[Scan]
initial_time=2016-01-18T18:47:59
final_time=2016-01-18T18:48:19
ip_count=19
run=1024
dataset=4
scan=268
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17779E-2
qbias_imon=-3.80268E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-7.77781E-10
ql2_vset=
ql2_vmon=-1.66893E-4
ql2_imon=1.40278E-9
ql3_vset=
ql3_vmon=-8.80012E1
ql3_imon=-2.58529E-9
ql4_vset=
ql4_vmon=5.00679E-4
ql4_imon=1.58593E-8
mult1=-1.96778E-8
mult2=-2.72522E-9
rf_tmon=-4.71594E-3
rf_agc=3.34802E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.98159E-3
ql5_imon=5.85043E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67683E0
bslens_imon=2.37337E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.195E1
lens5a_imon=1.99288E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.05178E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53442E1
cs_ef1b_imon=2.81403E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02291E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04593E1
cs_ea1_imon=2.52061E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00352E0
lens1_imon=1.42834E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64921E1
os_ef1alow_imon=2.98955E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03395E1
cs_ea2_imon=1.48108E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84791E1
cs_ef1a_imon=2.95675E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.35901E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10979E1
os_restr1_imon=4.23652E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15406E1
os_ea1_imon=2.34824E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63425E1
os_ef1bup_imon=3.08613E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24384E0
cs_ionrep_imon=1.21811E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91946E2
cs_nozzle_imon=1.93601E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02476E1
cs_anode1_imon=3.02054E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20411E0
olens4_imon=4.03169E-8
tplens_vset=1.4E-1
tplens_vmon=1.70101E0
tplens_imon=-1.39614E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2603E1
iondef3_imon=1.48392E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2659E1
iondef2_imon=1.57169E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0304E2
lens6_imon=2.98116E-4
ql6_vset=1.0E-1
ql6_vmon=9.52244E-2
ql6_imon=9.2696E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24679E0
ionrepsh_imon=1.78158E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3374E1
lens5b_imon=2.19392E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74742E1
cs_ef2b_imon=3.10055E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5323E0
os_ea2_imon=-7.90865E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0613E2
lens4b_imon=2.00711E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70987E1
cs_ef2a_imon=3.14452E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06717E0
os_ef2alow_imon=-2.13657E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04031E-1
os_ef2bup_imon=-5.1639E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11376E1
os_restr2_imon=3.4368E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.26637E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01761E1
cs_anode2_imon=2.27128E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73033E1
iondef1_imon=1.10343E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68319E1
iondef4_imon=1.07044E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.25799E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=7.95335E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15717E0
cs_ionaccel_imon=-1.55273E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02131E2
cs_ionfocb_imon=1.47396E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56261E1
einzel_imon=7.40673E-6
window_vset=0.0E0
window_vmon=2.94227E-1
window_imon=-6.51738E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82738E2
mask1_imon=2.39437E-4
mask2_vset=0.0E0
mask2_vmon=-1.86464E1
mask2_imon=-9.83303E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.57276E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.29857E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=7.58338E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42327E0
defgridb_imon=5.94109E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33322E1
os_fil1_imon=9.44288E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07383E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66601E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3089E1
cs_fil1_imon=9.97176E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62738E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67786E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.28124E-2
os_fil2_imon=-2.47976E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.03721E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.57621E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36126E-1
cs_fil2_imon=-2.90023E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.47899E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22816E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.14242E-1
res40_imon=-2.18342E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.218E3	1.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80019E1	-1.90735E-4	-8.8001E1	3.57628E-4	4.52995E-3	9.56297E-2	2.73147E1	-3.26699E1	-3.2653E1	2.69043E1	1.20311E-7	2.51525E-3	2.51525E-3	6.33436E-3	2.9841E-1
2.0E0	1.11932E5	7.8E1	3.16E2	1.6E2	-7.11597E-2	-8.8002E1	0.0E0	-8.80015E1	6.4373E-4	4.52995E-3	9.53913E-2	2.73541E1	-3.26638E1	-3.26272E1	2.68134E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.02133E-1
3.0E0	1.5E1	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.8002E1	2.38419E-5	-8.80013E1	9.05991E-4	4.31538E-3	9.57251E-2	2.73393E1	-3.2637E1	-3.26405E1	2.68259E1	1.19913E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.01085E-1
4.0E0	2.4266E4	1.5E1	6.55E2	3.98E2	-7.23964E-2	-8.8002E1	-3.09944E-4	-8.80009E1	6.19888E-4	4.45843E-3	9.56059E-2	2.72979E1	-3.26591E1	-3.26092E1	2.68436E1	1.19991E-7	2.52131E-3	2.52131E-3	6.2863E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.13915E-2	-8.80019E1	-2.14577E-4	-8.80011E1	6.91414E-4	4.31538E-3	9.57012E-2	2.73369E1	-3.26452E1	-3.26098E1	2.68202E1	1.20055E-7	2.51203E-3	2.51203E-3	6.33436E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.8002E1	-3.09944E-4	-8.8001E1	9.05991E-4	4.31538E-3	9.5439E-2	2.72992E1	-3.26602E1	-3.26189E1	2.68268E1	1.20191E-7	2.51915E-3	2.51915E-3	6.32418E-3	3.00942E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80018E1	-4.76837E-5	-8.8001E1	1.04904E-3	4.62532E-3	9.57251E-2	2.73279E1	-3.26777E1	-3.26194E1	2.68244E1	1.19891E-7	2.51498E-3	2.51498E-3	6.29684E-3	3.00852E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80019E1	-1.90735E-4	-8.80011E1	8.34465E-4	4.14848E-3	9.55582E-2	2.73099E1	-3.26344E1	-3.26194E1	2.68683E1	1.19925E-7	2.52139E-3	2.52139E-3	6.3074E-3	3.03081E-1
1.2E1	8.9E1	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.80016E1	-1.19209E-4	-8.80011E1	5.72205E-4	4.673E-3	9.5129E-2	2.73151E1	-3.26732E1	-3.26384E1	2.6814E1	1.19902E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.01738E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80018E1	-2.86102E-4	-8.80009E1	6.4373E-4	4.41074E-3	9.54628E-2	2.72931E1	-3.26717E1	-3.2632E1	2.68304E1	1.19549E-7	2.5188E-3	2.5188E-3	6.34037E-3	2.99E-1
1.4E1	3.583E3	4.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80019E1	-7.15256E-5	-8.80011E1	5.72205E-4	4.26769E-3	9.56297E-2	2.73147E1	-3.26284E1	-3.25924E1	2.6849E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.98222E-1
1.5E1	1.12E2	0.0E0	6.06E2	4.11E2	-7.15461E-2	-8.80017E1	-1.90735E-4	-8.80013E1	4.29153E-4	4.48227E-3	9.53913E-2	2.73244E1	-3.26795E1	-3.26528E1	2.68667E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9952E-1
1.6E1	5.14E2	2.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80021E1	-5.24521E-4	-8.80012E1	5.00679E-4	4.45843E-3	9.54151E-2	2.73242E1	-3.2654E1	-3.2633E1	2.68325E1	1.20016E-7	2.5216E-3	2.5216E-3	6.3074E-3	3.01365E-1
1.7E1	1.191E3	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80018E1	-4.52995E-4	-8.8001E1	6.67572E-4	4.31538E-3	9.57489E-2	2.73216E1	-3.26276E1	-3.26646E1	2.6827E1	1.19895E-7	2.51527E-3	2.51527E-3	6.31321E-3	3.01193E-1
1.8E1	4.638E3	1.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80018E1	-3.57628E-4	-8.80008E1	4.76837E-4	4.24385E-3	9.5439E-2	2.73334E1	-3.26685E1	-3.26189E1	2.68151E1	1.19869E-7	2.51709E-3	2.51709E-3	6.27928E-3	3.006E-1
1.9E1	2.298E3	1.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80018E1	-9.53674E-5	-8.80008E1	5.48363E-4	4.29153E-3	9.57251E-2	2.73237E1	-3.26597E1	-3.26272E1	2.68223E1	1.20122E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.9952E-1
2.0E1	2.6823E4	1.7E1	8.08E2	5.58E2	-7.24736E-2	-8.8002E1	-1.66893E-4	-8.80011E1	5.48363E-4	4.24385E-3	9.53913E-2	2.73399E1	-3.26711E1	-3.26128E1	2.68583E1	1.20017E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.98481E-1
2.1E1	5.7E1	0.0E0	8.49E2	5.88E2	-7.201E-2	-8.80018E1	-2.6226E-4	-8.80012E1	6.91414E-4	4.26769E-3	9.54151E-2	2.73201E1	-3.26807E1	-3.26194E1	2.6843E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99941E-1
2.2E1	1.92E3	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80018E1	-1.19209E-4	-8.80014E1	4.29153E-4	4.31538E-3	9.53913E-2	2.7288E1	-3.26838E1	-3.27416E1	2.68322E1	1.20122E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.9952E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.17779E-2	-8.80021E1	-1.66893E-4	-8.80012E1	5.00679E-4	3.98159E-3	9.52244E-2	2.73033E1	-3.2659E1	-3.2603E1	2.68319E1	1.19902E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.99686E-1