[Scan]
initial_time=2016-01-18T18:37:20
final_time=2016-01-18T18:37:40
ip_count=19
run=1024
dataset=4
scan=244
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.82149E-6
ql1_vset=
ql1_vmon=-8.8E1
ql1_imon=-1.30794E-9
ql2_vset=
ql2_vmon=9.53674E-5
ql2_imon=1.38662E-9
ql3_vset=
ql3_vmon=-8.80018E1
ql3_imon=-4.31128E-9
ql4_vset=
ql4_vmon=1.00136E-3
ql4_imon=1.60066E-8
mult1=-2.50689E-8
mult2=-2.75468E-9
rf_tmon=-5.00489E-3
rf_agc=3.3019E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=6.07228E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66674E0
bslens_imon=2.40076E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20085E1
lens5a_imon=2.01624E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.05133E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54113E1
cs_ef1b_imon=2.8376E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02081E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04471E1
cs_ea1_imon=2.51877E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99029E0
lens1_imon=1.47429E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64724E1
os_ef1alow_imon=2.96931E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03732E1
cs_ea2_imon=1.48775E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=2.9429E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.35738E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11535E1
os_restr1_imon=4.26871E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14927E1
os_ea1_imon=2.35294E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63473E1
os_ef1bup_imon=3.06488E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24429E0
cs_ionrep_imon=1.20512E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91957E2
cs_nozzle_imon=1.93593E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01937E1
cs_anode1_imon=2.99642E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20408E0
olens4_imon=4.02188E-8
tplens_vset=1.4E-1
tplens_vmon=1.70752E0
tplens_imon=-2.48877E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26266E1
iondef3_imon=1.50181E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26608E1
iondef2_imon=1.5512E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03019E2
lens6_imon=2.98047E-4
ql6_vset=1.0E-1
ql6_vmon=9.54628E-2
ql6_imon=9.74035E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.33081E0
ionrepsh_imon=1.80427E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33538E1
lens5b_imon=2.16837E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74634E1
cs_ef2b_imon=3.1257E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52968E0
os_ea2_imon=-8.11249E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00507E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71368E1
cs_ef2a_imon=3.15559E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06962E0
os_ef2alow_imon=-2.58501E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.15186E-1
os_ef2bup_imon=-5.2679E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11326E1
os_restr2_imon=3.435E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.29351E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02006E1
cs_anode2_imon=2.24681E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73039E1
iondef1_imon=1.09048E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68592E1
iondef4_imon=1.08434E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=5.15364E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81927E-1
olens1_imon=7.90006E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14868E0
cs_ionaccel_imon=-1.81698E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02106E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56417E1
einzel_imon=7.69827E-6
window_vset=0.0E0
window_vmon=2.68656E-1
window_imon=-7.22272E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82714E2
mask1_imon=2.39074E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-6.18015E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.54864E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.27248E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.13407E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.18201E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33336E1
os_fil1_imon=9.41905E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06958E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65665E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30923E1
cs_fil1_imon=9.95203E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63374E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67784E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1124E-2
os_fil2_imon=-2.62285E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.84864E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.83323E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37018E-1
cs_fil2_imon=-2.28691E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.42003E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22846E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.9926E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40035E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.8084E-1
res40_imon=-2.55026E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=184
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.187E3	1.0E0	1.47E2	4.1E1	-7.19325E-2	-8.79993E1	2.38419E-4	-8.80019E1	2.6226E-4	4.12464E-3	9.57251E-2	2.73132E1	-3.26677E1	-3.26052E1	2.68202E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01085E-1
2.0E0	1.10852E5	1.21E2	3.16E2	1.6E2	-7.27053E-2	-8.79992E1	3.8147E-4	-8.80018E1	4.29153E-4	4.05312E-3	9.55343E-2	2.73123E1	-3.26771E1	-3.26284E1	2.68556E1	1.20192E-7	2.51287E-3	2.51287E-3	6.32858E-3	3.006E-1
3.0E0	2.2E1	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.79993E1	2.86102E-4	-8.80016E1	1.90735E-4	4.00543E-3	9.57251E-2	2.73399E1	-3.26685E1	-3.26101E1	2.68337E1	1.20226E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.02396E-1
4.0E0	2.4083E4	2.4E1	6.55E2	3.98E2	-7.24736E-2	-8.79993E1	6.91414E-4	-8.8002E1	3.09944E-4	3.8147E-3	9.57489E-2	2.7344E1	-3.26838E1	-3.26608E1	2.6825E1	1.20226E-7	2.5188E-3	2.5188E-3	6.34588E-3	3.01871E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.79998E1	2.14577E-4	-8.80019E1	4.05312E-4	4.00543E-3	9.53674E-2	2.72996E1	-3.2648E1	-3.26499E1	2.68363E1	1.20142E-7	2.52025E-3	2.52025E-3	6.3074E-3	3.03129E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37874E-2	-8.8E1	-9.53674E-5	-8.80017E1	5.72205E-4	4.02927E-3	9.55105E-2	2.73311E1	-3.26478E1	-3.26136E1	2.68587E1	1.19925E-7	2.52027E-3	2.52027E-3	6.34099E-3	3.02277E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.79997E1	-2.6226E-4	-8.80019E1	9.05991E-4	4.19617E-3	9.54628E-2	2.73207E1	-3.26482E1	-3.26038E1	2.68112E1	1.21117E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.8E1	2.38419E-5	-8.80018E1	9.05991E-4	4.12464E-3	9.54866E-2	2.73652E1	-3.26789E1	-3.25984E1	2.68382E1	1.20209E-7	2.51954E-3	2.51954E-3	6.29665E-3	2.97394E-1
1.2E1	9.2E1	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.79999E1	2.86102E-4	-8.80015E1	8.82149E-4	3.93391E-3	9.55105E-2	2.73135E1	-3.26561E1	-3.2587E1	2.68418E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9926E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.22418E-2	-8.80002E1	2.38419E-4	-8.80013E1	8.10623E-4	4.31538E-3	9.55582E-2	2.73351E1	-3.26548E1	-3.26138E1	2.68058E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.9874E-1
1.4E1	3.525E3	2.0E0	5.66E2	3.82E2	-7.15461E-2	-8.80002E1	2.38419E-4	-8.80017E1	7.15256E-4	3.8147E-3	9.54628E-2	2.73682E1	-3.26945E1	-3.26092E1	2.68106E1	1.19766E-7	2.5225E-3	2.5225E-3	6.29067E-3	3.00676E-1
1.5E1	8.4E1	0.0E0	6.06E2	4.11E2	-7.21643E-2	-8.79999E1	1.43051E-4	-8.80012E1	5.72205E-4	4.22001E-3	9.52721E-2	2.72957E1	-3.26614E1	-3.26266E1	2.683E1	1.20174E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.02133E-1
1.6E1	5.08E2	0.0E0	6.47E2	4.41E2	-7.24736E-2	-8.79999E1	0.0E0	-8.80012E1	8.82149E-4	4.14848E-3	9.55105E-2	2.73175E1	-3.26408E1	-3.26331E1	2.6866E1	1.198E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.02253E-1
1.7E1	1.143E3	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.8E1	-1.43051E-4	-8.80014E1	9.05991E-4	4.43459E-3	9.53197E-2	2.73285E1	-3.26939E1	-3.26188E1	2.68376E1	1.19861E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.02396E-1
1.8E1	4.582E3	3.0E0	7.27E2	5.0E2	-7.18554E-2	-8.79999E1	2.38419E-5	-8.80014E1	6.67572E-4	4.14848E-3	9.57489E-2	2.73574E1	-3.26651E1	-3.26164E1	2.68172E1	1.19902E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.02511E-1
1.9E1	2.266E3	0.0E0	7.68E2	5.29E2	-7.29374E-2	-8.79998E1	2.14577E-4	-8.80015E1	7.39098E-4	4.26769E-3	9.5582E-2	2.73157E1	-3.2659E1	-3.26508E1	2.6843E1	1.20122E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00563E-1
2.0E1	2.6449E4	1.3E1	8.08E2	5.58E2	-7.30146E-2	-8.79997E1	2.6226E-4	-8.80014E1	6.91414E-4	4.57764E-3	9.57012E-2	2.73387E1	-3.26747E1	-3.26038E1	2.68257E1	1.20004E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00966E-1
2.1E1	7.5E1	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.79997E1	1.43051E-4	-8.80015E1	6.19888E-4	4.79221E-3	9.53436E-2	2.73493E1	-3.26938E1	-3.26531E1	2.68476E1	1.20226E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.01871E-1
2.2E1	1.967E3	1.0E0	8.89E2	6.17E2	-7.33239E-2	-8.79999E1	-2.38419E-5	-8.80015E1	7.15256E-4	3.93391E-3	9.56535E-2	2.73255E1	-3.26819E1	-3.26308E1	2.68394E1	1.19851E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99941E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.8E1	9.53674E-5	-8.80018E1	1.00136E-3	4.48227E-3	9.54628E-2	2.73039E1	-3.26608E1	-3.26266E1	2.68592E1	1.19913E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.9926E-1