[Scan]
initial_time=2016-01-18T18:15:51
final_time=2016-01-18T18:16:10
ip_count=19
run=1024
dataset=3
scan=213
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08752E-4
ql1_vset=
ql1_vmon=-8.79812E-1
ql1_imon=1.33527E-8
ql2_vset=
ql2_vmon=-8.96597E-1
ql2_imon=1.90014E-9
ql3_vset=
ql3_vmon=-9.04686E0
ql3_imon=1.11234E-10
ql4_vset=
ql4_vmon=-9.04214E0
ql4_imon=-3.1352E-12
mult1=-9.94858E-9
mult2=-2.69974E-9
rf_tmon=-6.39716E-3
rf_agc=3.19759E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.12464E-3
ql5_imon=1.68434E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68686E0
bslens_imon=2.3132E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1999E1
lens5a_imon=1.98368E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.04987E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53852E1
cs_ef1b_imon=2.85116E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.0227E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04386E1
cs_ea1_imon=2.53158E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36902E0
lens1_imon=2.6813E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64689E1
os_ef1alow_imon=2.9575E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03773E1
cs_ea2_imon=1.52073E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84458E1
cs_ef1a_imon=2.93074E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.3428E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11129E1
os_restr1_imon=4.26941E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14839E1
os_ea1_imon=2.36452E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63913E1
os_ef1bup_imon=3.0694E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22083E0
cs_ionrep_imon=1.18448E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91966E2
cs_nozzle_imon=1.93473E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02018E1
cs_anode1_imon=2.98217E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2037E0
olens4_imon=3.35044E-8
tplens_vset=1.4E-1
tplens_vmon=1.70278E0
tplens_imon=-4.40464E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26083E1
iondef3_imon=1.51223E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26596E1
iondef2_imon=1.56815E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03065E2
lens6_imon=2.98187E-4
ql6_vset=1.0E-1
ql6_vmon=9.5582E-2
ql6_imon=4.07212E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30637E0
ionrepsh_imon=1.78052E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33717E1
lens5b_imon=2.15711E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74449E1
cs_ef2b_imon=3.13057E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49573E0
os_ea2_imon=-8.36877E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06139E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71599E1
cs_ef2a_imon=3.14725E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06498E0
os_ef2alow_imon=-2.4182E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84488E-1
os_ef2bup_imon=-5.33393E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11193E1
os_restr2_imon=3.42527E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2303E2
cs_ionfoca_imon=6.32193E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01798E1
cs_anode2_imon=2.2555E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73228E1
iondef1_imon=1.11759E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68545E1
iondef4_imon=1.09337E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.11087E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81092E-1
olens1_imon=7.88013E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11624E0
cs_ionaccel_imon=-1.63626E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02151E2
cs_ionfocb_imon=1.47202E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5655E1
einzel_imon=7.87203E-6
window_vset=0.0E0
window_vmon=2.84874E-1
window_imon=-8.12629E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82756E2
mask1_imon=2.39074E-4
mask2_vset=0.0E0
mask2_vmon=-1.86396E1
mask2_imon=-3.74747E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92607E3
multa_neg_imon=7.35331E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.92859E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.43826E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31106E0
defgridb_imon=6.28441E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33334E1
os_fil1_imon=9.42802E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07422E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65603E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30899E1
cs_fil1_imon=9.97433E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61596E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67443E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30657E-2
os_fil2_imon=-2.53597E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82547E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.91031E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34271E-1
cs_fil2_imon=-1.93359E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.74384E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22791E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3131E-3
inlet_lpb_pmon=2.97823E-1
chamber_ion_pmon=1.20154E-7
chamber_cvt_pmon=2.51384E-3
foreline_cvt_pmon=2.51384E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.35662E-1
res40_imon=-2.29656E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	9.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.80051E-1	-8.96502E-1	-9.04713E0	-9.04205E0	4.55379E-3	9.58204E-2	2.73123E1	-3.26254E1	-3.2605E1	2.68575E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00824E-1
2.0E0	3.8E1	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.80051E-1	-8.96263E-1	-9.04691E0	-9.04186E0	4.45843E-3	9.56059E-2	2.73277E1	-3.2686E1	-3.26432E1	2.6835E1	1.19902E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.80075E-1	-8.96311E-1	-9.04725E0	-9.04233E0	4.673E-3	9.56535E-2	2.73312E1	-3.26608E1	-3.26405E1	2.68574E1	1.20084E-7	2.51248E-3	2.51248E-3	6.31299E-3	3.03618E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.80122E-1	-8.96549E-1	-9.0471E0	-9.04224E0	4.41074E-3	9.5439E-2	2.73228E1	-3.2639E1	-3.26508E1	2.68244E1	1.20055E-7	2.52276E-3	2.52276E-3	6.33977E-3	2.9892E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09356E0	-8.80265E-1	-8.96788E-1	-9.04729E0	-9.04219E0	4.17233E-3	9.53913E-2	2.73345E1	-3.26783E1	-3.26344E1	2.6822E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.97394E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.80027E-1	-8.96335E-1	-9.04701E0	-9.04241E0	4.19617E-3	9.55582E-2	2.73387E1	-3.26669E1	-3.2611E1	2.68178E1	1.19851E-7	2.51096E-3	2.51096E-3	6.30202E-3	2.95876E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.79908E-1	-8.96215E-1	-9.04732E0	-9.04176E0	4.29153E-3	9.56535E-2	2.7346E1	-3.26326E1	-3.26206E1	2.68538E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.9874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.79622E-1	-8.96096E-1	-9.04706E0	-9.04167E0	4.17233E-3	9.57727E-2	2.73267E1	-3.26621E1	-3.26759E1	2.68448E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.79884E-1	-8.96096E-1	-9.04708E0	-9.04179E0	3.95775E-3	9.57012E-2	2.7337E1	-3.26378E1	-3.26183E1	2.68466E1	1.20017E-7	2.52428E-3	2.52428E-3	6.31288E-3	3.02133E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.80027E-1	-8.96287E-1	-9.04701E0	-9.04183E0	4.24385E-3	9.56297E-2	2.73712E1	-3.26434E1	-3.26284E1	2.6852E1	1.19861E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.04505E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.79955E-1	-8.96454E-1	-9.04689E0	-9.0416E0	3.93391E-3	9.54628E-2	2.73327E1	-3.26699E1	-3.25996E1	2.68058E1	1.2033E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.01609E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.79717E-1	-8.96144E-1	-9.04694E0	-9.04169E0	3.98159E-3	9.56774E-2	2.73275E1	-3.26661E1	-3.26779E1	2.68192E1	1.19861E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.98481E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.80027E-1	-8.96072E-1	-9.04703E0	-9.04191E0	3.83854E-3	9.57489E-2	2.73237E1	-3.26753E1	-3.26128E1	2.68178E1	1.19991E-7	2.52025E-3	2.52025E-3	6.32328E-3	2.98092E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.79669E-1	-8.96144E-1	-9.04667E0	-9.04176E0	3.93391E-3	9.58681E-2	2.73231E1	-3.26404E1	-3.26554E1	2.68364E1	1.20031E-7	2.51581E-3	2.51581E-3	6.30182E-3	2.98026E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09657E0	-8.79931E-1	-8.96192E-1	-9.04686E0	-9.0415E0	3.98159E-3	9.57489E-2	2.7348E1	-3.26695E1	-3.26382E1	2.68314E1	1.19595E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.0071E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09665E0	-8.79812E-1	-8.96263E-1	-9.04706E0	-9.0415E0	3.98159E-3	9.61304E-2	2.73251E1	-3.26578E1	-3.26522E1	2.68831E1	1.20055E-7	2.51739E-3	2.51739E-3	6.29128E-3	3.01995E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09627E0	-8.79884E-1	-8.96192E-1	-9.04679E0	-9.0416E0	4.33922E-3	9.57727E-2	2.73517E1	-3.26325E1	-3.26307E1	2.68256E1	1.20137E-7	2.51025E-3	2.51025E-3	6.31858E-3	3.0201E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.79908E-1	-8.95786E-1	-9.04686E0	-9.04152E0	4.12464E-3	9.58681E-2	2.73267E1	-3.26949E1	-3.25833E1	2.68798E1	1.19861E-7	2.51552E-3	2.51552E-3	6.35692E-3	3.03185E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.80194E-1	-8.96239E-1	-9.0466E0	-9.042E0	4.00543E-3	9.57727E-2	2.73569E1	-3.26884E1	-3.26322E1	2.68138E1	1.19782E-7	2.5199E-3	2.5199E-3	6.31779E-3	3.00989E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.79812E-1	-8.96597E-1	-9.04686E0	-9.04214E0	4.12464E-3	9.5582E-2	2.73228E1	-3.26596E1	-3.26083E1	2.68545E1	1.20154E-7	2.51384E-3	2.51384E-3	6.3131E-3	2.97823E-1