[Scan]
initial_time=2016-01-18T18:56:42
final_time=2016-01-18T18:57:03
ip_count=19
run=1024
dataset=4
scan=286
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.201E-2
qbias_imon=-3.79228E-6
ql1_vset=
ql1_vmon=-8.80028E1
ql1_imon=-7.17402E-10
ql2_vset=
ql2_vmon=-5.24521E-4
ql2_imon=1.39523E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-2.32941E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=1.58609E-8
mult1=-1.68643E-8
mult2=-2.75657E-9
rf_tmon=-5.34714E-3
rf_agc=3.23476E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=5.70202E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64992E0
bslens_imon=2.25657E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19562E1
lens5a_imon=2.01588E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.04923E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53682E1
cs_ef1b_imon=2.84431E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.02312E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04345E1
cs_ea1_imon=2.52021E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97887E0
lens1_imon=1.60046E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=2.96828E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0375E1
cs_ea2_imon=1.49208E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84436E1
cs_ef1a_imon=2.94666E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.35591E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11352E1
os_restr1_imon=4.27292E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15119E1
os_ea1_imon=2.36916E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63701E1
os_ef1bup_imon=3.06559E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24789E0
cs_ionrep_imon=1.19755E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91993E2
cs_nozzle_imon=1.93471E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02031E1
cs_anode1_imon=2.97765E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=4.02417E-8
tplens_vset=1.4E-1
tplens_vmon=1.68649E0
tplens_imon=-3.71445E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26325E1
iondef3_imon=1.4964E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26785E1
iondef2_imon=1.55949E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03028E2
lens6_imon=2.98176E-4
ql6_vset=1.0E-1
ql6_vmon=9.51529E-2
ql6_imon=8.53956E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28274E0
ionrepsh_imon=1.79633E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34325E1
lens5b_imon=2.18315E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74922E1
cs_ef2b_imon=3.13839E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49123E0
os_ea2_imon=-4.39939E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00515E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71053E1
cs_ef2a_imon=3.16542E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05576E0
os_ef2alow_imon=-2.68798E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.27457E-1
os_ef2bup_imon=-5.1567E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11213E1
os_restr2_imon=3.42779E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.28955E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01749E1
cs_anode2_imon=2.24353E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73411E1
iondef1_imon=1.09517E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67836E1
iondef4_imon=1.10179E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.20002E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.85835E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16558E0
cs_ionaccel_imon=-1.90952E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.021E2
cs_ionfocb_imon=1.47442E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56249E1
einzel_imon=7.84641E-6
window_vset=0.0E0
window_vmon=2.84617E-1
window_imon=-8.82392E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82708E2
mask1_imon=2.38972E-4
mask2_vset=0.0E0
mask2_vmon=-1.8608E1
mask2_imon=-6.04886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.49096E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.80241E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=6.81683E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50382E0
defgridb_imon=6.29411E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33342E1
os_fil1_imon=9.42096E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0778E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65834E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30742E1
cs_fil1_imon=9.9529E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63003E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67269E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.37035E-2
os_fil2_imon=-2.86419E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92308E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.95311E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36514E-1
cs_fil2_imon=-2.22749E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.56018E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22455E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30471E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.20081E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.77622E-1
res40_imon=-2.47895E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.181E3	3.0E0	1.47E2	4.1E1	-7.17007E-2	-8.80028E1	-2.6226E-4	-8.80006E1	5.24521E-4	4.12464E-3	9.55105E-2	2.7334E1	-3.26543E1	-3.26201E1	2.6843E1	1.20122E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.01871E-1
2.0E0	1.1002E5	1.04E2	3.16E2	1.6E2	-7.201E-2	-8.80028E1	-5.72205E-4	-8.80005E1	8.10623E-4	4.36306E-3	9.53197E-2	2.73123E1	-3.26885E1	-3.26218E1	2.684E1	1.20004E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.00453E-1
3.0E0	1.9E1	0.0E0	4.85E2	2.79E2	-7.19325E-2	-8.80028E1	-6.91414E-4	-8.80007E1	5.24521E-4	4.31538E-3	9.54151E-2	2.73493E1	-3.26826E1	-3.26154E1	2.68105E1	1.20122E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.02133E-1
4.0E0	2.4083E4	1.3E1	6.55E2	3.98E2	-7.26282E-2	-8.80028E1	-6.67572E-4	-8.80005E1	6.4373E-4	4.26769E-3	9.52482E-2	2.73375E1	-3.26726E1	-3.26006E1	2.68502E1	1.19851E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80029E1	-8.58307E-4	-8.80006E1	3.57628E-4	4.22001E-3	9.55105E-2	2.73237E1	-3.26621E1	-3.26579E1	2.67932E1	1.198E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.01995E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80026E1	-6.67572E-4	-8.80008E1	7.15256E-4	4.31538E-3	9.53913E-2	2.72865E1	-3.2644E1	-3.26266E1	2.68382E1	1.20278E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80025E1	-4.76837E-4	-8.80009E1	5.00679E-4	4.07696E-3	9.54628E-2	2.73532E1	-3.26609E1	-3.25948E1	2.68701E1	1.20226E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.9874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80024E1	-6.4373E-4	-8.8001E1	4.76837E-4	4.33922E-3	9.55582E-2	2.73228E1	-3.26685E1	-3.26402E1	2.68151E1	1.20435E-7	2.52647E-3	2.52647E-3	6.33486E-3	3.01347E-1
1.2E1	1.04E2	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80026E1	-6.67572E-4	-8.80009E1	6.19888E-4	4.22001E-3	9.52959E-2	2.73265E1	-3.26487E1	-3.25856E1	2.6825E1	1.19851E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00197E-1
1.3E1	2.6E1	0.0E0	5.25E2	3.53E2	-7.05415E-2	-8.80027E1	-7.39098E-4	-8.8001E1	6.19888E-4	4.12464E-3	9.53913E-2	2.73508E1	-3.26573E1	-3.26242E1	2.68779E1	1.2033E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00563E-1
1.4E1	3.536E3	3.0E0	5.66E2	3.82E2	-7.16233E-2	-8.80028E1	-7.86781E-4	-8.80006E1	3.33786E-4	4.60148E-3	9.56535E-2	2.73099E1	-3.26362E1	-3.262E1	2.68693E1	1.21328E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.02396E-1
1.5E1	9.3E1	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.80026E1	-2.6226E-4	-8.80008E1	6.67572E-4	4.41074E-3	9.52959E-2	2.73051E1	-3.26446E1	-3.26494E1	2.68209E1	1.21904E-7	2.51693E-3	2.51693E-3	6.34099E-3	3.01209E-1
1.6E1	4.74E2	0.0E0	6.47E2	4.41E2	-7.19325E-2	-8.80026E1	-5.00679E-4	-8.8001E1	3.57628E-4	4.31538E-3	9.52005E-2	2.72818E1	-3.26146E1	-3.27313E1	2.68597E1	1.2212E-7	2.52099E-3	2.52099E-3	6.34588E-3	3.01085E-1
1.7E1	1.095E3	0.0E0	6.87E2	4.7E2	-7.10825E-2	-8.80027E1	-5.24521E-4	-8.80008E1	1.90735E-4	4.31538E-3	9.5439E-2	2.73312E1	-3.2689E1	-3.26158E1	2.68394E1	1.21869E-7	2.52405E-3	2.52405E-3	6.3126E-3	3.00247E-1
1.8E1	4.574E3	3.0E0	7.27E2	5.0E2	-7.14689E-2	-8.80026E1	-4.76837E-4	-8.80012E1	6.67572E-4	4.33922E-3	9.52959E-2	2.73219E1	-3.26789E1	-3.26116E1	2.68142E1	1.20447E-7	2.52222E-3	2.52222E-3	6.33648E-3	3.00363E-1
1.9E1	2.225E3	0.0E0	7.68E2	5.29E2	-7.17779E-2	-8.80027E1	-5.72205E-4	-8.8001E1	5.48363E-4	4.31538E-3	9.53197E-2	2.73375E1	-3.26921E1	-3.26482E1	2.69229E1	1.20069E-7	2.52757E-3	2.52757E-3	6.31288E-3	3.00824E-1
2.0E1	2.6626E4	8.0E0	8.08E2	5.58E2	-7.23189E-2	-8.80025E1	-5.00679E-4	-8.8001E1	5.00679E-4	4.3869E-3	9.51052E-2	2.73399E1	-3.26874E1	-3.2649E1	2.67866E1	1.20017E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.00824E-1
2.1E1	6.2E1	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80026E1	-7.39098E-4	-8.8001E1	7.62939E-4	4.26769E-3	9.4986E-2	2.73458E1	-3.26596E1	-3.26431E1	2.68256E1	1.20055E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.00966E-1
2.2E1	1.934E3	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80028E1	-8.82149E-4	-8.80007E1	7.39098E-4	4.43459E-3	9.53436E-2	2.72962E1	-3.26685E1	-3.26236E1	2.69623E1	1.19953E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.00453E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.201E-2	-8.80028E1	-5.24521E-4	-8.80009E1	3.57628E-4	4.43459E-3	9.51529E-2	2.73411E1	-3.26785E1	-3.26325E1	2.67836E1	1.20081E-7	2.51632E-3	2.51632E-3	6.30471E-3	3.01223E-1