[Scan]
initial_time=2016-01-18T18:17:11
final_time=2016-01-18T18:17:30
ip_count=19
run=1024
dataset=3
scan=216
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08791E-4
ql1_vset=
ql1_vmon=-8.80146E-1
ql1_imon=1.33675E-8
ql2_vset=
ql2_vmon=-8.96049E-1
ql2_imon=1.92513E-9
ql3_vset=
ql3_vmon=-9.04694E0
ql3_imon=1.22452E-10
ql4_vset=
ql4_vmon=-9.04186E0
ql4_imon=1.33872E-11
mult1=-1.03063E-8
mult2=-2.7246E-9
rf_tmon=-5.46173E-3
rf_agc=3.20718E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=1.68746E-9
bslens_vset=-6.2E0
bslens_vmon=-6.7088E0
bslens_imon=2.43321E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19556E1
lens5a_imon=2.00867E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.05035E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53839E1
cs_ef1b_imon=2.8508E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.01952E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04754E1
cs_ea1_imon=2.52814E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36595E0
lens1_imon=2.66393E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64566E1
os_ef1alow_imon=2.98162E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03852E1
cs_ea2_imon=1.47009E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84442E1
cs_ef1a_imon=2.93837E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.34352E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11502E1
os_restr1_imon=4.24697E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15203E1
os_ea1_imon=2.38502E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63785E1
os_ef1bup_imon=3.08217E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23527E0
cs_ionrep_imon=1.1907E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91948E2
cs_nozzle_imon=1.93442E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01383E1
cs_anode1_imon=2.98594E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2037E0
olens4_imon=3.34453E-8
tplens_vset=1.4E-1
tplens_vmon=1.69551E0
tplens_imon=-2.66901E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26332E1
iondef3_imon=1.49893E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26837E1
iondef2_imon=1.60023E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03058E2
lens6_imon=2.9813E-4
ql6_vset=1.0E-1
ql6_vmon=9.57012E-2
ql6_imon=4.09362E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27193E0
ionrepsh_imon=1.80427E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34006E1
lens5b_imon=2.16007E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74573E1
cs_ef2b_imon=3.11857E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52728E0
os_ea2_imon=-6.85076E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.00781E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71384E1
cs_ef2a_imon=3.16038E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07558E0
os_ef2alow_imon=-2.47895E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0343E-1
os_ef2bup_imon=-5.3441E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1131E1
os_restr2_imon=3.42671E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23017E2
cs_ionfoca_imon=6.28378E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.25902E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73153E1
iondef1_imon=1.12689E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68208E1
iondef4_imon=1.09855E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.11582E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81212E-1
olens1_imon=7.87495E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-1.83744E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02106E2
cs_ionfocb_imon=1.47313E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56489E1
einzel_imon=7.7383E-6
window_vset=0.0E0
window_vmon=2.63593E-1
window_imon=-7.31025E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82696E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86458E1
mask2_imon=-7.67065E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92605E3
multa_neg_imon=7.57387E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93766E3
defgrida_imon=6.651E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=6.96824E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.573E0
defgridb_imon=6.13189E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33342E1
os_fil1_imon=9.42805E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07293E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65618E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30923E1
cs_fil1_imon=9.94978E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62816E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67568E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35745E-2
os_fil2_imon=-2.6059E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.87706E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36514E-1
cs_fil2_imon=-2.68399E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.19978E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22711E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.02511E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.88724E-1
res40_imon=-2.50057E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.80075E-1	-8.96406E-1	-9.04665E0	-9.04205E0	4.31538E-3	9.54866E-2	2.73086E1	-3.26296E1	-3.26083E1	2.68436E1	1.19757E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9926E-1
2.0E0	4.2E1	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.80051E-1	-8.9643E-1	-9.04667E0	-9.04174E0	4.26769E-3	9.55582E-2	2.73449E1	-3.26517E1	-3.26474E1	2.68593E1	1.20106E-7	2.52384E-3	2.52384E-3	6.29665E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09364E0	-8.80122E-1	-8.96144E-1	-9.04677E0	-9.042E0	4.12464E-3	9.55582E-2	2.73139E1	-3.26756E1	-3.2606E1	2.68244E1	1.19933E-7	2.5143E-3	2.5143E-3	6.31012E-3	2.99603E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09379E0	-8.80408E-1	-8.96263E-1	-9.0471E0	-9.04193E0	4.36306E-3	9.56059E-2	2.73488E1	-3.26419E1	-3.26101E1	2.68314E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.80241E-1	-8.9643E-1	-9.04682E0	-9.04193E0	4.3869E-3	9.54151E-2	2.73279E1	-3.26765E1	-3.2599E1	2.68196E1	1.19953E-7	2.51954E-3	2.51954E-3	6.34518E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.79645E-1	-8.96287E-1	-9.04675E0	-9.04167E0	4.22001E-3	9.57012E-2	2.73411E1	-3.26711E1	-3.26038E1	2.68406E1	1.20031E-7	2.51915E-3	2.51915E-3	6.34099E-3	2.9829E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09611E0	-8.79669E-1	-8.96502E-1	-9.0467E0	-9.04191E0	4.1008E-3	9.58204E-2	2.73137E1	-3.2626E1	-3.26407E1	2.68308E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.79741E-1	-8.96382E-1	-9.04689E0	-9.04219E0	4.64916E-3	9.55343E-2	2.73352E1	-3.2636E1	-3.26083E1	2.68518E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00041E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.79622E-1	-8.96478E-1	-9.04706E0	-9.04171E0	4.22001E-3	9.56059E-2	2.72961E1	-3.26332E1	-3.26284E1	2.68388E1	1.198E-7	2.51632E-3	2.51632E-3	6.35601E-3	2.97901E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.79526E-1	-8.96311E-1	-9.04677E0	-9.04188E0	4.31538E-3	9.58204E-2	2.73039E1	-3.26815E1	-3.25965E1	2.68526E1	1.19965E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.01347E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.79693E-1	-8.96335E-1	-9.04686E0	-9.04214E0	4.41074E-3	9.55582E-2	2.73111E1	-3.26482E1	-3.26248E1	2.68118E1	1.2026E-7	2.52384E-3	2.52384E-3	6.30202E-3	3.00966E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.79455E-1	-8.96168E-1	-9.04667E0	-9.04207E0	4.3869E-3	9.56535E-2	2.73434E1	-3.26655E1	-3.26095E1	2.68163E1	1.20174E-7	2.50898E-3	2.50898E-3	6.32936E-3	3.02659E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.79693E-1	-8.96573E-1	-9.04689E0	-9.04193E0	4.48227E-3	9.59873E-2	2.73333E1	-3.26819E1	-3.26332E1	2.68448E1	1.20017E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.79622E-1	-8.95858E-1	-9.04734E0	-9.0416E0	4.62532E-3	9.58204E-2	2.73676E1	-3.26638E1	-3.2616E1	2.68376E1	1.19861E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00563E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.79908E-1	-8.96382E-1	-9.04708E0	-9.04181E0	4.33922E-3	9.58681E-2	2.73381E1	-3.26951E1	-3.26392E1	2.68575E1	1.198E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00197E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.80003E-1	-8.96287E-1	-9.04696E0	-9.04222E0	4.05312E-3	9.5892E-2	2.73352E1	-3.25422E1	-3.26431E1	2.68354E1	1.20106E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00966E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.79836E-1	-8.96001E-1	-9.04729E0	-9.04231E0	4.17233E-3	9.60588E-2	2.73033E1	-3.26836E1	-3.26352E1	2.68288E1	1.20174E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.03185E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.80003E-1	-8.96001E-1	-9.04715E0	-9.04219E0	4.48227E-3	9.57251E-2	2.73399E1	-3.26472E1	-3.26172E1	2.68586E1	1.19913E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01347E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.80265E-1	-8.95929E-1	-9.04715E0	-9.04202E0	4.43459E-3	9.57012E-2	2.73193E1	-3.26602E1	-3.26384E1	2.68346E1	1.20055E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.80146E-1	-8.96049E-1	-9.04694E0	-9.04186E0	4.52995E-3	9.57012E-2	2.73153E1	-3.26837E1	-3.26332E1	2.68208E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.02511E-1