[Scan]
initial_time=2016-01-18T18:46:40
final_time=2016-01-18T18:46:59
ip_count=19
run=1024
dataset=4
scan=265
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17007E-2
qbias_imon=-3.82347E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-7.97391E-10
ql2_vset=
ql2_vmon=-2.86102E-4
ql2_imon=1.38776E-9
ql3_vset=
ql3_vmon=-8.80014E1
ql3_imon=-2.71834E-9
ql4_vset=
ql4_vmon=7.15256E-4
ql4_imon=1.58115E-8
mult1=-1.74584E-8
mult2=-2.7266E-9
rf_tmon=-5.2935E-3
rf_agc=3.16272E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.07696E-3
ql5_imon=5.40984E-10
bslens_vset=-6.2E0
bslens_vmon=-6.663E0
bslens_imon=2.39981E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19596E1
lens5a_imon=2.00007E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.04894E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5388E1
cs_ef1b_imon=2.86388E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.02099E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04211E1
cs_ea1_imon=2.53008E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99247E0
lens1_imon=1.48157E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64933E1
os_ef1alow_imon=2.97316E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03917E1
cs_ea2_imon=1.50348E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84419E1
cs_ef1a_imon=2.94435E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.364E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11429E1
os_restr1_imon=4.25163E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14718E1
os_ea1_imon=2.34239E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6386E1
os_ef1bup_imon=3.07047E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25026E0
cs_ionrep_imon=1.20561E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91955E2
cs_nozzle_imon=1.93585E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01778E1
cs_anode1_imon=2.98514E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20425E0
olens4_imon=4.0406E-8
tplens_vset=1.4E-1
tplens_vmon=1.68E0
tplens_imon=-3.32879E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.49724E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2623E1
iondef2_imon=1.57951E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03034E2
lens6_imon=2.98206E-4
ql6_vset=1.0E-1
ql6_vmon=9.54866E-2
ql6_imon=8.82614E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25455E0
ionrepsh_imon=1.7863E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33952E1
lens5b_imon=2.18555E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74713E1
cs_ef2b_imon=3.11388E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55328E0
os_ea2_imon=-5.202E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06103E2
lens4b_imon=2.00766E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71289E1
cs_ef2a_imon=3.16666E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08013E0
os_ef2alow_imon=-2.58554E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.12602E-1
os_ef2bup_imon=-5.35505E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11335E1
os_restr2_imon=3.43425E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23034E2
cs_ionfoca_imon=6.29267E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01572E1
cs_anode2_imon=2.24823E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73381E1
iondef1_imon=1.10717E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68256E1
iondef4_imon=1.09551E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.16957E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81522E-1
olens1_imon=7.97053E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13264E0
cs_ionaccel_imon=-1.80334E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47279E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56474E1
einzel_imon=7.85251E-6
window_vset=0.0E0
window_vmon=2.65003E-1
window_imon=-8.34015E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82715E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-6.73084E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.47219E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.65311E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50159E3
multb_neg_imon=7.1306E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34839E0
defgridb_imon=5.81935E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33337E1
os_fil1_imon=9.42894E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06818E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66526E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30864E1
cs_fil1_imon=9.95665E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62478E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67518E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20001E-2
os_fil2_imon=-2.63131E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89721E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.60353E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36375E-1
cs_fil2_imon=-2.60013E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=4.50077E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22618E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.9841E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.19889E-1
res40_imon=-2.66414E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.153E3	2.0E0	1.47E2	4.1E1	-7.15461E-2	-8.80021E1	-3.57628E-4	-8.80013E1	7.15256E-4	4.57764E-3	9.5582E-2	2.7321E1	-3.26962E1	-3.25971E1	2.6854E1	1.20297E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.99083E-1
2.0E0	1.12251E5	1.07E2	3.16E2	1.6E2	-7.201E-2	-8.80019E1	-4.76837E-5	-8.8001E1	4.29153E-4	4.36306E-3	9.56059E-2	2.73467E1	-3.26505E1	-3.26487E1	2.68207E1	1.20092E-7	2.51603E-3	2.51603E-3	6.31269E-3	3.00097E-1
3.0E0	1.1E1	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80019E1	-3.09944E-4	-8.80011E1	3.8147E-4	4.31538E-3	9.55343E-2	2.73346E1	-3.26874E1	-3.26451E1	2.68319E1	1.20031E-7	2.51804E-3	2.51804E-3	6.29067E-3	3.01742E-1
4.0E0	2.4284E4	1.5E1	6.55E2	3.98E2	-7.18554E-2	-8.8002E1	-1.90735E-4	-8.80009E1	3.57628E-4	4.41074E-3	9.57251E-2	2.73105E1	-3.26476E1	-3.26092E1	2.68238E1	1.19902E-7	2.51096E-3	2.51096E-3	6.30202E-3	3.03027E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.18554E-2	-8.80018E1	-2.14577E-4	-8.80009E1	7.15256E-4	4.26769E-3	9.52482E-2	2.73139E1	-3.26531E1	-3.25759E1	2.68308E1	1.19902E-7	2.51739E-3	2.51739E-3	6.29128E-3	3.02769E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.80019E1	-1.66893E-4	-8.80011E1	3.8147E-4	4.22001E-3	9.5439E-2	2.7321E1	-3.26474E1	-3.2626E1	2.68525E1	1.19757E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.02133E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80021E1	-2.6226E-4	-8.80011E1	2.14577E-4	4.12464E-3	9.57012E-2	2.73293E1	-3.26437E1	-3.26343E1	2.68233E1	1.20122E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.03712E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.8002E1	-2.14577E-4	-8.8001E1	7.15256E-4	4.19617E-3	9.5439E-2	2.73562E1	-3.26158E1	-3.25713E1	2.68538E1	1.2117E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.02396E-1
1.2E1	1.21E2	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80019E1	-5.48363E-4	-8.80013E1	5.72205E-4	4.26769E-3	9.56059E-2	2.72987E1	-3.26614E1	-3.26179E1	2.68134E1	1.2175E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.03449E-1
1.3E1	2.2E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80017E1	-4.29153E-4	-8.80011E1	4.76837E-4	4.05312E-3	9.57012E-2	2.73344E1	-3.26535E1	-3.26166E1	2.68487E1	1.2207E-7	2.51679E-3	2.51679E-3	6.33341E-3	3.03476E-1
1.4E1	3.611E3	3.0E0	5.66E2	3.82E2	-7.36328E-2	-8.80018E1	-6.91414E-4	-8.80013E1	2.38419E-4	4.41074E-3	9.55105E-2	2.73045E1	-3.26799E1	-3.2675E1	2.68587E1	1.22064E-7	2.51411E-3	2.51411E-3	6.29581E-3	3.00916E-1
1.5E1	1.05E2	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80019E1	-6.19888E-4	-8.80014E1	1.19209E-4	4.22001E-3	9.55105E-2	2.7358E1	-3.26627E1	-3.26224E1	2.67998E1	1.2212E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.01347E-1
1.6E1	4.99E2	1.0E0	6.47E2	4.41E2	-7.18554E-2	-8.80016E1	-3.8147E-4	-8.8001E1	8.82149E-4	4.3869E-3	9.55343E-2	2.73063E1	-3.26969E1	-3.26278E1	2.6822E1	1.22227E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9874E-1
1.7E1	1.209E3	0.0E0	6.87E2	4.7E2	-7.19325E-2	-8.80016E1	-2.38419E-5	-8.80012E1	5.72205E-4	4.26769E-3	9.57012E-2	2.736E1	-3.26472E1	-3.26195E1	2.67978E1	1.21486E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00824E-1
1.8E1	4.622E3	5.0E0	7.27E2	5.0E2	-7.18554E-2	-8.80019E1	-2.14577E-4	-8.80012E1	5.96046E-4	4.41074E-3	9.55105E-2	2.73476E1	-3.26579E1	-3.2606E1	2.68484E1	1.2054E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01347E-1
1.9E1	2.237E3	0.0E0	7.68E2	5.29E2	-7.14689E-2	-8.80019E1	1.19209E-4	-8.80012E1	9.53674E-5	4.24385E-3	9.55105E-2	2.73284E1	-3.26352E1	-3.26493E1	2.68376E1	1.21342E-7	2.52169E-3	2.52169E-3	6.33436E-3	3.0071E-1
2.0E1	2.6813E4	2.9E1	8.08E2	5.58E2	-7.11597E-2	-8.80019E1	-1.19209E-4	-8.80012E1	1.90735E-4	4.36306E-3	9.5439E-2	2.73523E1	-3.26437E1	-3.26142E1	2.68749E1	1.22014E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.01085E-1
2.1E1	4.9E1	0.0E0	8.49E2	5.88E2	-7.13143E-2	-8.80018E1	-4.05312E-4	-8.8001E1	6.19888E-4	4.36306E-3	9.5439E-2	2.73502E1	-3.2647E1	-3.25942E1	2.68484E1	1.21697E-7	2.52538E-3	2.52538E-3	6.30192E-3	2.9874E-1
2.2E1	1.983E3	0.0E0	8.89E2	6.17E2	-7.06958E-2	-8.8002E1	-1.43051E-4	-8.80012E1	2.38419E-4	4.43459E-3	9.57012E-2	2.73671E1	-3.26735E1	-3.2622E1	2.68151E1	1.19749E-7	2.51417E-3	2.51417E-3	6.29128E-3	2.99175E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.17007E-2	-8.80019E1	-2.86102E-4	-8.80014E1	7.15256E-4	4.07696E-3	9.54866E-2	2.73381E1	-3.2623E1	-3.26248E1	2.68256E1	1.20055E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.9841E-1