[Scan]
initial_time=2016-01-18T18:19:24
final_time=2016-01-18T18:19:43
ip_count=19
run=1024
dataset=3
scan=221
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08797E-4
ql1_vset=
ql1_vmon=-8.79979E-1
ql1_imon=1.33794E-8
ql2_vset=
ql2_vmon=-8.95882E-1
ql2_imon=1.91836E-9
ql3_vset=
ql3_vmon=-9.04691E0
ql3_imon=1.09375E-10
ql4_vset=
ql4_vmon=-9.04181E0
ql4_imon=1.80483E-11
mult1=-9.53482E-9
mult2=-2.78009E-9
rf_tmon=-4.52717E-3
rf_agc=3.40465E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.67165E-3
ql5_imon=1.70376E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67996E0
bslens_imon=2.45844E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1958E1
lens5a_imon=1.99353E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.04855E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5385E1
cs_ef1b_imon=2.84755E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02348E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04441E1
cs_ea1_imon=2.53535E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36054E0
lens1_imon=2.63509E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64909E1
os_ef1alow_imon=2.9654E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04045E1
cs_ea2_imon=1.49857E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84526E1
cs_ef1a_imon=2.93297E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.34092E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11958E1
os_restr1_imon=4.2704E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14909E1
os_ea1_imon=2.36411E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63785E1
os_ef1bup_imon=3.06055E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21665E0
cs_ionrep_imon=1.18385E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91999E2
cs_nozzle_imon=1.9351E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01479E1
cs_anode1_imon=2.9845E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2042E0
olens4_imon=3.34631E-8
tplens_vset=1.4E-1
tplens_vmon=1.63482E0
tplens_imon=-9.74686E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26077E1
iondef3_imon=1.50001E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26213E1
iondef2_imon=1.56418E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03048E2
lens6_imon=2.98331E-4
ql6_vset=1.0E-1
ql6_vmon=9.5439E-2
ql6_imon=4.08005E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25751E0
ionrepsh_imon=1.8003E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33748E1
lens5b_imon=2.16152E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74579E1
cs_ef2b_imon=3.12938E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52908E0
os_ea2_imon=-7.13916E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.00644E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7139E1
cs_ef2a_imon=3.15965E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04194E0
os_ef2alow_imon=-2.46453E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9382E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11063E1
os_restr2_imon=3.4332E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.28306E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01851E1
cs_anode2_imon=2.24533E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73346E1
iondef1_imon=1.09121E-5
iondef4_vset=2.691E1
iondef4_vmon=2.681E1
iondef4_imon=1.10684E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.0802E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81188E-1
olens1_imon=7.8805E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11633E0
cs_ionaccel_imon=-1.72212E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02111E2
cs_ionfocb_imon=1.47237E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56447E1
einzel_imon=7.80317E-6
window_vset=0.0E0
window_vmon=2.64795E-1
window_imon=-8.78788E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82714E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.865E1
mask2_imon=-5.9047E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.45491E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.43471E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.31792E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38352E0
defgridb_imon=6.01293E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33342E1
os_fil1_imon=9.42348E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07816E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65801E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30906E1
cs_fil1_imon=9.9699E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62588E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67291E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.70801E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86902E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.68887E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.25752E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.59912E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22788E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.03545E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.52815E-3
foreline_cvt_pmon=2.52815E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.665E-1
res40_imon=-2.51499E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.79717E-1	-8.96287E-1	-9.04701E0	-9.04195E0	4.55379E-3	9.57251E-2	2.73387E1	-3.2682E1	-3.25853E1	2.68059E1	1.19913E-7	2.52538E-3	2.52538E-3	6.32936E-3	2.9926E-1
2.0E0	4.8E1	1.0E0	3.16E2	1.6E2	-2.09526E0	-8.80003E-1	-8.96168E-1	-9.04672E0	-9.042E0	4.26769E-3	9.54866E-2	2.73514E1	-3.2635E1	-3.26218E1	2.68623E1	1.20158E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.79931E-1	-8.96096E-1	-9.04672E0	-9.04188E0	4.26769E-3	9.57251E-2	2.73286E1	-3.26406E1	-3.26422E1	2.68211E1	1.20697E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9952E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.80075E-1	-8.96215E-1	-9.04689E0	-9.04176E0	4.12464E-3	9.5439E-2	2.73237E1	-3.26543E1	-3.26392E1	2.6846E1	1.20016E-7	2.51854E-3	2.51854E-3	6.33297E-3	3.00392E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.80337E-1	-8.96287E-1	-9.04667E0	-9.04176E0	3.93391E-3	9.53913E-2	2.73315E1	-3.26921E1	-3.26206E1	2.68208E1	1.20069E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.80241E-1	-8.96478E-1	-9.04691E0	-9.04174E0	3.95775E-3	9.55582E-2	2.73243E1	-3.2653E1	-3.26554E1	2.68731E1	1.20017E-7	2.51225E-3	2.51225E-3	6.29645E-3	3.00824E-1
7.0E0	2.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.79955E-1	-8.96215E-1	-9.04651E0	-9.04121E0	3.86238E-3	9.56297E-2	2.7324E1	-3.26526E1	-3.26219E1	2.6825E1	1.20069E-7	2.5199E-3	2.5199E-3	6.29098E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.80313E-1	-8.95762E-1	-9.04655E0	-9.04183E0	3.91006E-3	9.56297E-2	2.73087E1	-3.26236E1	-3.2623E1	2.68292E1	1.19953E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.9841E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.80527E-1	-8.9612E-1	-9.04663E0	-9.04162E0	3.88622E-3	9.57727E-2	2.72985E1	-3.26609E1	-3.26164E1	2.68424E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.80694E-1	-8.95834E-1	-9.04679E0	-9.0416E0	3.79086E-3	9.57727E-2	2.73156E1	-3.265E1	-3.26358E1	2.6819E1	1.20174E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00302E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.80456E-1	-8.96025E-1	-9.04694E0	-9.04179E0	3.91006E-3	9.52721E-2	2.73237E1	-3.26567E1	-3.26194E1	2.68227E1	1.20226E-7	2.51436E-3	2.51436E-3	6.32592E-3	3.01314E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.8079E-1	-8.96168E-1	-9.04691E0	-9.04183E0	3.86238E-3	9.58204E-2	2.73357E1	-3.26627E1	-3.26338E1	2.68184E1	1.20435E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.9926E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.80218E-1	-8.96096E-1	-9.04682E0	-9.04207E0	3.71933E-3	9.5582E-2	2.73446E1	-3.26443E1	-3.26183E1	2.68448E1	1.20209E-7	2.52384E-3	2.52384E-3	6.32356E-3	2.9841E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.80122E-1	-8.95905E-1	-9.04682E0	-9.04212E0	3.71933E-3	9.55343E-2	2.73363E1	-3.26633E1	-3.26242E1	2.6852E1	1.20069E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.9978E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.80241E-1	-8.96096E-1	-9.04703E0	-9.04236E0	4.02927E-3	9.56535E-2	2.73856E1	-3.26711E1	-3.26362E1	2.68076E1	1.19809E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-8.80051E-1	-8.96144E-1	-9.04701E0	-9.04193E0	4.45843E-3	9.56059E-2	2.73435E1	-3.26645E1	-3.26536E1	2.6822E1	1.20174E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9926E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.80027E-1	-8.96144E-1	-9.04701E0	-9.04179E0	4.07696E-3	9.55343E-2	2.73093E1	-3.26194E1	-3.26428E1	2.68184E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.79979E-1	-8.96049E-1	-9.04701E0	-9.04195E0	3.88622E-3	9.52959E-2	2.73122E1	-3.26862E1	-3.26366E1	2.684E1	1.20278E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.80027E-1	-8.9581E-1	-9.04689E0	-9.04176E0	3.91006E-3	9.59158E-2	2.73123E1	-3.26729E1	-3.26242E1	2.68331E1	1.20055E-7	2.51739E-3	2.51739E-3	6.34518E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.79979E-1	-8.95882E-1	-9.04691E0	-9.04181E0	3.67165E-3	9.5439E-2	2.73346E1	-3.26213E1	-3.26077E1	2.681E1	1.19851E-7	2.52815E-3	2.52815E-3	6.3074E-3	3.03545E-1