[Scan]
initial_time=2016-01-18T18:44:53
final_time=2016-01-18T18:45:13
ip_count=19
run=1024
dataset=4
scan=261
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.18554E-2
qbias_imon=-3.82055E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-8.32081E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=1.35763E-9
ql3_vset=
ql3_vmon=-8.80014E1
ql3_imon=-2.71688E-9
ql4_vset=
ql4_vmon=6.91414E-4
ql4_imon=1.58735E-8
mult1=-2.61397E-8
mult2=-2.68268E-9
rf_tmon=-2.98032E-3
rf_agc=3.47155E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=5.6448E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67402E0
bslens_imon=2.53204E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19749E1
lens5a_imon=2.00595E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12509E2
lens4a_imon=2.04913E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54185E1
cs_ef1b_imon=2.87024E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04589E2
lens23_imon=1.02172E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04566E1
cs_ea1_imon=2.50694E-5
lens1_vset=-2.7E0
lens1_vmon=-2.95085E0
lens1_imon=1.44117E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.656E1
os_ef1alow_imon=2.99749E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03605E1
cs_ea2_imon=1.50679E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84101E1
cs_ef1a_imon=2.91291E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.36985E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11142E1
os_restr1_imon=4.24676E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15012E1
os_ea1_imon=2.35414E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64247E1
os_ef1bup_imon=3.12287E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21843E0
cs_ionrep_imon=1.21479E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91962E2
cs_nozzle_imon=1.93659E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01902E1
cs_anode1_imon=2.96194E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=4.0395E-8
tplens_vset=1.4E-1
tplens_vmon=1.68551E0
tplens_imon=-2.52073E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26302E1
iondef3_imon=1.47961E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26585E1
iondef2_imon=1.56372E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03021E2
lens6_imon=2.98092E-4
ql6_vset=1.0E-1
ql6_vmon=9.52959E-2
ql6_imon=8.91805E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2723E0
ionrepsh_imon=1.78704E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33982E1
lens5b_imon=2.18445E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74152E1
cs_ef2b_imon=3.09817E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56002E0
os_ea2_imon=-7.80981E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00715E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71301E1
cs_ef2a_imon=3.19922E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.12629E0
os_ef2alow_imon=-2.63045E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.8079E-1
os_ef2bup_imon=-5.57586E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10743E1
os_restr2_imon=3.40655E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.28459E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01285E1
cs_anode2_imon=2.22427E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73219E1
iondef1_imon=1.09542E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68214E1
iondef4_imon=1.12021E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.19482E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=7.92889E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.20811E0
cs_ionaccel_imon=-1.72849E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02048E2
cs_ionfocb_imon=1.47106E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56031E1
einzel_imon=7.75521E-6
window_vset=0.0E0
window_vmon=1.74557E-1
window_imon=-5.04668E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82675E2
mask1_imon=2.38766E-4
mask2_vset=0.0E0
mask2_vmon=-1.85982E1
mask2_imon=-8.67698E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.44647E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.6825E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50104E3
multb_neg_imon=7.39138E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38823E0
defgridb_imon=6.03973E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33336E1
os_fil1_imon=9.42551E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07654E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66584E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30899E1
cs_fil1_imon=9.95209E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62734E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68404E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.18687E-2
os_fil2_imon=-2.77478E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.19038E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.6705E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33417E-1
cs_fil2_imon=-2.86211E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.18493E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22893E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=3.01347E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=7.3988E-1
res40_imon=-2.74647E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.099E3	0.0E0	1.47E2	4.1E1	-7.21643E-2	-8.80016E1	-4.52995E-4	-8.80011E1	4.05312E-4	4.26769E-3	9.54866E-2	2.73445E1	-3.26677E1	-3.26503E1	2.68065E1	1.20137E-7	2.52139E-3	2.52139E-3	6.34661E-3	2.98819E-1
2.0E0	1.11891E5	1.05E2	3.16E2	1.6E2	-7.17779E-2	-8.80018E1	-2.6226E-4	-8.80012E1	7.39098E-4	4.22001E-3	9.53913E-2	2.73289E1	-3.26631E1	-3.26202E1	2.68644E1	1.20142E-7	2.52448E-3	2.52448E-3	6.3074E-3	2.99594E-1
3.0E0	2.0E1	1.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80018E1	-3.8147E-4	-8.80011E1	7.39098E-4	4.26769E-3	9.56297E-2	2.73003E1	-3.26843E1	-3.25972E1	2.67968E1	1.20092E-7	2.51603E-3	2.51603E-3	6.31269E-3	3.01609E-1
4.0E0	2.4629E4	1.1E1	6.55E2	3.98E2	-7.26282E-2	-8.80019E1	-2.38419E-4	-8.80013E1	5.00679E-4	4.43459E-3	9.5582E-2	2.73213E1	-3.26663E1	-3.26146E1	2.68364E1	1.20174E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.03185E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.12368E-2	-8.80017E1	-1.19209E-4	-8.80013E1	7.39098E-4	4.50611E-3	9.54866E-2	2.73598E1	-3.26266E1	-3.2644E1	2.68112E1	1.20122E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80015E1	4.76837E-5	-8.80014E1	3.57628E-4	4.33922E-3	9.55343E-2	2.73284E1	-3.26756E1	-3.2634E1	2.68394E1	1.20383E-7	2.51771E-3	2.51771E-3	6.29098E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.15461E-2	-8.80018E1	2.38419E-5	-8.80015E1	2.38419E-4	4.19617E-3	9.55343E-2	2.73303E1	-3.26579E1	-3.25906E1	2.68701E1	1.19925E-7	2.51359E-3	2.51359E-3	6.31858E-3	3.01742E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.201E-2	-8.80015E1	4.76837E-5	-8.80014E1	2.86102E-4	4.33922E-3	9.52721E-2	2.72871E1	-3.26741E1	-3.26554E1	2.68256E1	1.20174E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.02659E-1
1.2E1	1.2E2	0.0E0	4.85E2	3.23E2	-7.12368E-2	-8.80017E1	-2.38419E-5	-8.80016E1	3.33786E-4	4.93526E-3	9.51767E-2	2.73187E1	-3.26537E1	-3.26012E1	2.68226E1	1.19595E-7	2.51203E-3	2.51203E-3	6.30202E-3	2.99941E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80019E1	2.38419E-5	-8.80017E1	5.00679E-4	4.673E-3	9.52005E-2	2.72961E1	-3.26639E1	-3.26236E1	2.68569E1	1.19913E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00302E-1
1.4E1	3.498E3	4.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80016E1	-1.90735E-4	-8.80014E1	4.05312E-4	4.57764E-3	9.57012E-2	2.7403E1	-3.27426E1	-3.26122E1	2.68226E1	1.20278E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9874E-1
1.5E1	9.9E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80016E1	2.38419E-5	-8.80015E1	7.39098E-4	4.57764E-3	9.56059E-2	2.73063E1	-3.26585E1	-3.26062E1	2.68202E1	1.19757E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9874E-1
1.6E1	5.05E2	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.8002E1	-3.33786E-4	-8.80015E1	6.91414E-4	4.79221E-3	9.52244E-2	2.73008E1	-3.26303E1	-3.25825E1	2.6834E1	1.20174E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.97445E-1
1.7E1	1.105E3	0.0E0	6.87E2	4.7E2	-7.13143E-2	-8.8002E1	-4.29153E-4	-8.80014E1	9.77516E-4	4.64916E-3	9.52005E-2	2.73267E1	-3.26326E1	-3.26152E1	2.68514E1	1.19978E-7	2.51359E-3	2.51359E-3	6.29624E-3	3.00144E-1
1.8E1	4.753E3	2.0E0	7.27E2	5.0E2	-7.26282E-2	-8.80017E1	-2.86102E-4	-8.80013E1	7.15256E-4	4.93526E-3	9.5439E-2	2.73291E1	-3.26933E1	-3.26314E1	2.6807E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01871E-1
1.9E1	2.286E3	1.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80015E1	-4.29153E-4	-8.80013E1	5.72205E-4	4.45843E-3	9.52721E-2	2.73104E1	-3.26938E1	-3.26508E1	2.68298E1	1.19851E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.01223E-1
2.0E1	2.6796E4	1.8E1	8.08E2	5.58E2	-7.23964E-2	-8.80014E1	-3.33786E-4	-8.80011E1	6.91414E-4	4.29153E-3	9.53436E-2	2.73442E1	-3.26512E1	-3.2635E1	2.68352E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.02659E-1
2.1E1	6.1E1	0.0E0	8.49E2	5.88E2	-7.18554E-2	-8.80017E1	-1.66893E-4	-8.80012E1	6.67572E-4	4.52995E-3	9.55343E-2	2.73169E1	-3.26478E1	-3.26278E1	2.68302E1	1.19965E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00041E-1
2.2E1	1.915E3	0.0E0	8.89E2	6.17E2	-7.12368E-2	-8.80017E1	-1.66893E-4	-8.80013E1	3.8147E-4	4.52995E-3	9.5439E-2	2.73712E1	-3.26803E1	-3.2606E1	2.6825E1	1.19941E-7	2.52131E-3	2.52131E-3	6.33388E-3	3.01104E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.18554E-2	-8.80019E1	-3.8147E-4	-8.80014E1	6.91414E-4	4.48227E-3	9.52959E-2	2.73219E1	-3.26585E1	-3.26302E1	2.68214E1	1.19913E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.01347E-1