[Scan]
initial_time=2016-01-18T18:44:27
final_time=2016-01-18T18:44:46
ip_count=19
run=1024
dataset=4
scan=260
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.15461E-2
qbias_imon=-3.78614E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-7.98941E-10
ql2_vset=
ql2_vmon=-1.19209E-4
ql2_imon=1.35384E-9
ql3_vset=
ql3_vmon=-8.80016E1
ql3_imon=-2.79819E-9
ql4_vset=
ql4_vmon=5.48363E-4
ql4_imon=1.58577E-8
mult1=-2.21604E-8
mult2=-2.79381E-9
rf_tmon=-4.54487E-3
rf_agc=3.27546E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=5.43976E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64616E0
bslens_imon=2.38045E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19671E1
lens5a_imon=1.98899E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53279E1
cs_ef1b_imon=2.84455E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02174E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04793E1
cs_ea1_imon=2.5284E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99231E0
lens1_imon=1.47436E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65031E1
os_ef1alow_imon=3.01136E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03791E1
cs_ea2_imon=1.47896E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84898E1
cs_ef1a_imon=2.94255E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.37106E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10967E1
os_restr1_imon=4.22631E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14916E1
os_ea1_imon=2.35249E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63601E1
os_ef1bup_imon=3.11249E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27156E0
cs_ionrep_imon=1.18873E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91977E2
cs_nozzle_imon=1.93551E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02499E1
cs_anode1_imon=3.00893E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20403E0
olens4_imon=4.04237E-8
tplens_vset=1.4E-1
tplens_vmon=1.64851E0
tplens_imon=-2.67032E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26119E1
iondef3_imon=1.50374E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26797E1
iondef2_imon=1.5724E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02995E2
lens6_imon=2.98126E-4
ql6_vset=1.0E-1
ql6_vmon=9.53913E-2
ql6_imon=9.18365E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30165E0
ionrepsh_imon=1.77238E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.17906E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74449E1
cs_ef2b_imon=3.09442E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50871E0
os_ea2_imon=-6.66986E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06144E2
lens4b_imon=2.00672E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71142E1
cs_ef2a_imon=3.17401E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.1148E0
os_ef2alow_imon=-2.28614E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.65374E-1
os_ef2bup_imon=-5.1845E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1077E1
os_restr2_imon=3.42909E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23028E2
cs_ionfoca_imon=6.30742E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01415E1
cs_anode2_imon=2.2687E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72839E1
iondef1_imon=1.10237E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68436E1
iondef4_imon=1.09442E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.14697E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81522E-1
olens1_imon=7.99696E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.18748E0
cs_ionaccel_imon=-1.34087E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02131E2
cs_ionfocb_imon=1.47216E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55878E1
einzel_imon=7.37159E-6
window_vset=0.0E0
window_vmon=2.49542E-1
window_imon=-5.93688E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8275E2
mask1_imon=2.39143E-4
mask2_vset=0.0E0
mask2_vmon=-1.86049E1
mask2_imon=-9.79441E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=7.45242E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.42599E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.19758E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28744E0
defgridb_imon=6.12514E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33341E1
os_fil1_imon=9.4147E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06727E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66483E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30886E1
cs_fil1_imon=9.95586E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62076E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68299E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.98999E-2
os_fil2_imon=-2.23478E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.30622E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59899E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34146E-1
cs_fil2_imon=-2.91825E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.17651E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22878E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.47449E-1
res40_imon=-2.30004E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.242E3	0.0E0	1.47E2	4.1E1	-7.17007E-2	-8.80016E1	2.86102E-4	-8.80013E1	4.29153E-4	4.33922E-3	9.55343E-2	2.7344E1	-3.26402E1	-3.26266E1	2.67565E1	1.19851E-7	2.51203E-3	2.51203E-3	6.29665E-3	3.01223E-1
2.0E0	1.12254E5	1.19E2	3.16E2	1.6E2	-7.14689E-2	-8.80016E1	2.6226E-4	-8.80011E1	3.33786E-4	4.52995E-3	9.56059E-2	2.73105E1	-3.26561E1	-3.26284E1	2.68496E1	1.2026E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.01223E-1
3.0E0	1.7E1	0.0E0	4.85E2	2.79E2	-7.16233E-2	-8.80017E1	4.05312E-4	-8.80011E1	5.96046E-4	4.07696E-3	9.52482E-2	2.73541E1	-3.26555E1	-3.26071E1	2.68406E1	1.20122E-7	2.52428E-3	2.52428E-3	6.3074E-3	3.00302E-1
4.0E0	2.4394E4	9.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80014E1	2.38419E-4	-8.80012E1	5.48363E-4	4.29153E-3	9.52244E-2	2.73464E1	-3.26644E1	-3.26472E1	2.68151E1	1.20004E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80015E1	-7.15256E-5	-8.80011E1	4.05312E-4	4.62532E-3	9.5439E-2	2.73261E1	-3.26518E1	-3.26266E1	2.68605E1	1.2026E-7	2.51525E-3	2.51525E-3	6.2752E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80018E1	4.76837E-5	-8.80009E1	5.72205E-4	4.41074E-3	9.53674E-2	2.73499E1	-3.26762E1	-3.26649E1	2.68178E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80022E1	-4.76837E-5	-8.80011E1	6.19888E-4	4.22001E-3	9.54628E-2	2.73159E1	-3.26711E1	-3.26098E1	2.68412E1	1.20055E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80018E1	2.14577E-4	-8.8001E1	4.05312E-4	4.33922E-3	9.55343E-2	2.73027E1	-3.26482E1	-3.26056E1	2.68377E1	1.19965E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.9978E-1
1.2E1	1.1E2	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80018E1	0.0E0	-8.8001E1	5.96046E-4	4.12464E-3	9.53436E-2	2.73297E1	-3.26296E1	-3.26476E1	2.68444E1	1.20069E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00563E-1
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80017E1	9.53674E-5	-8.80013E1	6.91414E-4	4.05312E-3	9.52005E-2	2.73063E1	-3.26543E1	-3.26134E1	2.68041E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00563E-1
1.4E1	3.555E3	2.0E0	5.66E2	3.82E2	-7.286E-2	-8.8002E1	-1.43051E-4	-8.80013E1	3.8147E-4	4.07696E-3	9.52721E-2	2.73694E1	-3.27174E1	-3.25977E1	2.68526E1	1.20174E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.01609E-1
1.5E1	9.8E1	0.0E0	6.06E2	4.11E2	-7.15461E-2	-8.80019E1	-1.19209E-4	-8.80013E1	9.05991E-4	4.36306E-3	9.52482E-2	2.72933E1	-3.26502E1	-3.26296E1	2.68112E1	1.19851E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.00966E-1
1.6E1	4.99E2	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80017E1	4.76837E-5	-8.80014E1	7.39098E-4	4.41074E-3	9.50575E-2	2.73237E1	-3.26795E1	-3.26338E1	2.6843E1	1.20311E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.0148E-1
1.7E1	1.127E3	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80019E1	2.6226E-4	-8.80012E1	7.62939E-4	4.64916E-3	9.54151E-2	2.73272E1	-3.26494E1	-3.26658E1	2.68481E1	1.20069E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.00041E-1
1.8E1	4.749E3	0.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80018E1	2.14577E-4	-8.80011E1	5.96046E-4	4.72069E-3	9.54628E-2	2.73033E1	-3.26803E1	-3.26419E1	2.67966E1	1.19813E-7	2.51675E-3	2.51675E-3	6.3074E-3	2.9926E-1
1.9E1	2.312E3	0.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80018E1	9.53674E-5	-8.80014E1	5.24521E-4	4.62532E-3	9.53436E-2	2.73718E1	-3.26407E1	-3.26493E1	2.68475E1	1.20004E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00966E-1
2.0E1	2.6959E4	1.1E1	8.08E2	5.58E2	-7.23964E-2	-8.80015E1	-7.15256E-5	-8.80016E1	5.48363E-4	4.93526E-3	9.57489E-2	2.72997E1	-3.26549E1	-3.26272E1	2.68112E1	1.19713E-7	2.50914E-3	2.50914E-3	6.32978E-3	2.98819E-1
2.1E1	7.7E1	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80015E1	-4.76837E-5	-8.80012E1	6.19888E-4	4.19617E-3	9.5439E-2	2.73658E1	-3.26759E1	-3.26104E1	2.68412E1	1.19705E-7	2.52757E-3	2.52757E-3	6.31837E-3	3.03449E-1
2.2E1	1.893E3	2.0E0	8.89E2	6.17E2	-7.18554E-2	-8.80015E1	-9.53674E-5	-8.80016E1	5.24521E-4	4.45843E-3	9.53436E-2	2.72638E1	-3.26573E1	-3.26909E1	2.68354E1	1.20004E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.01995E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.15461E-2	-8.80017E1	-1.19209E-4	-8.80016E1	5.48363E-4	4.48227E-3	9.53913E-2	2.72839E1	-3.26797E1	-3.26119E1	2.68436E1	1.19965E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00302E-1