[Scan]
initial_time=2016-01-18T18:49:19
final_time=2016-01-18T18:49:39
ip_count=19
run=1024
dataset=4
scan=271
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.86034E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-7.42233E-10
ql2_vset=
ql2_vmon=4.76837E-5
ql2_imon=1.39011E-9
ql3_vset=
ql3_vmon=-8.80012E1
ql3_imon=-2.42263E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=1.58047E-8
mult1=-1.40389E-8
mult2=-2.76049E-9
rf_tmon=-4.83392E-3
rf_agc=3.28313E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=5.61094E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65112E0
bslens_imon=2.39716E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19749E1
lens5a_imon=2.0047E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.05129E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53947E1
cs_ef1b_imon=2.82304E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04659E2
lens23_imon=1.02276E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0482E1
cs_ea1_imon=2.5267E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96325E0
lens1_imon=1.56802E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64572E1
os_ef1alow_imon=2.98018E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03828E1
cs_ea2_imon=1.47802E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84484E1
cs_ef1a_imon=2.95603E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.3605E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=4.25706E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15041E1
os_ea1_imon=2.36844E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63347E1
os_ef1bup_imon=3.07172E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22506E0
cs_ionrep_imon=1.19395E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91969E2
cs_nozzle_imon=1.93478E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01761E1
cs_anode1_imon=2.98486E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20399E0
olens4_imon=4.03572E-8
tplens_vset=1.4E-1
tplens_vmon=1.68529E0
tplens_imon=-3.6063E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26284E1
iondef3_imon=1.49712E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26738E1
iondef2_imon=1.5512E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03022E2
lens6_imon=2.98151E-4
ql6_vset=1.0E-1
ql6_vmon=9.53197E-2
ql6_imon=9.14276E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27253E0
ionrepsh_imon=1.79417E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33868E1
lens5b_imon=2.18783E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74784E1
cs_ef2b_imon=3.13479E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52668E0
os_ea2_imon=-6.81471E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0612E2
lens4b_imon=2.00529E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71444E1
cs_ef2a_imon=3.15497E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03293E0
os_ef2alow_imon=-2.55463E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09437E-1
os_ef2bup_imon=-5.24679E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11316E1
os_restr2_imon=3.43212E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.27513E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02091E1
cs_anode2_imon=2.25794E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73405E1
iondef1_imon=1.10707E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68151E1
iondef4_imon=1.0881E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.13424E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81212E-1
olens1_imon=7.94177E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13194E0
cs_ionaccel_imon=-1.76176E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0211E2
cs_ionfocb_imon=1.47334E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56525E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=2.63593E-1
window_imon=-8.13916E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82703E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.86644E1
mask2_imon=-6.84173E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.45491E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.67263E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.39362E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28427E0
defgridb_imon=5.98048E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33332E1
os_fil1_imon=9.43525E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07864E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66289E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30764E1
cs_fil1_imon=9.95044E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6257E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67742E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.29297E-2
os_fil2_imon=-2.70201E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79094E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.81905E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34572E-1
cs_fil2_imon=-2.19745E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.38249E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22804E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.01871E-1
chamber_ion_pmon=1.20174E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.25655E-1
res40_imon=-2.39966E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.169E3	1.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80018E1	-2.6226E-4	-8.80013E1	6.19888E-4	4.43459E-3	9.57251E-2	2.73316E1	-3.26579E1	-3.26213E1	2.68389E1	1.20055E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.0148E-1
2.0E0	1.11779E5	1.29E2	3.16E2	1.6E2	-7.25507E-2	-8.8002E1	-4.05312E-4	-8.80011E1	7.39098E-4	4.29153E-3	9.52721E-2	2.73345E1	-3.26529E1	-3.26162E1	2.68219E1	1.19902E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.02511E-1
3.0E0	1.2E1	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.8002E1	-4.52995E-4	-8.80012E1	3.09944E-4	4.14848E-3	9.56059E-2	2.73352E1	-3.26708E1	-3.2616E1	2.68511E1	1.20031E-7	2.51693E-3	2.51693E-3	6.33538E-3	3.01209E-1
4.0E0	2.3979E4	1.6E1	6.55E2	3.98E2	-7.14689E-2	-8.80023E1	-2.6226E-4	-8.80016E1	4.76837E-4	4.50611E-3	9.56535E-2	2.73364E1	-3.26791E1	-3.26549E1	2.67998E1	1.2026E-7	2.52384E-3	2.52384E-3	6.3074E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.80021E1	-2.86102E-4	-8.80014E1	6.4373E-4	4.1008E-3	9.55582E-2	2.73021E1	-3.26753E1	-3.2608E1	2.68436E1	1.198E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.9841E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80025E1	-2.6226E-4	-8.80012E1	7.62939E-4	4.45843E-3	9.55105E-2	2.73454E1	-3.26705E1	-3.26158E1	2.6837E1	1.19809E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80023E1	-1.43051E-4	-8.80013E1	3.8147E-4	4.45843E-3	9.52721E-2	2.73145E1	-3.26732E1	-3.26207E1	2.68244E1	1.20069E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.80022E1	0.0E0	-8.80012E1	7.15256E-5	4.48227E-3	9.5439E-2	2.73147E1	-3.26891E1	-3.26194E1	2.68581E1	1.20158E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.99686E-1
1.2E1	1.0E2	0.0E0	4.85E2	3.23E2	-7.23189E-2	-8.80021E1	-4.05312E-4	-8.80012E1	5.48363E-4	4.07696E-3	9.52959E-2	2.73195E1	-3.26699E1	-3.2632E1	2.68394E1	1.20069E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01609E-1
1.3E1	1.9E1	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.8002E1	-3.09944E-4	-8.80013E1	5.96046E-4	4.1008E-3	9.51529E-2	2.73123E1	-3.26597E1	-3.26314E1	2.68148E1	1.20122E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.9952E-1
1.4E1	3.611E3	2.0E0	5.66E2	3.82E2	-7.37103E-2	-8.80023E1	-2.14577E-4	-8.80011E1	3.09944E-4	4.29153E-3	9.50336E-2	2.73299E1	-3.26585E1	-3.25546E1	2.68322E1	1.19907E-7	2.51593E-3	2.51593E-3	6.3074E-3	2.99346E-1
1.5E1	9.1E1	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.80025E1	-1.90735E-4	-8.80011E1	8.10623E-4	4.17233E-3	9.50813E-2	2.73675E1	-3.26762E1	-3.26058E1	2.68304E1					
1.6E1	4.62E2	0.0E0	6.47E2	4.41E2	-7.37103E-2	-8.80024E1	-1.90735E-4	-8.80011E1	8.34465E-4	4.26769E-3	9.54866E-2	2.73291E1	-3.26338E1	-3.26296E1	2.6846E1	1.20084E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.00144E-1
1.7E1	1.151E3	1.0E0	6.87E2	4.7E2	-7.33239E-2	-8.80025E1	0.0E0	-8.80013E1	1.19209E-4	4.3869E-3	9.52482E-2	2.73285E1	-3.26609E1	-3.26573E1	2.68406E1	1.19861E-7	2.51007E-3	2.51007E-3	6.3074E-3	3.00824E-1
1.8E1	4.712E3	2.0E0	7.27E2	5.0E2	-7.34782E-2	-8.80023E1	-1.43051E-4	-8.8001E1	2.86102E-4	4.26769E-3	9.52959E-2	2.73267E1	-3.26705E1	-3.26488E1	2.67878E1	1.20069E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.02922E-1
1.9E1	2.246E3	3.0E0	7.68E2	5.29E2	-7.37874E-2	-8.80022E1	-2.86102E-4	-8.80008E1	5.48363E-4	4.22001E-3	9.52482E-2	2.73346E1	-3.26602E1	-3.26349E1	2.68271E1	1.19809E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.02922E-1
2.0E1	2.6901E4	1.6E1	8.08E2	5.58E2	-7.31692E-2	-8.80024E1	-3.57628E-4	-8.8001E1	5.96046E-4	4.1008E-3	9.53436E-2	2.73225E1	-3.26164E1	-3.26338E1	2.68272E1	1.20055E-7	2.52384E-3	2.52384E-3	6.3074E-3	3.01223E-1
2.1E1	5.7E1	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80023E1	-2.86102E-4	-8.80012E1	4.52995E-4	4.02927E-3	9.51529E-2	2.73429E1	-3.26687E1	-3.26308E1	2.67962E1	1.19978E-7	2.51359E-3	2.51359E-3	6.32978E-3	3.00144E-1
2.2E1	1.907E3	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80029E1	-2.38419E-4	-8.80011E1	-4.76837E-5	4.19617E-3	9.53674E-2	2.72114E1	-3.26458E1	-3.2772E1	2.68334E1	1.198E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.02253E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80027E1	4.76837E-5	-8.80012E1	-2.38419E-5	4.33922E-3	9.53197E-2	2.73405E1	-3.26738E1	-3.26284E1	2.68151E1	1.20174E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01871E-1