[Scan]
initial_time=2016-01-18T18:24:16
final_time=2016-01-18T18:24:35
ip_count=19
run=1024
dataset=3
scan=232
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08737E-4
ql1_vset=
ql1_vmon=-8.7986E-1
ql1_imon=1.33611E-8
ql2_vset=
ql2_vmon=-8.96168E-1
ql2_imon=1.87776E-9
ql3_vset=
ql3_vmon=-9.04703E0
ql3_imon=1.33729E-10
ql4_vset=
ql4_vmon=-9.04129E0
ql4_imon=-1.02639E-11
mult1=-9.90896E-9
mult2=-2.62879E-9
rf_tmon=-3.40691E-3
rf_agc=3.3646E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.93391E-3
ql5_imon=1.68183E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68568E0
bslens_imon=2.61759E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19653E1
lens5a_imon=2.00527E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12509E2
lens4a_imon=2.04955E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54007E1
cs_ef1b_imon=2.84215E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02284E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04599E1
cs_ea1_imon=2.51919E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35368E0
lens1_imon=2.58927E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64885E1
os_ef1alow_imon=2.96973E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03431E1
cs_ea2_imon=1.50338E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84382E1
cs_ef1a_imon=2.93333E-5
olens2_vset=9.7E-1
olens2_vmon=9.70745E-1
olens2_imon=1.35061E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11502E1
os_restr1_imon=4.25995E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1494E1
os_ea1_imon=2.37337E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63509E1
os_ef1bup_imon=3.0746E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24915E0
cs_ionrep_imon=1.19687E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91933E2
cs_nozzle_imon=1.93732E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01599E1
cs_anode1_imon=2.97261E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20394E0
olens4_imon=3.35993E-8
tplens_vset=1.4E-1
tplens_vmon=1.65264E0
tplens_imon=-2.98887E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26146E1
iondef3_imon=1.51365E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26855E1
iondef2_imon=1.56568E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03041E2
lens6_imon=2.98105E-4
ql6_vset=1.0E-1
ql6_vmon=9.54866E-2
ql6_imon=4.04913E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29162E0
ionrepsh_imon=1.78583E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33888E1
lens5b_imon=2.18083E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74808E1
cs_ef2b_imon=3.13118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51224E0
os_ea2_imon=-6.56367E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06118E2
lens4b_imon=2.00506E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71168E1
cs_ef2a_imon=3.1629E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04795E0
os_ef2alow_imon=-2.49336E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92619E-1
os_ef2bup_imon=-5.36573E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11298E1
os_restr2_imon=3.42959E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.28796E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01851E1
cs_anode2_imon=2.24172E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73309E1
iondef1_imon=1.11122E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68256E1
iondef4_imon=1.09711E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.09789E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=7.90003E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12293E0
cs_ionaccel_imon=-1.80501E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47388E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56381E1
einzel_imon=7.81037E-6
window_vset=0.0E0
window_vmon=2.46174E-1
window_imon=-8.60768E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82729E2
mask1_imon=2.39026E-4
mask2_vset=0.0E0
mask2_vmon=-1.8668E1
mask2_imon=-5.68847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.24713E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93696E3
defgrida_imon=6.72684E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=6.99229E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48824E0
defgridb_imon=6.1216E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33319E1
os_fil1_imon=9.41561E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06572E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6578E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30909E1
cs_fil1_imon=9.95495E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62312E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67381E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42053E-2
os_fil2_imon=-2.67798E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00717E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.67492E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.35362E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.98064E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2278E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.52428E-3
foreline_cvt_pmon=2.52428E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.51193E-1
res40_imon=-2.66275E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.79645E-1	-8.96382E-1	-9.04689E0	-9.04212E0	3.6478E-3	9.57966E-2	2.73015E1	-3.26332E1	-3.26182E1	2.68134E1	1.19902E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.00453E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.79693E-1	-8.96358E-1	-9.04689E0	-9.04186E0	3.79086E-3	9.56535E-2	2.73363E1	-3.26326E1	-3.26212E1	2.68319E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.02133E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.7986E-1	-8.96144E-1	-9.04715E0	-9.04193E0	3.76701E-3	9.55343E-2	2.73345E1	-3.26903E1	-3.26134E1	2.6836E1	1.19913E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00041E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.79645E-1	-8.96001E-1	-9.04694E0	-9.0421E0	3.6478E-3	9.57012E-2	2.73334E1	-3.26508E1	-3.26124E1	2.68322E1	1.20278E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00041E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.79645E-1	-8.96049E-1	-9.04665E0	-9.04183E0	3.88622E-3	9.55582E-2	2.73267E1	-3.26543E1	-3.26056E1	2.6831E1	1.19902E-7	2.52707E-3	2.52707E-3	6.32356E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.79741E-1	-8.9581E-1	-9.04646E0	-9.04179E0	3.69549E-3	9.56059E-2	2.73015E1	-3.26621E1	-3.26362E1	2.68382E1	1.19965E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.97963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09364E0	-8.79693E-1	-8.96025E-1	-9.04677E0	-9.04198E0	4.02927E-3	9.5582E-2	2.73285E1	-3.26536E1	-3.26188E1	2.68316E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.79788E-1	-8.95953E-1	-9.04651E0	-9.04205E0	3.86238E-3	9.57727E-2	2.73478E1	-3.26536E1	-3.26416E1	2.68292E1	1.2033E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09333E0	-8.79788E-1	-8.95977E-1	-9.04665E0	-9.04202E0	3.95775E-3	9.56059E-2	2.73617E1	-3.26714E1	-3.26366E1	2.68478E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01871E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09317E0	-8.79788E-1	-8.96239E-1	-9.04694E0	-9.04179E0	3.95775E-3	9.53913E-2	2.72985E1	-3.26885E1	-3.26344E1	2.68238E1	1.19965E-7	2.51007E-3	2.51007E-3	6.32386E-3	3.00041E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0934E0	-8.79788E-1	-8.9643E-1	-9.04691E0	-9.04207E0	4.02927E-3	9.58204E-2	2.72943E1	-3.26212E1	-3.26284E1	2.68394E1	1.19851E-7	2.51417E-3	2.51417E-3	6.30202E-3	2.99941E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.79836E-1	-8.96168E-1	-9.04672E0	-9.04174E0	4.02927E-3	9.56774E-2	2.73574E1	-3.265E1	-3.26326E1	2.68321E1	1.19601E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-8.79788E-1	-8.96335E-1	-9.0467E0	-9.04191E0	4.14848E-3	9.57489E-2	2.73418E1	-3.2678E1	-3.25721E1	2.6831E1	1.2033E-7	2.52099E-3	2.52099E-3	6.3514E-3	3.00824E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.79574E-1	-8.96239E-1	-9.04682E0	-9.042E0	4.19617E-3	9.58204E-2	2.73293E1	-3.26661E1	-3.26101E1	2.68364E1	1.20031E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.03349E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09402E0	-8.79908E-1	-8.95786E-1	-9.0467E0	-9.04191E0	4.48227E-3	9.58204E-2	2.73027E1	-3.2635E1	-3.27287E1	2.68382E1	1.19749E-7	2.51203E-3	2.51203E-3	6.29665E-3	2.9892E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-8.79669E-1	-8.95643E-1	-9.04703E0	-9.04176E0	3.79086E-3	9.5439E-2	2.73724E1	-3.26529E1	-3.26493E1	2.6828E1	1.20278E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9978E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.79908E-1	-8.95953E-1	-9.04722E0	-9.04188E0	3.86238E-3	9.57251E-2	2.73039E1	-3.26596E1	-3.26437E1	2.68334E1	1.19554E-7	2.51581E-3	2.51581E-3	6.32418E-3	2.99613E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09371E0	-8.79526E-1	-8.96335E-1	-9.04689E0	-9.04169E0	3.79086E-3	9.58204E-2	2.73421E1	-3.26778E1	-3.26294E1	2.68518E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9978E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09325E0	-8.79717E-1	-8.9612E-1	-9.0471E0	-9.0415E0	3.38554E-3	9.57966E-2	2.73285E1	-3.26699E1	-3.26296E1	2.68412E1	1.20064E-7	2.51752E-3	2.51752E-3	6.31251E-3	2.99179E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.7986E-1	-8.96168E-1	-9.04703E0	-9.04129E0	3.93391E-3	9.54866E-2	2.73309E1	-3.26855E1	-3.26146E1	2.68256E1	1.19965E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.01085E-1