[Scan]
initial_time=2016-01-18T18:53:14
final_time=2016-01-18T18:53:36
ip_count=19
run=1024
dataset=4
scan=279
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.13915E-2
qbias_imon=-3.82011E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-7.23064E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.39387E-9
ql3_vset=
ql3_vmon=-8.80012E1
ql3_imon=-2.48146E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.58851E-8
mult1=-2.05408E-8
mult2=-2.77684E-9
rf_tmon=-4.97461E-3
rf_agc=3.27774E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.24385E-3
ql5_imon=5.39374E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63249E0
bslens_imon=2.39716E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19616E1
lens5a_imon=1.98019E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12485E2
lens4a_imon=2.05053E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54145E1
cs_ef1b_imon=2.83025E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.0228E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04459E1
cs_ea1_imon=2.5422E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99389E0
lens1_imon=1.7014E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64602E1
os_ef1alow_imon=2.96792E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0357E1
cs_ea2_imon=1.4809E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84424E1
cs_ef1a_imon=2.92792E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.34255E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11622E1
os_restr1_imon=4.26968E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15089E1
os_ea1_imon=2.34933E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.08866E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21845E0
cs_ionrep_imon=1.19611E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91939E2
cs_nozzle_imon=1.93395E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01773E1
cs_anode1_imon=2.96901E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20396E0
olens4_imon=4.02097E-8
tplens_vset=1.4E-1
tplens_vmon=1.69791E0
tplens_imon=-1.26308E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26597E1
iondef3_imon=1.50145E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26682E1
iondef2_imon=1.55877E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03061E2
lens6_imon=2.98097E-4
ql6_vset=1.0E-1
ql6_vmon=9.56297E-2
ql6_imon=9.27985E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2551E0
ionrepsh_imon=1.78336E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3397E1
lens5b_imon=2.17485E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74597E1
cs_ef2b_imon=3.13299E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48522E0
os_ea2_imon=-7.13916E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.00432E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71372E1
cs_ef2a_imon=3.16002E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07378E0
os_ef2alow_imon=-2.55103E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96223E-1
os_ef2bup_imon=-5.40177E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11159E1
os_restr2_imon=3.42383E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.29568E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.24677E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73473E1
iondef1_imon=1.1186E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68487E1
iondef4_imon=1.10539E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.1827E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=7.84815E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15177E0
cs_ionaccel_imon=-1.79419E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47331E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56327E1
einzel_imon=7.79596E-6
window_vset=0.0E0
window_vmon=2.34161E-1
window_imon=-7.41837E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82692E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86392E1
mask2_imon=-7.67065E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92668E3
multa_neg_imon=7.26385E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.43831E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50104E3
multb_neg_imon=7.36118E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35344E0
defgridb_imon=5.95885E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33348E1
os_fil1_imon=9.42342E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07299E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66059E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30725E1
cs_fil1_imon=9.95657E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61903E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67206E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.47353E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.80745E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3509E-1
cs_fil2_imon=-2.19145E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04011E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22483E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.98665E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.29569E-1
res40_imon=-2.54022E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.153E3	2.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80026E1	-4.05312E-4	-8.80009E1	6.91414E-4	4.31538E-3	9.5582E-2	2.73381E1	-3.26627E1	-3.26188E1	2.68128E1	1.2212E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00302E-1
2.0E0	1.10741E5	1.0E2	3.16E2	1.6E2	-7.30146E-2	-8.80027E1	-5.72205E-4	-8.80008E1	5.24521E-4	4.05312E-3	9.54866E-2	2.73236E1	-3.26364E1	-3.2604E1	2.68719E1	1.2212E-7	2.52599E-3	2.52599E-3	6.3074E-3	3.00453E-1
3.0E0	1.8E1	0.0E0	4.85E2	2.79E2	-7.37874E-2	-8.80025E1	-3.33786E-4	-8.80009E1	2.86102E-4	4.19617E-3	9.5439E-2	2.73241E1	-3.26627E1	-3.26236E1	2.6801E1	1.22018E-7	2.52025E-3	2.52025E-3	6.31269E-3	3.00097E-1
4.0E0	2.4332E4	1.4E1	6.55E2	3.98E2	-7.3401E-2	-8.80025E1	-3.57628E-4	-8.80006E1	2.86102E-4	4.26769E-3	9.51529E-2	2.7337E1	-3.26708E1	-3.25983E1	2.68695E1	1.20031E-7	2.51359E-3	2.51359E-3	6.34661E-3	3.00676E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.40967E-2	-8.80026E1	-2.6226E-4	-8.80008E1	4.76837E-5	4.62532E-3	9.55343E-2	2.73297E1	-3.26536E1	-3.26591E1	2.67956E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.02133E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.36328E-2	-8.80022E1	-4.29153E-4	-8.80009E1	3.57628E-4	4.22001E-3	9.4986E-2	2.73279E1	-3.26392E1	-3.26482E1	2.68502E1	1.20004E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.99686E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80023E1	-4.05312E-4	-8.8001E1	5.00679E-4	4.29153E-3	9.53197E-2	2.73351E1	-3.26458E1	-3.26272E1	2.68099E1	1.20403E-7	2.5147E-3	2.5147E-3	6.33538E-3	3.01475E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80025E1	-4.76837E-5	-8.80011E1	5.96046E-4	4.29153E-3	9.53436E-2	2.72973E1	-3.26741E1	-3.26296E1	2.68388E1	1.20774E-7	2.50775E-3	2.50775E-3	6.28592E-3	3.0148E-1
1.2E1	1.05E2	0.0E0	4.85E2	3.23E2	-7.19325E-2	-8.80022E1	-3.8147E-4	-8.80012E1	6.91414E-4	4.43459E-3	9.53197E-2	2.73676E1	-3.26874E1	-3.26248E1	2.68511E1	1.19965E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01085E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.17779E-2	-8.80024E1	-2.14577E-4	-8.80013E1	2.6226E-4	4.48227E-3	9.52959E-2	2.73269E1	-3.2639E1	-3.26231E1	2.68304E1	1.20004E-7	2.51471E-3	2.51471E-3	6.29665E-3	2.99175E-1
1.4E1	3.533E3	3.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80028E1	-3.8147E-4	-8.80009E1	2.38419E-4	4.1008E-3	9.52959E-2	2.73492E1	-3.2648E1	-3.26138E1	2.68208E1					
1.5E1	1.05E2	0.0E0	6.06E2	4.11E2	-7.17007E-2	-8.80025E1	-1.66893E-4	-8.80008E1	3.09944E-4	4.26769E-3	9.55343E-2	2.73159E1	-3.26446E1	-3.26434E1	2.68526E1	1.19991E-7	2.51611E-3	2.51611E-3	6.29603E-3	2.9944E-1
1.6E1	4.9E2	0.0E0	6.47E2	4.41E2	-7.15461E-2	-8.80028E1	-1.90735E-4	-8.80012E1	8.10623E-4	4.31538E-3	9.54151E-2	2.73309E1	-3.26494E1	-3.26134E1	2.68526E1	1.20055E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.99175E-1
1.7E1	1.145E3	2.0E0	6.87E2	4.7E2	-7.25507E-2	-8.80025E1	-4.52995E-4	-8.80015E1	6.67572E-4	4.36306E-3	9.5129E-2	2.73237E1	-3.26488E1	-3.2641E1	2.68575E1	1.20017E-7	2.52538E-3	2.52538E-3	6.32386E-3	3.00302E-1
1.8E1	4.801E3	3.0E0	7.27E2	5.0E2	-7.26282E-2	-8.80025E1	-1.90735E-4	-8.80013E1	5.72205E-4	4.48227E-3	9.52244E-2	2.73405E1	-3.26602E1	-3.25947E1	2.68028E1	1.19809E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.02922E-1
1.9E1	2.359E3	2.0E0	7.68E2	5.29E2	-7.22418E-2	-8.80024E1	-4.05312E-4	-8.80006E1	3.33786E-4	4.26769E-3	9.54866E-2	2.73508E1	-3.26699E1	-3.2635E1	2.67992E1	1.19851E-7	2.52384E-3	2.52384E-3	6.3074E-3	3.03027E-1
2.0E1	2.6778E4	1.3E1	8.08E2	5.58E2	-7.18554E-2	-8.80025E1	-2.6226E-4	-8.80006E1	-4.76837E-5	4.55379E-3	9.54628E-2	2.73183E1	-3.26651E1	-3.26158E1	2.68273E1	1.20244E-7	2.51581E-3	2.51581E-3	6.35223E-3	3.02277E-1
2.1E1	5.9E1	0.0E0	8.49E2	5.88E2	-7.18554E-2	-8.80026E1	-3.09944E-4	-8.80008E1	2.38419E-4	4.3869E-3	9.55582E-2	2.73169E1	-3.26791E1	-3.26207E1	2.6849E1	1.22068E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.02253E-1
2.2E1	1.898E3	4.0E0	8.89E2	6.17E2	-7.17779E-2	-8.80024E1	-3.8147E-4	-8.80008E1	4.76837E-4	4.07696E-3	9.56535E-2	2.73236E1	-3.26521E1	-3.26237E1	2.6847E1	1.2129E-7	2.51954E-3	2.51954E-3	6.29665E-3	2.99941E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.13915E-2	-8.80023E1	-5.96046E-4	-8.80012E1	2.38419E-4	4.24385E-3	9.56297E-2	2.73473E1	-3.26682E1	-3.26597E1	2.68487E1	1.20106E-7	2.51096E-3	2.51096E-3	6.33977E-3	2.98665E-1