[Scan]
initial_time=2016-01-18T18:40:00
final_time=2016-01-18T18:40:20
ip_count=19
run=1024
dataset=4
scan=250
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37103E-2
qbias_imon=-3.8028E-6
ql1_vset=
ql1_vmon=-8.80007E1
ql1_imon=-9.45163E-10
ql2_vset=
ql2_vmon=1.90735E-4
ql2_imon=1.32174E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-3.16298E-9
ql4_vset=
ql4_vmon=3.8147E-4
ql4_imon=1.58595E-8
mult1=-1.92995E-8
mult2=-2.70954E-9
rf_tmon=-3.84879E-3
rf_agc=3.3663E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.1008E-3
ql5_imon=5.37634E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69276E0
bslens_imon=2.44062E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1986E1
lens5a_imon=1.99536E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.0515E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53887E1
cs_ef1b_imon=2.84323E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04653E2
lens23_imon=1.02213E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04669E1
cs_ea1_imon=2.5245E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96399E0
lens1_imon=1.41419E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64789E1
os_ef1alow_imon=2.98522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0372E1
cs_ea2_imon=1.49135E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84418E1
cs_ef1a_imon=2.93981E-5
olens2_vset=9.7E-1
olens2_vmon=9.69791E-1
olens2_imon=1.35515E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11418E1
os_restr1_imon=4.26175E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15134E1
os_ea1_imon=2.35921E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63605E1
os_ef1bup_imon=3.07821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23971E0
cs_ionrep_imon=1.22058E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91988E2
cs_nozzle_imon=1.93608E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=2.98522E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20408E0
olens4_imon=4.02991E-8
tplens_vset=1.4E-1
tplens_vmon=1.65205E0
tplens_imon=-1.53771E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25965E1
iondef3_imon=1.4917E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26962E1
iondef2_imon=1.55612E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03005E2
lens6_imon=2.98165E-4
ql6_vset=1.0E-1
ql6_vmon=9.55582E-2
ql6_imon=9.21845E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29103E0
ionrepsh_imon=1.79928E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33634E1
lens5b_imon=2.17339E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74693E1
cs_ef2b_imon=3.13767E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49691E0
os_ea2_imon=-7.23616E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00488E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71444E1
cs_ef2a_imon=3.1611E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04375E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.15444E-1
os_ef2bup_imon=-5.22517E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1131E1
os_restr2_imon=3.42779E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.27415E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01923E1
cs_anode2_imon=2.241E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73434E1
iondef1_imon=1.09741E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68286E1
iondef4_imon=1.09747E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.09678E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=7.88699E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13915E0
cs_ionaccel_imon=-1.69689E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56351E1
einzel_imon=7.87164E-6
window_vset=0.0E0
window_vmon=2.47376E-1
window_imon=-8.67976E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82703E2
mask1_imon=2.39232E-4
mask2_vset=0.0E0
mask2_vmon=-1.86452E1
mask2_imon=-6.69758E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92608E3
multa_neg_imon=7.57276E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.13576E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.02769E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37898E0
defgridb_imon=5.92693E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33348E1
os_fil1_imon=9.42594E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06843E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66033E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30893E1
cs_fil1_imon=9.95891E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63417E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67746E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.0913E-2
os_fil2_imon=-2.74405E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.845E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.56608E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.54584E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.11859E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22699E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.9952E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.73708E-1
res40_imon=-2.45732E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=144
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.237E3	2.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80006E1	-2.6226E-4	-8.80009E1	5.24521E-4	4.36306E-3	9.5439E-2	2.73574E1	-3.26482E1	-3.2635E1	2.68154E1	1.20174E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.99E-1
2.0E0	1.11401E5	1.03E2	3.16E2	1.6E2	-7.14689E-2	-8.80009E1	-1.66893E-4	-8.80011E1	4.29153E-4	4.07696E-3	9.53197E-2	2.73315E1	-3.26284E1	-3.26464E1	2.6822E1	1.19757E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00041E-1
3.0E0	2.1E1	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80007E1	-4.76837E-5	-8.8001E1	6.67572E-4	4.48227E-3	9.53197E-2	2.73306E1	-3.26625E1	-3.26289E1	2.68343E1	1.19965E-7	2.51116E-3	2.51116E-3	6.32936E-3	3.00824E-1
4.0E0	2.408E4	1.1E1	6.55E2	3.98E2	-7.22418E-2	-8.80007E1	0.0E0	-8.8001E1	7.62939E-4	4.33922E-3	9.56059E-2	2.73225E1	-3.26386E1	-3.2623E1	2.68575E1	1.19683E-7	2.51783E-3	2.51783E-3	6.30221E-3	3.00247E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80009E1	-4.76837E-5	-8.80012E1	6.4373E-4	4.55379E-3	9.56059E-2	2.73688E1	-3.26714E1	-3.26573E1	2.68298E1	1.19809E-7	2.51334E-3	2.51334E-3	6.33486E-3	2.9874E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80007E1	2.14577E-4	-8.80014E1	4.76837E-4	4.41074E-3	9.54628E-2	2.73341E1	-3.26835E1	-3.2618E1	2.68345E1	1.19913E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.97445E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.201E-2	-8.80009E1	1.66893E-4	-8.80014E1	5.72205E-4	4.673E-3	9.53913E-2	2.73189E1	-3.26244E1	-3.2643E1	2.6837E1	1.1988E-7	2.51369E-3	2.51369E-3	6.33341E-3	3.00494E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17779E-2	-8.80011E1	1.19209E-4	-8.80014E1	5.72205E-4	4.43459E-3	9.5439E-2	2.73257E1	-3.26685E1	-3.26378E1	2.68569E1	1.19787E-7	2.51165E-3	2.51165E-3	6.33131E-3	3.01837E-1
1.2E1	1.17E2	0.0E0	4.85E2	3.23E2	-7.19325E-2	-8.8001E1	0.0E0	-8.80014E1	6.4373E-4	4.50611E-3	9.53436E-2	2.73502E1	-3.26239E1	-3.26733E1	2.68153E1	1.20069E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01085E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.21643E-2	-8.80011E1	-7.15256E-5	-8.80012E1	3.8147E-4	4.43459E-3	9.54628E-2	2.73588E1	-3.26638E1	-3.26254E1	2.68214E1	1.20022E-7	2.51819E-3	2.51819E-3	6.33319E-3	3.00381E-1
1.4E1	3.388E3	0.0E0	5.66E2	3.82E2	-7.12368E-2	-8.80014E1	2.38419E-5	-8.80013E1	6.91414E-4	4.05312E-3	9.57251E-2	2.73165E1	-3.26254E1	-3.26627E1	2.68574E1	1.19646E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.0071E-1
1.5E1	9.6E1	0.0E0	6.06E2	4.11E2	-7.10825E-2	-8.80011E1	-1.19209E-4	-8.80012E1	3.57628E-4	4.36306E-3	9.57012E-2	2.73117E1	-3.26837E1	-3.26482E1	2.68358E1	1.19953E-7	2.51096E-3	2.51096E-3	6.30202E-3	2.99175E-1
1.6E1	4.48E2	0.0E0	6.47E2	4.41E2	-7.15461E-2	-8.8001E1	7.15256E-5	-8.80013E1	5.24521E-4	4.17233E-3	9.56059E-2	2.73193E1	-3.26844E1	-3.2636E1	2.68436E1	1.19925E-7	2.51359E-3	2.51359E-3	6.35223E-3	3.00144E-1
1.7E1	1.168E3	0.0E0	6.87E2	4.7E2	-7.13915E-2	-8.80007E1	3.33786E-4	-8.80014E1	4.29153E-4	3.95775E-3	9.54151E-2	2.73176E1	-3.2675E1	-3.26146E1	2.68574E1	1.19749E-7	2.50989E-3	2.50989E-3	6.33436E-3	3.02511E-1
1.8E1	4.558E3	6.0E0	7.27E2	5.0E2	-7.20871E-2	-8.80007E1	-2.38419E-5	-8.80015E1	9.53674E-5	4.1008E-3	9.53913E-2	2.73223E1	-3.26826E1	-3.26171E1	2.682E1	1.1988E-7	2.51783E-3	2.51783E-3	6.31779E-3	3.01733E-1
1.9E1	2.307E3	1.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80007E1	2.86102E-4	-8.80014E1	1.43051E-4	3.95775E-3	9.55105E-2	2.73327E1	-3.26536E1	-3.2629E1	2.68575E1	1.20116E-7	2.51758E-3	2.51758E-3	6.31902E-3	2.98435E-1
2.0E1	2.6575E4	1.8E1	8.08E2	5.58E2	-7.23189E-2	-8.80007E1	0.0E0	-8.80013E1	1.66893E-4	4.26769E-3	9.53436E-2	2.73075E1	-3.26708E1	-3.26083E1	2.68235E1	1.20311E-7	2.50989E-3	2.50989E-3	6.35601E-3	2.9841E-1
2.1E1	6.3E1	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80011E1	-4.76837E-5	-8.80013E1	5.48363E-4	3.91006E-3	9.53913E-2	2.73324E1	-3.26528E1	-3.26579E1	2.68384E1	1.20069E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9874E-1
2.2E1	1.956E3	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80007E1	-4.76837E-5	-8.80012E1	5.00679E-4	4.17233E-3	9.56297E-2	2.7318E1	-3.27154E1	-3.26346E1	2.68424E1	1.20078E-7	2.51369E-3	2.51369E-3	6.3074E-3	3.00494E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.37103E-2	-8.80007E1	1.90735E-4	-8.80013E1	3.8147E-4	4.1008E-3	9.55582E-2	2.73434E1	-3.26962E1	-3.25965E1	2.68286E1	1.19913E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.9952E-1