[Scan]
initial_time=2016-01-18T18:44:00
final_time=2016-01-18T18:44:19
ip_count=19
run=1024
dataset=4
scan=259
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.79843E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-8.26025E-10
ql2_vset=
ql2_vmon=2.38419E-5
ql2_imon=1.38763E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-2.74855E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=1.58457E-8
mult1=-1.51383E-8
mult2=-2.80753E-9
rf_tmon=-4.59796E-3
rf_agc=3.29198E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=5.71752E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65688E0
bslens_imon=2.30799E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19933E1
lens5a_imon=1.98207E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.05016E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53144E1
cs_ef1b_imon=2.81223E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02297E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0467E1
cs_ea1_imon=2.51833E-5
lens1_vset=-2.7E0
lens1_vmon=-2.95881E0
lens1_imon=1.44484E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64833E1
os_ef1alow_imon=3.00947E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03439E1
cs_ea2_imon=1.51671E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84881E1
cs_ef1a_imon=2.96194E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.36897E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10843E1
os_restr1_imon=4.21907E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15275E1
os_ea1_imon=2.31631E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63155E1
os_ef1bup_imon=3.08844E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.1817E0
cs_ionrep_imon=1.21111E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91974E2
cs_nozzle_imon=1.93593E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02451E1
cs_anode1_imon=3.01695E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20401E0
olens4_imon=4.04447E-8
tplens_vset=1.4E-1
tplens_vmon=1.64878E0
tplens_imon=-3.62263E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25977E1
iondef3_imon=1.50826E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26838E1
iondef2_imon=1.56262E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03028E2
lens6_imon=2.9817E-4
ql6_vset=1.0E-1
ql6_vmon=9.56297E-2
ql6_imon=9.07087E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28577E0
ionrepsh_imon=1.78189E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33835E1
lens5b_imon=2.17931E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74851E1
cs_ef2b_imon=3.10752E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51043E0
os_ea2_imon=-5.64276E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06128E2
lens4b_imon=2.00479E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70827E1
cs_ef2a_imon=3.13971E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06953E0
os_ef2alow_imon=-2.00919E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84533E-1
os_ef2bup_imon=-5.07436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11242E1
os_restr2_imon=3.43238E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.28386E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01703E1
cs_anode2_imon=2.27143E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73228E1
iondef1_imon=1.10386E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68383E1
iondef4_imon=1.06407E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.18087E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.94424E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16133E0
cs_ionaccel_imon=-1.40289E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02166E2
cs_ionfocb_imon=1.47454E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55856E1
einzel_imon=7.34352E-6
window_vset=0.0E0
window_vmon=2.82468E-1
window_imon=-6.46886E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82764E2
mask1_imon=2.39514E-4
mask2_vset=0.0E0
mask2_vmon=-1.86438E1
mask2_imon=-1.04734E-6
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92616E3
multa_neg_imon=7.35465E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.10217E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.171E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33307E0
defgridb_imon=6.23439E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33336E1
os_fil1_imon=9.41634E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06487E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66486E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30861E1
cs_fil1_imon=9.96307E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62029E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67786E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.05546E-2
os_fil2_imon=-2.27577E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.02196E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.65606E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34761E-1
cs_fil2_imon=-2.48785E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16117E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22752E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.52721E-1
res40_imon=-2.13643E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.251E3	1.0E0	1.47E2	4.1E1	-7.22418E-2	-8.80017E1	2.6226E-4	-8.80015E1	7.86781E-4	4.43459E-3	9.51529E-2	2.73134E1	-3.26213E1	-3.26054E1	2.67978E1					
2.0E0	1.12E5	9.4E1	3.16E2	1.6E2	-7.29374E-2	-8.80015E1	-1.66893E-4	-8.80016E1	8.34465E-4	4.14848E-3	9.56059E-2	2.73455E1	-3.26707E1	-3.26187E1	2.68425E1	1.2026E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.98665E-1
3.0E0	1.6E1	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.80017E1	-4.76837E-5	-8.80017E1	7.86781E-4	4.22001E-3	9.5439E-2	2.7359E1	-3.2666E1	-3.26434E1	2.68244E1	1.20031E-7	2.51804E-3	2.51804E-3	6.31858E-3	2.97762E-1
4.0E0	2.4365E4	1.1E1	6.55E2	3.98E2	-7.3401E-2	-8.80015E1	-1.43051E-4	-8.80017E1	1.0252E-3	4.12464E-3	9.57727E-2	2.73353E1	-3.26829E1	-3.26425E1	2.68574E1	1.20209E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.38649E-2	-8.80019E1	-2.6226E-4	-8.80016E1	5.48363E-4	4.29153E-3	9.57251E-2	2.73248E1	-3.26712E1	-3.25897E1	2.68069E1	1.19919E-7	2.52364E-3	2.52364E-3	6.33297E-3	3.02342E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80014E1	-1.43051E-4	-8.80016E1	7.39098E-4	4.29153E-3	9.56535E-2	2.73175E1	-3.26496E1	-3.2593E1	2.68196E1	1.20226E-7	2.51874E-3	2.51874E-3	6.3016E-3	3.03976E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80015E1	-2.38419E-4	-8.80013E1	5.48363E-4	4.3869E-3	9.53436E-2	2.73345E1	-3.26506E1	-3.2623E1	2.68401E1	1.19851E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.0148E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80017E1	-3.57628E-4	-8.8001E1	6.91414E-4	4.36306E-3	9.57727E-2	2.72927E1	-3.26461E1	-3.26767E1	2.68208E1	1.20122E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.98222E-1
1.2E1	1.03E2	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80016E1	1.66893E-4	-8.80012E1	8.58307E-4	4.24385E-3	9.56059E-2	2.72979E1	-3.2626E1	-3.26524E1	2.68352E1	1.20209E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.98156E-1
1.3E1	2.0E1	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.80017E1	-2.6226E-4	-8.80011E1	6.4373E-4	4.50611E-3	9.58443E-2	2.73293E1	-3.26767E1	-3.26296E1	2.68615E1	1.20122E-7	2.52428E-3	2.52428E-3	6.3074E-3	2.98481E-1
1.4E1	3.612E3	1.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80015E1	-1.66893E-4	-8.80012E1	1.04904E-3	3.86238E-3	9.54151E-2	2.72636E1	-3.25918E1	-3.25888E1	2.68461E1	1.20209E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.01223E-1
1.5E1	9.4E1	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80014E1	-2.6226E-4	-8.80015E1	9.05991E-4	4.12464E-3	9.56774E-2	2.73291E1	-3.26428E1	-3.26374E1	2.68302E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00824E-1
1.6E1	5.16E2	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80018E1	-2.14577E-4	-8.80013E1	8.82149E-4	3.88622E-3	9.56059E-2	2.73309E1	-3.26657E1	-3.26194E1	2.6858E1	1.20278E-7	2.51443E-3	2.51443E-3	6.29098E-3	3.01609E-1
1.7E1	1.137E3	0.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80013E1	3.09944E-4	-8.80012E1	6.67572E-4	3.95775E-3	9.57489E-2	2.73137E1	-3.26603E1	-3.26456E1	2.68363E1	1.19913E-7	2.51007E-3	2.51007E-3	6.31837E-3	3.01085E-1
1.8E1	4.794E3	3.0E0	7.27E2	5.0E2	-7.30146E-2	-8.80013E1	-9.53674E-5	-8.80014E1	5.48363E-4	4.3869E-3	9.56535E-2	2.73476E1	-3.2659E1	-3.26183E1	2.67989E1	1.19913E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00302E-1
1.9E1	2.247E3	2.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80014E1	9.53674E-5	-8.80012E1	4.05312E-4	4.17233E-3	9.52005E-2	2.73405E1	-3.26434E1	-3.26573E1	2.68563E1	1.20278E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00302E-1
2.0E1	2.6633E4	2.4E1	8.08E2	5.58E2	-7.43285E-2	-8.80016E1	2.14577E-4	-8.8001E1	4.29153E-4	4.07696E-3	9.54151E-2	2.73309E1	-3.26116E1	-3.26062E1	2.6807E1	1.19809E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.03185E-1
2.1E1	5.2E1	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80015E1	7.15256E-5	-8.8001E1	5.24521E-4	4.52995E-3	9.53197E-2	2.73198E1	-3.2672E1	-3.26838E1	2.68124E1	1.20055E-7	2.50989E-3	2.50989E-3	6.31817E-3	2.9892E-1
2.2E1	1.891E3	1.0E0	8.89E2	6.17E2	-7.286E-2	-8.80012E1	2.38419E-5	-8.80012E1	7.15256E-4	3.93391E-3	9.52244E-2	2.73526E1	-3.26464E1	-3.26482E1	2.684E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.98222E-1
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80015E1	2.38419E-5	-8.80011E1	4.29153E-4	4.33922E-3	9.56297E-2	2.73228E1	-3.26838E1	-3.25977E1	2.68383E1	1.20055E-7	2.51954E-3	2.51954E-3	6.29665E-3	2.9943E-1