[Scan]
initial_time=2016-01-18T18:58:06
final_time=2016-01-18T18:58:27
ip_count=19
run=1024
dataset=4
scan=289
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.85768E-6
ql1_vset=
ql1_vmon=-8.80031E1
ql1_imon=-7.46989E-10
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=1.45222E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-2.34352E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=1.59238E-8
mult1=-1.82829E-8
mult2=-2.75657E-9
rf_tmon=-4.86931E-3
rf_agc=3.40642E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.31538E-3
ql5_imon=5.88357E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65501E0
bslens_imon=2.24949E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19647E1
lens5a_imon=2.00775E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.04909E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53941E1
cs_ef1b_imon=2.82593E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.02142E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04457E1
cs_ea1_imon=2.53937E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00529E0
lens1_imon=1.36817E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64909E1
os_ef1alow_imon=2.97045E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03655E1
cs_ea2_imon=1.49737E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84622E1
cs_ef1a_imon=2.94234E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.33865E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=4.26103E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1504E1
os_ea1_imon=2.3532E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63587E1
os_ef1bup_imon=3.07208E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23676E0
cs_ionrep_imon=1.19829E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91959E2
cs_nozzle_imon=1.93491E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=2.98883E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20432E0
olens4_imon=4.03341E-8
tplens_vset=1.4E-1
tplens_vmon=1.65382E0
tplens_imon=-1.6439E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26296E1
iondef3_imon=1.5048E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26396E1
iondef2_imon=1.56957E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02998E2
lens6_imon=2.98006E-4
ql6_vset=1.0E-1
ql6_vmon=9.57966E-2
ql6_imon=9.17232E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26449E0
ionrepsh_imon=1.76778E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33669E1
lens5b_imon=2.17021E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74742E1
cs_ef2b_imon=3.12542E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49573E0
os_ea2_imon=-7.27156E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06112E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71372E1
cs_ef2a_imon=3.16182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05456E0
os_ef2alow_imon=-2.48616E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99827E-1
os_ef2bup_imon=-5.29004E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11304E1
os_restr2_imon=3.43212E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.29008E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01719E1
cs_anode2_imon=2.24893E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73334E1
iondef1_imon=1.08609E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68046E1
iondef4_imon=1.09999E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.2597E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=7.88297E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12474E0
cs_ionaccel_imon=-1.79059E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02109E2
cs_ionfocb_imon=1.47396E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56435E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=2.45574E-1
window_imon=-9.04015E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82695E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.86386E1
mask2_imon=-6.04886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.6577E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93682E3
defgrida_imon=6.57464E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=6.61358E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42327E0
defgridb_imon=6.21009E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33335E1
os_fil1_imon=9.4272E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07858E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65878E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3072E1
cs_fil1_imon=9.95326E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62384E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6712E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.2939E-2
os_fil2_imon=-2.53983E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.77292E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.80527E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.52181E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.53906E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22497E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.35059E-3
inlet_lpb_pmon=3.02769E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.9353E-1
res40_imon=-2.51859E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.098E3	4.0E0	1.47E2	4.1E1	-7.38649E-2	-8.8003E1	4.76837E-5	-8.80012E1	4.52995E-4	4.43459E-3	9.52005E-2	2.73305E1	-3.26425E1	-3.26142E1	2.6822E1	1.20435E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9978E-1
2.0E0	1.10136E5	1.02E2	3.16E2	1.6E2	-7.27828E-2	-8.8003E1	-3.09944E-4	-8.80007E1	5.24521E-4	4.79221E-3	9.50813E-2	2.73204E1	-3.2648E1	-3.26223E1	2.68388E1	1.20055E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.00197E-1
3.0E0	2.0E1	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.80028E1	-3.57628E-4	-8.80009E1	4.52995E-4	4.673E-3	9.51052E-2	2.73364E1	-3.26478E1	-3.26065E1	2.67836E1	1.20137E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.01742E-1
4.0E0	2.4365E4	1.9E1	6.55E2	3.98E2	-7.16233E-2	-8.8003E1	-5.00679E-4	-8.8001E1	1.0252E-3	4.31538E-3	9.53197E-2	2.73129E1	-3.26801E1	-3.26242E1	2.68192E1	1.20042E-7	2.52131E-3	2.52131E-3	6.31798E-3	3.01862E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.15461E-2	-8.80029E1	-4.76837E-4	-8.80011E1	7.86781E-4	4.36306E-3	9.5439E-2	2.73228E1	-3.26809E1	-3.25965E1	2.68334E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9926E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.16233E-2	-8.8003E1	-3.09944E-4	-8.8001E1	4.05312E-4	4.12464E-3	9.50098E-2	2.73562E1	-3.26765E1	-3.26266E1	2.68208E1	1.19861E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.13915E-2	-8.80029E1	-1.43051E-4	-8.8001E1	2.38419E-4	4.26769E-3	9.4986E-2	2.7301E1	-3.26667E1	-3.26254E1	2.68111E1	1.20158E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23189E-2	-8.80028E1	-3.33786E-4	-8.80007E1	8.10623E-4	4.52995E-3	9.53197E-2	2.73093E1	-3.26765E1	-3.26134E1	2.68849E1	1.20106E-7	2.52707E-3	2.52707E-3	6.3074E-3	3.01223E-1
1.2E1	9.6E1	0.0E0	4.85E2	3.23E2	-7.26282E-2	-8.80025E1	-2.38419E-4	-8.80007E1	2.86102E-4	4.3869E-3	9.53197E-2	2.73141E1	-3.26458E1	-3.26272E1	2.67776E1	1.20031E-7	2.52362E-3	2.52362E-3	6.31299E-3	3.00942E-1
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.80025E1	-4.29153E-4	-8.8001E1	8.58307E-4	4.22001E-3	9.52244E-2	2.73676E1	-3.26561E1	-3.26284E1	2.68204E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.02922E-1
1.4E1	3.565E3	1.0E0	5.66E2	3.82E2	-7.15461E-2	-8.80024E1	-4.05312E-4	-8.80009E1	5.72205E-4	4.02927E-3	9.51052E-2	2.72925E1	-3.2647E1	-3.2635E1	2.68647E1	1.20466E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.01223E-1
1.5E1	9.3E1	0.0E0	6.06E2	4.11E2	-7.201E-2	-8.80024E1	-3.33786E-4	-8.8001E1	4.29153E-4	4.1008E-3	9.51767E-2	2.73216E1	-3.26378E1	-3.26248E1	2.69043E1	1.2033E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00563E-1
1.6E1	4.86E2	2.0E0	6.47E2	4.41E2	-7.11597E-2	-8.80029E1	-2.86102E-4	-8.80009E1	8.10623E-4	4.31538E-3	9.52005E-2	2.72973E1	-3.26284E1	-3.26092E1	2.67746E1	1.2026E-7	2.51954E-3	2.51954E-3	6.28056E-3	3.0148E-1
1.7E1	1.197E3	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.80028E1	-4.76837E-4	-8.80013E1	7.15256E-4	4.1008E-3	9.51767E-2	2.73375E1	-3.26655E1	-3.26195E1	2.68809E1	1.19851E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.02253E-1
1.8E1	4.738E3	7.0E0	7.27E2	5.0E2	-7.20871E-2	-8.80029E1	-3.8147E-4	-8.80014E1	3.57628E-4	4.05312E-3	9.51529E-2	2.73063E1	-3.26494E1	-3.26356E1	2.68671E1	1.20697E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01871E-1
1.9E1	2.259E3	1.0E0	7.68E2	5.29E2	-7.201E-2	-8.8003E1	-1.90735E-4	-8.80015E1	5.72205E-4	4.24385E-3	9.55582E-2	2.73088E1	-3.26462E1	-3.26413E1	2.68358E1	1.21538E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.9952E-1
2.0E1	2.6976E4	1.4E1	8.08E2	5.58E2	-7.30918E-2	-8.80032E1	-5.00679E-4	-8.80012E1	5.96046E-4	4.05312E-3	9.54628E-2	2.73315E1	-3.26434E1	-3.26374E1	2.69379E1	1.20278E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00563E-1
2.1E1	5.0E1	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.80029E1	-2.14577E-4	-8.8001E1	2.6226E-4	4.17233E-3	9.55343E-2	2.73167E1	-3.26585E1	-3.26202E1	2.68442E1	1.20088E-7	2.51701E-3	2.51701E-3	6.29655E-3	3.01025E-1
2.2E1	1.909E3	2.0E0	8.89E2	6.17E2	-7.37103E-2	-8.80031E1	-3.8147E-4	-8.80012E1	5.96046E-4	4.41074E-3	9.57727E-2	2.73123E1	-3.26621E1	-3.26392E1	2.67937E1					
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80031E1	-4.05312E-4	-8.80013E1	1.19209E-4	4.31538E-3	9.57966E-2	2.73334E1	-3.26396E1	-3.26296E1	2.68046E1	1.20106E-7	2.51096E-3	2.51096E-3	6.35059E-3	3.02769E-1