=2.78289E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64825E1
os_ef1alow_imon=2.98198E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03858E1
cs_ea2_imon=1.5101E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8467E1
cs_ef1a_imon=2.93152E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.33933E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11502E1
os_restr1_imon=4.25562E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14999E1
os_ea1_imon=2.34429E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63455E1
os_ef1bup_imon=3.08325E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2509E0
cs_ionrep_imon=1.20837E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91971E2
cs_nozzle_imon=1.93543E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01371E1
cs_anode1_imon=2.97946E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20403E0
olens4_imon=3.35159E-8
tplens_vset=1.4E-1
tplens_vmon=1.70512E0
tplens_imon=-3.17371E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26219E1
iondef3_imon=1.52849E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26655E1
iondef2_imon=1.57066E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03065E2
lens6_imon=2.9813E-4
ql6_vset=1.0E-1
ql6_vmon=9.55582E-2
ql6_imon=4.05496E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2569E0
ionrepsh_imon=1.7967E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33922E1
lens5b_imon=2.18062E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7479E1
cs_ef2b_imon=3.11136E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52427E0
os_ea2_imon=-6.45421E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00785E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7136E1
cs_ef2a_imon=3.16074E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06357E0
os_ef2alow_imon=-2.47895E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09437E-1
os_ef2bup_imon=-5.26121E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11286E1
os_restr2_imon=3.435E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.30036E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01521E1
cs_anode2_imon=2.23452E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.11175E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68526E1
iondef4_imon=1.09602E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.11117E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81188E-1
olens1_imon=7.86788E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15657E0
cs_ionaccel_imon=-1.7041E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47349E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56621E1
einzel_imon=7.61576E-6
window_vset=0.0E0
window_vmon=2.53382E-1
window_imon=-8.93203E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82725E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.86296E1
mask2_imon=-5.79658E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.78296E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.51041E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50165E3
multb_neg_imon=7.3792E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.61811E0
defgridb_imon=6.25806E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33326E1
os_fil1_imon=9.43417E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06885E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65441E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30896E1
cs_fil1_imon=9.9708E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62882E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67089E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42194E-2
os_fil2_imon=-2.62993E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87503E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.95053E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35608E-1
cs_fil2_imon=-2.53382E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.37998E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22701E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.49081E-1
res40_imon=-2.56905E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.80003E-1	-8.96406E-1	-9.04703E0	-9.04181E0	4.17233E-3	9.59635E-2	2.7344E1	-3.26691E1	-3.26455E1	2.68286E1	1.19953E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.00197E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.80194E-1	-8.96072E-1	-9.04713E0	-9.04205E0	4.29153E-3	9.55105E-2	2.73443E1	-3.26383E1	-3.26138E1	2.6825E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01085E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.80098E-1	-8.96406E-1	-9.04703E0	-9.0415E0	3.86238E-3	9.56535E-2	2.73045E1	-3.26826E1	-3.26213E1	2.6825E1	1.19872E-7	2.52027E-3	2.52027E-3	6.3074E-3	3.00942E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.79955E-1	-8.9612E-1	-9.04706E0	-9.04205E0	3.83854E-3	9.58204E-2	2.7349E1	-3.26236E1	-3.2617E1	2.68316E1	1.198E-7	2.51739E-3	2.51739E-3	6.28056E-3	3.03286E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.80098E-1	-8.96072E-1	-9.04686E0	-9.04224E0	4.19617E-3	9.5439E-2	2.73135E1	-3.26771E1	-3.26248E1	2.68334E1	1.19749E-7	2.50989E-3	2.50989E-3	6.33436E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.80098E-1	-8.96072E-1	-9.04703E0	-9.04229E0	4.19617E-3	9.5892E-2	2.73193E1	-3.26419E1	-3.26242E1	2.6829E1	1.20069E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.80122E-1	-8.96168E-1	-9.04701E0	-9.04198E0	4.05312E-3	9.5582E-2	2.73417E1	-3.26398E1	-3.2608E1	2.68424E1	1.20122E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09356E0	-8.80408E-1	-8.96168E-1	-9.04677E0	-9.04179E0	3.93391E-3	9.57727E-2	2.73273E1	-3.26621E1	-3.2593E1	2.68611E1	1.20004E-7	2.51417E-3	2.51417E-3	6.32896E-3	2.99175E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-8.79931E-1	-8.96144E-1	-9.04672E0	-9.0414E0	4.02927E-3	9.57012E-2	2.73429E1	-3.2647E1	-3.26422E1	2.68683E1	1.20084E-7	2.5147E-3	2.5147E-3	6.29067E-3	2.99613E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.80003E-1	-8.96287E-1	-9.04732E0	-9.04186E0	3.95775E-3	9.55582E-2	2.72821E1	-3.26508E1	-3.26543E1	2.68382E1	1.19809E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00302E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09371E0	-8.79955E-1	-8.96382E-1	-9.04715E0	-9.04195E0	3.93391E-3	9.56535E-2	2.73105E1	-3.26897E1	-3.26398E1	2.68316E1	1.20209E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.01223E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.80003E-1	-8.96263E-1	-9.04698E0	-9.04198E0	3.91006E-3	9.57489E-2	2.73222E1	-3.26472E1	-3.26372E1	2.68487E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.80003E-1	-8.96549E-1	-9.04689E0	-9.04212E0	4.1008E-3	9.57251E-2	2.73339E1	-3.26567E1	-3.26458E1	2.6828E1	1.20106E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.02511E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.80003E-1	-8.96502E-1	-9.04682E0	-9.04198E0	3.95775E-3	9.54866E-2	2.73291E1	-3.26506E1	-3.26254E1	2.68478E1	1.19861E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00824E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.8017E-1	-8.96335E-1	-9.04703E0	-9.04205E0	3.95775E-3	9.57727E-2	2.73659E1	-3.26384E1	-3.26101E1	2.6828E1	1.20158E-7	2.52276E-3	2.52276E-3	6.32896E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.80027E-1	-8.96287E-1	-9.04713E0	-9.04207E0	3.95775E-3	9.56297E-2	2.73063E1	-3.26939E1	-3.26158E1	2.68635E1	1.20122E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00824E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.79955E-1	-8.96454E-1	-9.04703E0	-9.042E0	3.76701E-3	9.56297E-2	2.73027E1	-3.26621E1	-3.25629E1	2.68683E1	1.20383E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.7986E-1	-8.96454E-1	-9.04698E0	-9.04191E0	3.60012E-3	9.5582E-2	2.73308E1	-3.26249E1	-3.26523E1	2.68485E1	1.20069E-7	2.52538E-3	2.52538E-3	6.32386E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-8.79669E-1	-8.96287E-1	-9.04682E0	-9.04207E0	3.62396E-3	9.55105E-2	2.73412E1	-3.26597E1	-3.26536E1	2.68436E1	1.19972E-7	2.51671E-3	2.51671E-3	6.32877E-3	3.01163E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09325E0	-8.79741E-1	-8.96454E-1	-9.04717E0	-9.04181E0	3.98159E-3	9.55582E-2	2.73051E1	-3.26655E1	-3.26219E1	2.68526E1