[Scan]
initial_time=2016-01-18T18:34:04
final_time=2016-01-18T18:34:23
ip_count=19
run=1024
dataset=3
scan=237
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09394E0
qbias_imon=-1.08859E-4
ql1_vset=
ql1_vmon=-8.79979E-1
ql1_imon=1.33101E-8
ql2_vset=
ql2_vmon=-8.96168E-1
ql2_imon=1.86355E-9
ql3_vset=
ql3_vmon=-9.04677E0
ql3_imon=1.56224E-10
ql4_vset=
ql4_vmon=-9.04193E0
ql4_imon=-1.01089E-11
mult1=-9.78855E-9
mult2=-2.77251E-9
rf_tmon=-5.1493E-3
rf_agc=3.27628E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=1.70276E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68623E0
bslens_imon=2.3837E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19952E1
lens5a_imon=1.98998E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05096E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54074E1
cs_ef1b_imon=2.83696E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02264E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04558E1
cs_ea1_imon=2.51002E-5
lens1_vset=-5.0E0
lens1_vmon=-5.31893E0
lens1_imon=2.8803E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64926E1
os_ef1alow_imon=2.98657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03293E1
cs_ea2_imon=1.49974E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84401E1
cs_ef1a_imon=2.92454E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.34659E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11765E1
os_restr1_imon=4.2686E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15379E1
os_ea1_imon=2.36541E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63818E1
os_ef1bup_imon=3.07456E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23819E0
cs_ionrep_imon=1.19979E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9194E2
cs_nozzle_imon=1.93571E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01944E1
cs_anode1_imon=2.9813E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20403E0
olens4_imon=3.36321E-8
tplens_vset=1.4E-1
tplens_vmon=1.70169E0
tplens_imon=-3.37676E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25978E1
iondef3_imon=1.50172E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26416E1
iondef2_imon=1.56092E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03023E2
lens6_imon=2.98215E-4
ql6_vset=1.0E-1
ql6_vmon=9.57251E-2
ql6_imon=4.05173E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26402E0
ionrepsh_imon=1.77346E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33691E1
lens5b_imon=2.18067E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74785E1
cs_ef2b_imon=3.12443E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56396E0
os_ea2_imon=-8.14413E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06137E2
lens4b_imon=2.00635E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71292E1
cs_ef2a_imon=3.15929E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0728E0
os_ef2alow_imon=-2.44426E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.11615E-1
os_ef2bup_imon=-5.31077E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1134E1
os_restr2_imon=3.41594E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.28856E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01944E1
cs_anode2_imon=2.24015E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73153E1
iondef1_imon=1.10484E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68296E1
iondef4_imon=1.08382E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.06492E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=7.86592E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14095E0
cs_ionaccel_imon=-1.83204E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47348E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56398E1
einzel_imon=7.83786E-6
window_vset=0.0E0
window_vmon=2.42495E-1
window_imon=-7.08951E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82726E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.86432E1
mask2_imon=-6.96787E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.49272E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.51939E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.19476E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3891E0
defgridb_imon=6.04265E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33307E1
os_fil1_imon=9.42745E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07349E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65895E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.309E1
cs_fil1_imon=9.95358E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62723E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67568E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25927E-2
os_fil2_imon=-2.54659E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87953E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.63076E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36206E-1
cs_fil2_imon=-2.4182E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.52404E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22879E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33021E-3
inlet_lpb_pmon=3.01337E-1
chamber_ion_pmon=1.19775E-7
chamber_cvt_pmon=2.51271E-3
foreline_cvt_pmon=2.51271E-3
chamber_tmon=1.40007E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.35276E-1
res40_imon=-2.39155E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.79884E-1	-8.95929E-1	-9.04706E0	-9.04181E0	4.12464E-3	9.5582E-2	2.73261E1	-3.26837E1	-3.25984E1	2.6828E1	1.19862E-7	2.52191E-3	2.52191E-3	6.33161E-3	3.02332E-1
2.0E0	3.8E1	1.0E0	3.16E2	1.6E2	-2.09518E0	-8.80003E-1	-8.96001E-1	-9.04701E0	-9.04195E0	4.07696E-3	9.52959E-2	2.73063E1	-3.26419E1	-3.26327E1	2.68268E1	1.19861E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.01085E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.79645E-1	-8.96001E-1	-9.04708E0	-9.04205E0	4.24385E-3	9.53913E-2	2.73231E1	-3.26666E1	-3.26318E1	2.6814E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00302E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.80337E-1	-8.96049E-1	-9.04691E0	-9.0416E0	4.24385E-3	9.53197E-2	2.73063E1	-3.26651E1	-3.26014E1	2.68635E1	1.20055E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.79836E-1	-8.96096E-1	-9.04689E0	-9.04164E0	4.12464E-3	9.51052E-2	2.73399E1	-3.26626E1	-3.26207E1	2.68484E1	1.19965E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.80408E-1	-8.96311E-1	-9.04696E0	-9.04169E0	4.29153E-3	9.52482E-2	2.73694E1	-3.26511E1	-3.26193E1	2.68689E1	1.20055E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.9892E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.80098E-1	-8.96454E-1	-9.04677E0	-9.04176E0	4.29153E-3	9.56535E-2	2.73087E1	-3.26591E1	-3.26248E1	2.6831E1	1.19861E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.80265E-1	-8.96406E-1	-9.0471E0	-9.04145E0	4.17233E-3	9.5439E-2	2.73351E1	-3.26549E1	-3.26038E1	2.68094E1	1.19978E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.02277E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.80218E-1	-8.96215E-1	-9.04717E0	-9.04181E0	4.22001E-3	9.55105E-2	2.73381E1	-3.26735E1	-3.26254E1	2.68346E1	1.20383E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.80146E-1	-8.9612E-1	-9.04679E0	-9.04195E0	4.19617E-3	9.52959E-2	2.73198E1	-3.26496E1	-3.26313E1	2.68148E1	1.19902E-7	2.51954E-3	2.51954E-3	6.29128E-3	2.99686E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09619E0	-8.79693E-1	-8.96096E-1	-9.04684E0	-9.04217E0	4.22001E-3	9.52005E-2	2.72953E1	-3.26432E1	-3.2626E1	2.6843E1	1.19913E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9926E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.7986E-1	-8.96335E-1	-9.04684E0	-9.04183E0	4.45843E-3	9.52482E-2	2.73505E1	-3.26472E1	-3.26307E1	2.68389E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9926E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.80098E-1	-8.95977E-1	-9.04691E0	-9.04179E0	4.43459E-3	9.5129E-2	2.73255E1	-3.26789E1	-3.26062E1	2.68117E1	1.20174E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00563E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.80075E-1	-8.96263E-1	-9.04663E0	-9.04167E0	4.48227E-3	9.55582E-2	2.73225E1	-3.26657E1	-3.26374E1	2.68376E1	1.20055E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.00453E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.79884E-1	-8.96263E-1	-9.04694E0	-9.0421E0	4.22001E-3	9.55105E-2	2.73016E1	-3.26213E1	-3.25936E1	2.68298E1	1.19809E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.79788E-1	-8.96096E-1	-9.04675E0	-9.04207E0	4.31538E-3	9.55343E-2	2.73393E1	-3.26813E1	-3.26374E1	2.68412E1	1.20069E-7	2.52428E-3	2.52428E-3	6.31837E-3	2.9952E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.79788E-1	-8.96025E-1	-9.04694E0	-9.04198E0	4.24385E-3	9.53913E-2	2.73098E1	-3.26815E1	-3.26384E1	2.68424E1	1.19965E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.97704E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.80003E-1	-8.95929E-1	-9.04672E0	-9.042E0	4.55379E-3	9.50813E-2	2.73155E1	-3.26787E1	-3.26191E1	2.68321E1	1.19646E-7	2.5131E-3	2.5131E-3	6.35059E-3	2.9943E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.80098E-1	-8.96096E-1	-9.04648E0	-9.04191E0	4.57764E-3	9.51052E-2	2.73388E1	-3.27003E1	-3.26017E1	2.68425E1	1.19941E-7	2.51814E-3	2.51814E-3	6.32328E-3	3.00097E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09394E0	-8.79979E-1	-8.96168E-1	-9.04677E0	-9.04193E0	4.33922E-3	9.57251E-2	2.73153E1	-3.26416E1	-3.25978E1	2.68296E1	1.19775E-7	2.51271E-3	2.51271E-3	6.33021E-3	3.01337E-1