[Scan]
initial_time=2016-01-18T18:18:04
final_time=2016-01-18T18:18:23
ip_count=19
run=1024
dataset=3
scan=218
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09333E0
qbias_imon=-1.08788E-4
ql1_vset=
ql1_vmon=-8.79979E-1
ql1_imon=1.33301E-8
ql2_vset=
ql2_vmon=-8.96025E-1
ql2_imon=1.92082E-9
ql3_vset=
ql3_vmon=-9.04655E0
ql3_imon=1.46949E-10
ql4_vset=
ql4_vmon=-9.04217E0
ql4_imon=-4.17233E-12
mult1=-9.12632E-9
mult2=-2.80245E-9
rf_tmon=-5.4377E-3
rf_agc=3.23422E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.19617E-3
ql5_imon=1.68409E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67155E0
bslens_imon=2.19528E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19652E1
lens5a_imon=1.99028E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.05118E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54049E1
cs_ef1b_imon=2.84863E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02352E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04856E1
cs_ea1_imon=2.51697E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34612E0
lens1_imon=2.74684E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64674E1
os_ef1alow_imon=2.94053E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03534E1
cs_ea2_imon=1.51767E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84568E1
cs_ef1a_imon=2.98018E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.34471E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1131E1
os_restr1_imon=4.22174E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14825E1
os_ea1_imon=2.36808E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63731E1
os_ef1bup_imon=3.11821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20403E0
cs_ionrep_imon=1.1734E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91969E2
cs_nozzle_imon=1.93654E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02254E1
cs_anode1_imon=2.99243E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=3.35769E-8
tplens_vset=1.4E-1
tplens_vmon=1.70272E0
tplens_imon=-1.62358E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26152E1
iondef3_imon=1.50505E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26332E1
iondef2_imon=1.55985E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03061E2
lens6_imon=2.98295E-4
ql6_vset=1.0E-1
ql6_vmon=9.57727E-2
ql6_imon=4.05424E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30617E0
ionrepsh_imon=1.78264E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33712E1
lens5b_imon=2.15863E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74519E1
cs_ef2b_imon=3.12253E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51766E0
os_ea2_imon=-6.85076E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06151E2
lens4b_imon=2.00731E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71132E1
cs_ef2a_imon=3.16182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07198E0
os_ef2alow_imon=-2.50778E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.17846E-1
os_ef2bup_imon=-5.22157E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11153E1
os_restr2_imon=3.42599E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.29532E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02079E1
cs_anode2_imon=2.25001E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73424E1
iondef1_imon=1.10418E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68366E1
iondef4_imon=1.0917E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71775E1
olens3_imon=5.09063E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81164E-1
olens1_imon=7.89445E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12173E0
cs_ionaccel_imon=-1.72932E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02131E2
cs_ionfocb_imon=1.4741E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.8356E-6
window_vset=0.0E0
window_vmon=3.21257E-1
window_imon=-8.89599E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82739E2
mask1_imon=2.39062E-4
mask2_vset=0.0E0
mask2_vmon=-1.86212E1
mask2_imon=-6.73362E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.42967E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.70508E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.29629E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27525E0
defgridb_imon=5.98048E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33309E1
os_fil1_imon=9.46402E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06945E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65912E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30944E1
cs_fil1_imon=9.98221E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.60978E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67483E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26717E-2
os_fil2_imon=-2.73805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01919E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.55352E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34442E-1
cs_fil2_imon=-3.69911E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.29879E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22839E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.20122E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.52685E-1
res40_imon=-2.4393E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.80003E-1	-8.96311E-1	-9.04675E0	-9.04222E0	4.60148E-3	9.60827E-2	2.73458E1	-3.26791E1	-3.26313E1	2.68319E1	1.19851E-7	2.5131E-3	2.5131E-3	6.29665E-3	2.98665E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.79884E-1	-8.96001E-1	-9.04703E0	-9.04183E0	4.64916E-3	9.58681E-2	2.72984E1	-3.2645E1	-3.26217E1	2.68425E1	1.20055E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.79884E-1	-8.96096E-1	-9.04696E0	-9.04191E0	4.22001E-3	9.57012E-2	2.73284E1	-3.26499E1	-3.26328E1	2.68166E1	1.20244E-7	2.51581E-3	2.51581E-3	6.3074E-3	3.01475E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09387E0	-8.79812E-1	-8.96192E-1	-9.04708E0	-9.04202E0	4.02927E-3	9.57251E-2	2.73147E1	-3.26579E1	-3.2638E1	2.68256E1	1.20127E-7	2.51783E-3	2.51783E-3	6.33863E-3	3.02977E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09387E0	-8.79955E-1	-8.96335E-1	-9.04686E0	-9.04222E0	4.19617E-3	9.56297E-2	2.7349E1	-3.26729E1	-3.26296E1	2.6831E1	1.19653E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.79765E-1	-8.96215E-1	-9.04703E0	-9.04214E0	4.14848E-3	9.56535E-2	2.7344E1	-3.26844E1	-3.26313E1	2.68178E1	1.20174E-7	2.51116E-3	2.51116E-3	6.32936E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09325E0	-8.7986E-1	-8.96406E-1	-9.04663E0	-9.04183E0	4.41074E-3	9.60112E-2	2.73171E1	-3.26807E1	-3.26561E1	2.6852E1	1.198E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.9892E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09387E0	-8.80027E-1	-8.96192E-1	-9.04684E0	-9.042E0	4.07696E-3	9.60588E-2	2.73238E1	-3.26237E1	-3.26128E1	2.68406E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0941E0	-8.8017E-1	-8.95929E-1	-9.04701E0	-9.04198E0	4.45843E-3	9.58204E-2	2.73157E1	-3.26602E1	-3.26331E1	2.68328E1	1.20041E-7	2.52434E-3	2.52434E-3	6.3074E-3	3.00713E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.80241E-1	-8.96192E-1	-9.04667E0	-9.04195E0	4.19617E-3	9.58204E-2	2.73443E1	-3.26395E1	-3.25917E1	2.68659E1	1.20122E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01347E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09356E0	-8.80051E-1	-8.96096E-1	-9.04689E0	-9.04193E0	4.17233E-3	9.59635E-2	2.73375E1	-3.26791E1	-3.26313E1	2.68112E1	1.20017E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.02396E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.80194E-1	-8.96358E-1	-9.04691E0	-9.04212E0	4.07696E-3	9.58204E-2	2.73263E1	-3.26938E1	-3.25847E1	2.68319E1	1.19913E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.03185E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09317E0	-8.80051E-1	-8.96358E-1	-9.04684E0	-9.04176E0	3.76701E-3	9.56535E-2	2.73443E1	-3.26438E1	-3.26229E1	2.68319E1	1.20092E-7	2.51814E-3	2.51814E-3	6.31269E-3	3.00348E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09379E0	-8.79979E-1	-8.96358E-1	-9.04706E0	-9.0416E0	4.1008E-3	9.57251E-2	2.73198E1	-3.26779E1	-3.26101E1	2.68319E1	1.20137E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.00942E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09317E0	-8.80241E-1	-8.96168E-1	-9.04691E0	-9.04224E0	4.07696E-3	9.57251E-2	2.73988E1	-3.26338E1	-3.26074E1	2.68232E1	1.20017E-7	2.51116E-3	2.51116E-3	6.29645E-3	3.00041E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09279E0	-8.80122E-1	-8.9612E-1	-9.04682E0	-9.04176E0	4.31538E-3	9.55582E-2	2.72943E1	-3.26843E1	-3.26464E1	2.68238E1	1.20055E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.01223E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.80051E-1	-8.96239E-1	-9.04672E0	-9.04183E0	4.29153E-3	9.53913E-2	2.73147E1	-3.26963E1	-3.26182E1	2.68575E1	1.20174E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.02133E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09387E0	-8.80098E-1	-8.96287E-1	-9.04653E0	-9.04219E0	4.29153E-3	9.57251E-2	2.736E1	-3.26461E1	-3.26461E1	2.68358E1	1.20017E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01871E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09394E0	-8.79765E-1	-8.9612E-1	-9.04675E0	-9.04229E0	4.45843E-3	9.59158E-2	2.73472E1	-3.26651E1	-3.26218E1	2.68346E1	1.20209E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09333E0	-8.79979E-1	-8.96025E-1	-9.04655E0	-9.04217E0	4.19617E-3	9.57727E-2	2.73424E1	-3.26332E1	-3.26152E1	2.68366E1	1.20122E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9978E-1