[Scan]
initial_time=2016-01-18T18:16:17
final_time=2016-01-18T18:16:37
ip_count=19
run=1024
dataset=3
scan=214
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08766E-4
ql1_vset=
ql1_vmon=-8.80075E-1
ql1_imon=1.32991E-8
ql2_vset=
ql2_vmon=-8.96597E-1
ql2_imon=1.95216E-9
ql3_vset=
ql3_vmon=-9.04694E0
ql3_imon=1.4689E-10
ql4_vset=
ql4_vmon=-9.04205E0
ql4_imon=-1.52707E-11
mult1=-8.87347E-9
mult2=-2.62679E-9
rf_tmon=-5.03514E-3
rf_agc=3.28649E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.52859E-3
ql5_imon=1.67971E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66444E0
bslens_imon=2.5291E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19748E1
lens5a_imon=2.0127E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12491E2
lens4a_imon=2.0482E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53997E1
cs_ef1b_imon=2.82683E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02319E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04923E1
cs_ea1_imon=2.52309E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33835E0
lens1_imon=2.52202E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.97522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03708E1
cs_ea2_imon=1.52816E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84388E1
cs_ef1a_imon=2.94499E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.34753E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11315E1
os_restr1_imon=4.25099E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15258E1
os_ea1_imon=2.35178E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63676E1
os_ef1bup_imon=3.08122E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19134E0
cs_ionrep_imon=1.1951E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91961E2
cs_nozzle_imon=1.93505E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01439E1
cs_anode1_imon=2.978E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2038E0
olens4_imon=3.34652E-8
tplens_vset=1.4E-1
tplens_vmon=1.70042E0
tplens_imon=-2.77651E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26158E1
iondef3_imon=1.49878E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26326E1
iondef2_imon=1.56285E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03064E2
lens6_imon=2.98254E-4
ql6_vset=1.0E-1
ql6_vmon=9.53674E-2
ql6_imon=4.07012E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23794E0
ionrepsh_imon=1.783E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34006E1
lens5b_imon=2.18224E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.12257E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52522E0
os_ea2_imon=-5.74961E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00563E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71426E1
cs_ef2a_imon=3.15767E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06556E0
os_ef2alow_imon=-2.55373E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9028E-1
os_ef2bup_imon=-5.37564E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11465E1
os_restr2_imon=3.42075E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.29574E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02122E1
cs_anode2_imon=2.24438E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73435E1
iondef1_imon=1.12998E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68322E1
iondef4_imon=1.09059E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.0599E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81021E-1
olens1_imon=7.88353E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15099E0
cs_ionaccel_imon=-1.83088E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02125E2
cs_ionfocb_imon=1.4741E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56666E1
einzel_imon=7.74692E-6
window_vset=0.0E0
window_vmon=2.55334E-1
window_imon=-7.70926E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8272E2
mask1_imon=2.39081E-4
mask2_vset=0.0E0
mask2_vmon=-1.86361E1
mask2_imon=-6.77094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9266E3
multa_neg_imon=7.0737E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.52155E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.66832E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27268E0
defgridb_imon=5.91985E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33318E1
os_fil1_imon=9.43434E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07109E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65496E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30877E1
cs_fil1_imon=9.96559E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62771E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67454E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39521E-2
os_fil2_imon=-2.71552E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83127E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.83944E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33647E-1
cs_fil2_imon=-2.60547E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.21909E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22852E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01871E-1
chamber_ion_pmon=1.202E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.0786E-1
res40_imon=-2.43905E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.79669E-1	-8.96358E-1	-9.04686E0	-9.04188E0	4.17233E-3	9.55343E-2	2.73405E1	-3.26856E1	-3.2606E1	2.68244E1	1.20017E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01609E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.7986E-1	-8.96382E-1	-9.04701E0	-9.04219E0	4.07696E-3	9.56297E-2	2.72943E1	-3.26621E1	-3.26194E1	2.68292E1	1.20192E-7	2.51709E-3	2.51709E-3	6.29157E-3	3.01862E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.79884E-1	-8.96335E-1	-9.04706E0	-9.04202E0	4.00543E-3	9.59158E-2	2.73317E1	-3.26556E1	-3.26075E1	2.68348E1	1.19925E-7	2.52027E-3	2.52027E-3	6.31299E-3	2.98819E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.79717E-1	-8.96478E-1	-9.04698E0	-9.04176E0	3.83854E-3	9.58681E-2	2.73033E1	-3.26308E1	-3.26176E1	2.6825E1	1.1964E-7	2.51709E-3	2.51709E-3	6.34982E-3	2.98092E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.80051E-1	-8.96716E-1	-9.04689E0	-9.04195E0	3.88622E-3	9.56059E-2	2.73231E1	-3.26476E1	-3.26549E1	2.68358E1	1.20278E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.01347E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.79765E-1	-8.96502E-1	-9.04703E0	-9.04181E0	3.93391E-3	9.59158E-2	2.73321E1	-3.26524E1	-3.26284E1	2.68322E1	1.20226E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09394E0	-8.79884E-1	-8.96454E-1	-9.04713E0	-9.04222E0	4.26769E-3	9.59396E-2	2.73322E1	-3.26543E1	-3.25865E1	2.68308E1	1.20004E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.01995E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.79812E-1	-8.96621E-1	-9.04732E0	-9.04219E0	3.95775E-3	9.57012E-2	2.73195E1	-3.26681E1	-3.26074E1	2.68556E1	1.19913E-7	2.5199E-3	2.5199E-3	6.27461E-3	3.01347E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.79979E-1	-8.96835E-1	-9.04696E0	-9.04181E0	3.88622E-3	9.59396E-2	2.73141E1	-3.26735E1	-3.25882E1	2.68508E1	1.19757E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.98481E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.79836E-1	-8.96788E-1	-9.04725E0	-9.04181E0	4.02927E-3	9.56535E-2	2.73484E1	-3.26332E1	-3.26212E1	2.68268E1	1.19913E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.97963E-1
1.4E1	5.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.79788E-1	-8.96621E-1	-9.04679E0	-9.04207E0	4.29153E-3	9.5892E-2	2.73075E1	-3.26621E1	-3.26458E1	2.68484E1	1.20017E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9978E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.79836E-1	-8.96239E-1	-9.04651E0	-9.04186E0	4.14848E-3	9.58204E-2	2.73508E1	-3.26603E1	-3.26392E1	2.6819E1	1.19851E-7	2.52599E-3	2.52599E-3	6.30202E-3	3.0148E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.79955E-1	-8.96597E-1	-9.04672E0	-9.04164E0	4.24385E-3	9.57727E-2	2.73139E1	-3.26585E1	-3.26626E1	2.68142E1	1.20226E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.03712E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.79931E-1	-8.96454E-1	-9.04655E0	-9.04186E0	4.14848E-3	9.57489E-2	2.73173E1	-3.26432E1	-3.2645E1	2.68695E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.02396E-1
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09379E0	-8.80194E-1	-8.96478E-1	-9.04691E0	-9.04219E0	4.22001E-3	9.58443E-2	2.73105E1	-3.26723E1	-3.26308E1	2.68052E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.02396E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.8017E-1	-8.96454E-1	-9.04691E0	-9.04207E0	4.17233E-3	9.58443E-2	2.73275E1	-3.26419E1	-3.26319E1	2.6846E1	1.20174E-7	2.52209E-3	2.52209E-3	6.34588E-3	3.02659E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.80313E-1	-8.96573E-1	-9.0471E0	-9.04217E0	3.98159E-3	9.56774E-2	2.72919E1	-3.26536E1	-3.26783E1	2.6834E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.80289E-1	-8.96573E-1	-9.04739E0	-9.04202E0	3.93391E-3	9.57012E-2	2.73339E1	-3.26915E1	-3.25978E1	2.68268E1	1.19757E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.9952E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.80003E-1	-8.9643E-1	-9.04706E0	-9.04171E0	3.93391E-3	9.53197E-2	2.73478E1	-3.26771E1	-3.26428E1	2.68334E1	1.19902E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.80075E-1	-8.96597E-1	-9.04694E0	-9.04205E0	3.52859E-3	9.53674E-2	2.73435E1	-3.26326E1	-3.26158E1	2.68322E1	1.202E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.01871E-1