[Scan]
initial_time=2016-01-18T18:41:47
final_time=2016-01-18T18:42:06
ip_count=19
run=1024
dataset=4
scan=254
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.16233E-2
qbias_imon=-3.78082E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-8.95524E-10
ql2_vset=
ql2_vmon=-2.38419E-5
ql2_imon=1.35779E-9
ql3_vset=
ql3_vmon=-8.80014E1
ql3_imon=-2.94945E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=1.58478E-8
mult1=-1.68203E-8
mult2=-2.64875E-9
rf_tmon=-4.86691E-3
rf_agc=3.31173E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.17233E-3
ql5_imon=5.58805E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6409E0
bslens_imon=2.55217E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19472E1
lens5a_imon=1.98704E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12509E2
lens4a_imon=2.04902E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53947E1
cs_ef1b_imon=2.86233E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04651E2
lens23_imon=1.02067E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0479E1
cs_ea1_imon=2.53607E-5
lens1_vset=-2.7E0
lens1_vmon=-2.9999E0
lens1_imon=1.53558E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.98054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03618E1
cs_ea2_imon=1.48234E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84616E1
cs_ef1a_imon=2.93729E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.36048E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11015E1
os_restr1_imon=4.25562E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15089E1
os_ea1_imon=2.36195E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63972E1
os_ef1bup_imon=3.10199E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21304E0
cs_ionrep_imon=1.20404E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91942E2
cs_nozzle_imon=1.93478E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=2.9827E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20411E0
olens4_imon=4.02762E-8
tplens_vset=1.4E-1
tplens_vmon=1.67748E0
tplens_imon=-3.10161E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26266E1
iondef3_imon=1.51731E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26873E1
iondef2_imon=1.56958E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03038E2
lens6_imon=2.98101E-4
ql6_vset=1.0E-1
ql6_vmon=9.57251E-2
ql6_imon=9.38725E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28094E0
ionrepsh_imon=1.7866E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3367E1
lens5b_imon=2.17774E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74772E1
cs_ef2b_imon=3.11244E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52728E0
os_ea2_imon=-8.50904E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06125E2
lens4b_imon=2.00507E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7148E1
cs_ef2a_imon=3.16254E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11282E0
os_ef2alow_imon=-2.48616E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0343E-1
os_ef2bup_imon=-5.36933E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1134E1
os_restr2_imon=3.42383E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.28018E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01479E1
cs_anode2_imon=2.24605E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73526E1
iondef1_imon=1.10202E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6843E1
iondef4_imon=1.07764E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.19183E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=7.92132E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16198E0
cs_ionaccel_imon=-1.63922E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47161E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56219E1
einzel_imon=7.75632E-6
window_vset=0.0E0
window_vmon=2.74405E-1
window_imon=-7.13005E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82722E2
mask1_imon=2.3925E-4
mask2_vset=0.0E0
mask2_vmon=-1.86116E1
mask2_imon=-7.74273E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.33234E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93671E3
defgrida_imon=6.34458E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.2999E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32637E0
defgridb_imon=5.93001E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33314E1
os_fil1_imon=9.43471E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06584E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66249E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30902E1
cs_fil1_imon=9.97218E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62642E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67662E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.98343E-2
os_fil2_imon=-2.55184E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9411E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.6618E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36773E-1
cs_fil2_imon=-2.0593E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=3.73377E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22682E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.9841E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.59002E-1
res40_imon=-2.55463E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.193E3	0.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80018E1	2.38419E-4	-8.80014E1	8.34465E-4	4.22001E-3	9.58443E-2	2.7352E1	-3.26512E1	-3.26284E1	2.684E1	1.2026E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.0071E-1
2.0E0	1.11921E5	1.2E2	3.16E2	1.6E2	-7.286E-2	-8.80017E1	-1.43051E-4	-8.80013E1	8.10623E-4	4.26769E-3	9.56774E-2	2.73184E1	-3.2633E1	-3.26092E1	2.68447E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01609E-1
3.0E0	1.6E1	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80014E1	1.43051E-4	-8.80014E1	8.10623E-4	4.50611E-3	9.56774E-2	2.73147E1	-3.26494E1	-3.26242E1	2.68346E1	1.19902E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.01223E-1
4.0E0	2.4356E4	1.0E1	6.55E2	3.98E2	-7.40967E-2	-8.80012E1	-4.76837E-5	-8.80015E1	8.58307E-4	4.72069E-3	9.54151E-2	2.73231E1	-3.26705E1	-3.26488E1	2.6843E1	1.20311E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.02769E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.40967E-2	-8.8001E1	-9.53674E-5	-8.80016E1	7.39098E-4	4.26769E-3	9.53436E-2	2.73169E1	-3.26537E1	-3.26113E1	2.6836E1	1.20174E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.02922E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80011E1	-9.53674E-5	-8.80016E1	9.77516E-4	4.52995E-3	9.53913E-2	2.72739E1	-3.26693E1	-3.26134E1	2.68525E1	1.20055E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.02511E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80011E1	-1.90735E-4	-8.80015E1	3.8147E-4	3.98159E-3	9.53913E-2	2.73429E1	-3.26452E1	-3.26506E1	2.68233E1	1.20244E-7	2.51915E-3	2.51915E-3	6.34661E-3	2.99083E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37874E-2	-8.80009E1	2.38419E-5	-8.80014E1	5.00679E-4	3.91006E-3	9.56535E-2	2.73339E1	-3.26789E1	-3.26338E1	2.68538E1	1.19902E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.99175E-1
1.2E1	9.9E1	0.0E0	4.85E2	3.23E2	-7.40192E-2	-8.80011E1	-2.38419E-5	-8.80012E1	5.24521E-4	4.17233E-3	9.53674E-2	2.73069E1	-3.26518E1	-3.2608E1	2.68172E1	1.20174E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.98222E-1
1.3E1	1.8E1	1.0E0	5.25E2	3.53E2	-7.37103E-2	-8.80015E1	-7.15256E-5	-8.80013E1	2.6226E-4	3.93391E-3	9.53913E-2	2.73435E1	-3.26398E1	-3.265E1	2.6831E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.97704E-1
1.4E1	3.52E3	1.0E0	5.66E2	3.82E2	-7.33239E-2	-8.80012E1	-2.14577E-4	-8.80014E1	6.19888E-4	4.02927E-3	9.52721E-2	2.73169E1	-3.26567E1	-3.26679E1	2.68436E1	1.19861E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.02396E-1
1.5E1	1.1E2	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80015E1	2.38419E-5	-8.80017E1	4.29153E-4	4.05312E-3	9.56297E-2	2.73345E1	-3.26542E1	-3.26015E1	2.68472E1	1.19965E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01085E-1
1.6E1	4.97E2	0.0E0	6.47E2	4.41E2	-7.39421E-2	-8.80014E1	2.38419E-4	-8.80012E1	5.24521E-4	4.22001E-3	9.54866E-2	2.73399E1	-3.26627E1	-3.26182E1	2.681E1	1.20297E-7	2.5147E-3	2.5147E-3	6.31858E-3	3.0041E-1
1.7E1	1.096E3	2.0E0	6.87E2	4.7E2	-7.40192E-2	-8.80013E1	2.38419E-4	-8.80011E1	6.4373E-4	4.22001E-3	9.53197E-2	2.73246E1	-3.26608E1	-3.25989E1	2.68526E1	1.19902E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.00966E-1
1.8E1	4.747E3	5.0E0	7.27E2	5.0E2	-7.37874E-2	-8.80015E1	4.76837E-5	-8.80011E1	3.8147E-4	4.12464E-3	9.55343E-2	2.73544E1	-3.26476E1	-3.26392E1	2.68556E1	1.198E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00966E-1
1.9E1	2.271E3	1.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80012E1	1.19209E-4	-8.80011E1	7.62939E-4	4.22001E-3	9.55105E-2	2.73387E1	-3.26777E1	-3.26242E1	2.68376E1	1.19978E-7	2.51359E-3	2.51359E-3	6.3074E-3	2.99613E-1
2.0E1	2.6718E4	1.3E1	8.08E2	5.58E2	-7.30918E-2	-8.80011E1	4.29153E-4	-8.80012E1	4.76837E-4	4.17233E-3	9.52482E-2	2.7346E1	-3.2653E1	-3.26597E1	2.68214E1	1.20004E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.0071E-1
2.1E1	6.5E1	0.0E0	8.49E2	5.88E2	-7.23189E-2	-8.80012E1	2.14577E-4	-8.8001E1	4.29153E-4	4.26769E-3	9.54628E-2	2.73309E1	-3.26482E1	-3.26356E1	2.68484E1	1.19819E-7	2.51693E-3	2.51693E-3	6.32978E-3	3.00676E-1
2.2E1	1.862E3	3.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80011E1	2.38419E-5	-8.80013E1	4.52995E-4	4.12464E-3	9.56297E-2	2.73283E1	-3.26579E1	-3.25629E1	2.68244E1	1.20055E-7	2.5131E-3	2.5131E-3	6.33436E-3	2.99175E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.16233E-2	-8.80013E1	-2.38419E-5	-8.80014E1	3.57628E-4	4.17233E-3	9.57251E-2	2.73526E1	-3.26873E1	-3.26266E1	2.6843E1	1.198E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.9841E-1