[Scan]
initial_time=2016-01-18T18:43:07
final_time=2016-01-18T18:43:26
ip_count=19
run=1024
dataset=4
scan=257
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.84743E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-9.00316E-10
ql2_vset=
ql2_vmon=4.76837E-5
ql2_imon=1.40756E-9
ql3_vset=
ql3_vmon=-8.80012E1
ql3_imon=-2.93392E-9
ql4_vset=
ql4_vmon=6.91414E-4
ql4_imon=1.58434E-8
mult1=-2.36834E-8
mult2=-2.73059E-9
rf_tmon=-4.37423E-3
rf_agc=3.3664E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=5.53846E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66444E0
bslens_imon=2.46539E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1963E1
lens5a_imon=1.99005E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.05019E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53472E1
cs_ef1b_imon=2.79313E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02128E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04375E1
cs_ea1_imon=2.51247E-5
lens1_vset=-2.7E0
lens1_vmon=-2.9634E0
lens1_imon=1.62301E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64254E1
os_ef1alow_imon=2.98378E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03802E1
cs_ea2_imon=1.50515E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85001E1
cs_ef1a_imon=2.9809E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.35696E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11526E1
os_restr1_imon=4.24084E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15105E1
os_ea1_imon=2.36452E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63095E1
os_ef1bup_imon=3.06379E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2285E0
cs_ionrep_imon=1.18731E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91938E2
cs_nozzle_imon=1.93639E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01923E1
cs_anode1_imon=3.02847E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=4.04107E-8
tplens_vset=1.4E-1
tplens_vmon=1.66621E0
tplens_imon=-2.52875E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2602E1
iondef3_imon=1.48533E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2626E1
iondef2_imon=1.5363E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03014E2
lens6_imon=2.98208E-4
ql6_vset=1.0E-1
ql6_vmon=9.55343E-2
ql6_imon=9.13668E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27451E0
ionrepsh_imon=1.80848E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33776E1
lens5b_imon=2.15853E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7512E1
cs_ef2b_imon=3.12398E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51342E0
os_ea2_imon=-7.66089E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06141E2
lens4b_imon=2.00633E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70621E1
cs_ef2a_imon=3.12506E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02993E0
os_ef2alow_imon=-2.32037E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.49081E-1
os_ef2bup_imon=-4.91883E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11508E1
os_restr2_imon=3.46275E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.29964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02127E1
cs_anode2_imon=2.27488E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73195E1
iondef1_imon=1.10874E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68328E1
iondef4_imon=1.07332E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.17244E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81188E-1
olens1_imon=7.96662E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10431E0
cs_ionaccel_imon=-1.63202E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02151E2
cs_ionfocb_imon=1.47788E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56537E1
einzel_imon=7.37069E-6
window_vset=0.0E0
window_vmon=3.1465E-1
window_imon=-1.00853E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82732E2
mask1_imon=2.39506E-4
mask2_vset=0.0E0
mask2_vmon=-1.86843E1
mask2_imon=-9.04015E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.84175E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.32689E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.33916E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36126E0
defgridb_imon=6.34104E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33355E1
os_fil1_imon=9.43165E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06837E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66451E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30851E1
cs_fil1_imon=9.96359E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62816E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67705E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.0913E-2
os_fil2_imon=-2.53382E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.67681E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.45851E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.53983E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.13972E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22758E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.02511E-1
chamber_ion_pmon=1.19749E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=-7.7119E-3
res40_imon=-2.04287E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.146E3	1.0E0	1.47E2	4.1E1	-7.31692E-2	-8.8001E1	1.90735E-4	-8.80011E1	9.29832E-4	4.07696E-3	9.5439E-2	2.7357E1	-3.26703E1	-3.26508E1	2.68609E1	1.198E-7	2.51203E-3	2.51203E-3	6.31278E-3	2.99941E-1
2.0E0	1.09812E5	1.0E2	3.16E2	1.6E2	-7.34782E-2	-8.80009E1	-1.43051E-4	-8.80012E1	6.67572E-4	4.22001E-3	9.53913E-2	2.734E1	-3.26848E1	-3.26376E1	2.67957E1	1.20363E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.9841E-1
3.0E0	2.4E1	0.0E0	4.85E2	2.79E2	-7.3401E-2	-8.80013E1	7.15256E-5	-8.80011E1	5.24521E-4	4.05312E-3	9.54866E-2	2.73263E1	-3.26791E1	-3.26296E1	2.68482E1	1.19978E-7	2.52027E-3	2.52027E-3	6.32978E-3	2.97762E-1
4.0E0	2.4519E4	1.1E1	6.55E2	3.98E2	-7.33239E-2	-8.80013E1	-1.90735E-4	-8.80013E1	5.96046E-4	4.36306E-3	9.52721E-2	2.73311E1	-3.26543E1	-3.26136E1	2.68502E1	1.20055E-7	2.52115E-3	2.52115E-3	6.31278E-3	2.97647E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80017E1	-3.09944E-4	-8.80014E1	3.57628E-4	4.3869E-3	9.54866E-2	2.73099E1	-3.26741E1	-3.2647E1	2.68496E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80014E1	4.76837E-5	-8.80018E1	9.53674E-5	4.12464E-3	9.55343E-2	2.73039E1	-3.26738E1	-3.26183E1	2.68244E1	1.19861E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.00824E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80014E1	1.66893E-4	-8.80015E1	4.52995E-4	4.3869E-3	9.53913E-2	2.72909E1	-3.26325E1	-3.26189E1	2.68358E1	1.20055E-7	2.52276E-3	2.52276E-3	6.32896E-3	3.02253E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.80015E1	1.19209E-4	-8.80012E1	6.67572E-4	4.22001E-3	9.53913E-2	2.73177E1	-3.26549E1	-3.26062E1	2.68226E1	1.19913E-7	2.53196E-3	2.53196E-3	6.30192E-3	2.98481E-1
1.2E1	8.7E1	0.0E0	4.85E2	3.23E2	-7.39421E-2	-8.80015E1	-1.19209E-4	-8.80013E1	6.4373E-4	4.62532E-3	9.56774E-2	2.73303E1	-3.26719E1	-3.2631E1	2.6858E1	1.19953E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.99941E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.41738E-2	-8.80017E1	-7.15256E-5	-8.80013E1	5.00679E-4	4.1008E-3	9.54628E-2	2.73337E1	-3.2633E1	-3.26025E1	2.68374E1	1.20028E-7	2.51783E-3	2.51783E-3	6.3074E-3	2.99506E-1
1.4E1	3.493E3	2.0E0	5.66E2	3.82E2	-7.40967E-2	-8.80017E1	1.90735E-4	-8.80012E1	8.58307E-4	4.45843E-3	9.56297E-2	2.73273E1	-3.26693E1	-3.26921E1	2.68337E1	1.1984E-7	2.51874E-3	2.51874E-3	6.31902E-3	3.00363E-1
1.5E1	1.11E2	1.0E0	6.06E2	4.11E2	-7.37103E-2	-8.80015E1	1.66893E-4	-8.80011E1	3.57628E-4	4.07696E-3	9.54866E-2	2.73511E1	-3.26756E1	-3.26756E1	2.68532E1	1.20209E-7	2.52492E-3	2.52492E-3	6.32356E-3	2.99686E-1
1.6E1	4.97E2	0.0E0	6.47E2	4.41E2	-7.38649E-2	-8.80016E1	4.76837E-5	-8.8001E1	5.24521E-4	4.29153E-3	9.53674E-2	2.73261E1	-3.26999E1	-3.25864E1	2.6804E1	1.20106E-7	2.52599E-3	2.52599E-3	6.3074E-3	2.9943E-1
1.7E1	1.153E3	1.0E0	6.87E2	4.7E2	-7.41738E-2	-8.80015E1	4.76837E-5	-8.80012E1	6.67572E-4	4.55379E-3	9.50336E-2	2.73092E1	-3.26573E1	-3.26189E1	2.68424E1	1.20122E-7	2.52867E-3	2.52867E-3	6.34037E-3	3.03712E-1
1.8E1	4.723E3	4.0E0	7.27E2	5.0E2	-7.33239E-2	-8.80016E1	-2.38419E-5	-8.80013E1	6.4373E-4	4.43459E-3	9.54866E-2	2.73411E1	-3.26756E1	-3.26201E1	2.68322E1	1.19902E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.01223E-1
1.9E1	2.242E3	1.0E0	7.68E2	5.29E2	-7.37874E-2	-8.80014E1	2.14577E-4	-8.80014E1	4.76837E-4	4.60148E-3	9.52482E-2	2.73412E1	-3.2645E1	-3.26205E1	2.68436E1	1.20069E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.01609E-1
2.0E1	2.6706E4	2.0E1	8.08E2	5.58E2	-7.32464E-2	-8.80017E1	-4.76837E-5	-8.80014E1	5.24521E-4	4.57764E-3	9.54866E-2	2.73109E1	-3.26561E1	-3.2604E1	2.68076E1	1.19445E-7	2.51443E-3	2.51443E-3	6.29645E-3	2.9926E-1
2.1E1	6.7E1	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80014E1	-2.14577E-4	-8.80011E1	5.48363E-4	4.41074E-3	9.52244E-2	2.73442E1	-3.26494E1	-3.26284E1	2.6829E1	1.20092E-7	2.52342E-3	2.52342E-3	6.32858E-3	3.00348E-1
2.2E1	1.912E3	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80015E1	-1.90735E-4	-8.80013E1	3.09944E-4	4.86374E-3	9.55582E-2	2.73293E1	-3.26543E1	-3.26632E1	2.68034E1	1.19861E-7	2.52647E-3	2.52647E-3	6.30192E-3	3.02922E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80017E1	4.76837E-5	-8.80012E1	6.91414E-4	4.33922E-3	9.55343E-2	2.73195E1	-3.2626E1	-3.2602E1	2.68328E1	1.19749E-7	2.52276E-3	2.52276E-3	6.30202E-3	3.02511E-1