[Scan]
initial_time=2016-01-18T18:36:27
final_time=2016-01-18T18:36:47
ip_count=19
run=1024
dataset=4
scan=242
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.201E-2
qbias_imon=-3.86534E-6
ql1_vset=
ql1_vmon=-8.79992E1
ql1_imon=-1.81249E-9
ql2_vset=
ql2_vmon=-2.86102E-4
ql2_imon=1.43347E-9
ql3_vset=
ql3_vmon=-8.80018E1
ql3_imon=-5.96173E-9
ql4_vset=
ql4_vmon=5.24521E-4
ql4_imon=1.61624E-8
mult1=-1.35091E-8
mult2=-2.79047E-9
rf_tmon=-3.62921E-3
rf_agc=3.45472E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.22001E-3
ql5_imon=6.49393E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67275E0
bslens_imon=2.38634E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19833E1
lens5a_imon=2.00398E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.0501E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54031E1
cs_ef1b_imon=2.83566E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02294E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04537E1
cs_ea1_imon=2.52237E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97707E0
lens1_imon=1.49953E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64807E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03708E1
cs_ea2_imon=1.50325E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84556E1
cs_ef1a_imon=2.94089E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.34763E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11069E1
os_restr1_imon=4.26103E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15378E1
os_ea1_imon=2.36303E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63497E1
os_ef1bup_imon=3.06523E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20824E0
cs_ionrep_imon=1.18818E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91959E2
cs_nozzle_imon=1.93615E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=2.98955E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20382E0
olens4_imon=4.02843E-8
tplens_vset=1.4E-1
tplens_vmon=1.65525E0
tplens_imon=-2.09222E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25966E1
iondef3_imon=1.5101E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26759E1
iondef2_imon=1.5649E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03047E2
lens6_imon=2.98075E-4
ql6_vset=1.0E-1
ql6_vmon=9.54628E-2
ql6_imon=9.80985E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26532E0
ionrepsh_imon=1.78083E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34006E1
lens5b_imon=2.16945E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49063E0
os_ea2_imon=-6.02162E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06067E2
lens4b_imon=2.00608E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71156E1
cs_ef2a_imon=3.15425E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04555E0
os_ef2alow_imon=-2.55463E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94421E-1
os_ef2bup_imon=-5.15309E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.114E1
os_restr2_imon=3.43139E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.27333E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.24965E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73027E1
iondef1_imon=1.09878E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68388E1
iondef4_imon=1.09458E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.19071E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=7.8949E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11813E0
cs_ionaccel_imon=-1.84105E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02112E2
cs_ionfocb_imon=1.47392E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56693E1
einzel_imon=7.61216E-6
window_vset=0.0E0
window_vmon=2.85818E-1
window_imon=-9.65283E-7
mask1_vset=-4.8E2
mask1_vmon=-4.827E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.8668E1
mask2_imon=-7.38233E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=7.35757E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.64019E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.26024E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32938E0
defgridb_imon=6.1355E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3333E1
os_fil1_imon=9.41964E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06903E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65921E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3088E1
cs_fil1_imon=9.95404E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6296E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67425E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24138E-2
os_fil2_imon=-2.67798E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.68371E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.55785E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.68031E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22713E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.20226E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.34064E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.149E3	0.0E0	1.47E2	4.1E1	-7.31692E-2	-8.79987E1	2.38419E-5	-8.80018E1	5.24521E-4	4.48227E-3	9.53436E-2	2.72968E1	-3.26797E1	-3.26443E1	2.6819E1	1.20055E-7	2.52492E-3	2.52492E-3	6.31278E-3	3.0148E-1
2.0E0	1.09389E5	9.6E1	3.16E2	1.6E2	-7.34782E-2	-8.79988E1	9.53674E-5	-8.80018E1	6.4373E-4	4.33922E-3	9.53674E-2	2.73382E1	-3.26805E1	-3.26278E1	2.68328E1	1.19913E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.98222E-1
3.0E0	2.1E1	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.79988E1	1.90735E-4	-8.80018E1	6.67572E-4	4.31538E-3	9.55582E-2	2.73535E1	-3.26954E1	-3.26192E1	2.68453E1	1.20017E-7	2.51771E-3	2.51771E-3	6.34037E-3	2.97963E-1
4.0E0	2.3935E4	8.0E0	6.55E2	3.98E2	-7.31692E-2	-8.79985E1	1.66893E-4	-8.80019E1	6.67572E-4	3.6478E-3	9.57489E-2	2.73541E1	-3.26315E1	-3.2607E1	2.68466E1	1.19991E-7	2.52448E-3	2.52448E-3	6.31798E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.79983E1	1.66893E-4	-8.80018E1	7.62939E-4	3.93391E-3	9.5582E-2	2.73399E1	-3.26687E1	-3.25924E1	2.68262E1	1.20031E-7	2.5147E-3	2.5147E-3	6.32978E-3	3.0201E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.79989E1	2.6226E-4	-8.80019E1	6.67572E-4	3.83854E-3	9.54866E-2	2.73287E1	-3.26614E1	-3.26343E1	2.68082E1	1.20004E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.02769E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.79987E1	5.72205E-4	-8.80019E1	6.67572E-4	4.02927E-3	9.56535E-2	2.73014E1	-3.26842E1	-3.25985E1	2.68478E1	1.19913E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.79985E1	3.33786E-4	-8.8002E1	6.67572E-4	3.88622E-3	9.54628E-2	2.73139E1	-3.26543E1	-3.25965E1	2.68298E1	1.20174E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00563E-1
1.2E1	8.8E1	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.79989E1	7.15256E-5	-8.80019E1	7.62939E-4	4.05312E-3	9.55105E-2	2.7346E1	-3.27095E1	-3.26416E1	2.68383E1	1.19965E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.01347E-1
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.7999E1	2.38419E-4	-8.80018E1	6.4373E-4	4.26769E-3	9.55105E-2	2.73562E1	-3.26561E1	-3.26152E1	2.6825E1	1.20311E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.00453E-1
1.4E1	3.543E3	2.0E0	5.66E2	3.82E2	-7.3401E-2	-8.7999E1	5.96046E-4	-8.80019E1	8.34465E-4	4.14848E-3	9.54151E-2	2.7346E1	-3.26903E1	-3.25912E1	2.68268E1	1.19913E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00302E-1
1.5E1	9.0E1	0.0E0	6.06E2	4.11E2	-7.37874E-2	-8.79991E1	5.24521E-4	-8.80022E1	7.62939E-4	4.05312E-3	9.55105E-2	2.73435E1	-3.26885E1	-3.26206E1	2.68316E1	1.20226E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00302E-1
1.6E1	4.85E2	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.7999E1	3.8147E-4	-8.8002E1	6.67572E-4	4.12464E-3	9.56774E-2	2.73216E1	-3.26354E1	-3.26154E1	2.68611E1	1.20017E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00824E-1
1.7E1	1.113E3	3.0E0	6.87E2	4.7E2	-7.35556E-2	-8.79989E1	4.29153E-4	-8.80018E1	9.77516E-4	4.26769E-3	9.54866E-2	2.73538E1	-3.26579E1	-3.26056E1	2.68346E1	1.20226E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.01347E-1
1.8E1	4.687E3	5.0E0	7.27E2	5.0E2	-7.38649E-2	-8.7999E1	5.48363E-4	-8.80019E1	1.09673E-3	4.14848E-3	9.58443E-2	2.73228E1	-3.2639E1	-3.26183E1	2.68394E1	1.19749E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.00966E-1
1.9E1	2.231E3	1.0E0	7.68E2	5.29E2	-7.35556E-2	-8.79988E1	1.66893E-4	-8.80017E1	6.4373E-4	4.07696E-3	9.56059E-2	2.73478E1	-3.26771E1	-3.26278E1	2.68088E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.03185E-1
2.0E1	2.6152E4	1.5E1	8.08E2	5.58E2	-7.41738E-2	-8.79989E1	3.33786E-4	-8.80018E1	7.62939E-4	4.1008E-3	9.57251E-2	2.73175E1	-3.26703E1	-3.26042E1	2.68286E1	1.2026E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.99175E-1
2.1E1	5.2E1	0.0E0	8.49E2	5.88E2	-7.37874E-2	-8.79989E1	7.15256E-5	-8.80017E1	8.10623E-4	4.22001E-3	9.57251E-2	2.73015E1	-3.26464E1	-3.2635E1	2.68262E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9978E-1
2.2E1	1.896E3	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.79987E1	-1.43051E-4	-8.80017E1	8.10623E-4	4.22001E-3	9.58204E-2	2.73333E1	-3.2653E1	-3.26404E1	2.6819E1	1.19953E-7	2.51954E-3	2.51954E-3	6.29665E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.201E-2	-8.79992E1	-2.86102E-4	-8.80018E1	5.24521E-4	4.22001E-3	9.54628E-2	2.73027E1	-3.26759E1	-3.25966E1	2.68388E1	1.20226E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.00302E-1