[Scan]
initial_time=2016-01-18T18:53:44
final_time=2016-01-18T18:54:06
ip_count=19
run=1024
dataset=4
scan=280
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.7717E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-7.68852E-10
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=1.36651E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.40167E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.58615E-8
mult1=-1.67289E-8
mult2=-2.6275E-9
rf_tmon=-4.57286E-3
rf_agc=3.26048E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.1008E-3
ql5_imon=5.70273E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64439E0
bslens_imon=2.49725E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20013E1
lens5a_imon=1.98687E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12521E2
lens4a_imon=2.05054E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54037E1
cs_ef1b_imon=2.83494E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.02195E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04669E1
cs_ea1_imon=2.54503E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99054E0
lens1_imon=1.53099E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6429E1
os_ef1alow_imon=2.96756E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0408E1
cs_ea2_imon=1.48498E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=2.93585E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.34799E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11322E1
os_restr1_imon=4.26571E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14745E1
os_ea1_imon=2.36806E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63719E1
os_ef1bup_imon=3.0764E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23145E0
cs_ionrep_imon=1.19262E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91939E2
cs_nozzle_imon=1.93363E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02079E1
cs_anode1_imon=2.98919E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20394E0
olens4_imon=4.03054E-8
tplens_vset=1.4E-1
tplens_vmon=1.70101E0
tplens_imon=-2.13941E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25961E1
iondef3_imon=1.51294E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26941E1
iondef2_imon=1.57063E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03022E2
lens6_imon=2.9813E-4
ql6_vset=1.0E-1
ql6_vmon=9.57966E-2
ql6_imon=8.83138E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28985E0
ionrepsh_imon=1.77344E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33752E1
lens5b_imon=2.15463E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74717E1
cs_ef2b_imon=3.12758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50517E0
os_ea2_imon=-6.20973E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00676E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71426E1
cs_ef2a_imon=3.16218E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06357E0
os_ef2alow_imon=-2.58707E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.20249E-1
os_ef2bup_imon=-5.26481E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11268E1
os_restr2_imon=3.43428E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.28512E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01395E1
cs_anode2_imon=2.24857E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73452E1
iondef1_imon=1.09529E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6845E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.17949E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81355E-1
olens1_imon=7.82313E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16138E0
cs_ionaccel_imon=-1.78338E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47453E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56603E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=2.66597E-1
window_imon=-8.13916E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82687E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86314E1
mask2_imon=-7.81481E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.80282E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.37998E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50101E3
multb_neg_imon=7.31792E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48528E0
defgridb_imon=5.72165E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33343E1
os_fil1_imon=9.40624E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07275E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65503E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30734E1
cs_fil1_imon=9.94551E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63111E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67064E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.4332E-2
os_fil2_imon=-2.71402E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.77892E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.12798E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34313E-1
cs_fil2_imon=-2.22148E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1182E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22513E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29237E-3
inlet_lpb_pmon=2.99577E-1
chamber_ion_pmon=1.1986E-7
chamber_cvt_pmon=2.52023E-3
foreline_cvt_pmon=2.52023E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.29569E-1
res40_imon=-2.46093E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.165E3	4.0E0	1.47E2	4.1E1	-7.15461E-2	-8.80025E1	-2.6226E-4	-8.80007E1	3.8147E-4	4.55379E-3	9.56059E-2	2.73333E1	-3.26338E1	-3.26506E1	2.68815E1	1.20092E-7	2.51077E-3	2.51077E-3	6.32858E-3	2.99093E-1
2.0E0	1.09891E5	9.5E1	3.16E2	1.6E2	-7.11597E-2	-8.80025E1	-2.6226E-4	-8.8001E1	5.00679E-4	4.22001E-3	9.56059E-2	2.73171E1	-3.26567E1	-3.26056E1	2.6816E1	1.20383E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.99E-1
3.0E0	1.2E1	0.0E0	4.85E2	2.79E2	-7.09279E-2	-8.80025E1	-4.52995E-4	-8.80011E1	1.90735E-4	4.31538E-3	9.52959E-2	2.73027E1	-3.26714E1	-3.26349E1	2.68609E1	1.19861E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01609E-1
4.0E0	2.3855E4	1.5E1	6.55E2	3.98E2	-7.06958E-2	-8.80024E1	-9.53674E-5	-8.80011E1	6.19888E-4	4.26769E-3	9.5582E-2	2.73069E1	-3.26476E1	-3.25996E1	2.6798E1	1.19913E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00041E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.10825E-2	-8.80024E1	-5.96046E-4	-8.80011E1	6.91414E-4	4.14848E-3	9.56059E-2	2.73472E1	-3.26597E1	-3.2641E1	2.68815E1	1.19646E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.9714E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80024E1	-8.82149E-4	-8.80009E1	3.8147E-4	3.83854E-3	9.55582E-2	2.73171E1	-3.26458E1	-3.26266E1	2.68334E1	1.19925E-7	2.51915E-3	2.51915E-3	6.31299E-3	2.97236E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.12368E-2	-8.80022E1	-5.00679E-4	-8.80013E1	2.38419E-4	4.33922E-3	9.54628E-2	2.73027E1	-3.2667E1	-3.26474E1	2.68094E1	1.19861E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.95899E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80024E1	-5.00679E-4	-8.80007E1	2.86102E-4	4.12464E-3	9.56059E-2	2.73122E1	-3.26602E1	-3.26154E1	2.68586E1	1.20069E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.00041E-1
1.2E1	1.09E2	0.0E0	4.85E2	3.23E2	-7.18554E-2	-8.80025E1	-1.90735E-4	-8.8001E1	4.52995E-4	4.60148E-3	9.56297E-2	2.72967E1	-3.26579E1	-3.2638E1	2.68701E1	1.19953E-7	2.52707E-3	2.52707E-3	6.31278E-3	2.99941E-1
1.3E1	2.0E1	1.0E0	5.25E2	3.53E2	-7.09279E-2	-8.80026E1	-1.90735E-4	-8.80009E1	2.38419E-4	4.12464E-3	9.56297E-2	2.73175E1	-3.26508E1	-3.26272E1	2.68845E1	1.20031E-7	2.52027E-3	2.52027E-3	6.34661E-3	3.00676E-1
1.4E1	3.579E3	1.0E0	5.66E2	3.82E2	-7.13915E-2	-8.80025E1	-5.72205E-4	-8.8001E1	4.29153E-4	3.83854E-3	9.55343E-2	2.73231E1	-3.26398E1	-3.26008E1	2.68304E1	1.198E-7	2.52492E-3	2.52492E-3	6.32896E-3	3.00453E-1
1.5E1	9.7E1	0.0E0	6.06E2	4.11E2	-7.0464E-2	-8.80025E1	-6.67572E-4	-8.80008E1	5.00679E-4	3.76701E-3	9.5892E-2	2.72961E1	-3.2638E1	-3.26062E1	2.67842E1	1.20174E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.01609E-1
1.6E1	4.78E2	0.0E0	6.47E2	4.41E2	-7.05415E-2	-8.80023E1	-9.53674E-5	-8.8001E1	4.05312E-4	3.95775E-3	9.52482E-2	2.73586E1	-3.26597E1	-3.2617E1	2.68683E1	1.19851E-7	2.52276E-3	2.52276E-3	6.2752E-3	3.01738E-1
1.7E1	1.09E3	1.0E0	6.87E2	4.7E2	-7.12368E-2	-8.80025E1	-9.53674E-5	-8.80007E1	2.14577E-4	4.12464E-3	9.58443E-2	2.73195E1	-3.26657E1	-3.26206E1	2.6819E1	1.20435E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01347E-1
1.8E1	4.607E3	1.0E0	7.27E2	5.0E2	-7.17779E-2	-8.80028E1	-2.6226E-4	-8.8001E1	7.39098E-4	4.22001E-3	9.53913E-2	2.7346E1	-3.26867E1	-3.26116E1	2.68755E1	1.19965E-7	2.51225E-3	2.51225E-3	6.33486E-3	3.01085E-1
1.9E1	2.328E3	4.0E0	7.68E2	5.29E2	-7.13143E-2	-8.80027E1	-3.8147E-4	-8.8001E1	1.66893E-4	4.12464E-3	9.56059E-2	2.73057E1	-3.2644E1	-3.26212E1	2.68292E1	1.19872E-7	2.52027E-3	2.52027E-3	6.29067E-3	2.99613E-1
2.0E1	2.6515E4	1.2E1	8.08E2	5.58E2	-7.17007E-2	-8.80029E1	-3.57628E-4	-8.80011E1	5.24521E-4	3.86238E-3	9.51767E-2	2.73135E1	-3.2644E1	-3.2596E1	2.6843E1	1.19913E-7	2.51116E-3	2.51116E-3	6.32386E-3	2.9978E-1
2.1E1	6.6E1	0.0E0	8.49E2	5.88E2	-7.19325E-2	-8.80026E1	-5.48363E-4	-8.80008E1	4.05312E-4	4.14848E-3	9.58443E-2	2.73316E1	-3.26502E1	-3.26325E1	2.6795E1	1.19646E-7	2.51847E-3	2.51847E-3	6.35601E-3	2.9943E-1
2.2E1	1.842E3	1.0E0	8.89E2	6.17E2	-7.201E-2	-8.80026E1	-7.39098E-4	-8.80005E1	4.52995E-4	4.17233E-3	9.56774E-2	2.73293E1	-3.26711E1	-3.25974E1	2.68199E1	1.19851E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00197E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80024E1	-4.05312E-4	-8.80006E1	1.43051E-4	4.1008E-3	9.57966E-2	2.73452E1	-3.26941E1	-3.25961E1	2.6845E1	1.1986E-7	2.52023E-3	2.52023E-3	6.29237E-3	2.99577E-1