[Scan]
initial_time=2016-01-18T18:17:37
final_time=2016-01-18T18:17:57
ip_count=19
run=1024
dataset=3
scan=217
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08774E-4
ql1_vset=
ql1_vmon=-8.8017E-1
ql1_imon=1.33376E-8
ql2_vset=
ql2_vmon=-8.96311E-1
ql2_imon=1.89784E-9
ql3_vset=
ql3_vmon=-9.04698E0
ql3_imon=1.19448E-10
ql4_vset=
ql4_vmon=-9.04183E0
ql4_imon=-1.10745E-11
mult1=-9.75944E-9
mult2=-2.73502E-9
rf_tmon=-4.87521E-3
rf_agc=3.34684E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.67928E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6427E0
bslens_imon=2.25296E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19652E1
lens5a_imon=2.01479E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12517E2
lens4a_imon=2.05078E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54115E1
cs_ef1b_imon=2.84215E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.01966E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04555E1
cs_ea1_imon=2.54328E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35934E0
lens1_imon=2.74323E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64843E1
os_ef1alow_imon=2.9654E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03336E1
cs_ea2_imon=1.4773E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84328E1
cs_ef1a_imon=2.9463E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.34502E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=4.27184E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15155E1
os_ea1_imon=2.38538E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.07244E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24969E0
cs_ionrep_imon=1.2044E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91929E2
cs_nozzle_imon=1.93355E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01395E1
cs_anode1_imon=2.97081E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20403E0
olens4_imon=3.35638E-8
tplens_vset=1.4E-1
tplens_vmon=1.67748E0
tplens_imon=-1.45546E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.25965E1
iondef3_imon=1.48883E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26425E1
iondef2_imon=1.54183E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03057E2
lens6_imon=2.98357E-4
ql6_vset=1.0E-1
ql6_vmon=9.58443E-2
ql6_imon=4.08255E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28574E0
ionrepsh_imon=1.77254E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33471E1
lens5b_imon=2.15899E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74597E1
cs_ef2b_imon=3.12109E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56993E0
os_ea2_imon=-5.94952E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06149E2
lens4b_imon=2.00612E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71084E1
cs_ef2a_imon=3.1629E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06477E0
os_ef2alow_imon=-2.50057E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00427E-1
os_ef2bup_imon=-5.38735E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1134E1
os_restr2_imon=3.44545E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23019E2
cs_ionfoca_imon=6.2708E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01977E1
cs_anode2_imon=2.24064E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73163E1
iondef1_imon=1.13591E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68538E1
iondef4_imon=1.09891E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.09287E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81021E-1
olens1_imon=7.87875E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13795E0
cs_ionaccel_imon=-1.94556E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02128E2
cs_ionfocb_imon=1.47342E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56531E1
einzel_imon=7.79956E-6
window_vset=0.0E0
window_vmon=2.70801E-1
window_imon=-9.50867E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82728E2
mask1_imon=2.39052E-4
mask2_vset=0.0E0
mask2_vmon=-1.86849E1
mask2_imon=-7.02193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=7.64597E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93694E3
defgrida_imon=6.91056E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=6.97185E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53089E0
defgridb_imon=6.22922E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33324E1
os_fil1_imon=9.41363E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07221E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6551E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30865E1
cs_fil1_imon=9.9475E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62065E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67231E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33166E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.64678E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.84096E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33018E-1
cs_fil2_imon=-2.61191E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19628E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22962E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.24163E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.80122E-1	-8.96192E-1	-9.04682E0	-9.04207E0	4.50611E-3	9.5582E-2	2.73654E1	-3.26561E1	-3.26086E1	2.67902E1	1.19809E-7	2.5199E-3	2.5199E-3	6.28552E-3	2.98481E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09449E0	-8.80241E-1	-8.96144E-1	-9.04684E0	-9.04212E0	4.41074E-3	9.56535E-2	2.7329E1	-3.27252E1	-3.26181E1	2.68569E1	1.20363E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.8017E-1	-8.96215E-1	-9.04691E0	-9.04152E0	4.14848E-3	9.55105E-2	2.73207E1	-3.26637E1	-3.26376E1	2.68018E1	1.19861E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.03185E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.80289E-1	-8.96263E-1	-9.04691E0	-9.04188E0	4.26769E-3	9.54151E-2	2.73417E1	-3.26767E1	-3.26266E1	2.68262E1	1.19991E-7	2.52025E-3	2.52025E-3	6.29684E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.80361E-1	-8.96311E-1	-9.04677E0	-9.04219E0	4.00543E-3	9.57489E-2	2.73159E1	-3.26422E1	-3.25942E1	2.68394E1	1.19705E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.80265E-1	-8.96382E-1	-9.0467E0	-9.04217E0	4.36306E-3	9.57251E-2	2.73151E1	-3.26891E1	-3.25894E1	2.68487E1	1.20004E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.0148E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-8.80075E-1	-8.96525E-1	-9.04703E0	-9.04205E0	4.07696E-3	9.57727E-2	2.73033E1	-3.26401E1	-3.25856E1	2.68338E1	1.20055E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.9943E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.80194E-1	-8.96311E-1	-9.04665E0	-9.04212E0	4.55379E-3	9.57012E-2	2.73141E1	-3.26254E1	-3.26248E1	2.6831E1	1.19766E-7	2.51915E-3	2.51915E-3	6.33538E-3	3.00144E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.8048E-1	-8.96406E-1	-9.04658E0	-9.04186E0	4.52995E-3	9.57012E-2	2.7344E1	-3.2675E1	-3.26042E1	2.68354E1	1.20069E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.80361E-1	-8.96597E-1	-9.04691E0	-9.04183E0	4.62532E-3	9.57966E-2	2.73237E1	-3.26855E1	-3.26344E1	2.68358E1	1.19861E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00563E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.8017E-1	-8.96406E-1	-9.04686E0	-9.04195E0	4.52995E-3	9.60112E-2	2.73165E1	-3.26561E1	-3.26104E1	2.68496E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.80051E-1	-8.96692E-1	-9.04677E0	-9.04217E0	4.05312E-3	9.56297E-2	2.73122E1	-3.26921E1	-3.26248E1	2.68376E1	1.20106E-7	2.52061E-3	2.52061E-3	6.28592E-3	3.00453E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.79836E-1	-8.96335E-1	-9.04708E0	-9.04229E0	4.31538E-3	9.56297E-2	2.73237E1	-3.26777E1	-3.26302E1	2.6825E1	1.20055E-7	2.52707E-3	2.52707E-3	6.29665E-3	3.00197E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.80027E-1	-8.9612E-1	-9.0471E0	-9.04248E0	4.62532E-3	9.57489E-2	2.73375E1	-3.26484E1	-3.26213E1	2.68285E1	1.19913E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01871E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.80051E-1	-8.96287E-1	-9.04665E0	-9.04207E0	4.60148E-3	9.57012E-2	2.73387E1	-3.26747E1	-3.2617E1	2.68346E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.03185E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09387E0	-8.79884E-1	-8.96573E-1	-9.04691E0	-9.04193E0	4.69685E-3	9.56535E-2	2.73387E1	-3.26567E1	-3.25996E1	2.6837E1	1.20106E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.9892E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-8.79884E-1	-8.96454E-1	-9.04715E0	-9.04226E0	4.673E-3	9.58443E-2	2.73045E1	-3.26897E1	-3.26502E1	2.68364E1	1.19913E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.9926E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.80122E-1	-8.96168E-1	-9.04701E0	-9.04174E0	4.62532E-3	9.56297E-2	2.73315E1	-3.26603E1	-3.2626E1	2.68076E1	1.20226E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9926E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.80408E-1	-8.96382E-1	-9.04686E0	-9.04157E0	4.72069E-3	9.57012E-2	2.73541E1	-3.26638E1	-3.2639E1	2.67827E1	1.19953E-7	2.51096E-3	2.51096E-3	6.31817E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.8017E-1	-8.96311E-1	-9.04698E0	-9.04183E0	4.673E-3	9.58443E-2	2.73163E1	-3.26425E1	-3.25965E1	2.68538E1	1.19902E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.0071E-1