[Scan]
initial_time=2016-01-18T18:52:44
final_time=2016-01-18T18:53:06
ip_count=19
run=1024
dataset=4
scan=278
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.80926E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-7.4476E-10
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=1.41909E-9
ql3_vset=
ql3_vmon=-8.80014E1
ql3_imon=-2.49805E-9
ql4_vset=
ql4_vmon=8.10623E-4
ql4_imon=1.58906E-8
mult1=-1.83855E-8
mult2=-2.83239E-9
rf_tmon=-3.92362E-3
rf_agc=3.39104E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.07696E-3
ql5_imon=5.29397E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67335E0
bslens_imon=2.3539E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19839E1
lens5a_imon=1.99461E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.05096E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54013E1
cs_ef1b_imon=2.81259E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04573E2
lens23_imon=1.02103E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04874E1
cs_ea1_imon=2.52309E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98488E0
lens1_imon=1.64012E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64837E1
os_ef1alow_imon=2.98558E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03901E1
cs_ea2_imon=1.48162E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=2.929E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.33797E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.27472E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14855E1
os_ea1_imon=2.37709E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63527E1
os_ef1bup_imon=3.08866E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22566E0
cs_ionrep_imon=1.19359E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91989E2
cs_nozzle_imon=1.93442E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=2.95099E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20375E0
olens4_imon=4.0196E-8
tplens_vset=1.4E-1
tplens_vmon=1.63362E0
tplens_imon=-6.5024E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26224E1
iondef3_imon=1.50469E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26633E1
iondef2_imon=1.5411E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03024E2
lens6_imon=2.9791E-4
ql6_vset=1.0E-1
ql6_vmon=9.56535E-2
ql6_imon=9.34029E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29776E0
ionrepsh_imon=1.78552E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3367E1
lens5b_imon=2.19504E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74808E1
cs_ef2b_imon=3.13587E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54891E0
os_ea2_imon=-6.45421E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06112E2
lens4b_imon=2.00724E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71102E1
cs_ef2a_imon=3.14452E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05336E0
os_ef2alow_imon=-2.49336E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.22051E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1152E1
os_restr2_imon=3.41734E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.26972E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.22226E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73478E1
iondef1_imon=1.09769E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68322E1
iondef4_imon=1.08882E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.20884E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=7.82974E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17879E0
cs_ionaccel_imon=-1.94917E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47345E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56603E1
einzel_imon=7.70586E-6
window_vset=0.0E0
window_vmon=2.76808E-1
window_imon=-8.31936E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82654E2
mask1_imon=2.39235E-4
mask2_vset=0.0E0
mask2_vmon=-1.86704E1
mask2_imon=-7.27421E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.38641E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93693E3
defgrida_imon=6.66542E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.0151E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42262E0
defgridb_imon=6.25446E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33375E1
os_fil1_imon=9.42654E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06644E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65734E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30737E1
cs_fil1_imon=9.95561E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63039E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67512E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52512E-2
os_fil2_imon=-2.84617E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.89768E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3509E-1
cs_fil2_imon=-2.73805E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05212E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22641E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.21964E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.47589E-1
res40_imon=-2.54742E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.191E3	5.0E0	1.47E2	4.1E1	-7.22418E-2	-8.80025E1	-8.34465E-4	-8.8001E1	9.53674E-5	4.12464E-3	9.52482E-2	2.73075E1	-3.2649E1	-3.26331E1	2.68412E1	1.19861E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00563E-1
2.0E0	1.10842E5	1.07E2	3.16E2	1.6E2	-7.19325E-2	-8.80022E1	-5.48363E-4	-8.80011E1	5.24521E-4	3.83854E-3	9.53197E-2	2.73105E1	-3.26152E1	-3.26452E1	2.68226E1	1.19965E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00824E-1
3.0E0	2.1E1	0.0E0	4.85E2	2.79E2	-7.20871E-2	-8.80023E1	-2.86102E-4	-8.80011E1	4.52995E-4	4.22001E-3	9.52482E-2	2.737E1	-3.26625E1	-3.26208E1	2.68198E1	1.19549E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.02659E-1
4.0E0	2.4239E4	1.4E1	6.55E2	3.98E2	-7.201E-2	-8.80024E1	-3.57628E-4	-8.8001E1	6.67572E-4	4.26769E-3	9.54628E-2	2.73171E1	-3.26981E1	-3.26074E1	2.68448E1	1.20177E-7	2.52197E-3	2.52197E-3	6.3074E-3	3.01237E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.80023E1	-3.8147E-4	-8.8001E1	2.86102E-4	4.36306E-3	9.56059E-2	2.73471E1	-3.26755E1	-3.26148E1	2.68569E1	1.20122E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.201E-2	-8.80026E1	-6.91414E-4	-8.8001E1	4.05312E-4	4.1008E-3	9.55343E-2	2.73161E1	-3.26543E1	-3.26474E1	2.6842E1	1.20026E-7	2.52151E-3	2.52151E-3	6.33658E-3	3.0103E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.80027E1	-9.53674E-5	-8.80013E1	5.00679E-4	4.45843E-3	9.53674E-2	2.72962E1	-3.26172E1	-3.26083E1	2.68018E1	1.19887E-7	2.51153E-3	2.51153E-3	6.32001E-3	3.00257E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80026E1	-4.05312E-4	-8.80011E1	4.05312E-4	4.24385E-3	9.52482E-2	2.73339E1	-3.26597E1	-3.26116E1	2.6837E1	1.20017E-7	2.52757E-3	2.52757E-3	6.31288E-3	3.00302E-1
1.2E1	1.27E2	0.0E0	4.85E2	3.23E2	-7.15461E-2	-8.80026E1	-3.09944E-4	-8.80011E1	4.05312E-4	4.07696E-3	9.5439E-2	2.73021E1	-3.2647E1	-3.26464E1	2.68587E1	1.19965E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00824E-1
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80024E1	-2.14577E-4	-8.80009E1	2.38419E-4	4.29153E-3	9.52244E-2	2.73411E1	-3.26789E1	-3.2626E1	2.68689E1	1.20106E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00966E-1
1.4E1	3.429E3	2.0E0	5.66E2	3.82E2	-7.19325E-2	-8.80025E1	-2.86102E-4	-8.80008E1	5.96046E-4	4.17233E-3	9.52721E-2	2.73275E1	-3.26425E1	-3.26172E1	2.67938E1	1.20017E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00824E-1
1.5E1	9.5E1	2.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80024E1	-3.33786E-4	-8.80007E1	5.24521E-4	4.22001E-3	9.51767E-2	2.73181E1	-3.26602E1	-3.26124E1	2.68198E1	1.2033E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01085E-1
1.6E1	5.02E2	0.0E0	6.47E2	4.41E2	-7.19325E-2	-8.80023E1	-5.00679E-4	-8.80011E1	6.91414E-4	4.22001E-3	9.54628E-2	2.72877E1	-3.26278E1	-3.26278E1	2.68412E1	1.19991E-7	2.51393E-3	2.51393E-3	6.31269E-3	3.00097E-1
1.7E1	1.15E3	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80024E1	-4.05312E-4	-8.80008E1	2.14577E-4	4.02927E-3	9.53913E-2	2.73207E1	-3.26795E1	-3.2629E1	2.68244E1	1.20084E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.0201E-1
1.8E1	4.63E3	2.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80027E1	-3.33786E-4	-8.8001E1	-9.53674E-5	3.93391E-3	9.55105E-2	2.73291E1	-3.27047E1	-3.26146E1	2.68442E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0148E-1
1.9E1	2.325E3	0.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80027E1	-3.57628E-4	-8.80009E1	4.05312E-4	4.12464E-3	9.56059E-2	2.7344E1	-3.26526E1	-3.26148E1	2.68232E1	1.20017E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.02922E-1
2.0E1	2.6473E4	9.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80029E1	-5.24521E-4	-8.80008E1	1.90735E-4	4.07696E-3	9.55343E-2	2.73163E1	-3.26809E1	-3.26526E1	2.68123E1	1.20069E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01347E-1
2.1E1	5.1E1	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80025E1	-4.05312E-4	-8.80009E1	3.09944E-4	3.93391E-3	9.53436E-2	2.72996E1	-3.26468E1	-3.26309E1	2.68113E1	1.2026E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.03286E-1
2.2E1	1.843E3	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80028E1	-2.14577E-4	-8.80008E1	8.10623E-4	4.12464E-3	9.57012E-2	2.73289E1	-3.26706E1	-3.26196E1	2.68453E1	1.22067E-7	2.52538E-3	2.52538E-3	6.32386E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80027E1	-4.29153E-4	-8.80014E1	8.10623E-4	4.07696E-3	9.56535E-2	2.73478E1	-3.26633E1	-3.26224E1	2.68322E1	1.21964E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.01738E-1