[Scan]
initial_time=2016-01-18T18:57:10
final_time=2016-01-18T18:57:31
ip_count=19
run=1024
dataset=4
scan=287
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.77351E-6
ql1_vset=
ql1_vmon=-8.80029E1
ql1_imon=-7.27749E-10
ql2_vset=
ql2_vmon=-3.33786E-4
ql2_imon=1.35462E-9
ql3_vset=
ql3_vmon=-8.8001E1
ql3_imon=-2.35208E-9
ql4_vset=
ql4_vmon=3.8147E-4
ql4_imon=1.58653E-8
mult1=-1.9465E-8
mult2=-2.79185E-9
rf_tmon=-5.77186E-3
rf_agc=3.25658E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.31538E-3
ql5_imon=5.7292E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63009E0
bslens_imon=2.25657E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19448E1
lens5a_imon=2.01443E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.04797E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54061E1
cs_ef1b_imon=2.8407E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0467E2
lens23_imon=1.02319E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04423E1
cs_ea1_imon=2.50002E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04196E0
lens1_imon=1.50674E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64566E1
os_ef1alow_imon=2.98847E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03606E1
cs_ea2_imon=1.48054E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84514E1
cs_ef1a_imon=2.91098E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.34882E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11616E1
os_restr1_imon=4.25418E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15516E1
os_ea1_imon=2.36952E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63335E1
os_ef1bup_imon=3.0901E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22806E0
cs_ionrep_imon=1.18854E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91966E2
cs_nozzle_imon=1.93589E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01905E1
cs_anode1_imon=2.96216E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=4.01171E-8
tplens_vset=1.4E-1
tplens_vmon=1.66366E0
tplens_imon=-1.69568E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25912E1
iondef3_imon=1.49893E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26779E1
iondef2_imon=1.57968E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02995E2
lens6_imon=2.98108E-4
ql6_vset=1.0E-1
ql6_vmon=9.54628E-2
ql6_imon=9.637E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27132E0
ionrepsh_imon=1.79057E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33622E1
lens5b_imon=2.15899E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75024E1
cs_ef2b_imon=3.12614E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51706E0
os_ea2_imon=-6.09372E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00695E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70867E1
cs_ef2a_imon=3.17912E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06957E0
os_ef2alow_imon=-2.70239E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.10638E-1
os_ef2bup_imon=-5.17111E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11165E1
os_restr2_imon=3.42671E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.28378E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01671E1
cs_anode2_imon=2.24064E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73824E1
iondef1_imon=1.11067E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68442E1
iondef4_imon=1.1108E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.22728E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=7.85033E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12714E0
cs_ionaccel_imon=-1.85907E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02103E2
cs_ionfocb_imon=1.47208E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56411E1
einzel_imon=7.87525E-6
window_vset=0.0E0
window_vmon=2.79211E-1
window_imon=-8.24728E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82725E2
mask1_imon=2.38994E-4
mask2_vset=0.0E0
mask2_vmon=-1.86686E1
mask2_imon=-5.7245E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.10162E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.29772E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.2278E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26923E0
defgridb_imon=6.17875E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33365E1
os_fil1_imon=9.45051E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.05527E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6573E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30732E1
cs_fil1_imon=9.95939E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6424E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67358E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.58961E-2
os_fil2_imon=-2.82815E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09727E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.86159E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.5158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25635E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22514E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.02511E-1
chamber_ion_pmon=1.2026E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.60804E-1
res40_imon=-2.42849E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=216
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.263E3	0.0E0	1.47E2	4.1E1	-7.13915E-2	-8.80026E1	-1.43051E-4	-8.80009E1	3.33786E-4	4.14848E-3	9.50336E-2	2.73198E1	-3.26585E1	-3.26065E1	2.67601E1	1.19861E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.9926E-1
2.0E0	1.10566E5	9.3E1	3.16E2	1.6E2	-7.17779E-2	-8.80028E1	-4.29153E-4	-8.80009E1	5.96046E-4	4.14848E-3	9.50575E-2	2.73345E1	-3.26837E1	-3.26128E1	2.69175E1	1.20142E-7	2.51919E-3	2.51919E-3	6.3074E-3	3.01609E-1
3.0E0	2.1E1	0.0E0	4.85E2	2.79E2	-7.17779E-2	-8.80029E1	-2.14577E-4	-8.80008E1	-4.76837E-5	4.29153E-3	9.53197E-2	2.73387E1	-3.26649E1	-3.26012E1	2.67914E1	1.22066E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.03349E-1
4.0E0	2.4008E4	1.9E1	6.55E2	3.98E2	-7.21643E-2	-8.80029E1	-3.57628E-4	-8.80011E1	2.6226E-4	4.29153E-3	9.54151E-2	2.73442E1	-3.26567E1	-3.26567E1	2.68812E1	1.21601E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.01738E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80029E1	-5.72205E-4	-8.80008E1	5.24521E-4	4.26769E-3	9.53913E-2	2.73299E1	-3.26484E1	-3.2626E1	2.66592E1	1.2212E-7	2.52923E-3	2.52923E-3	6.32356E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80029E1	-6.19888E-4	-8.8001E1	5.96046E-4	4.41074E-3	9.52959E-2	2.73117E1	-3.27047E1	-3.25821E1	2.68827E1	1.2212E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.14689E-2	-8.80028E1	-4.05312E-4	-8.80011E1	1.66893E-4	4.07696E-3	9.54151E-2	2.73183E1	-3.26711E1	-3.2602E1	2.68274E1	1.2212E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.13915E-2	-8.80027E1	-3.8147E-4	-8.80008E1	5.24521E-4	4.1008E-3	9.50813E-2	2.73183E1	-3.26506E1	-3.26068E1	2.68412E1	1.21117E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.01085E-1
1.2E1	1.15E2	0.0E0	4.85E2	3.23E2	-7.13143E-2	-8.80028E1	-3.8147E-4	-8.80005E1	2.38419E-4	4.29153E-3	9.54151E-2	2.7349E1	-3.26681E1	-3.25888E1	2.67908E1	1.20069E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00824E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.23189E-2	-8.80027E1	-2.6226E-4	-8.80011E1	5.24521E-4	4.02927E-3	9.52959E-2	2.73706E1	-3.26254E1	-3.2593E1	2.69151E1	1.20959E-7	2.50789E-3	2.50789E-3	6.28552E-3	3.01347E-1
1.4E1	3.583E3	3.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80029E1	-9.53674E-5	-8.8001E1	6.67572E-4	4.29153E-3	9.52482E-2	2.72877E1	-3.26747E1	-3.26236E1	2.68142E1	1.21497E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.9943E-1
1.5E1	1.06E2	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80028E1	-3.09944E-4	-8.80008E1	3.57628E-4	4.48227E-3	9.50575E-2	2.73171E1	-3.26422E1	-3.2608E1	2.68202E1	1.20409E-7	2.51716E-3	2.51716E-3	6.32936E-3	2.9952E-1
1.6E1	4.85E2	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80026E1	-2.14577E-4	-8.80007E1	1.66893E-4	4.36306E-3	9.50813E-2	2.74453E1	-3.27344E1	-3.24999E1	2.69373E1					
1.7E1	1.116E3	1.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80026E1	-2.14577E-4	-8.80009E1	1.43051E-4	4.07696E-3	9.4986E-2	2.73171E1	-3.26476E1	-3.2617E1	2.67818E1	1.20226E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00302E-1
1.8E1	4.694E3	4.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80027E1	-2.38419E-4	-8.80008E1	4.05312E-4	4.24385E-3	9.53674E-2	2.7324E1	-3.26608E1	-3.26313E1	2.69259E1	1.19965E-7	2.5188E-3	2.5188E-3	6.29098E-3	3.02133E-1
1.9E1	2.299E3	4.0E0	7.68E2	5.29E2	-7.16233E-2	-8.80027E1	-5.00679E-4	-8.80008E1	2.38419E-4	4.14848E-3	9.53197E-2	2.73267E1	-3.26693E1	-3.26104E1	2.67595E1	1.19757E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00563E-1
2.0E1	2.676E4	1.8E1	8.08E2	5.58E2	-7.17779E-2	-8.80028E1	-1.66893E-4	-8.80011E1	3.57628E-4	4.43459E-3	9.53197E-2	2.73297E1	-3.26813E1	-3.26482E1	2.68088E1	1.20069E-7	2.52538E-3	2.52538E-3	6.31288E-3	2.9952E-1
2.1E1	7.3E1	0.0E0	8.49E2	5.88E2	-7.17779E-2	-8.8003E1	-3.33786E-4	-8.80007E1	5.00679E-4	4.3869E-3	9.50336E-2	2.73316E1	-3.26649E1	-3.26284E1	2.68569E1	1.20004E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.01223E-1
2.2E1	1.886E3	1.0E0	8.89E2	6.17E2	-7.19325E-2	-8.80028E1	-1.90735E-4	-8.80007E1	4.05312E-4	4.57764E-3	9.53674E-2	2.73163E1	-3.2652E1	-3.26638E1	2.68123E1	1.20174E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01347E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80029E1	-3.33786E-4	-8.8001E1	3.8147E-4	4.31538E-3	9.54628E-2	2.73824E1	-3.26779E1	-3.25912E1	2.68442E1	1.2026E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.02511E-1