[Scan]
initial_time=2016-01-18T18:45:20
final_time=2016-01-18T18:45:39
ip_count=19
run=1024
dataset=4
scan=262
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.78233E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-7.66909E-10
ql2_vset=
ql2_vmon=1.90735E-4
ql2_imon=1.37637E-9
ql3_vset=
ql3_vmon=-8.8001E1
ql3_imon=-2.72143E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.58085E-8
mult1=-2.12619E-8
mult2=-2.77421E-9
rf_tmon=-4.78083E-3
rf_agc=3.22886E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.19617E-3
ql5_imon=5.31971E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65352E0
bslens_imon=2.27459E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19316E1
lens5a_imon=1.98379E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05136E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54253E1
cs_ef1b_imon=2.85404E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.0215E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04952E1
cs_ea1_imon=2.51697E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97767E0
lens1_imon=1.65093E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64855E1
os_ef1alow_imon=2.96252E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0381E1
cs_ea2_imon=1.49027E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84256E1
cs_ef1a_imon=2.94017E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.36039E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1188E1
os_restr1_imon=4.26751E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14999E1
os_ea1_imon=2.34753E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63485E1
os_ef1bup_imon=3.05694E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23527E0
cs_ionrep_imon=1.20188E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91931E2
cs_nozzle_imon=1.93305E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01557E1
cs_anode1_imon=3.0036E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=4.0363E-8
tplens_vset=1.4E-1
tplens_vmon=1.67508E0
tplens_imon=-3.71445E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26207E1
iondef3_imon=1.50578E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2659E1
iondef2_imon=1.56562E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03059E2
lens6_imon=2.98223E-4
ql6_vset=1.0E-1
ql6_vmon=9.53913E-2
ql6_imon=9.03273E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2509E0
ionrepsh_imon=1.77182E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33592E1
lens5b_imon=2.18927E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75036E1
cs_ef2b_imon=3.14596E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52247E0
os_ea2_imon=-7.3915E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06136E2
lens4b_imon=2.00569E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71174E1
cs_ef2a_imon=3.1492E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04194E0
os_ef2alow_imon=-2.68077E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.50883E-1
os_ef2bup_imon=-5.24319E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11334E1
os_restr2_imon=3.44905E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23029E2
cs_ionfoca_imon=6.30289E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02067E1
cs_anode2_imon=2.23488E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73458E1
iondef1_imon=1.11428E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68458E1
iondef4_imon=1.08449E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.15349E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.97598E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10912E0
cs_ionaccel_imon=-1.89511E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47356E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56273E1
einzel_imon=7.81037E-6
window_vset=0.0E0
window_vmon=2.49178E-1
window_imon=-9.07619E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82691E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86338E1
mask2_imon=-6.66154E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92692E3
multa_neg_imon=7.64597E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.73392E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.1593E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36547E0
defgridb_imon=5.9913E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33351E1
os_fil1_imon=9.41417E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07449E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66817E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30909E1
cs_fil1_imon=9.94293E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6397E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67898E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24138E-2
os_fil2_imon=-2.77409E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.7549E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.31377E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-1.77699E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25034E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22918E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.02253E-1
chamber_ion_pmon=1.21445E-7
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.49391E-1
res40_imon=-2.59067E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.106E3	1.0E0	1.47E2	4.1E1	-7.21643E-2	-8.80018E1	-2.38419E-4	-8.80013E1	6.4373E-4	4.72069E-3	9.54628E-2	2.73446E1	-3.26691E1	-3.26225E1	2.67943E1	1.20158E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00197E-1
2.0E0	1.1158E5	9.3E1	3.16E2	1.6E2	-7.201E-2	-8.80017E1	-2.6226E-4	-8.8001E1	5.00679E-4	4.43459E-3	9.53436E-2	2.73382E1	-3.2645E1	-3.26125E1	2.68275E1	1.19965E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00041E-1
3.0E0	1.3E1	0.0E0	4.85E2	2.79E2	-7.13143E-2	-8.80017E1	-2.86102E-4	-8.80009E1	2.6226E-4	5.07832E-3	9.54151E-2	2.73381E1	-3.26845E1	-3.26498E1	2.68395E1	1.20174E-7	2.51334E-3	2.51334E-3	6.28552E-3	3.01085E-1
4.0E0	2.4559E4	7.0E0	6.55E2	3.98E2	-7.17779E-2	-8.80018E1	-2.6226E-4	-8.80013E1	4.05312E-4	4.95911E-3	9.53436E-2	2.73598E1	-3.26554E1	-3.26236E1	2.68328E1	1.20106E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.16233E-2	-8.80017E1	-4.76837E-5	-8.80011E1	2.6226E-4	4.88758E-3	9.56059E-2	2.73207E1	-3.26825E1	-3.26194E1	2.68352E1	1.19809E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01347E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.201E-2	-8.80018E1	-1.43051E-4	-8.80012E1	2.38419E-4	4.64916E-3	9.54628E-2	2.73387E1	-3.26518E1	-3.26164E1	2.68202E1	1.20174E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.9874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80015E1	-1.90735E-4	-8.80014E1	5.48363E-4	4.48227E-3	9.55105E-2	2.73248E1	-3.26538E1	-3.26185E1	2.68325E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.9714E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80019E1	-1.43051E-4	-8.80012E1	4.29153E-4	4.48227E-3	9.55343E-2	2.73213E1	-3.2647E1	-3.26056E1	2.68514E1	1.19985E-7	2.51809E-3	2.51809E-3	6.32644E-3	2.98574E-1
1.2E1	1.21E2	0.0E0	4.85E2	3.23E2	-7.18554E-2	-8.80018E1	1.66893E-4	-8.80015E1	5.96046E-4	4.45843E-3	9.53436E-2	2.73183E1	-3.26621E1	-3.26506E1	2.68442E1					
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80017E1	-2.6226E-4	-8.80015E1	1.90735E-4	4.50611E-3	9.58443E-2	2.73423E1	-3.2636E1	-3.26331E1	2.68346E1	1.2026E-7	2.5131E-3	2.5131E-3	6.30202E-3	3.0071E-1
1.4E1	3.584E3	1.0E0	5.66E2	3.82E2	-7.10051E-2	-8.80017E1	-2.14577E-4	-8.80013E1	3.57628E-4	4.41074E-3	9.53197E-2	2.72799E1	-3.26182E1	-3.26482E1	2.6828E1	1.19965E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.01609E-1
1.5E1	1.02E2	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.80017E1	-4.76837E-5	-8.80014E1	3.33786E-4	4.57764E-3	9.53913E-2	2.73442E1	-3.26452E1	-3.26585E1	2.68302E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.98481E-1
1.6E1	5.1E2	0.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80017E1	1.43051E-4	-8.80011E1	6.19888E-4	4.81606E-3	9.53913E-2	2.73279E1	-3.26711E1	-3.26374E1	2.68556E1	1.20174E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.97445E-1
1.7E1	1.102E3	1.0E0	6.87E2	4.7E2	-7.17779E-2	-8.80017E1	3.09944E-4	-8.80011E1	4.05312E-4	4.45843E-3	9.52005E-2	2.73328E1	-3.2662E1	-3.26337E1	2.68064E1	1.20055E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.0071E-1
1.8E1	4.59E3	8.0E0	7.27E2	5.0E2	-7.18554E-2	-8.80016E1	1.19209E-4	-8.8001E1	7.86781E-4	4.62532E-3	9.51052E-2	2.7321E1	-3.26603E1	-3.25985E1	2.68424E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00041E-1
1.9E1	2.31E3	0.0E0	7.68E2	5.29E2	-7.22418E-2	-8.80017E1	2.38419E-5	-8.80012E1	4.05312E-4	4.29153E-3	9.50813E-2	2.73328E1	-3.26343E1	-3.26337E1	2.68238E1	1.19705E-7	2.51443E-3	2.51443E-3	6.34588E-3	3.01609E-1
2.0E1	2.6927E4	1.7E1	8.08E2	5.58E2	-7.30146E-2	-8.80017E1	1.19209E-4	-8.80011E1	2.6226E-4	4.43459E-3	9.52244E-2	2.73225E1	-3.26392E1	-3.26374E1	2.68394E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01609E-1
2.1E1	6.6E1	0.0E0	8.49E2	5.88E2	-7.40192E-2	-8.80017E1	-2.6226E-4	-8.80014E1	5.48363E-4	4.36306E-3	9.51767E-2	2.73586E1	-3.26536E1	-3.2611E1	2.68214E1	1.20017E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.02922E-1
2.2E1	1.914E3	1.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80014E1	2.38419E-5	-8.80013E1	2.6226E-4	4.19617E-3	9.52482E-2	2.73003E1	-3.25725E1	-3.26056E1	2.68364E1	1.20226E-7	2.52867E-3	2.52867E-3	6.31288E-3	3.01871E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80016E1	1.90735E-4	-8.8001E1	1.90735E-4	4.19617E-3	9.53913E-2	2.73458E1	-3.2659E1	-3.26207E1	2.68458E1	1.21445E-7	2.52492E-3	2.52492E-3	6.29665E-3	3.02253E-1