[Scan]
initial_time=2016-01-18T18:22:56
final_time=2016-01-18T18:23:15
ip_count=19
run=1024
dataset=3
scan=229
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08865E-4
ql1_vset=
ql1_vmon=-8.79574E-1
ql1_imon=1.33315E-8
ql2_vset=
ql2_vmon=-8.96645E-1
ql2_imon=1.89153E-9
ql3_vset=
ql3_vmon=-9.04646E0
ql3_imon=1.10924E-10
ql4_vset=
ql4_vmon=-9.04188E0
ql4_imon=-2.56896E-11
mult1=-9.92494E-9
mult2=-2.77225E-9
rf_tmon=-4.62156E-3
rf_agc=3.31616E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.12464E-3
ql5_imon=1.69842E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65972E0
bslens_imon=2.67776E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19818E1
lens5a_imon=2.00456E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.05019E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54055E1
cs_ef1b_imon=2.84034E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02107E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04392E1
cs_ea1_imon=2.52167E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34306E0
lens1_imon=2.70961E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64807E1
os_ef1alow_imon=2.97946E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03625E1
cs_ea2_imon=1.49701E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84616E1
cs_ef1a_imon=2.93585E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.34629E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1179E1
os_restr1_imon=4.27292E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15182E1
os_ea1_imon=2.37903E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.08289E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22673E0
cs_ionrep_imon=1.20572E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91972E2
cs_nozzle_imon=1.93572E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=2.97297E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.35321E-8
tplens_vset=1.4E-1
tplens_vmon=1.67211E0
tplens_imon=-2.67032E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25995E1
iondef3_imon=1.50197E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27204E1
iondef2_imon=1.54833E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03038E2
lens6_imon=2.98197E-4
ql6_vset=1.0E-1
ql6_vmon=9.59635E-2
ql6_imon=4.06482E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26213E0
ionrepsh_imon=1.79432E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33888E1
lens5b_imon=2.17587E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.12145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51932E0
os_ea2_imon=-6.3867E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.00545E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71312E1
cs_ef2a_imon=3.16614E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05576E0
os_ef2alow_imon=-2.53661E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.16645E-1
os_ef2bup_imon=-5.32248E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11364E1
os_restr2_imon=3.42455E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.29008E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.24893E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73157E1
iondef1_imon=1.10697E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68376E1
iondef4_imon=1.09602E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.09405E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=7.87554E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13495E0
cs_ionaccel_imon=-1.69328E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02103E2
cs_ionfocb_imon=1.47403E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56387E1
einzel_imon=7.70946E-6
window_vset=0.0E0
window_vmon=2.47376E-1
window_imon=-7.45441E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82697E2
mask1_imon=2.3912E-4
mask2_vset=0.0E0
mask2_vmon=-1.86404E1
mask2_imon=-5.9047E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.53029E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.79763E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=6.98522E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46757E0
defgridb_imon=5.95879E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33323E1
os_fil1_imon=9.41339E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06897E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65936E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30902E1
cs_fil1_imon=9.95969E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62876E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67416E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.05331E-2
os_fil2_imon=-2.55785E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.65088E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34313E-1
cs_fil2_imon=-2.35963E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.01958E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2281E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.20122E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.58982E-1
res40_imon=-2.50057E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.79788E-1	-8.96549E-1	-9.04691E0	-9.04183E0	4.02927E-3	9.57251E-2	2.73187E1	-3.27068E1	-3.26266E1	2.68348E1	1.19809E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.03449E-1
2.0E0	4.3E1	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.7986E-1	-8.96525E-1	-9.04686E0	-9.04169E0	4.19617E-3	9.56535E-2	2.72982E1	-3.26329E1	-3.26285E1	2.68082E1	1.19953E-7	2.52384E-3	2.52384E-3	6.29128E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.79955E-1	-8.96239E-1	-9.04691E0	-9.04169E0	4.17233E-3	9.56774E-2	2.73222E1	-3.26932E1	-3.25958E1	2.68221E1	1.21259E-7	2.51581E-3	2.51581E-3	6.3074E-3	3.00942E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.79931E-1	-8.96239E-1	-9.04675E0	-9.04186E0	4.02927E-3	9.55582E-2	2.73207E1	-3.25978E1	-3.2626E1	2.6837E1	1.20127E-7	2.51783E-3	2.51783E-3	6.30221E-3	3.0E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.79979E-1	-8.96311E-1	-9.04694E0	-9.04186E0	4.1008E-3	9.53913E-2	2.73189E1	-3.26488E1	-3.25912E1	2.68202E1	1.19757E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.80241E-1	-8.96263E-1	-9.04706E0	-9.04157E0	4.14848E-3	9.56297E-2	2.73538E1	-3.26206E1	-3.26494E1	2.6849E1	1.19819E-7	2.51581E-3	2.51581E-3	6.3074E-3	3.01209E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.80289E-1	-8.96072E-1	-9.04717E0	-9.04162E0	4.05312E-3	9.58681E-2	2.73021E1	-3.26867E1	-3.2653E1	2.68406E1	1.19809E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.80241E-1	-8.95953E-1	-9.04746E0	-9.04186E0	4.14848E-3	9.56297E-2	2.72889E1	-3.26705E1	-3.25906E1	2.6828E1	1.20017E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00824E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.80289E-1	-8.96049E-1	-9.04698E0	-9.04176E0	4.05312E-3	9.54866E-2	2.73111E1	-3.26182E1	-3.26404E1	2.68314E1	1.20106E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.04063E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.80075E-1	-8.96311E-1	-9.04682E0	-9.04202E0	4.07696E-3	9.57251E-2	2.73424E1	-3.26146E1	-3.26116E1	2.68118E1	1.19861E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.03449E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.80122E-1	-8.9612E-1	-9.04691E0	-9.04202E0	4.22001E-3	9.57727E-2	2.73275E1	-3.26313E1	-3.26272E1	2.68418E1	1.21644E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.01871E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.7986E-1	-8.96072E-1	-9.04672E0	-9.04191E0	4.19617E-3	9.55105E-2	2.73075E1	-3.26502E1	-3.26024E1	2.68148E1	1.20209E-7	2.52169E-3	2.52169E-3	6.33436E-3	3.01223E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.80098E-1	-8.96025E-1	-9.04675E0	-9.04176E0	4.45843E-3	9.55343E-2	2.72974E1	-3.2652E1	-3.25912E1	2.68238E1	1.20697E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.8017E-1	-8.96215E-1	-9.04686E0	-9.04183E0	4.14848E-3	9.56535E-2	2.7367E1	-3.26188E1	-3.26158E1	2.684E1	1.2212E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.01995E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.7986E-1	-8.96311E-1	-9.04689E0	-9.04155E0	3.93391E-3	9.56774E-2	2.72781E1	-3.25503E1	-3.259E1	2.68298E1	1.20226E-7	2.52318E-3	2.52318E-3	6.30192E-3	2.98222E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-8.79455E-1	-8.96335E-1	-9.04727E0	-9.0416E0	3.98159E-3	9.53436E-2	2.73352E1	-3.2636E1	-3.26242E1	2.68382E1	1.19953E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.97901E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.0968E0	-8.7955E-1	-8.96478E-1	-9.04675E0	-9.0416E0	3.93391E-3	9.55582E-2	2.73261E1	-3.26927E1	-3.2635E1	2.68268E1	1.20017E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.79717E-1	-8.9643E-1	-9.04639E0	-9.042E0	4.43459E-3	9.5892E-2	2.73482E1	-3.26826E1	-3.2616E1	2.68117E1	1.20226E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.01085E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.7986E-1	-8.96597E-1	-9.04627E0	-9.04157E0	4.14848E-3	9.57012E-2	2.73339E1	-3.27071E1	-3.26518E1	2.68466E1	1.20042E-7	2.51603E-3	2.51603E-3	6.32328E-3	3.01609E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.79574E-1	-8.96645E-1	-9.04646E0	-9.04188E0	4.12464E-3	9.59635E-2	2.73157E1	-3.27204E1	-3.25995E1	2.68376E1	1.20122E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.9978E-1