[Scan]
initial_time=2016-01-18T18:34:57
final_time=2016-01-18T18:35:16
ip_count=19
run=1024
dataset=3
scan=239
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08822E-4
ql1_vset=
ql1_vmon=-8.79741E-1
ql1_imon=1.33369E-8
ql2_vset=
ql2_vmon=-8.96144E-1
ql2_imon=1.92569E-9
ql3_vset=
ql3_vmon=-9.04696E0
ql3_imon=1.04845E-10
ql4_vset=
ql4_vmon=-9.04188E0
ql4_imon=-1.3423E-11
mult1=-1.00294E-8
mult2=-2.72859E-9
rf_tmon=-5.18535E-3
rf_agc=3.26366E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.17233E-3
ql5_imon=1.68589E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65592E0
bslens_imon=2.59543E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19983E1
lens5a_imon=1.99749E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12548E2
lens4a_imon=2.04974E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53826E1
cs_ef1b_imon=2.83241E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.02164E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=2.51697E-5
lens1_vset=-5.0E0
lens1_vmon=-5.30887E0
lens1_imon=2.81894E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64783E1
os_ef1alow_imon=2.9809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03318E1
cs_ea2_imon=1.46252E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84634E1
cs_ef1a_imon=2.93585E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.34973E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11153E1
os_restr1_imon=4.24805E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14831E1
os_ea1_imon=2.35546E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63479E1
os_ef1bup_imon=3.07172E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22025E0
cs_ionrep_imon=1.20729E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91951E2
cs_nozzle_imon=1.93467E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.025E1
cs_anode1_imon=3.00504E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20403E0
olens4_imon=3.36342E-8
tplens_vset=1.4E-1
tplens_vmon=1.65105E0
tplens_imon=-2.63296E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2647E1
iondef3_imon=1.50902E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26741E1
iondef2_imon=1.5357E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03015E2
lens6_imon=2.9827E-4
ql6_vset=1.0E-1
ql6_vmon=9.51767E-2
ql6_imon=4.06675E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26652E0
ionrepsh_imon=1.78552E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34078E1
lens5b_imon=2.16801E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.12109E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50324E0
os_ea2_imon=-4.0389E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06128E2
lens4b_imon=2.00536E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71126E1
cs_ef2a_imon=3.15965E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05996E0
os_ef2alow_imon=-2.38525E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.91417E-1
os_ef2bup_imon=-5.24319E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11268E1
os_restr2_imon=3.42202E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.27477E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01755E1
cs_anode2_imon=2.24172E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73111E1
iondef1_imon=1.10743E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68196E1
iondef4_imon=1.07728E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.05482E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.88632E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13735E0
cs_ionaccel_imon=-1.68247E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02112E2
cs_ionfocb_imon=1.47543E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56507E1
einzel_imon=7.6518E-6
window_vset=0.0E0
window_vmon=2.65996E-1
window_imon=-7.34629E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82699E2
mask1_imon=2.39124E-4
mask2_vset=0.0E0
mask2_vmon=-1.86398E1
mask2_imon=-7.05797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92684E3
multa_neg_imon=7.72167E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.27609E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50104E3
multb_neg_imon=7.20977E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4948E0
defgridb_imon=6.05979E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33312E1
os_fil1_imon=9.43501E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07275E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6606E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30908E1
cs_fil1_imon=9.95975E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62762E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67331E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1382E-2
os_fil2_imon=-2.54584E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.64891E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36514E-1
cs_fil2_imon=-2.80412E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01608E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2272E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.98665E-1
chamber_ion_pmon=1.20466E-7
chamber_cvt_pmon=2.50989E-3
foreline_cvt_pmon=2.50989E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.00137E-1
res40_imon=-2.44651E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09688E0	-8.79812E-1	-8.95953E-1	-9.04734E0	-9.04181E0	4.3869E-3	9.52244E-2	2.7337E1	-3.26714E1	-3.26585E1	2.6843E1	1.19861E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00824E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09627E0	-8.79765E-1	-8.95953E-1	-9.04713E0	-9.04164E0	4.24385E-3	9.51767E-2	2.73508E1	-3.26254E1	-3.26104E1	2.68298E1	1.19953E-7	2.52276E-3	2.52276E-3	6.30202E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09673E0	-8.79884E-1	-8.95691E-1	-9.04732E0	-9.04202E0	4.48227E-3	9.53436E-2	2.73482E1	-3.26508E1	-3.26231E1	2.6843E1	1.19965E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.02922E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09673E0	-8.79812E-1	-8.96001E-1	-9.04696E0	-9.04195E0	4.52995E-3	9.54151E-2	2.73267E1	-3.26717E1	-3.25918E1	2.6849E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.02769E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09657E0	-8.79574E-1	-8.96382E-1	-9.04698E0	-9.04198E0	4.57764E-3	9.5439E-2	2.73267E1	-3.26512E1	-3.26248E1	2.68376E1	1.19965E-7	2.51116E-3	2.51116E-3	6.32936E-3	2.9978E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09696E0	-8.79478E-1	-8.96287E-1	-9.04667E0	-9.04193E0	3.98159E-3	9.53197E-2	2.73045E1	-3.26837E1	-3.26398E1	2.68442E1	1.20122E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.79502E-1	-8.96335E-1	-9.0466E0	-9.04202E0	4.41074E-3	9.52005E-2	2.73435E1	-3.26536E1	-3.26098E1	2.68659E1	1.19809E-7	2.52538E-3	2.52538E-3	6.31837E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.79598E-1	-8.96525E-1	-9.04684E0	-9.04186E0	4.29153E-3	9.50098E-2	2.7349E1	-3.26194E1	-3.26134E1	2.68575E1	1.19757E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.01347E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.79884E-1	-8.96454E-1	-9.04696E0	-9.04179E0	4.1008E-3	9.5129E-2	2.73151E1	-3.26537E1	-3.26307E1	2.68202E1	1.20122E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.79526E-1	-8.96001E-1	-9.04694E0	-9.04191E0	3.98159E-3	9.49383E-2	2.73386E1	-3.26422E1	-3.26498E1	2.68618E1	1.20517E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.00453E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.79741E-1	-8.96001E-1	-9.04686E0	-9.04181E0	4.12464E-3	9.54628E-2	2.73222E1	-3.26944E1	-3.26166E1	2.68346E1	1.21286E-7	2.52202E-3	2.52202E-3	6.30285E-3	3.0259E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.79622E-1	-8.96382E-1	-9.04686E0	-9.04205E0	3.93391E-3	9.56059E-2	2.73688E1	-3.26478E1	-3.2636E1	2.68292E1	1.2054E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.02396E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.79765E-1	-8.96478E-1	-9.04696E0	-9.04179E0	3.6478E-3	9.52244E-2	2.73369E1	-3.26762E1	-3.26248E1	2.6852E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00453E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.79884E-1	-8.96502E-1	-9.04706E0	-9.04181E0	3.93391E-3	9.51052E-2	2.73159E1	-3.26717E1	-3.25978E1	2.6822E1	1.20031E-7	2.52027E-3	2.52027E-3	6.30182E-3	2.99613E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.79908E-1	-8.96454E-1	-9.04696E0	-9.04186E0	3.98159E-3	9.51052E-2	2.72793E1	-3.2638E1	-3.26476E1	2.68376E1	1.20017E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.02133E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.79669E-1	-8.96382E-1	-9.04717E0	-9.04176E0	4.19617E-3	9.55343E-2	2.73195E1	-3.26879E1	-3.26026E1	2.68148E1	1.19809E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.02659E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.79669E-1	-8.96263E-1	-9.04708E0	-9.04152E0	4.17233E-3	9.52721E-2	2.73316E1	-3.26484E1	-3.25953E1	2.6828E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01871E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.79574E-1	-8.96001E-1	-9.04682E0	-9.04181E0	4.31538E-3	9.54151E-2	2.7334E1	-3.26531E1	-3.2695E1	2.68418E1	1.20004E-7	2.52707E-3	2.52707E-3	6.29128E-3	2.9892E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.79693E-1	-8.96001E-1	-9.04682E0	-9.04207E0	3.95775E-3	9.52959E-2	2.73375E1	-3.26301E1	-3.25989E1	2.6801E1	1.19749E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.98156E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.79741E-1	-8.96144E-1	-9.04696E0	-9.04188E0	4.17233E-3	9.51767E-2	2.73111E1	-3.26741E1	-3.2647E1	2.68196E1	1.20466E-7	2.50989E-3	2.50989E-3	6.31278E-3	2.98665E-1