[Scan]
initial_time=2016-01-18T18:34:30
final_time=2016-01-18T18:34:50
ip_count=19
run=1024
dataset=3
scan=238
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08738E-4
ql1_vset=
ql1_vmon=-8.79502E-1
ql1_imon=1.3355E-8
ql2_vset=
ql2_vmon=-8.96263E-1
ql2_imon=1.84461E-9
ql3_vset=
ql3_vmon=-9.04672E0
ql3_imon=1.19925E-10
ql4_vset=
ql4_vmon=-9.04176E0
ql4_imon=-1.10984E-11
mult1=-8.62455E-9
mult2=-2.74285E-9
rf_tmon=-4.07885E-3
rf_agc=3.33209E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.29153E-3
ql5_imon=1.66506E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64321E0
bslens_imon=2.65652E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19801E1
lens5a_imon=1.98368E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12521E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54271E1
cs_ef1b_imon=2.85512E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.02146E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04811E1
cs_ea1_imon=2.53052E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32655E0
lens1_imon=2.76978E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.98378E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03737E1
cs_ea2_imon=1.51719E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84604E1
cs_ef1a_imon=2.93152E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.34263E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10985E1
os_restr1_imon=4.2704E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15217E1
os_ea1_imon=2.35957E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.07028E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25918E0
cs_ionrep_imon=1.19475E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91959E2
cs_nozzle_imon=1.93441E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=2.96576E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=3.36122E-8
tplens_vset=1.4E-1
tplens_vmon=1.6898E0
tplens_imon=-2.38717E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26183E1
iondef3_imon=1.51825E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26974E1
iondef2_imon=1.56001E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03022E2
lens6_imon=2.98215E-4
ql6_vset=1.0E-1
ql6_vmon=9.54628E-2
ql6_imon=4.09462E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26449E0
ionrepsh_imon=1.77627E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33787E1
lens5b_imon=2.17516E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74447E1
cs_ef2b_imon=3.13767E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52345E0
os_ea2_imon=-7.0238E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.00775E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71162E1
cs_ef2a_imon=3.16074E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06837E0
os_ef2alow_imon=-2.49697E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13642E-1
os_ef2bup_imon=-5.36212E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11538E1
os_restr2_imon=3.41914E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.28725E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01671E1
cs_anode2_imon=2.24136E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73582E1
iondef1_imon=1.10378E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68442E1
iondef4_imon=1.09134E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.04264E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.91633E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13375E0
cs_ionaccel_imon=-1.95998E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47284E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56483E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=2.37765E-1
window_imon=-7.70669E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82742E2
mask1_imon=2.39066E-4
mask2_vset=0.0E0
mask2_vmon=-1.8659E1
mask2_imon=-5.47223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.33916E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93683E3
defgrida_imon=6.66313E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.13033E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39374E0
defgridb_imon=6.05789E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3332E1
os_fil1_imon=9.43261E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07161E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65733E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30871E1
cs_fil1_imon=9.96456E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62642E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67291E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35722E-2
os_fil2_imon=-2.72003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92308E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.79768E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35737E-1
cs_fil2_imon=-2.21547E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01008E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22797E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.98156E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.80916E-1
res40_imon=-2.58346E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.79669E-1	-8.96239E-1	-9.0472E0	-9.04181E0	4.41074E-3	9.54628E-2	2.73193E1	-3.26573E1	-3.26236E1	2.68163E1	1.19913E-7	2.51007E-3	2.51007E-3	6.3074E-3	3.02396E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.79836E-1	-8.96144E-1	-9.04701E0	-9.04174E0	4.17233E-3	9.52482E-2	2.73161E1	-3.2637E1	-3.26395E1	2.68725E1	1.20158E-7	2.51417E-3	2.51417E-3	6.34518E-3	3.01995E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.7986E-1	-8.96406E-1	-9.04646E0	-9.04131E0	4.43459E-3	9.55343E-2	2.73482E1	-3.26496E1	-3.26095E1	2.68244E1	1.20644E-7	2.51116E-3	2.51116E-3	6.32936E-3	2.9978E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.80051E-1	-8.9612E-1	-9.0467E0	-9.04145E0	4.05312E-3	9.54151E-2	2.73177E1	-3.26849E1	-3.2611E1	2.68569E1	1.20854E-7	2.52209E-3	2.52209E-3	6.29098E-3	2.9926E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.80003E-1	-8.96215E-1	-9.04679E0	-9.04138E0	4.02927E-3	9.52482E-2	2.73273E1	-3.26476E1	-3.262E1	2.68322E1	1.20487E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.80051E-1	-8.96358E-1	-9.04667E0	-9.04171E0	4.22001E-3	9.55343E-2	2.73505E1	-3.26915E1	-3.25924E1	2.68545E1	1.22068E-7	2.51954E-3	2.51954E-3	6.34518E-3	3.02769E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.8017E-1	-8.95929E-1	-9.04675E0	-9.04205E0	4.31538E-3	9.54628E-2	2.73045E1	-3.2644E1	-3.26314E1	2.6828E1	1.21222E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.80146E-1	-8.96215E-1	-9.04672E0	-9.04219E0	4.17233E-3	9.53674E-2	2.73045E1	-3.26392E1	-3.26212E1	2.68358E1	1.20487E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.01347E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.79908E-1	-8.96144E-1	-9.04698E0	-9.04157E0	4.02927E-3	9.53436E-2	2.72971E1	-3.26921E1	-3.25495E1	2.68496E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.79884E-1	-8.9612E-1	-9.04651E0	-9.04169E0	4.19617E-3	9.55582E-2	2.72974E1	-3.26579E1	-3.26195E1	2.68364E1	1.20383E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.9978E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.8017E-1	-8.96072E-1	-9.04667E0	-9.04157E0	4.26769E-3	9.54628E-2	2.72703E1	-3.25717E1	-3.26419E1	2.68458E1	1.20487E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00563E-1
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.80098E-1	-8.96287E-1	-9.04679E0	-9.04181E0	4.36306E-3	9.54628E-2	2.73128E1	-3.26408E1	-3.2639E1	2.68172E1	1.20142E-7	2.51814E-3	2.51814E-3	6.29684E-3	3.01104E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.80075E-1	-8.95929E-1	-9.04694E0	-9.04186E0	4.22001E-3	9.52244E-2	2.73213E1	-3.26627E1	-3.26416E1	2.6837E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.80218E-1	-8.96025E-1	-9.04686E0	-9.04148E0	4.31538E-3	9.52482E-2	2.73112E1	-3.26578E1	-3.26383E1	2.68136E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.99E-1
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.79788E-1	-8.95643E-1	-9.04689E0	-9.04186E0	4.26769E-3	9.54628E-2	2.72937E1	-3.26556E1	-3.26169E1	2.68615E1	1.19705E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.79812E-1	-8.96192E-1	-9.04701E0	-9.04205E0	4.36306E-3	9.54628E-2	2.73101E1	-3.26485E1	-3.26329E1	2.6789E1	1.1979E-7	2.51919E-3	2.51919E-3	6.3074E-3	3.00348E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.7986E-1	-8.96263E-1	-9.04682E0	-9.04169E0	4.62532E-3	9.55105E-2	2.73147E1	-3.26627E1	-3.26242E1	2.68094E1	1.19667E-7	2.51952E-3	2.51952E-3	6.30171E-3	3.02972E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.79765E-1	-8.96096E-1	-9.04698E0	-9.04202E0	4.45843E-3	9.55105E-2	2.73265E1	-3.2655E1	-3.26023E1	2.68667E1	1.19965E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.01871E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.79717E-1	-8.96215E-1	-9.04677E0	-9.04193E0	4.26769E-3	9.54151E-2	2.7361E1	-3.26741E1	-3.26044E1	2.68204E1	1.19991E-7	2.51919E-3	2.51919E-3	6.31269E-3	3.01609E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.79502E-1	-8.96263E-1	-9.04672E0	-9.04176E0	4.29153E-3	9.54628E-2	2.73582E1	-3.26974E1	-3.26183E1	2.68442E1	1.20004E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.98156E-1