[Scan]
initial_time=2016-01-18T18:21:37
final_time=2016-01-18T18:21:56
ip_count=19
run=1024
dataset=3
scan=226
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08721E-4
ql1_vset=
ql1_vmon=-8.7986E-1
ql1_imon=1.33371E-8
ql2_vset=
ql2_vmon=-8.96311E-1
ql2_imon=1.87804E-9
ql3_vset=
ql3_vmon=-9.04703E0
ql3_imon=1.10316E-10
ql4_vset=
ql4_vmon=-9.042E0
ql4_imon=-2.21014E-11
mult1=-1.00195E-8
mult2=-2.72718E-9
rf_tmon=-3.81339E-3
rf_agc=3.38636E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.24385E-3
ql5_imon=1.69482E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64675E0
bslens_imon=2.31674E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19246E1
lens5a_imon=1.97979E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.04962E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53719E1
cs_ef1b_imon=2.83552E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04651E2
lens23_imon=1.02178E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0474E1
cs_ea1_imon=2.53371E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32242E0
lens1_imon=2.71315E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64834E1
os_ef1alow_imon=2.97626E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03737E1
cs_ea2_imon=1.4917E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84475E1
cs_ef1a_imon=2.94221E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.35286E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1106E1
os_restr1_imon=4.24021E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15288E1
os_ea1_imon=2.35921E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63589E1
os_ef1bup_imon=3.07253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24443E0
cs_ionrep_imon=1.18873E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91942E2
cs_nozzle_imon=1.93505E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02371E1
cs_anode1_imon=2.99885E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2042E0
olens4_imon=3.36298E-8
tplens_vset=1.4E-1
tplens_vmon=1.66739E0
tplens_imon=-2.67032E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26024E1
iondef3_imon=1.50515E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26579E1
iondef2_imon=1.56745E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03028E2
lens6_imon=2.9818E-4
ql6_vset=1.0E-1
ql6_vmon=9.54628E-2
ql6_imon=4.04583E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27864E0
ionrepsh_imon=1.77415E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33563E1
lens5b_imon=2.16278E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74727E1
cs_ef2b_imon=3.11979E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51106E0
os_ea2_imon=-8.12101E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.00651E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.14481E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06904E0
os_ef2alow_imon=-2.41125E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04761E-1
os_ef2bup_imon=-5.24358E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11239E1
os_restr2_imon=3.42144E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.28548E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01751E1
cs_anode2_imon=2.24994E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7311E1
iondef1_imon=1.12396E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6852E1
iondef4_imon=1.0892E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71775E1
olens3_imon=5.11001E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=7.92196E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12956E0
cs_ionaccel_imon=-1.76485E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02125E2
cs_ionfocb_imon=1.47452E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56538E1
einzel_imon=7.70522E-6
window_vset=0.0E0
window_vmon=2.55914E-1
window_imon=-8.40431E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82702E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86605E1
mask2_imon=-6.90995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92669E3
multa_neg_imon=7.36039E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93674E3
defgrida_imon=6.46846E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.15865E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37898E0
defgridb_imon=6.16407E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33316E1
os_fil1_imon=9.43121E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06414E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65892E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30874E1
cs_fil1_imon=9.9686E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62864E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67393E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00503E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.57115E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34271E-1
cs_fil2_imon=-2.85453E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01458E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22834E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31269E-3
inlet_lpb_pmon=3.00348E-1
chamber_ion_pmon=1.19841E-7
chamber_cvt_pmon=2.51603E-3
foreline_cvt_pmon=2.51603E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.28132E-1
res40_imon=-2.58501E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09286E0	-8.79812E-1	-8.96239E-1	-9.04682E0	-9.04183E0	4.14848E-3	9.5129E-2	2.73228E1	-3.26791E1	-3.2626E1	2.68382E1	1.21135E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.00453E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09387E0	-8.79812E-1	-8.96287E-1	-9.04715E0	-9.04198E0	4.14848E-3	9.52244E-2	2.72979E1	-3.26416E1	-3.26338E1	2.68322E1	1.20723E-7	2.52276E-3	2.52276E-3	6.31278E-3	2.9943E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.79884E-1	-8.96335E-1	-9.04708E0	-9.04205E0	4.26769E-3	9.52721E-2	2.73316E1	-3.26372E1	-3.26278E1	2.6814E1	1.20226E-7	2.52209E-3	2.52209E-3	6.30192E-3	2.97187E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-8.79669E-1	-8.96621E-1	-9.04686E0	-9.04171E0	4.52995E-3	9.55105E-2	2.73183E1	-3.26639E1	-3.26422E1	2.68719E1	1.20243E-7	2.51814E-3	2.51814E-3	6.32328E-3	2.97344E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.79693E-1	-8.96668E-1	-9.04703E0	-9.04186E0	4.07696E-3	9.56059E-2	2.73411E1	-3.26212E1	-3.2605E1	2.68154E1	1.1966E-7	2.51915E-3	2.51915E-3	6.29624E-3	3.00942E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.79669E-1	-8.96192E-1	-9.04694E0	-9.04207E0	4.24385E-3	9.54151E-2	2.73269E1	-3.2675E1	-3.2593E1	2.68599E1	1.19953E-7	2.51847E-3	2.51847E-3	6.2752E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.79884E-1	-8.96096E-1	-9.04686E0	-9.0416E0	4.45843E-3	9.53197E-2	2.73171E1	-3.26128E1	-3.26008E1	2.68202E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09387E0	-8.79693E-1	-8.96263E-1	-9.04701E0	-9.04157E0	4.3869E-3	9.53436E-2	2.73081E1	-3.26903E1	-3.26302E1	2.6855E1	1.19705E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.97704E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09364E0	-8.79788E-1	-8.96168E-1	-9.04708E0	-9.04169E0	4.07696E-3	9.53913E-2	2.73267E1	-3.26753E1	-3.26176E1	2.68334E1	1.19757E-7	2.51116E-3	2.51116E-3	6.32936E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09418E0	-8.79812E-1	-8.96406E-1	-9.04686E0	-9.0416E0	4.07696E-3	9.55105E-2	2.73576E1	-3.2698E1	-3.26408E1	2.68569E1	1.19959E-7	2.5116E-3	2.5116E-3	6.31827E-3	3.02714E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.79955E-1	-8.96263E-1	-9.04696E0	-9.04167E0	4.19617E-3	9.52721E-2	2.73159E1	-3.26344E1	-3.2635E1	2.68178E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.79788E-1	-8.96263E-1	-9.04691E0	-9.04183E0	4.19617E-3	9.55343E-2	2.73418E1	-3.26383E1	-3.26119E1	2.68178E1	1.20209E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.0148E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.79884E-1	-8.96478E-1	-9.04703E0	-9.04193E0	4.52995E-3	9.54628E-2	2.73354E1	-3.26812E1	-3.26249E1	2.68278E1	1.19978E-7	2.5225E-3	2.5225E-3	6.32418E-3	2.99348E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.7986E-1	-8.9643E-1	-9.04703E0	-9.04183E0	4.41074E-3	9.55582E-2	2.72938E1	-3.26558E1	-3.26697E1	2.68504E1	1.19765E-7	2.52424E-3	2.52424E-3	6.28737E-3	2.99101E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.79526E-1	-8.96454E-1	-9.04696E0	-9.04155E0	4.1008E-3	9.54866E-2	2.73175E1	-3.26461E1	-3.26319E1	2.68244E1	1.19977E-7	2.5207E-3	2.5207E-3	6.31344E-3	3.00888E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.79645E-1	-8.96597E-1	-9.04701E0	-9.04195E0	4.26769E-3	9.55105E-2	2.73149E1	-3.26499E1	-3.26395E1	2.68363E1	1.19941E-7	2.52342E-3	2.52342E-3	6.29684E-3	3.01104E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.79717E-1	-8.96597E-1	-9.04677E0	-9.04193E0	4.07696E-3	9.55105E-2	2.73134E1	-3.26419E1	-3.26124E1	2.68214E1	1.19872E-7	2.52362E-3	2.52362E-3	6.34661E-3	3.01742E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.79979E-1	-8.96382E-1	-9.04708E0	-9.04205E0	4.43459E-3	9.56535E-2	2.73333E1	-3.26975E1	-3.26164E1	2.68478E1	1.20017E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.79812E-1	-8.96335E-1	-9.04689E0	-9.04188E0	4.29153E-3	9.55343E-2	2.7334E1	-3.26732E1	-3.26195E1	2.68493E1	1.20069E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.01609E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.7986E-1	-8.96311E-1	-9.04703E0	-9.042E0	4.24385E-3	9.54628E-2	2.7311E1	-3.26579E1	-3.26024E1	2.6852E1	1.19841E-7	2.51603E-3	2.51603E-3	6.31269E-3	3.00348E-1