[Scan]
initial_time=2016-01-18T18:19:50
final_time=2016-01-18T18:20:10
ip_count=19
run=1024
dataset=3
scan=222
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08778E-4
ql1_vset=
ql1_vmon=-8.80384E-1
ql1_imon=1.33966E-8
ql2_vset=
ql2_vmon=-8.96549E-1
ql2_imon=1.89484E-9
ql3_vset=
ql3_vmon=-9.04679E0
ql3_imon=1.22654E-10
ql4_vset=
ql4_vmon=-9.04198E0
ql4_imon=-4.23193E-12
mult1=-1.01826E-8
mult2=-2.68234E-9
rf_tmon=-1.95602E-3
rf_agc=3.573E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.24385E-3
ql5_imon=1.67265E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67211E0
bslens_imon=2.38752E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19995E1
lens5a_imon=1.99678E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12488E2
lens4a_imon=2.04959E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53974E1
cs_ef1b_imon=2.83517E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04662E2
lens23_imon=1.02089E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04587E1
cs_ea1_imon=2.53831E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35604E0
lens1_imon=2.72731E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.97626E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03885E1
cs_ea2_imon=1.50586E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84383E1
cs_ef1a_imon=2.94429E-5
olens2_vset=9.7E-1
olens2_vmon=9.69601E-1
olens2_imon=1.34337E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11396E1
os_restr1_imon=4.26489E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14993E1
os_ea1_imon=2.3585E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63728E1
os_ef1bup_imon=3.06732E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21729E0
cs_ionrep_imon=1.19015E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91954E2
cs_nozzle_imon=1.9371E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02064E1
cs_anode1_imon=2.986E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20384E0
olens4_imon=3.36595E-8
tplens_vset=1.4E-1
tplens_vmon=1.67683E0
tplens_imon=-3.4136E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25964E1
iondef3_imon=1.51294E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26769E1
iondef2_imon=1.54055E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03045E2
lens6_imon=2.98222E-4
ql6_vset=1.0E-1
ql6_vmon=9.57727E-2
ql6_imon=4.05505E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27156E0
ionrepsh_imon=1.78831E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.1649E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.12605E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51814E0
os_ea2_imon=-7.20077E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00598E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71345E1
cs_ef2a_imon=3.15385E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05688E0
os_ef2alow_imon=-2.44947E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.1229E-1
os_ef2bup_imon=-5.28528E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11378E1
os_restr2_imon=3.43257E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.28265E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01775E1
cs_anode2_imon=2.24785E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73113E1
iondef1_imon=1.09069E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68464E1
iondef4_imon=1.0892E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.0892E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81188E-1
olens1_imon=7.89679E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1313E0
cs_ionaccel_imon=-1.86216E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47379E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56417E1
einzel_imon=7.70174E-6
window_vset=0.0E0
window_vmon=2.44329E-1
window_imon=-8.89085E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82704E2
mask1_imon=2.39227E-4
mask2_vset=0.0E0
mask2_vmon=-1.86217E1
mask2_imon=-6.35391E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92609E3
multa_neg_imon=7.10556E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.67021E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.06662E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33764E0
defgridb_imon=6.22424E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33346E1
os_fil1_imon=9.41192E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07735E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65732E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30918E1
cs_fil1_imon=9.94775E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62876E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67532E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.61706E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.8776E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.71036E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34521E-1
cs_fil2_imon=-2.53018E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.27701E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22918E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30212E-3
inlet_lpb_pmon=3.00852E-1
chamber_ion_pmon=1.19941E-7
chamber_cvt_pmon=2.51709E-3
foreline_cvt_pmon=2.51709E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.22919E-1
res40_imon=-2.44947E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.79812E-1	-8.96072E-1	-9.04698E0	-9.04179E0	4.29153E-3	9.58204E-2	2.73222E1	-3.26803E1	-3.26154E1	2.6825E1	1.20081E-7	2.52008E-3	2.52008E-3	6.30202E-3	3.00838E-1
2.0E0	2.3E1	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.79931E-1	-8.96311E-1	-9.04677E0	-9.042E0	4.33922E-3	9.57251E-2	2.73375E1	-3.26621E1	-3.26284E1	2.68376E1					
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.79741E-1	-8.96263E-1	-9.04686E0	-9.04176E0	4.60148E-3	9.57727E-2	2.73321E1	-3.26543E1	-3.2623E1	2.68358E1	1.20226E-7	2.52318E-3	2.52318E-3	6.34037E-3	3.02922E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.7986E-1	-8.95977E-1	-9.04663E0	-9.04188E0	4.57764E-3	9.54866E-2	2.73243E1	-3.26747E1	-3.2596E1	2.684E1	1.20278E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.02396E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.79908E-1	-8.96263E-1	-9.04684E0	-9.04195E0	4.57764E-3	9.56535E-2	2.73187E1	-3.26773E1	-3.26449E1	2.68389E1	1.20697E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.01347E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09402E0	-8.80003E-1	-8.96215E-1	-9.04658E0	-9.04212E0	4.19617E-3	9.57727E-2	2.73499E1	-3.2659E1	-3.26213E1	2.6837E1	1.19953E-7	2.53031E-3	2.53031E-3	6.32896E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.79979E-1	-8.95977E-1	-9.04653E0	-9.04202E0	4.673E-3	9.5582E-2	2.73592E1	-3.26819E1	-3.2617E1	2.68328E1	1.19953E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.99686E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.79598E-1	-8.9643E-1	-9.04663E0	-9.04229E0	4.50611E-3	9.57012E-2	2.73357E1	-3.26206E1	-3.26464E1	2.68285E1	1.20435E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.79693E-1	-8.96621E-1	-9.0466E0	-9.04207E0	4.62532E-3	9.57727E-2	2.73153E1	-3.26579E1	-3.25683E1	2.68506E1	1.20055E-7	2.51417E-3	2.51417E-3	6.33436E-3	2.99941E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.7955E-1	-8.96239E-1	-9.04653E0	-9.04224E0	4.52995E-3	9.57489E-2	2.73363E1	-3.2653E1	-3.26579E1	2.68208E1	1.20244E-7	2.52585E-3	2.52585E-3	6.3074E-3	2.99613E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-8.79598E-1	-8.95929E-1	-9.04655E0	-9.04207E0	4.45843E-3	9.57489E-2	2.73141E1	-3.26458E1	-3.26026E1	2.68346E1	1.19913E-7	2.52209E-3	2.52209E-3	6.34037E-3	3.02659E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.79622E-1	-8.96263E-1	-9.04667E0	-9.04195E0	4.62532E-3	9.60588E-2	2.73201E1	-3.26633E1	-3.262E1	2.6834E1	1.19913E-7	2.52099E-3	2.52099E-3	6.3514E-3	3.01609E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.79526E-1	-8.96239E-1	-9.04672E0	-9.04207E0	4.55379E-3	9.59635E-2	2.73027E1	-3.26649E1	-3.26296E1	2.68406E1	1.20069E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01347E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.79645E-1	-8.96287E-1	-9.04679E0	-9.04219E0	4.64916E-3	9.57251E-2	2.73784E1	-3.26651E1	-3.26254E1	2.68322E1	1.19985E-7	2.5208E-3	2.5208E-3	6.32644E-3	3.00637E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09402E0	-8.79812E-1	-8.96287E-1	-9.04684E0	-9.04183E0	4.48227E-3	9.60588E-2	2.74231E1	-3.26868E1	-3.24945E1	2.68382E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.79931E-1	-8.96072E-1	-9.04689E0	-9.04179E0	4.26769E-3	9.55343E-2	2.73387E1	-3.26726E1	-3.26779E1	2.68308E1	1.20004E-7	2.51847E-3	2.51847E-3	6.29128E-3	2.98156E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.7986E-1	-8.96478E-1	-9.04696E0	-9.0416E0	4.52995E-3	9.56297E-2	2.7349E1	-3.26573E1	-3.25978E1	2.68352E1	1.19953E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.00453E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.80051E-1	-8.96287E-1	-9.04696E0	-9.04179E0	4.45843E-3	9.57966E-2	2.73261E1	-3.26512E1	-3.25924E1	2.68478E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.98481E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.80384E-1	-8.96454E-1	-9.04689E0	-9.04191E0	4.29153E-3	9.55105E-2	2.7324E1	-3.26797E1	-3.26419E1	2.68372E1	1.19653E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9926E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.80384E-1	-8.96549E-1	-9.04679E0	-9.04198E0	4.24385E-3	9.57727E-2	2.73113E1	-3.26769E1	-3.25964E1	2.68464E1	1.19941E-7	2.51709E-3	2.51709E-3	6.30212E-3	3.00852E-1