[Scan]
initial_time=2016-01-18T18:21:10
final_time=2016-01-18T18:21:30
ip_count=19
run=1024
dataset=3
scan=225
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09387E0
qbias_imon=-1.08787E-4
ql1_vset=
ql1_vmon=-8.80194E-1
ql1_imon=1.33816E-8
ql2_vset=
ql2_vmon=-8.96454E-1
ql2_imon=1.88472E-9
ql3_vset=
ql3_vmon=-9.04682E0
ql3_imon=1.13547E-10
ql4_vset=
ql4_vmon=-9.042E0
ql4_imon=-9.0003E-12
mult1=-9.74761E-9
mult2=-2.79577E-9
rf_tmon=-5.31174E-3
rf_agc=3.22827E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.19617E-3
ql5_imon=1.69324E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63849E0
bslens_imon=2.30966E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19771E1
lens5a_imon=2.00987E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.0487E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54049E1
cs_ef1b_imon=2.84935E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.02305E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0477E1
cs_ea1_imon=2.53371E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33835E0
lens1_imon=2.73085E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64686E1
os_ef1alow_imon=2.98414E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03631E1
cs_ea2_imon=1.49347E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84526E1
cs_ef1a_imon=2.93441E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.35025E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1155E1
os_restr1_imon=4.2531E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15182E1
os_ea1_imon=2.35638E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24502E0
cs_ionrep_imon=1.18625E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91943E2
cs_nozzle_imon=1.93586E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02344E1
cs_anode1_imon=2.99135E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=3.35081E-8
tplens_vset=1.4E-1
tplens_vmon=1.66267E0
tplens_imon=-2.31638E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25818E1
iondef3_imon=1.52462E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26714E1
iondef2_imon=1.56072E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03056E2
lens6_imon=2.98236E-4
ql6_vset=1.0E-1
ql6_vmon=9.55582E-2
ql6_imon=4.07591E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30283E0
ionrepsh_imon=1.76707E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3354E1
lens5b_imon=2.17516E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74591E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56121E0
os_ea2_imon=-6.77604E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06103E2
lens4b_imon=2.00379E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71228E1
cs_ef2a_imon=3.17011E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07919E0
os_ef2alow_imon=-2.53661E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.1244E-1
os_ef2bup_imon=-5.28283E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11141E1
os_restr2_imon=3.42238E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.2915E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01911E1
cs_anode2_imon=2.24172E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73204E1
iondef1_imon=1.12183E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68617E1
iondef4_imon=1.08665E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.12723E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8176E-1
olens1_imon=7.8698E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14155E0
cs_ionaccel_imon=-1.76897E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02101E2
cs_ionfocb_imon=1.47396E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56363E1
einzel_imon=7.73469E-6
window_vset=0.0E0
window_vmon=2.35362E-1
window_imon=-6.84173E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82701E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.8647E1
mask2_imon=-6.73362E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.77096E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9369E3
defgrida_imon=6.87549E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.2082E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39965E0
defgridb_imon=5.93755E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33339E1
os_fil1_imon=9.42198E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07293E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6594E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30883E1
cs_fil1_imon=9.96215E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6254E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67381E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.45852E-2
os_fil2_imon=-2.65395E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.58507E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-2.45574E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.87833E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22844E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=2.9952E-1
chamber_ion_pmon=1.20174E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.78223E-1
res40_imon=-2.62311E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=148
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09379E0	-8.80003E-1	-8.96621E-1	-9.04689E0	-9.04186E0	4.3869E-3	9.57489E-2	2.72974E1	-3.26561E1	-3.26655E1	2.68296E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00041E-1
2.0E0	2.6E1	0.0E0	3.16E2	1.6E2	-2.09402E0	-8.80122E-1	-8.96358E-1	-9.04672E0	-9.04207E0	4.31538E-3	9.55105E-2	2.73271E1	-3.26352E1	-3.26444E1	2.6855E1	1.20142E-7	2.51287E-3	2.51287E-3	6.31269E-3	3.02115E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.8017E-1	-8.96192E-1	-9.04679E0	-9.04171E0	4.50611E-3	9.54628E-2	2.73219E1	-3.26642E1	-3.26109E1	2.68483E1	1.19978E-7	2.51248E-3	2.51248E-3	6.3074E-3	3.02813E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.80241E-1	-8.9612E-1	-9.04694E0	-9.04179E0	4.3869E-3	9.55105E-2	2.72997E1	-3.26434E1	-3.2623E1	2.68218E1	1.19941E-7	2.52236E-3	2.52236E-3	6.32858E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09394E0	-8.80003E-1	-8.96335E-1	-9.04708E0	-9.04195E0	4.22001E-3	9.56297E-2	2.73423E1	-3.26366E1	-3.26101E1	2.6849E1	1.20069E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.80218E-1	-8.96382E-1	-9.04744E0	-9.04198E0	4.43459E-3	9.57727E-2	2.72967E1	-3.26735E1	-3.2611E1	2.68346E1	1.19965E-7	2.52209E-3	2.52209E-3	6.34037E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09394E0	-8.80003E-1	-8.96382E-1	-9.04708E0	-9.04205E0	4.26769E-3	9.55105E-2	2.73183E1	-3.26801E1	-3.26086E1	2.68232E1	1.20069E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.79788E-1	-8.96549E-1	-9.04713E0	-9.04195E0	4.43459E-3	9.53436E-2	2.73092E1	-3.26667E1	-3.26272E1	2.6843E1	1.2062E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.0071E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.79765E-1	-8.96382E-1	-9.04737E0	-9.04162E0	4.3869E-3	9.5582E-2	2.72979E1	-3.26801E1	-3.26278E1	2.68298E1	1.22067E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.03712E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.79717E-1	-8.96382E-1	-9.04717E0	-9.04176E0	4.55379E-3	9.53436E-2	2.73291E1	-3.26002E1	-3.26314E1	2.68268E1	1.2212E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01609E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.79931E-1	-8.9643E-1	-9.04679E0	-9.04164E0	4.33922E-3	9.55343E-2	2.737E1	-3.26164E1	-3.2587E1	2.68186E1	1.21856E-7	2.52647E-3	2.52647E-3	6.3074E-3	3.02396E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.79884E-1	-8.96335E-1	-9.04698E0	-9.04193E0	4.673E-3	9.55582E-2	2.73139E1	-3.2708E1	-3.26443E1	2.68334E1	1.20826E-7	2.51525E-3	2.51525E-3	6.29665E-3	3.0071E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.79908E-1	-8.96263E-1	-9.04689E0	-9.04186E0	4.45843E-3	9.54628E-2	2.73339E1	-3.26687E1	-3.26386E1	2.68418E1	1.19913E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.01347E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.80027E-1	-8.96168E-1	-9.04701E0	-9.04148E0	4.57764E-3	9.55582E-2	2.73405E1	-3.26573E1	-3.26392E1	2.68388E1	1.19861E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.03185E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09642E0	-8.80218E-1	-8.96263E-1	-9.04677E0	-9.04181E0	4.3869E-3	9.56059E-2	2.73171E1	-3.26494E1	-3.26627E1	2.68334E1	1.20174E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.02133E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.80075E-1	-8.96311E-1	-9.04672E0	-9.04183E0	4.19617E-3	9.55582E-2	2.73399E1	-3.26567E1	-3.2623E1	2.68346E1	1.2212E-7	2.52384E-3	2.52384E-3	6.28592E-3	3.01995E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.79955E-1	-8.96597E-1	-9.04689E0	-9.04217E0	4.17233E-3	9.53913E-2	2.73526E1	-3.26891E1	-3.2611E1	2.6843E1	1.22067E-7	2.5199E-3	2.5199E-3	6.29098E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.80313E-1	-8.96358E-1	-9.04684E0	-9.04195E0	4.1008E-3	9.53197E-2	2.73039E1	-3.26508E1	-3.26349E1	2.6834E1	1.21644E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.99E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.80098E-1	-8.96478E-1	-9.04694E0	-9.04181E0	4.33922E-3	9.59158E-2	2.73177E1	-3.2644E1	-3.26062E1	2.68186E1	1.20774E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09387E0	-8.80194E-1	-8.96454E-1	-9.04682E0	-9.042E0	4.19617E-3	9.55582E-2	2.73204E1	-3.26714E1	-3.25818E1	2.68617E1	1.20174E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.9952E-1