[Scan]
initial_time=2016-01-18T18:16:44
final_time=2016-01-18T18:17:03
ip_count=19
run=1024
dataset=3
scan=215
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08777E-4
ql1_vset=
ql1_vmon=-8.79645E-1
ql1_imon=1.33538E-8
ql2_vset=
ql2_vmon=-8.96406E-1
ql2_imon=1.93698E-9
ql3_vset=
ql3_vmon=-9.04713E0
ql3_imon=1.55795E-10
ql4_vset=
ql4_vmon=-9.04205E0
ql4_imon=-2.41995E-12
mult1=-1.0222E-8
mult2=-2.83239E-9
rf_tmon=-5.34156E-3
rf_agc=3.31714E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=1.67956E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65893E0
bslens_imon=2.33227E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20211E1
lens5a_imon=1.97406E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12456E2
lens4a_imon=2.05302E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54109E1
cs_ef1b_imon=2.84863E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02287E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04856E1
cs_ea1_imon=2.52886E-5
lens1_vset=-5.0E0
lens1_vmon=-5.29265E0
lens1_imon=2.91988E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64801E1
os_ef1alow_imon=2.98126E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04219E1
cs_ea2_imon=1.48559E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8419E1
cs_ef1a_imon=2.93477E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.35041E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=4.24805E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14993E1
os_ea1_imon=2.38574E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63719E1
os_ef1bup_imon=3.07929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.16678E0
cs_ionrep_imon=1.17448E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91993E2
cs_nozzle_imon=1.93402E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01557E1
cs_anode1_imon=2.96216E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.35603E-8
tplens_vset=1.4E-1
tplens_vmon=1.66787E0
tplens_imon=-5.42091E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.2623E1
iondef3_imon=1.4773E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26777E1
iondef2_imon=1.56922E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03047E2
lens6_imon=2.98285E-4
ql6_vset=1.0E-1
ql6_vmon=9.53913E-2
ql6_imon=4.07807E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31518E0
ionrepsh_imon=1.74875E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33802E1
lens5b_imon=2.1936E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74717E1
cs_ef2b_imon=3.12542E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52007E0
os_ea2_imon=-8.07644E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06176E2
lens4b_imon=2.00378E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71474E1
cs_ef2a_imon=3.16434E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06177E0
os_ef2alow_imon=-2.53301E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.17246E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11292E1
os_restr2_imon=3.4195E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23027E2
cs_ionfoca_imon=6.31514E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01977E1
cs_anode2_imon=2.24281E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73508E1
iondef1_imon=1.08183E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68388E1
iondef4_imon=1.08413E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.08244E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81307E-1
olens1_imon=7.89234E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16978E0
cs_ionaccel_imon=-1.86988E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02109E2
cs_ionfocb_imon=1.47493E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56615E1
einzel_imon=7.80317E-6
window_vset=0.0E0
window_vmon=2.64194E-1
window_imon=-8.21124E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8269E2
mask1_imon=2.39167E-4
mask2_vset=0.0E0
mask2_vmon=-1.86578E1
mask2_imon=-6.84173E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.41165E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=5.96246E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50083E3
multb_neg_imon=7.19896E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37149E0
defgridb_imon=6.10305E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33331E1
os_fil1_imon=9.42853E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07329E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65851E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30891E1
cs_fil1_imon=9.94473E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62414E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67428E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.37035E-2
os_fil2_imon=-2.73805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97714E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.80745E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.43772E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.31991E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22684E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.4E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.36177E-1
res40_imon=-2.6159E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=224
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.79788E-1	-8.9643E-1	-9.04675E0	-9.04224E0	3.83854E-3	9.61542E-2	2.73157E1	-3.27086E1	-3.25776E1	2.68169E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.01995E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.09449E0	-8.79836E-1	-8.96072E-1	-9.04698E0	-9.04207E0	4.1008E-3	9.57012E-2	2.73082E1	-3.26242E1	-3.26101E1	2.68562E1	1.20182E-7	2.51953E-3	2.51953E-3	6.3157E-3	3.01543E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.80027E-1	-8.96025E-1	-9.04691E0	-9.04174E0	4.24385E-3	9.55582E-2	2.73145E1	-3.26632E1	-3.26331E1	2.68233E1					
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.80075E-1	-8.96239E-1	-9.04701E0	-9.04179E0	4.36306E-3	9.54866E-2	2.73472E1	-3.26909E1	-3.25906E1	2.68484E1	1.20142E-7	2.51603E-3	2.51603E-3	6.30212E-3	2.98842E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.80122E-1	-8.96049E-1	-9.04708E0	-9.04212E0	4.07696E-3	9.56774E-2	2.7337E1	-3.26626E1	-3.26219E1	2.68262E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.97445E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.80051E-1	-8.95762E-1	-9.04691E0	-9.042E0	4.29153E-3	9.5582E-2	2.73496E1	-3.26464E1	-3.26242E1	2.68487E1	1.19965E-7	2.51826E-3	2.51826E-3	6.31288E-3	3.00171E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.80241E-1	-8.96049E-1	-9.0471E0	-9.04219E0	4.1008E-3	9.59158E-2	2.73147E1	-3.2653E1	-3.26188E1	2.68418E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.80122E-1	-8.9612E-1	-9.04722E0	-9.04179E0	3.95775E-3	9.59396E-2	2.73334E1	-3.26626E1	-3.26502E1	2.68534E1	1.19953E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.9943E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0934E0	-8.80241E-1	-8.96001E-1	-9.04691E0	-9.04193E0	4.22001E-3	9.54151E-2	2.73092E1	-3.26443E1	-3.25989E1	2.68388E1	1.20209E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.0148E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09348E0	-8.80194E-1	-8.96239E-1	-9.04679E0	-9.04181E0	4.19617E-3	9.58443E-2	2.73085E1	-3.26647E1	-3.26567E1	2.683E1	1.19809E-7	2.52538E-3	2.52538E-3	6.32936E-3	3.02133E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09371E0	-8.80122E-1	-8.96311E-1	-9.04694E0	-9.04136E0	4.12464E-3	9.58204E-2	2.73286E1	-3.26349E1	-3.2647E1	2.6875E1	1.1988E-7	2.51783E-3	2.51783E-3	6.3074E-3	2.9926E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.80051E-1	-8.95953E-1	-9.0467E0	-9.04202E0	3.93391E-3	9.53913E-2	2.73129E1	-3.26543E1	-3.26188E1	2.6831E1	1.19667E-7	2.52066E-3	2.52066E-3	6.3245E-3	2.97823E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.79979E-1	-8.96168E-1	-9.04672E0	-9.04188E0	4.12464E-3	9.56059E-2	2.73484E1	-3.26759E1	-3.25948E1	2.68352E1	1.19861E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.96671E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.79931E-1	-8.9612E-1	-9.04679E0	-9.042E0	4.05312E-3	9.55105E-2	2.73009E1	-3.26434E1	-3.26723E1	2.68268E1	1.20137E-7	2.52027E-3	2.52027E-3	6.31858E-3	3.0041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09364E0	-8.80122E-1	-8.96072E-1	-9.04651E0	-9.04212E0	4.24385E-3	9.56535E-2	2.73417E1	-3.26326E1	-3.2605E1	2.68442E1	1.20004E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.79979E-1	-8.96168E-1	-9.04665E0	-9.0421E0	4.12464E-3	9.55105E-2	2.73165E1	-3.26657E1	-3.26488E1	2.68482E1	1.20226E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01085E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.79669E-1	-8.96287E-1	-9.04686E0	-9.04179E0	3.83854E-3	9.57251E-2	2.73358E1	-3.26838E1	-3.25977E1	2.68532E1	1.19705E-7	2.5199E-3	2.5199E-3	6.30466E-3	2.97316E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.79931E-1	-8.96072E-1	-9.04696E0	-9.04214E0	3.88622E-3	9.57966E-2	2.73255E1	-3.26524E1	-3.2611E1	2.68599E1					
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.79836E-1	-8.96215E-1	-9.04682E0	-9.04195E0	4.14848E-3	9.55105E-2	2.73086E1	-3.26431E1	-3.26331E1	2.68286E1	1.20055E-7	2.5131E-3	2.5131E-3	6.33436E-3	2.9841E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.79645E-1	-8.96406E-1	-9.04713E0	-9.04205E0	4.33922E-3	9.53913E-2	2.73508E1	-3.26777E1	-3.2623E1	2.68388E1	1.198E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.99686E-1