[Scan]
initial_time=2016-01-18T18:24:42
final_time=2016-01-18T18:25:02
ip_count=19
run=1024
dataset=3
scan=233
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.0875E-4
ql1_vset=
ql1_vmon=-8.79812E-1
ql1_imon=1.33258E-8
ql2_vset=
ql2_vmon=-8.96454E-1
ql2_imon=1.906E-9
ql3_vset=
ql3_vmon=-9.04689E0
ql3_imon=1.17528E-10
ql4_vset=
ql4_vmon=-9.04193E0
ql4_imon=-1.89424E-11
mult1=-8.94374E-9
mult2=-2.66838E-9
rf_tmon=-5.12887E-3
rf_agc=3.37102E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.00543E-3
ql5_imon=1.69197E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66073E0
bslens_imon=2.59904E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19701E1
lens5a_imon=1.99389E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.04978E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53905E1
cs_ef1b_imon=2.83386E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02153E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04652E1
cs_ea1_imon=2.51264E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32149E0
lens1_imon=2.68916E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64801E1
os_ef1alow_imon=2.97045E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03738E1
cs_ea2_imon=1.49352E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8449E1
cs_ef1a_imon=2.94882E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.3453E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11664E1
os_restr1_imon=4.25923E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15095E1
os_ea1_imon=2.33852E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.07676E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23708E0
cs_ionrep_imon=1.20116E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91952E2
cs_nozzle_imon=1.93662E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01521E1
cs_anode1_imon=2.97585E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20399E0
olens4_imon=3.34297E-8
tplens_vset=1.4E-1
tplens_vmon=1.68409E0
tplens_imon=-2.20037E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26307E1
iondef3_imon=1.52524E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26685E1
iondef2_imon=1.54471E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03061E2
lens6_imon=2.98133E-4
ql6_vset=1.0E-1
ql6_vmon=9.57012E-2
ql6_imon=4.06401E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27253E0
ionrepsh_imon=1.75992E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33694E1
lens5b_imon=2.17558E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74784E1
cs_ef2b_imon=3.11893E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50865E0
os_ea2_imon=-7.752E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06137E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71378E1
cs_ef2a_imon=3.16326E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05996E0
os_ef2alow_imon=-2.48255E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.10038E-1
os_ef2bup_imon=-5.20355E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11322E1
os_restr2_imon=3.43428E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.29604E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01851E1
cs_anode2_imon=2.2356E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73476E1
iondef1_imon=1.09409E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68157E1
iondef4_imon=1.09963E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.09793E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81688E-1
olens1_imon=7.8605E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14215E0
cs_ionaccel_imon=-1.80501E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02114E2
cs_ionfocb_imon=1.47399E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.70586E-6
window_vset=0.0E0
window_vmon=2.64795E-1
window_imon=-8.57164E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82709E2
mask1_imon=2.39308E-4
mask2_vset=0.0E0
mask2_vmon=-1.86422E1
mask2_imon=-7.34629E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92679E3
multa_neg_imon=7.05836E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.60414E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.29269E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.22412E0
defgridb_imon=5.94083E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33292E1
os_fil1_imon=9.4212E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07431E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65893E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30895E1
cs_fil1_imon=9.95044E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63039E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67252E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1124E-2
os_fil2_imon=-2.61792E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86302E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.5793E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36255E-1
cs_fil2_imon=-2.62993E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.50011E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2266E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=3.02511E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.52815E-3
foreline_cvt_pmon=2.52815E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.572E-1
res40_imon=-2.58707E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=150
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.80003E-1	-8.96049E-1	-9.04698E0	-9.04214E0	3.71933E-3	9.56297E-2	2.73138E1	-3.26805E1	-3.26237E1	2.68099E1	1.19809E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.02659E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.79908E-1	-8.955E-1	-9.0467E0	-9.04171E0	3.8147E-3	9.56297E-2	2.7332E1	-3.26646E1	-3.26223E1	2.68132E1	1.19991E-7	2.52131E-3	2.52131E-3	6.29684E-3	3.02115E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09394E0	-8.79955E-1	-8.95858E-1	-9.04665E0	-9.04169E0	4.12464E-3	9.57489E-2	2.73335E1	-3.26243E1	-3.26092E1	2.68315E1	1.20084E-7	2.51693E-3	2.51693E-3	6.31299E-3	2.99348E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.7986E-1	-8.95905E-1	-9.04675E0	-9.04191E0	3.98159E-3	9.56535E-2	2.7321E1	-3.2626E1	-3.26113E1	2.68253E1	1.20192E-7	2.51919E-3	2.51919E-3	6.31269E-3	3.01356E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-8.79788E-1	-8.96215E-1	-9.04706E0	-9.04176E0	4.1008E-3	9.52959E-2	2.73111E1	-3.27354E1	-3.26248E1	2.68418E1	1.19953E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.79979E-1	-8.96382E-1	-9.04698E0	-9.04188E0	4.22001E-3	9.53436E-2	2.73496E1	-3.26573E1	-3.2617E1	2.68532E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.02659E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.79836E-1	-8.96239E-1	-9.04691E0	-9.04198E0	3.76701E-3	9.56297E-2	2.72841E1	-3.2635E1	-3.26158E1	2.68418E1	1.19809E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.7986E-1	-8.96287E-1	-9.04703E0	-9.04176E0	3.8147E-3	9.56059E-2	2.73165E1	-3.26624E1	-3.26112E1	2.68434E1	1.20069E-7	2.51662E-3	2.51662E-3	6.26371E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.79812E-1	-8.95858E-1	-9.04682E0	-9.0421E0	4.00543E-3	9.53913E-2	2.7307E1	-3.26909E1	-3.26559E1	2.68296E1	1.2112E-7	2.5199E-3	2.5199E-3	6.323E-3	3.01237E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.7986E-1	-8.96144E-1	-9.04682E0	-9.042E0	3.71933E-3	9.56059E-2	2.73148E1	-3.26802E1	-3.26237E1	2.68402E1	1.20076E-7	2.52029E-3	2.52029E-3	6.31925E-3	3.01609E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.79645E-1	-8.96382E-1	-9.04686E0	-9.04179E0	3.93391E-3	9.57012E-2	2.73213E1	-3.26356E1	-3.26068E1	2.68143E1	1.20092E-7	2.51877E-3	2.51877E-3	6.29895E-3	3.006E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.79502E-1	-8.96192E-1	-9.04701E0	-9.04198E0	4.05312E-3	9.52959E-2	2.73358E1	-3.26832E1	-3.26207E1	2.68279E1	1.19861E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0934E0	-8.79622E-1	-8.96478E-1	-9.04667E0	-9.04191E0	3.95775E-3	9.53436E-2	2.73496E1	-3.26543E1	-3.26116E1	2.68334E1	1.20106E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.0071E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09348E0	-8.79836E-1	-8.96192E-1	-9.04691E0	-9.04171E0	4.22001E-3	9.54151E-2	2.73496E1	-3.26765E1	-3.26242E1	2.68418E1	1.19965E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00824E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09379E0	-8.79979E-1	-8.96215E-1	-9.04684E0	-9.04193E0	4.14848E-3	9.53674E-2	2.74307E1	-3.27599E1	-3.25045E1	2.683E1	1.2033E-7	2.51007E-3	2.51007E-3	6.3074E-3	3.01609E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-8.79908E-1	-8.96263E-1	-9.04706E0	-9.04169E0	4.24385E-3	9.53436E-2	2.73015E1	-3.26867E1	-3.26236E1	2.6833E1	1.19646E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.01995E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-8.79478E-1	-8.96382E-1	-9.04703E0	-9.04202E0	4.17233E-3	9.55105E-2	2.7337E1	-3.26602E1	-3.26172E1	2.68136E1	1.19809E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09364E0	-8.79788E-1	-8.96382E-1	-9.04696E0	-9.04214E0	4.26769E-3	9.56535E-2	2.73033E1	-3.26699E1	-3.2611E1	2.68418E1	1.19953E-7	2.52169E-3	2.52169E-3	6.32896E-3	3.00453E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09394E0	-8.79765E-1	-8.96478E-1	-9.04703E0	-9.042E0	4.14848E-3	9.54628E-2	2.73057E1	-3.26708E1	-3.26195E1	2.68196E1	1.20226E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.79812E-1	-8.96454E-1	-9.04689E0	-9.04193E0	4.00543E-3	9.57012E-2	2.73476E1	-3.26685E1	-3.26307E1	2.68157E1	1.20055E-7	2.52815E-3	2.52815E-3	6.33977E-3	3.02511E-1