[Scan]
initial_time=2016-01-18T18:20:43
final_time=2016-01-18T18:21:03
ip_count=19
run=1024
dataset=3
scan=224
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08774E-4
ql1_vset=
ql1_vmon=-8.79669E-1
ql1_imon=1.33376E-8
ql2_vset=
ql2_vmon=-8.95929E-1
ql2_imon=1.91535E-9
ql3_vset=
ql3_vmon=-9.04701E0
ql3_imon=1.17171E-10
ql4_vset=
ql4_vmon=-9.04179E0
ql4_imon=-1.10745E-11
mult1=-9.18652E-9
mult2=-2.64076E-9
rf_tmon=-5.11926E-3
rf_agc=3.22641E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=1.7045E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65441E0
bslens_imon=2.49222E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19552E1
lens5a_imon=2.00328E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.05141E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54113E1
cs_ef1b_imon=2.83204E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02223E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0459E1
cs_ea1_imon=2.5159E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33613E0
lens1_imon=2.59467E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65107E1
os_ef1alow_imon=2.96549E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03571E1
cs_ea2_imon=1.49646E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84498E1
cs_ef1a_imon=2.95924E-5
olens2_vset=9.7E-1
olens2_vmon=9.69744E-1
olens2_imon=1.34767E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11546E1
os_restr1_imon=4.26211E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15186E1
os_ea1_imon=2.35812E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.08122E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22705E0
cs_ionrep_imon=1.19797E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91962E2
cs_nozzle_imon=1.93492E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01583E1
cs_anode1_imon=2.99225E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=3.35593E-8
tplens_vset=1.4E-1
tplens_vmon=1.67046E0
tplens_imon=-5.16592E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26254E1
iondef3_imon=1.49202E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26044E1
iondef2_imon=1.55554E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03033E2
lens6_imon=2.98165E-4
ql6_vset=1.0E-1
ql6_vmon=9.55582E-2
ql6_imon=4.08173E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27259E0
ionrepsh_imon=1.78949E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33663E1
lens5b_imon=2.16311E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74443E1
cs_ef2b_imon=3.13474E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51507E0
os_ea2_imon=-5.88311E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06146E2
lens4b_imon=2.00531E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.15559E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08178E0
os_ef2alow_imon=-2.48075E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.93176E-1
os_ef2bup_imon=-5.35131E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11338E1
os_restr2_imon=3.42979E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.30031E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01908E1
cs_anode2_imon=2.25411E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73562E1
iondef1_imon=1.0962E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68671E1
iondef4_imon=1.0892E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71773E1
olens3_imon=5.10744E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=7.89966E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16084E0
cs_ionaccel_imon=-1.83088E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47476E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56283E1
einzel_imon=7.60443E-6
window_vset=0.0E0
window_vmon=2.66339E-1
window_imon=-8.82134E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82738E2
mask1_imon=2.39171E-4
mask2_vset=0.0E0
mask2_vmon=-1.86466E1
mask2_imon=-7.50074E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.42038E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.28652E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.06178E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35898E0
defgridb_imon=6.06453E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33313E1
os_fil1_imon=9.40937E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08221E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65755E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30876E1
cs_fil1_imon=9.93877E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63096E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67225E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.17349E-2
os_fil2_imon=-2.69235E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.02241E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.57645E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36394E-1
cs_fil2_imon=-3.10359E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.39631E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22892E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.01995E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.20602E-1
res40_imon=-2.46337E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=199
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09387E0	-8.7986E-1	-8.95834E-1	-9.04698E0	-9.04186E0	4.00543E-3	9.55105E-2	2.73012E1	-3.26713E1	-3.26064E1	2.68602E1	1.2212E-7	2.52025E-3	2.52025E-3	6.33919E-3	2.99343E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09394E0	-8.79717E-1	-8.96263E-1	-9.04734E0	-9.04181E0	4.29153E-3	9.55582E-2	2.73265E1	-3.26636E1	-3.25955E1	2.68283E1	1.21726E-7	2.51752E-3	2.51752E-3	6.3074E-3	3.01853E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09333E0	-8.79645E-1	-8.96406E-1	-9.04706E0	-9.04191E0	4.36306E-3	9.56535E-2	2.73175E1	-3.2662E1	-3.25995E1	2.68777E1	1.22178E-7	2.52384E-3	2.52384E-3	6.32518E-3	3.03027E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.79717E-1	-8.96311E-1	-9.04696E0	-9.04219E0	4.24385E-3	9.58204E-2	2.73131E1	-3.26505E1	-3.26328E1	2.68255E1	1.2212E-7	2.51709E-3	2.51709E-3	6.33919E-3	3.01356E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.79931E-1	-8.96263E-1	-9.04684E0	-9.04212E0	4.26769E-3	9.57727E-2	2.73045E1	-3.2636E1	-3.26266E1	2.68587E1	1.2212E-7	2.52093E-3	2.52093E-3	6.3282E-3	3.00989E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.79931E-1	-8.96311E-1	-9.04703E0	-9.04183E0	4.29153E-3	9.59396E-2	2.73045E1	-3.26302E1	-3.26134E1	2.68307E1	1.2212E-7	2.51838E-3	2.51838E-3	6.3074E-3	3.00251E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.79741E-1	-8.96358E-1	-9.04715E0	-9.04195E0	3.95775E-3	9.58443E-2	2.73315E1	-3.26597E1	-3.26645E1	2.68232E1	1.22012E-7	2.52139E-3	2.52139E-3	6.31858E-3	2.99879E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.79836E-1	-8.96239E-1	-9.04727E0	-9.04164E0	4.1008E-3	9.61781E-2	2.73333E1	-3.26536E1	-3.26206E1	2.6831E1	1.21064E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01085E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09325E0	-8.79908E-1	-8.96287E-1	-9.04729E0	-9.04186E0	3.95775E-3	9.60588E-2	2.73345E1	-3.26254E1	-3.26068E1	2.68322E1	1.19861E-7	2.52867E-3	2.52867E-3	6.31288E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09333E0	-8.80051E-1	-8.96287E-1	-9.04722E0	-9.04212E0	3.69549E-3	9.5892E-2	2.73147E1	-3.25948E1	-3.27041E1	2.68268E1	1.20226E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00824E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09364E0	-8.79812E-1	-8.96311E-1	-9.04722E0	-9.04181E0	3.95775E-3	9.58204E-2	2.73269E1	-3.26113E1	-3.26113E1	2.68418E1	1.20055E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.02511E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09387E0	-8.80003E-1	-8.96549E-1	-9.04713E0	-9.04202E0	4.12464E-3	9.57012E-2	2.73345E1	-3.26543E1	-3.26524E1	2.6831E1	1.2117E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09325E0	-8.80027E-1	-8.96358E-1	-9.04689E0	-9.04183E0	4.00543E-3	9.58204E-2	2.73166E1	-3.26601E1	-3.26167E1	2.68518E1	1.20309E-7	2.51746E-3	2.51746E-3	6.32313E-3	3.01046E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-8.79908E-1	-8.96144E-1	-9.04713E0	-9.042E0	4.05312E-3	9.56774E-2	2.73362E1	-3.26993E1	-3.26409E1	2.6827E1					
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-8.79765E-1	-8.95953E-1	-9.0472E0	-9.04188E0	4.26769E-3	9.57489E-2	2.73898E1	-3.26681E1	-3.262E1	2.68208E1	1.20076E-7	2.51911E-3	2.51911E-3	6.32518E-3	2.99916E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.79717E-1	-8.96096E-1	-9.04739E0	-9.04176E0	4.31538E-3	9.58443E-2	2.72883E1	-3.26663E1	-3.26272E1	2.68605E1	1.19705E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00563E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-8.79598E-1	-8.96168E-1	-9.04717E0	-9.04179E0	4.02927E-3	9.59396E-2	2.73487E1	-3.26562E1	-3.2607E1	2.68401E1	1.20278E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09394E0	-8.79812E-1	-8.96168E-1	-9.04729E0	-9.04181E0	4.14848E-3	9.58204E-2	2.73509E1	-3.27539E1	-3.257E1	2.683E1	1.19773E-7	2.51752E-3	2.51752E-3	6.31251E-3	3.00635E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09364E0	-8.79884E-1	-8.96382E-1	-9.04741E0	-9.04195E0	4.48227E-3	9.56297E-2	2.73346E1	-3.26762E1	-3.2652E1	2.6807E1	1.1973E-7	2.52106E-3	2.52106E-3	6.31902E-3	2.99535E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.79669E-1	-8.95929E-1	-9.04701E0	-9.04179E0	4.57764E-3	9.55582E-2	2.73562E1	-3.26044E1	-3.26254E1	2.68671E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.01995E-1