[Scan]
initial_time=2016-01-18T18:36:00
final_time=2016-01-18T18:36:20
ip_count=19
run=1024
dataset=4
scan=241
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.76668E-6
ql1_vset=
ql1_vmon=-8.79986E1
ql1_imon=-3.45267E-9
ql2_vset=
ql2_vmon=0.0E0
ql2_imon=1.57174E-9
ql3_vset=
ql3_vmon=-8.80023E1
ql3_imon=-9.6498E-9
ql4_vset=
ql4_vmon=5.00679E-4
ql4_imon=1.65031E-8
mult1=-1.8654E-8
mult2=-2.72683E-9
rf_tmon=-3.54227E-3
rf_agc=3.38962E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.1008E-3
ql5_imon=7.68638E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66587E0
bslens_imon=2.4076E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19689E1
lens5a_imon=1.98337E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.04959E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53957E1
cs_ef1b_imon=2.82474E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02269E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04496E1
cs_ea1_imon=2.53549E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99068E0
lens1_imon=1.62893E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64863E1
os_ef1alow_imon=2.97522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03226E1
cs_ea2_imon=1.47522E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84383E1
cs_ef1a_imon=2.9436E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.34238E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11737E1
os_restr1_imon=4.2569E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14897E1
os_ea1_imon=2.33377E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63728E1
os_ef1bup_imon=3.0833E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23699E0
cs_ionrep_imon=1.19262E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91952E2
cs_nozzle_imon=1.93564E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01861E1
cs_anode1_imon=2.99121E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2038E0
olens4_imon=4.03865E-8
tplens_vset=1.4E-1
tplens_vmon=1.65486E0
tplens_imon=-3.8487E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26534E1
iondef3_imon=1.50509E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26616E1
iondef2_imon=1.54805E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0304E2
lens6_imon=2.98168E-4
ql6_vset=1.0E-1
ql6_vmon=9.56297E-2
ql6_imon=1.029E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30916E0
ionrepsh_imon=1.78065E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33545E1
lens5b_imon=2.18106E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74623E1
cs_ef2b_imon=3.13404E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51333E0
os_ea2_imon=-7.54067E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06134E2
lens4b_imon=2.00421E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.712E1
cs_ef2a_imon=3.15211E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06209E0
os_ef2alow_imon=-2.50508E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01864E-1
os_ef2bup_imon=-5.17755E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10874E1
os_restr2_imon=3.44716E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23081E2
cs_ionfoca_imon=6.30801E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01954E1
cs_anode2_imon=2.24994E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73426E1
iondef1_imon=1.10737E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68316E1
iondef4_imon=1.07843E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.27372E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.89536E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13535E0
cs_ionaccel_imon=-1.78918E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02115E2
cs_ionfocb_imon=1.4741E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5633E1
einzel_imon=7.7643E-6
window_vset=0.0E0
window_vmon=2.68656E-1
window_imon=-8.78659E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82754E2
mask1_imon=2.39168E-4
mask2_vset=0.0E0
mask2_vmon=-1.86692E1
mask2_imon=-5.83262E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.7576E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.5661E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.31121E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3887E0
defgridb_imon=6.31773E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33344E1
os_fil1_imon=9.44279E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07567E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6596E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30877E1
cs_fil1_imon=9.96344E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62598E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67484E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.22448E-2
os_fil2_imon=-2.69815E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91815E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.55797E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35145E-1
cs_fil2_imon=-2.17686E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.50869E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22806E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33297E-3
inlet_lpb_pmon=3.01121E-1
chamber_ion_pmon=1.20016E-7
chamber_cvt_pmon=2.51549E-3
foreline_cvt_pmon=2.51549E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.20399E-1
res40_imon=-2.5016E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.207E3	5.0E0	1.47E2	4.1E1	-7.17007E-2	-8.79984E1	-1.43051E-4	-8.80022E1	5.72205E-4	4.48227E-3	9.53674E-2	2.73434E1	-3.26673E1	-3.26514E1	2.68476E1	1.20276E-7	2.5199E-3	2.5199E-3	6.323E-3	3.0E-1
2.0E0	1.08105E5	1.1E2	3.16E2	1.6E2	-7.27828E-2	-8.79983E1	-4.29153E-4	-8.80021E1	5.00679E-4	4.26769E-3	9.53674E-2	2.73228E1	-3.2637E1	-3.2664E1	2.68375E1	1.20092E-7	2.52131E-3	2.52131E-3	6.32328E-3	3.00097E-1
3.0E0	1.7E1	0.0E0	4.85E2	2.79E2	-7.26282E-2	-8.79984E1	-4.76837E-5	-8.80023E1	4.05312E-4	4.12464E-3	9.53913E-2	2.73149E1	-3.2648E1	-3.26341E1	2.68516E1	1.19991E-7	2.52293E-3	2.52293E-3	6.3245E-3	3.01609E-1
4.0E0	2.3946E4	1.1E1	6.55E2	3.98E2	-7.13915E-2	-8.79982E1	-1.43051E-4	-8.80022E1	1.90735E-4	4.60148E-3	9.53913E-2	2.73442E1	-3.26717E1	-3.26104E1	2.68256E1	1.20042E-7	2.51709E-3	2.51709E-3	6.32858E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.14689E-2	-8.79985E1	-1.66893E-4	-8.80022E1	6.19888E-4	4.57764E-3	9.52721E-2	2.73405E1	-3.26675E1	-3.26248E1	2.68358E1	1.19953E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.02511E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17007E-2	-8.79985E1	2.14577E-4	-8.8002E1	4.76837E-4	4.52995E-3	9.5439E-2	2.73574E1	-3.26927E1	-3.26014E1	2.68472E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02133E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.201E-2	-8.79986E1	2.6226E-4	-8.80021E1	5.00679E-4	4.48227E-3	9.5582E-2	2.73411E1	-3.26354E1	-3.26213E1	2.68142E1	1.19965E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.79982E1	2.14577E-4	-8.80022E1	7.15256E-4	4.52995E-3	9.5439E-2	2.73299E1	-3.2652E1	-3.26437E1	2.68514E1	1.20055E-7	2.51632E-3	2.51632E-3	6.29128E-3	2.99686E-1
1.2E1	1.01E2	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.79986E1	-1.19209E-4	-8.80018E1	3.09944E-4	4.72069E-3	9.51767E-2	2.73351E1	-3.26866E1	-3.26395E1	2.684E1	1.19861E-7	2.51225E-3	2.51225E-3	6.34037E-3	3.00824E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.79988E1	-1.90735E-4	-8.80023E1	6.67572E-4	4.64916E-3	9.52244E-2	2.73446E1	-3.2672E1	-3.26077E1	2.68346E1	1.19861E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00302E-1
1.4E1	3.451E3	1.0E0	5.66E2	3.82E2	-7.23964E-2	-8.79988E1	1.66893E-4	-8.80021E1	2.6226E-4	4.88758E-3	9.55343E-2	2.73361E1	-3.26876E1	-3.26143E1	2.68425E1	1.19913E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.9926E-1
1.5E1	9.7E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.79986E1	2.14577E-4	-8.8002E1	2.38419E-4	4.36306E-3	9.52721E-2	2.73153E1	-3.26603E1	-3.26188E1	2.68322E1	1.19891E-7	2.51877E-3	2.51877E-3	6.30318E-3	2.98992E-1
1.6E1	4.88E2	1.0E0	6.47E2	4.41E2	-7.40967E-2	-8.79985E1	-7.15256E-5	-8.80021E1	3.09944E-4	4.33922E-3	9.53436E-2	2.73446E1	-3.26425E1	-3.25977E1	2.68215E1	1.19861E-7	2.51662E-3	2.51662E-3	6.29098E-3	2.99E-1
1.7E1	1.04E3	2.0E0	6.87E2	4.7E2	-7.37874E-2	-8.79987E1	1.43051E-4	-8.80023E1	5.24521E-4	4.36306E-3	9.55105E-2	2.72907E1	-3.26597E1	-3.2626E1	2.68364E1	1.19953E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.00197E-1
1.8E1	4.55E3	2.0E0	7.27E2	5.0E2	-7.41738E-2	-8.79985E1	-1.19209E-4	-8.80024E1	7.62939E-4	4.14848E-3	9.54628E-2	2.72518E1	-3.2582E1	-3.27079E1	2.68473E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.02133E-1
1.9E1	2.278E3	1.0E0	7.68E2	5.29E2	-7.31692E-2	-8.79985E1	1.66893E-4	-8.80022E1	8.58307E-4	4.22001E-3	9.53913E-2	2.73525E1	-3.26565E1	-3.2567E1	2.68328E1	1.19908E-7	2.51323E-3	2.51323E-3	6.32247E-3	3.00054E-1
2.0E1	2.6224E4	1.7E1	8.08E2	5.58E2	-7.34782E-2	-8.79986E1	1.19209E-4	-8.80022E1	7.39098E-4	4.12464E-3	9.52244E-2	2.73544E1	-3.26699E1	-3.26296E1	2.68563E1	1.19851E-7	2.51793E-3	2.51793E-3	6.3074E-3	3.02175E-1
2.1E1	5.8E1	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.79985E1	4.76837E-5	-8.80023E1	4.76837E-4	4.31538E-3	9.54866E-2	2.7321E1	-3.26874E1	-3.26242E1	2.68372E1	1.20084E-7	2.51804E-3	2.51804E-3	6.34099E-3	3.01209E-1
2.2E1	1.896E3	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.79985E1	2.38419E-5	-8.8002E1	3.09944E-4	4.07696E-3	9.56297E-2	2.73521E1	-3.27088E1	-3.26154E1	2.68116E1	1.19941E-7	2.51814E-3	2.51814E-3	6.3074E-3	3.02621E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.79986E1	0.0E0	-8.80023E1	5.00679E-4	4.1008E-3	9.56297E-2	2.73426E1	-3.26616E1	-3.26534E1	2.68316E1	1.20016E-7	2.51549E-3	2.51549E-3	6.33297E-3	3.01121E-1