[Scan]
initial_time=2016-01-18T18:52:13
final_time=2016-01-18T18:52:35
ip_count=19
run=1024
dataset=4
scan=277
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17779E-2
qbias_imon=-3.85643E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-7.7039E-10
ql2_vset=
ql2_vmon=-1.66893E-4
ql2_imon=1.37136E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-2.47881E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.5865E-8
mult1=-1.89331E-8
mult2=-2.72718E-9
rf_tmon=-4.72774E-3
rf_agc=3.29257E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.31538E-3
ql5_imon=5.70405E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64451E0
bslens_imon=2.26738E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19652E1
lens5a_imon=2.0184E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.04898E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54379E1
cs_ef1b_imon=2.81872E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04634E2
lens23_imon=1.02121E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04814E1
cs_ea1_imon=2.52273E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98067E0
lens1_imon=1.39138E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64344E1
os_ef1alow_imon=2.98306E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04021E1
cs_ea2_imon=1.50145E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84442E1
cs_ef1a_imon=2.95675E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.35059E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11201E1
os_restr1_imon=4.26067E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14969E1
os_ea1_imon=2.35871E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63743E1
os_ef1bup_imon=3.05586E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25811E0
cs_ionrep_imon=1.19575E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91971E2
cs_nozzle_imon=1.93471E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=2.97297E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=4.032E-8
tplens_vset=1.4E-1
tplens_vmon=1.67568E0
tplens_imon=-4.25519E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26319E1
iondef3_imon=1.50181E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26649E1
iondef2_imon=1.57283E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03046E2
lens6_imon=2.98097E-4
ql6_vset=1.0E-1
ql6_vmon=9.55582E-2
ql6_imon=9.23288E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29055E0
ionrepsh_imon=1.79706E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33532E1
lens5b_imon=2.18315E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74772E1
cs_ef2b_imon=3.14308E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55612E0
os_ea2_imon=-7.9683E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00688E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71186E1
cs_ef2a_imon=3.15497E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05516E0
os_ef2alow_imon=-2.4393E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.31662E-1
os_ef2bup_imon=-5.14949E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11316E1
os_restr2_imon=3.4332E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.27729E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01923E1
cs_anode2_imon=2.24893E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73252E1
iondef1_imon=1.115E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68436E1
iondef4_imon=1.08882E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.17787E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.90473E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13915E0
cs_ionaccel_imon=-1.73653E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02089E2
cs_ionfocb_imon=1.4728E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56237E1
einzel_imon=7.7383E-6
window_vset=0.0E0
window_vmon=2.67798E-1
window_imon=-7.70669E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82701E2
mask1_imon=2.39138E-4
mask2_vset=0.0E0
mask2_vmon=-1.87041E1
mask2_imon=-5.14787E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.42967E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93756E3
defgrida_imon=6.38784E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50089E3
multb_neg_imon=7.09081E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34442E0
defgridb_imon=6.03095E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33287E1
os_fil1_imon=9.4385E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07587E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65733E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30733E1
cs_fil1_imon=9.96203E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6224E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67223E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.29297E-2
os_fil2_imon=-2.79211E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90506E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.80745E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36384E-1
cs_fil2_imon=-2.70201E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11219E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22723E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.32863E-1
res40_imon=-2.38525E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.201E3	4.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80024E1	-9.53674E-5	-8.80011E1	9.77516E-4	4.26769E-3	9.54151E-2	2.73423E1	-3.26585E1	-3.26697E1	2.6818E1	1.20226E-7	2.5199E-3	2.5199E-3	6.28552E-3	3.01085E-1
2.0E0	1.10922E5	1.11E2	3.16E2	1.6E2	-7.32464E-2	-8.80023E1	-3.09944E-4	-8.80011E1	1.0252E-3	4.52995E-3	9.52482E-2	2.73363E1	-3.26585E1	-3.25997E1	2.68325E1	1.2033E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.03976E-1
3.0E0	1.9E1	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80023E1	-1.43051E-4	-8.80009E1	7.39098E-4	4.52995E-3	9.5129E-2	2.72933E1	-3.26526E1	-3.26006E1	2.68319E1	1.20278E-7	2.51443E-3	2.51443E-3	6.28552E-3	3.01871E-1
4.0E0	2.3911E4	1.0E1	6.55E2	3.98E2	-7.201E-2	-8.80027E1	-3.57628E-4	-8.80009E1	2.38419E-4	4.45843E-3	9.55343E-2	2.7324E1	-3.26614E1	-3.26372E1	2.68905E1	1.20174E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.01871E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17779E-2	-8.80026E1	-4.76837E-4	-8.80008E1	4.29153E-4	4.43459E-3	9.54628E-2	2.73279E1	-3.26545E1	-3.26158E1	2.68093E1	1.20106E-7	2.51739E-3	2.51739E-3	6.33977E-3	3.02769E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23189E-2	-8.80024E1	-3.8147E-4	-8.80009E1	4.52995E-4	4.29153E-3	9.55343E-2	2.7307E1	-3.26662E1	-3.26338E1	2.68445E1	1.20127E-7	2.51575E-3	2.51575E-3	6.3126E-3	3.00247E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17007E-2	-8.80021E1	-3.33786E-4	-8.80011E1	5.00679E-4	4.33922E-3	9.55582E-2	2.7301E1	-3.26756E1	-3.26024E1	2.68334E1	1.19619E-7	2.52106E-3	2.52106E-3	6.33065E-3	3.00087E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80023E1	-3.33786E-4	-8.80013E1	2.86102E-4	4.36306E-3	9.54628E-2	2.73147E1	-3.26645E1	-3.26338E1	2.68671E1	1.20017E-7	2.52099E-3	2.52099E-3	6.28552E-3	3.00041E-1
1.2E1	1.06E2	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80021E1	-4.05312E-4	-8.80013E1	1.90735E-4	4.22001E-3	9.51052E-2	2.73129E1	-3.26488E1	-3.26128E1	2.6846E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01085E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.80023E1	-4.52995E-4	-8.80012E1	7.86781E-4	4.22001E-3	9.54866E-2	2.73225E1	-3.26669E1	-3.26296E1	2.68268E1	1.20069E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.02133E-1
1.4E1	3.441E3	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80025E1	-6.4373E-4	-8.80008E1	5.00679E-4	4.05312E-3	9.55343E-2	2.73153E1	-3.26933E1	-3.25695E1	2.68359E1	1.20106E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99686E-1
1.5E1	1.24E2	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80022E1	-2.38419E-4	-8.80011E1	3.8147E-4	4.48227E-3	9.5892E-2	2.73446E1	-3.26555E1	-3.26254E1	2.68412E1	1.20017E-7	2.51443E-3	2.51443E-3	6.3514E-3	2.9926E-1
1.6E1	4.65E2	0.0E0	6.47E2	4.41E2	-7.201E-2	-8.80025E1	-4.52995E-4	-8.80013E1	6.67572E-4	4.22001E-3	9.56535E-2	2.73682E1	-3.26726E1	-3.26502E1	2.6822E1	1.20158E-7	2.52492E-3	2.52492E-3	6.32896E-3	3.0148E-1
1.7E1	1.186E3	0.0E0	6.87E2	4.7E2	-7.17779E-2	-8.80023E1	-2.38419E-4	-8.80012E1	3.33786E-4	4.07696E-3	9.57727E-2	2.73315E1	-3.27113E1	-3.259E1	2.68298E1	1.20122E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00824E-1
1.8E1	4.631E3	2.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80022E1	-4.76837E-4	-8.8001E1	6.4373E-4	4.05312E-3	9.57727E-2	2.73424E1	-3.26717E1	-3.26446E1	2.68172E1	1.20122E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02133E-1
1.9E1	2.253E3	1.0E0	7.68E2	5.29E2	-7.22418E-2	-8.80022E1	-2.86102E-4	-8.8001E1	3.33786E-4	4.31538E-3	9.57727E-2	2.73616E1	-3.26428E1	-3.2638E1	2.68394E1	1.19991E-7	2.5188E-3	2.5188E-3	6.31014E-3	3.00563E-1
2.0E1	2.6903E4	1.4E1	8.08E2	5.58E2	-7.17779E-2	-8.80023E1	-2.14577E-4	-8.80006E1	6.4373E-4	4.1008E-3	9.58443E-2	2.73057E1	-3.26518E1	-3.26404E1	2.68202E1					
2.1E1	6.3E1	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80024E1	-5.00679E-4	-8.80008E1	2.38419E-4	4.02927E-3	9.58204E-2	2.73086E1	-3.26793E1	-3.26567E1	2.68337E1	1.20055E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.99941E-1
2.2E1	1.93E3	1.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80022E1	-3.8147E-4	-8.8001E1	6.67572E-4	4.45843E-3	9.54866E-2	2.73393E1	-3.26422E1	-3.2605E1	2.68673E1	1.20209E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.0071E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.17779E-2	-8.80024E1	-1.66893E-4	-8.80011E1	2.38419E-4	4.31538E-3	9.55582E-2	2.73252E1	-3.26649E1	-3.26319E1	2.68436E1	1.20004E-7	2.51525E-3	2.51525E-3	6.33977E-3	3.0148E-1