[Scan]
initial_time=2016-01-18T18:36:54
final_time=2016-01-18T18:37:13
ip_count=19
run=1024
dataset=4
scan=243
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.81905E-6
ql1_vset=
ql1_vmon=-8.79995E1
ql1_imon=-1.49286E-9
ql2_vset=
ql2_vmon=0.0E0
ql2_imon=1.41914E-9
ql3_vset=
ql3_vmon=-8.80018E1
ql3_imon=-5.07212E-9
ql4_vset=
ql4_vmon=5.00679E-4
ql4_imon=1.6075E-8
mult1=-1.72176E-8
mult2=-2.71661E-9
rf_tmon=-5.55185E-3
rf_agc=3.33095E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.29153E-3
ql5_imon=5.86653E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66535E0
bslens_imon=2.27154E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19775E1
lens5a_imon=2.00686E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.05119E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54104E1
cs_ef1b_imon=2.83469E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.02196E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04545E1
cs_ea1_imon=2.53658E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98539E0
lens1_imon=1.51908E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64459E1
os_ef1alow_imon=2.97953E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03828E1
cs_ea2_imon=1.48238E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84538E1
cs_ef1a_imon=2.94435E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.35749E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11554E1
os_restr1_imon=4.27895E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1515E1
os_ea1_imon=2.35839E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63648E1
os_ef1bup_imon=3.07085E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23962E0
cs_ionrep_imon=1.20835E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91921E2
cs_nozzle_imon=1.936E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=2.98926E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20396E0
olens4_imon=4.01786E-8
tplens_vset=1.4E-1
tplens_vmon=1.65079E0
tplens_imon=-1.65547E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25948E1
iondef3_imon=1.48501E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26633E1
iondef2_imon=1.55763E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0304E2
lens6_imon=2.98095E-4
ql6_vset=1.0E-1
ql6_vmon=9.57012E-2
ql6_imon=9.12178E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26957E0
ionrepsh_imon=1.783E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33808E1
lens5b_imon=2.18206E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74582E1
cs_ef2b_imon=3.12137E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49294E0
os_ea2_imon=-6.44728E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06115E2
lens4b_imon=2.00567E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71488E1
cs_ef2a_imon=3.17564E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05331E0
os_ef2alow_imon=-2.608E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.1884E-1
os_ef2bup_imon=-5.26523E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11211E1
os_restr2_imon=3.43687E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.27719E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0184E1
cs_anode2_imon=2.23812E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7358E1
iondef1_imon=1.09679E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68268E1
iondef4_imon=1.10749E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.17098E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81355E-1
olens1_imon=7.87728E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13638E0
cs_ionaccel_imon=-1.82206E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02103E2
cs_ionfocb_imon=1.47451E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56592E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=2.43795E-1
window_imon=-8.86411E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82678E2
mask1_imon=2.39047E-4
mask2_vset=0.0E0
mask2_vmon=-1.86525E1
mask2_imon=-5.83262E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92609E3
multa_neg_imon=7.37782E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.3371E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5011E3
multb_neg_imon=7.05212E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30879E0
defgridb_imon=5.97022E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33359E1
os_fil1_imon=9.42096E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07398E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65773E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30891E1
cs_fil1_imon=9.94741E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62284E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67426E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.17044E-2
os_fil2_imon=-2.60013E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99077E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.73443E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35299E-1
cs_fil2_imon=-2.21339E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.37948E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22817E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.70186E-1
res40_imon=-2.54812E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.297E3	1.0E0	1.47E2	4.1E1	-7.15461E-2	-8.79996E1	-4.76837E-5	-8.80013E1	7.15256E-4	3.93391E-3	9.53674E-2	2.73352E1	-3.26602E1	-3.26179E1	2.6854E1	1.20191E-7	2.51248E-3	2.51248E-3	6.31299E-3	3.02545E-1
2.0E0	1.11342E5	1.15E2	3.16E2	1.6E2	-7.20871E-2	-8.79993E1	0.0E0	-8.80016E1	6.19888E-4	4.26769E-3	9.55582E-2	2.73276E1	-3.26628E1	-3.26179E1	2.68313E1	1.20344E-7	2.51709E-3	2.51709E-3	6.33388E-3	3.03637E-1
3.0E0	1.9E1	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.79993E1	2.38419E-5	-8.80018E1	9.05991E-4	4.24385E-3	9.52959E-2	2.73584E1	-3.26724E1	-3.2655E1	2.68209E1	1.201E-7	2.51498E-3	2.51498E-3	6.3245E-3	3.01065E-1
4.0E0	2.4216E4	1.4E1	6.55E2	3.98E2	-7.18554E-2	-8.79994E1	4.76837E-5	-8.80018E1	7.86781E-4	4.02927E-3	9.54866E-2	2.73316E1	-3.26938E1	-3.26183E1	2.68508E1	1.20243E-7	2.52236E-3	2.52236E-3	6.31798E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17007E-2	-8.79994E1	1.19209E-4	-8.80017E1	6.67572E-4	3.76701E-3	9.55582E-2	2.73345E1	-3.26392E1	-3.26482E1	2.68319E1	1.20122E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.9978E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.79991E1	1.66893E-4	-8.80018E1	8.82149E-4	3.86238E-3	9.53674E-2	2.73239E1	-3.26532E1	-3.26119E1	2.68325E1	1.20158E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.79994E1	4.52995E-4	-8.80018E1	7.62939E-4	3.74317E-3	9.55343E-2	2.73354E1	-3.26923E1	-3.25978E1	2.68371E1	1.19841E-7	2.51667E-3	2.51667E-3	6.31225E-3	3.00567E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.79992E1	2.6226E-4	-8.80017E1	4.05312E-4	3.83854E-3	9.57251E-2	2.73243E1	-3.26693E1	-3.26338E1	2.68603E1	1.20066E-7	2.52157E-3	2.52157E-3	6.32632E-3	3.01158E-1
1.2E1	9.1E1	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.79993E1	-2.14577E-4	-8.80016E1	8.10623E-4	4.07696E-3	9.57251E-2	2.72992E1	-3.2636E1	-3.26113E1	2.68563E1	1.20017E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9978E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.79992E1	0.0E0	-8.80017E1	6.4373E-4	4.41074E-3	9.57251E-2	2.73267E1	-3.26669E1	-3.26092E1	2.68196E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00302E-1
1.4E1	3.483E3	1.0E0	5.66E2	3.82E2	-7.17779E-2	-8.79995E1	-1.19209E-4	-8.80018E1	1.09673E-3	4.36306E-3	9.55343E-2	2.73153E1	-3.26536E1	-3.26543E1	2.68052E1	1.19965E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.01085E-1
1.5E1	1.0E2	0.0E0	6.06E2	4.11E2	-7.18554E-2	-8.79995E1	-1.66893E-4	-8.80016E1	6.91414E-4	4.19617E-3	9.56059E-2	2.73308E1	-3.26573E1	-3.26741E1	2.68406E1	1.20226E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00302E-1
1.6E1	4.99E2	1.0E0	6.47E2	4.41E2	-7.17007E-2	-8.79993E1	-4.76837E-5	-8.80017E1	6.4373E-4	4.07696E-3	9.55582E-2	2.7333E1	-3.26559E1	-3.26357E1	2.6838E1	1.19967E-7	2.52058E-3	2.52058E-3	6.32273E-3	3.00392E-1
1.7E1	1.155E3	3.0E0	6.87E2	4.7E2	-7.19325E-2	-8.79993E1	-9.53674E-5	-8.80016E1	5.00679E-4	4.24385E-3	9.55105E-2	2.73111E1	-3.26687E1	-3.2647E1	2.68154E1	1.20116E-7	2.51527E-3	2.51527E-3	6.32483E-3	2.97887E-1
1.8E1	4.624E3	4.0E0	7.27E2	5.0E2	-7.15461E-2	-8.7999E1	-4.76837E-4	-8.80018E1	4.29153E-4	4.26769E-3	9.58204E-2	2.73832E1	-3.27726E1	-3.25629E1	2.68358E1	1.19861E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00041E-1
1.9E1	2.29E3	3.0E0	7.68E2	5.29E2	-7.20871E-2	-8.79993E1	-4.76837E-5	-8.80017E1	5.24521E-4	4.26769E-3	9.56297E-2	2.73122E1	-3.26537E1	-3.26585E1	2.6798E1	1.19965E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.99E-1
2.0E1	2.6426E4	1.0E1	8.08E2	5.58E2	-7.286E-2	-8.79995E1	7.15256E-5	-8.80017E1	4.76837E-5	4.43459E-3	9.58443E-2	2.73219E1	-3.26669E1	-3.26146E1	2.684E1	1.19953E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00453E-1
2.1E1	6.0E1	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.79992E1	-4.76837E-5	-8.80014E1	6.4373E-4	4.52995E-3	9.56297E-2	2.73207E1	-3.26789E1	-3.26062E1	2.68548E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00563E-1
2.2E1	1.908E3	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.79998E1	0.0E0	-8.8002E1	7.39098E-4	4.33922E-3	9.55582E-2	2.73169E1	-3.26472E1	-3.26213E1	2.68224E1	1.19809E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00302E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.79995E1	0.0E0	-8.80018E1	5.00679E-4	4.29153E-3	9.57012E-2	2.7358E1	-3.26633E1	-3.25948E1	2.68268E1	1.20055E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.99941E-1