[Scan]
initial_time=2016-01-18T18:18:30
final_time=2016-01-18T18:18:50
ip_count=19
run=1024
dataset=3
scan=219
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08778E-4
ql1_vset=
ql1_vmon=-8.79908E-1
ql1_imon=1.3382E-8
ql2_vset=
ql2_vmon=-8.96502E-1
ql2_imon=1.90408E-9
ql3_vset=
ql3_vmon=-9.04677E0
ql3_imon=1.1245E-10
ql4_vset=
ql4_vmon=-9.04219E0
ql4_imon=-6.04391E-12
mult1=-1.05712E-8
mult2=-2.73059E-9
rf_tmon=-4.10386E-3
rf_agc=3.28049E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.17233E-3
ql5_imon=1.6778E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66803E0
bslens_imon=2.27395E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19996E1
lens5a_imon=1.99609E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.05079E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53959E1
cs_ef1b_imon=2.83278E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02118E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04936E1
cs_ea1_imon=2.53733E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34127E0
lens1_imon=2.71543E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64783E1
os_ef1alow_imon=2.9636E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.50942E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8458E1
cs_ef1a_imon=2.93837E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.34496E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11658E1
os_restr1_imon=4.26932E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14546E1
os_ea1_imon=2.36457E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63683E1
os_ef1bup_imon=3.06487E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22023E0
cs_ionrep_imon=1.17883E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92006E2
cs_nozzle_imon=1.93382E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02716E1
cs_anode1_imon=3.00252E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20384E0
olens4_imon=3.35673E-8
tplens_vset=1.4E-1
tplens_vmon=1.64491E0
tplens_imon=-2.63683E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26368E1
iondef3_imon=1.5122E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2632E1
iondef2_imon=1.56365E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02984E2
lens6_imon=2.98273E-4
ql6_vset=1.0E-1
ql6_vmon=9.58443E-2
ql6_imon=4.08837E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24978E0
ionrepsh_imon=1.775E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33854E1
lens5b_imon=2.19701E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74543E1
cs_ef2b_imon=3.12506E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49485E0
os_ea2_imon=-8.16399E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06116E2
lens4b_imon=2.00734E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7148E1
cs_ef2a_imon=3.16975E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07919E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95622E-1
os_ef2bup_imon=-5.36573E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11328E1
os_restr2_imon=3.43824E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23028E2
cs_ionfoca_imon=6.27947E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02067E1
cs_anode2_imon=2.25326E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72997E1
iondef1_imon=1.07316E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68382E1
iondef4_imon=1.10575E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.07945E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81426E-1
olens1_imon=7.87882E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15477E0
cs_ionaccel_imon=-1.67526E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.021E2
cs_ionfocb_imon=1.47273E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56267E1
einzel_imon=7.62297E-6
window_vset=0.0E0
window_vmon=2.66597E-1
window_imon=-7.59857E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82726E2
mask1_imon=2.39199E-4
mask2_vset=0.0E0
mask2_vmon=-1.8662E1
mask2_imon=-7.63461E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92607E3
multa_neg_imon=7.59254E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=7.37006E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.08154E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45581E0
defgridb_imon=6.16034E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33302E1
os_fil1_imon=9.42486E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07449E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6582E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30911E1
cs_fil1_imon=9.9463E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62492E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67527E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.75006E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90506E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8765E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32889E-1
cs_fil2_imon=-2.35362E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17226E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22797E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=3.02659E-1
chamber_ion_pmon=1.20435E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.63497E-1
res40_imon=-2.47534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.80218E-1	-8.96525E-1	-9.04701E0	-9.04233E0	4.36306E-3	9.57489E-2	2.73165E1	-3.26831E1	-3.2632E1	2.68262E1	1.20055E-7	2.52492E-3	2.52492E-3	6.32896E-3	3.01223E-1
2.0E0	2.1E1	0.0E0	3.16E2	1.6E2	-2.09402E0	-8.8017E-1	-8.96716E-1	-9.04701E0	-9.0421E0	4.12464E-3	9.56297E-2	2.73325E1	-3.26585E1	-3.26193E1	2.68574E1	1.20106E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.02253E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.8017E-1	-8.96335E-1	-9.0472E0	-9.04238E0	4.1008E-3	9.56059E-2	2.72998E1	-3.26512E1	-3.26253E1	2.6827E1	1.19967E-7	2.51447E-3	2.51447E-3	6.32273E-3	3.00878E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.80146E-1	-8.96406E-1	-9.04696E0	-9.04205E0	4.12464E-3	9.52482E-2	2.73109E1	-3.26515E1	-3.26474E1	2.68366E1	1.20092E-7	2.50987E-3	2.50987E-3	6.3074E-3	2.98878E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.80241E-1	-8.96573E-1	-9.04682E0	-9.0421E0	4.02927E-3	9.56297E-2	2.73171E1	-3.26663E1	-3.26176E1	2.68394E1	1.20055E-7	2.52169E-3	2.52169E-3	6.29128E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.80218E-1	-8.96573E-1	-9.04677E0	-9.04167E0	4.05312E-3	9.55343E-2	2.73296E1	-3.26334E1	-3.2607E1	2.6837E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.80218E-1	-8.96382E-1	-9.04708E0	-9.04233E0	4.17233E-3	9.55582E-2	2.73051E1	-3.26573E1	-3.26254E1	2.68382E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.80075E-1	-8.96287E-1	-9.0471E0	-9.04193E0	4.00543E-3	9.57251E-2	2.73237E1	-3.26645E1	-3.26272E1	2.68142E1	1.20487E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.02133E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.80122E-1	-8.9612E-1	-9.04698E0	-9.04186E0	4.41074E-3	9.55582E-2	2.73514E1	-3.26549E1	-3.26404E1	2.68316E1	1.20122E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.80241E-1	-8.96406E-1	-9.04679E0	-9.04207E0	4.02927E-3	9.53197E-2	2.73237E1	-3.26651E1	-3.26554E1	2.68271E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.9926E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.79765E-1	-8.96239E-1	-9.04701E0	-9.042E0	4.14848E-3	9.5439E-2	2.73231E1	-3.26675E1	-3.26116E1	2.68316E1	1.20017E-7	2.52757E-3	2.52757E-3	6.32936E-3	2.97704E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.7986E-1	-8.96072E-1	-9.04701E0	-9.04224E0	4.05312E-3	9.56535E-2	2.73147E1	-3.26807E1	-3.26218E1	2.68324E1	1.19965E-7	2.52428E-3	2.52428E-3	6.30192E-3	2.97963E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.79812E-1	-8.96358E-1	-9.04698E0	-9.04179E0	4.24385E-3	9.56297E-2	2.73122E1	-3.26661E1	-3.26272E1	2.68328E1	1.20278E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.00302E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.79645E-1	-8.96287E-1	-9.04713E0	-9.04219E0	4.1008E-3	9.53913E-2	2.72815E1	-3.26579E1	-3.26136E1	2.68178E1	1.20004E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.01738E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.7955E-1	-8.96382E-1	-9.04703E0	-9.04207E0	4.05312E-3	9.58204E-2	2.73177E1	-3.26747E1	-3.2602E1	2.68563E1	1.20106E-7	2.5131E-3	2.5131E-3	6.35059E-3	3.0071E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.79765E-1	-8.96478E-1	-9.04677E0	-9.04202E0	4.33922E-3	9.56535E-2	2.73382E1	-3.26793E1	-3.26223E1	2.68268E1	1.20191E-7	2.52362E-3	2.52362E-3	6.3074E-3	2.97762E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.79884E-1	-8.96287E-1	-9.04682E0	-9.04183E0	4.14848E-3	9.55343E-2	2.73057E1	-3.26632E1	-3.26119E1	2.68286E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.79717E-1	-8.96144E-1	-9.04682E0	-9.042E0	4.19617E-3	9.58681E-2	2.73257E1	-3.26703E1	-3.26248E1	2.68551E1	1.20004E-7	2.51793E-3	2.51793E-3	6.31548E-3	3.01352E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.79765E-1	-8.9674E-1	-9.04665E0	-9.04193E0	4.05312E-3	9.56774E-2	2.73493E1	-3.26738E1	-3.26437E1	2.68472E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.79908E-1	-8.96502E-1	-9.04677E0	-9.04219E0	4.17233E-3	9.58443E-2	2.72997E1	-3.2632E1	-3.26368E1	2.68382E1	1.20435E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.02659E-1