[Scan]
initial_time=2016-01-18T18:54:44
final_time=2016-01-18T18:55:07
ip_count=19
run=1024
dataset=4
scan=282
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.83299E-6
ql1_vset=
ql1_vmon=-8.80029E1
ql1_imon=-7.08616E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=1.41572E-9
ql3_vset=
ql3_vmon=-8.80012E1
ql3_imon=-2.34978E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=1.58737E-8
mult1=-1.6052E-8
mult2=-2.74402E-9
rf_tmon=-5.22995E-3
rf_agc=3.32106E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=5.95164E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65112E0
bslens_imon=2.31425E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19424E1
lens5a_imon=1.98884E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12513E2
lens4a_imon=2.04841E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54025E1
cs_ef1b_imon=2.83854E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04588E2
lens23_imon=1.02103E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04598E1
cs_ea1_imon=2.53968E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02934E0
lens1_imon=1.53197E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=2.96864E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03804E1
cs_ea2_imon=1.50397E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84526E1
cs_ef1a_imon=2.93549E-5
olens2_vset=9.7E-1
olens2_vmon=9.69768E-1
olens2_imon=1.34907E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11412E1
os_restr1_imon=4.26211E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15234E1
os_ea1_imon=2.36772E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63437E1
os_ef1bup_imon=3.06523E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22566E0
cs_ionrep_imon=1.18277E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91964E2
cs_nozzle_imon=1.93521E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=2.98306E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20394E0
olens4_imon=4.00754E-8
tplens_vset=1.4E-1
tplens_vmon=1.67027E0
tplens_imon=-2.95741E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26291E1
iondef3_imon=1.49316E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26659E1
iondef2_imon=1.57427E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03003E2
lens6_imon=2.98104E-4
ql6_vset=1.0E-1
ql6_vmon=9.55582E-2
ql6_imon=9.4136E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30076E0
ionrepsh_imon=1.77651E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33736E1
lens5b_imon=2.18062E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74513E1
cs_ef2b_imon=3.13551E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4738E0
os_ea2_imon=-8.58114E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00558E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71312E1
cs_ef2a_imon=3.15749E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06297E0
os_ef2alow_imon=-2.50778E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.22051E-1
os_ef2bup_imon=-5.23959E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11117E1
os_restr2_imon=3.43103E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.29243E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.23668E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73151E1
iondef1_imon=1.11248E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68653E1
iondef4_imon=1.09602E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.18817E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=7.84059E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15837E0
cs_ionaccel_imon=-1.88429E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02107E2
cs_ionfocb_imon=1.47435E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56411E1
einzel_imon=7.77073E-6
window_vset=0.0E0
window_vmon=2.47976E-1
window_imon=-8.10312E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82695E2
mask1_imon=2.38994E-4
mask2_vset=0.0E0
mask2_vmon=-1.86566E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=7.4477E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9374E3
defgrida_imon=7.05836E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.49817E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44668E0
defgridb_imon=6.36261E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33349E1
os_fil1_imon=9.41099E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07227E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65873E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30738E1
cs_fil1_imon=9.94732E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63057E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67434E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.48643E-2
os_fil2_imon=-2.67197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90506E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.96471E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.40168E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.38849E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22563E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29684E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.19991E-7
chamber_cvt_pmon=2.51603E-3
foreline_cvt_pmon=2.51603E-3
chamber_tmon=1.40017E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.60203E-1
res40_imon=-2.57265E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.306E3	2.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80026E1	-8.34465E-4	-8.8001E1	1.66893E-4	4.24385E-3	9.53913E-2	2.7359E1	-3.26614E1	-3.26121E1	2.68621E1	1.2033E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.03185E-1
2.0E0	1.11148E5	9.1E1	3.16E2	1.6E2	-7.23964E-2	-8.80023E1	-5.72205E-4	-8.8001E1	4.05312E-4	4.19617E-3	9.54628E-2	2.73544E1	-3.2647E1	-3.26524E1	2.68743E1	1.21653E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.02511E-1
3.0E0	1.9E1	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80025E1	-5.96046E-4	-8.80008E1	4.05312E-4	4.52995E-3	9.57489E-2	2.73189E1	-3.26753E1	-3.26056E1	2.68064E1	1.2212E-7	2.52276E-3	2.52276E-3	6.33977E-3	3.02253E-1
4.0E0	2.4429E4	1.4E1	6.55E2	3.98E2	-7.24736E-2	-8.80025E1	-3.8147E-4	-8.80007E1	5.24521E-4	4.43459E-3	9.53436E-2	2.73187E1	-3.26679E1	-3.26266E1	2.68701E1	1.2212E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01871E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.15461E-2	-8.80025E1	7.15256E-5	-8.80008E1	5.48363E-4	4.62532E-3	9.53197E-2	2.73159E1	-3.26549E1	-3.26308E1	2.67914E1	1.2212E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.03545E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80023E1	-3.8147E-4	-8.8001E1	5.48363E-4	4.36306E-3	9.53913E-2	2.73189E1	-3.26699E1	-3.26669E1	2.68605E1	1.2212E-7	2.51804E-3	2.51804E-3	6.32978E-3	3.00942E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.80025E1	-4.29153E-4	-8.80011E1	4.52995E-4	4.17233E-3	9.56535E-2	2.73207E1	-3.262E1	-3.26212E1	2.68737E1	1.2212E-7	2.52428E-3	2.52428E-3	6.31837E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.80024E1	-7.39098E-4	-8.8001E1	7.15256E-4	4.36306E-3	9.56059E-2	2.73514E1	-3.26579E1	-3.26158E1	2.68464E1	1.21445E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.9841E-1
1.2E1	9.8E1	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80024E1	-9.05991E-4	-8.80009E1	8.10623E-4	4.22001E-3	9.53436E-2	2.73069E1	-3.26455E1	-3.26018E1	2.68142E1	1.20226E-7	2.51116E-3	2.51116E-3	6.30192E-3	2.9926E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80026E1	-6.67572E-4	-8.80009E1	6.19888E-4	4.60148E-3	9.54151E-2	2.73496E1	-3.26699E1	-3.26026E1	2.68713E1	1.20158E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.98665E-1
1.4E1	3.399E3	2.0E0	5.66E2	3.82E2	-7.30146E-2	-8.80024E1	-6.19888E-4	-8.8001E1	9.77516E-4	4.50611E-3	9.52244E-2	2.73099E1	-3.26416E1	-3.26098E1	2.6789E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.02133E-1
1.5E1	1.09E2	1.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80023E1	-7.39098E-4	-8.80011E1	6.19888E-4	4.17233E-3	9.53197E-2	2.72787E1	-3.26543E1	-3.26591E1	2.68731E1	1.19965E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.02133E-1
1.6E1	5.09E2	0.0E0	6.47E2	4.41E2	-7.201E-2	-8.80025E1	-5.24521E-4	-8.80013E1	6.19888E-4	4.72069E-3	9.5439E-2	2.73393E1	-3.26567E1	-3.26006E1	2.6789E1	1.20122E-7	2.52099E-3	2.52099E-3	6.29098E-3	3.01609E-1
1.7E1	1.092E3	0.0E0	6.87E2	4.7E2	-7.18554E-2	-8.80025E1	-5.48363E-4	-8.80013E1	8.10623E-4	4.62532E-3	9.55582E-2	2.73247E1	-3.26831E1	-3.26438E1	2.68487E1	1.19953E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.02253E-1
1.8E1	4.619E3	1.0E0	7.27E2	5.0E2	-7.20871E-2	-8.80028E1	-7.62939E-4	-8.80013E1	9.53674E-4	4.17233E-3	9.54628E-2	2.73269E1	-3.26803E1	-3.26271E1	2.68244E1	1.20518E-7	2.52018E-3	2.52018E-3	6.31157E-3	3.00912E-1
1.9E1	2.292E3	2.0E0	7.68E2	5.29E2	-7.286E-2	-8.80028E1	-7.15256E-4	-8.80014E1	4.29153E-4	4.36306E-3	9.53913E-2	2.73213E1	-3.26541E1	-3.2626E1	2.684E1	1.20276E-7	2.51575E-3	2.51575E-3	6.323E-3	3.00989E-1
2.0E1	2.6693E4	1.5E1	8.08E2	5.58E2	-7.19325E-2	-8.80026E1	-7.15256E-4	-8.80011E1	2.6226E-4	4.48227E-3	9.55105E-2	2.73181E1	-3.26172E1	-3.26413E1	2.68575E1	1.20262E-7	2.51952E-3	2.51952E-3	6.28468E-3	2.989E-1
2.1E1	6.9E1	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80027E1	-6.91414E-4	-8.80009E1	4.52995E-4	4.12464E-3	9.57012E-2	2.73424E1	-3.26657E1	-3.26296E1	2.68418E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.99941E-1
2.2E1	1.853E3	1.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80028E1	-9.05991E-4	-8.80012E1	5.96046E-4	4.36306E-3	9.55105E-2	2.73399E1	-3.26648E1	-3.26231E1	2.68094E1	1.20004E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.01223E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80029E1	-7.39098E-4	-8.80012E1	4.29153E-4	4.33922E-3	9.55582E-2	2.73151E1	-3.26659E1	-3.26291E1	2.68653E1	1.19991E-7	2.51603E-3	2.51603E-3	6.29684E-3	3.01609E-1