[Scan]
initial_time=2016-01-18T18:48:26
final_time=2016-01-18T18:48:46
ip_count=19
run=1024
dataset=4
scan=269
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.76849E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-7.67481E-10
ql2_vset=
ql2_vmon=7.15256E-5
ql2_imon=1.37398E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-2.48431E-9
ql4_vset=
ql4_vmon=5.24521E-4
ql4_imon=1.58212E-8
mult1=-1.60131E-8
mult2=-2.81537E-9
rf_tmon=-4.75133E-3
rf_agc=3.21942E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.31538E-3
ql5_imon=5.92136E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65914E0
bslens_imon=2.36983E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19689E1
lens5a_imon=1.99253E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05026E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54501E1
cs_ef1b_imon=2.85672E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02199E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04581E1
cs_ea1_imon=2.52875E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01236E0
lens1_imon=1.49913E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64736E1
os_ef1alow_imon=2.96549E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03732E1
cs_ea2_imon=1.49312E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84232E1
cs_ef1a_imon=2.93282E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.36433E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11483E1
os_restr1_imon=4.2767E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14792E1
os_ea1_imon=2.34895E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64E1
os_ef1bup_imon=3.07461E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21493E0
cs_ionrep_imon=1.18448E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9191E2
cs_nozzle_imon=1.93682E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01682E1
cs_anode1_imon=2.97418E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=4.02851E-8
tplens_vset=1.4E-1
tplens_vmon=1.65972E0
tplens_imon=-2.17481E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26166E1
iondef3_imon=1.50586E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26779E1
iondef2_imon=1.57028E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03015E2
lens6_imon=2.98225E-4
ql6_vset=1.0E-1
ql6_vmon=9.52721E-2
ql6_imon=9.46343E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27038E0
ionrepsh_imon=1.78795E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33634E1
lens5b_imon=2.17127E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74588E1
cs_ef2b_imon=3.14412E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5146E0
os_ea2_imon=-8.47495E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06128E2
lens4b_imon=2.00584E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71652E1
cs_ef2a_imon=3.17088E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07425E0
os_ef2alow_imon=-2.66146E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.343E-1
os_ef2bup_imon=-5.42429E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11303E1
os_restr2_imon=3.43257E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.3007E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01705E1
cs_anode2_imon=2.23291E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73269E1
iondef1_imon=1.10591E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6825E1
iondef4_imon=1.12117E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.17664E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81307E-1
olens1_imon=7.9362E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13593E0
cs_ionaccel_imon=-1.90733E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02063E2
cs_ionfocb_imon=1.47212E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56515E1
einzel_imon=7.93458E-6
window_vset=0.0E0
window_vmon=2.32166E-1
window_imon=-8.30005E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82675E2
mask1_imon=2.39011E-4
mask2_vset=0.0E0
mask2_vmon=-1.86298E1
mask2_imon=-5.17233E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.69664E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93694E3
defgrida_imon=6.49324E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50167E3
multb_neg_imon=7.23651E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40851E0
defgridb_imon=5.95525E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33308E1
os_fil1_imon=9.43822E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07972E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66315E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30842E1
cs_fil1_imon=9.95452E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62441E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67949E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.10396E-2
os_fil2_imon=-2.90666E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.69805E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.93183E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35395E-1
cs_fil2_imon=-2.17686E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25785E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22673E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.2026E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.25815E-1
res40_imon=-2.66494E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.228E3	1.0E0	1.47E2	4.1E1	-7.13915E-2	-8.80022E1	-6.91414E-4	-8.8001E1	3.33786E-4	4.31538E-3	9.49144E-2	2.73309E1	-3.26585E1	-3.2644E1	2.68538E1	1.22018E-7	2.51919E-3	2.51919E-3	6.3074E-3	3.01356E-1
2.0E0	1.11859E5	1.47E2	3.16E2	1.6E2	-7.23189E-2	-8.80022E1	-6.4373E-4	-8.8001E1	5.72205E-4	4.50611E-3	9.50336E-2	2.73766E1	-3.26705E1	-3.25984E1	2.68232E1	1.2212E-7	2.51116E-3	2.51116E-3	6.34037E-3	3.00041E-1
3.0E0	1.5E1	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80021E1	-7.39098E-4	-8.80009E1	6.4373E-4	4.33922E-3	9.53197E-2	2.73283E1	-3.26614E1	-3.26138E1	2.68522E1	1.2212E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00563E-1
4.0E0	2.4286E4	1.4E1	6.55E2	3.98E2	-7.18554E-2	-8.80023E1	-6.67572E-4	-8.80007E1	7.15256E-4	4.00543E-3	9.53436E-2	2.73369E1	-3.26561E1	-3.26242E1	2.68671E1	1.22069E-7	2.52448E-3	2.52448E-3	6.31269E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.8002E1	-4.29153E-4	-8.80007E1	6.67572E-4	4.12464E-3	9.5129E-2	2.73351E1	-3.2653E1	-3.25936E1	2.68352E1	1.2212E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23189E-2	-8.80023E1	-2.86102E-4	-8.80011E1	4.76837E-4	3.86238E-3	9.53913E-2	2.73117E1	-3.26669E1	-3.26146E1	2.68322E1	1.2212E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.80017E1	-5.00679E-4	-8.80011E1	6.91414E-4	4.1008E-3	9.53436E-2	2.73201E1	-3.26573E1	-3.26302E1	2.68418E1	1.21012E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.32464E-2	-8.80021E1	-6.67572E-4	-8.80012E1	8.58307E-4	3.76701E-3	9.52244E-2	2.73033E1	-3.26753E1	-3.25948E1	2.68424E1	1.20174E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.9952E-1
1.2E1	1.04E2	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.8002E1	-6.67572E-4	-8.80008E1	6.19888E-4	4.22001E-3	9.51529E-2	2.7346E1	-3.26687E1	-3.26212E1	2.68466E1	1.20122E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00563E-1
1.3E1	2.0E1	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.80022E1	-5.96046E-4	-8.80014E1	3.8147E-4	4.31538E-3	9.50336E-2	2.73387E1	-3.26627E1	-3.26458E1	2.68094E1	1.19978E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.0201E-1
1.4E1	3.531E3	3.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80021E1	-2.14577E-4	-8.80009E1	4.52995E-4	4.3869E-3	9.5129E-2	2.73357E1	-3.26735E1	-3.25671E1	2.68665E1	1.198E-7	2.51096E-3	2.51096E-3	6.33436E-3	3.01223E-1
1.5E1	9.1E1	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80022E1	-3.8147E-4	-8.80012E1	6.19888E-4	4.41074E-3	9.52482E-2	2.73187E1	-3.26714E1	-3.25865E1	2.68016E1	1.2117E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.9926E-1
1.6E1	4.72E2	0.0E0	6.47E2	4.41E2	-7.19325E-2	-8.8002E1	-5.72205E-4	-8.80012E1	4.05312E-4	4.48227E-3	9.52244E-2	2.7364E1	-3.2653E1	-3.26368E1	2.68238E1	1.19902E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.01223E-1
1.7E1	1.165E3	0.0E0	6.87E2	4.7E2	-7.10051E-2	-8.80022E1	-3.57628E-4	-8.80012E1	6.19888E-4	4.26769E-3	9.50575E-2	2.73351E1	-3.26627E1	-3.26272E1	2.68593E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9926E-1
1.8E1	4.663E3	6.0E0	7.27E2	5.0E2	-7.201E-2	-8.80022E1	-1.66893E-4	-8.80011E1	4.52995E-4	4.57764E-3	9.50098E-2	2.73063E1	-3.26645E1	-3.26434E1	2.68304E1	1.19705E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.01085E-1
1.9E1	2.339E3	2.0E0	7.68E2	5.29E2	-7.32464E-2	-8.8002E1	-7.15256E-5	-8.80011E1	2.86102E-4	4.12464E-3	9.50813E-2	2.73252E1	-3.26437E1	-3.26455E1	2.68615E1	1.19965E-7	2.52099E-3	2.52099E-3	6.28552E-3	3.01609E-1
2.0E1	2.7143E4	2.4E1	8.08E2	5.58E2	-7.32464E-2	-8.8002E1	-1.19209E-4	-8.8001E1	6.67572E-4	4.07696E-3	9.50098E-2	2.73339E1	-3.26434E1	-3.26188E1	2.68334E1	1.2026E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.00197E-1
2.1E1	5.6E1	1.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80018E1	-2.38419E-4	-8.80009E1	7.86781E-4	4.55379E-3	9.4986E-2	2.73358E1	-3.26753E1	-3.26063E1	2.68169E1	1.20383E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9952E-1
2.2E1	1.866E3	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80017E1	-4.05312E-4	-8.80013E1	8.34465E-4	4.05312E-3	9.5129E-2	2.7419E1	-3.28183E1	-3.25906E1	2.68358E1	1.20092E-7	2.51182E-3	2.51182E-3	6.32858E-3	3.006E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80017E1	7.15256E-5	-8.80011E1	5.24521E-4	4.31538E-3	9.52721E-2	2.73269E1	-3.26779E1	-3.26166E1	2.6825E1	1.2026E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.01738E-1