[Scan]
initial_time=2016-01-18T18:58:34
final_time=2016-01-18T18:58:55
ip_count=19
run=1024
dataset=4
scan=290
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.81987E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-7.18343E-10
ql2_vset=
ql2_vmon=-6.4373E-4
ql2_imon=1.40371E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-2.36628E-9
ql4_vset=
ql4_vmon=5.24521E-4
ql4_imon=1.58661E-8
mult1=-1.67721E-8
mult2=-2.72061E-9
rf_tmon=-5.40165E-3
rf_agc=3.26366E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=5.66447E-10
bslens_vset=-6.2E0
bslens_vmon=-6.633E0
bslens_imon=2.27493E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19474E1
lens5a_imon=1.99346E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.04924E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54037E1
cs_ef1b_imon=2.8216E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.02345E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04743E1
cs_ea1_imon=2.53559E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02002E0
lens1_imon=1.49626E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64783E1
os_ef1alow_imon=2.9827E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03476E1
cs_ea2_imon=1.48108E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=2.93513E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.35467E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11388E1
os_restr1_imon=4.25598E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14828E1
os_ea1_imon=2.35451E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.06703E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21537E0
cs_ionrep_imon=1.19532E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91935E2
cs_nozzle_imon=1.93464E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=2.98955E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20372E0
olens4_imon=4.02432E-8
tplens_vset=1.4E-1
tplens_vmon=1.65674E0
tplens_imon=-2.41055E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26182E1
iondef3_imon=1.51487E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26729E1
iondef2_imon=1.56996E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03029E2
lens6_imon=2.98184E-4
ql6_vset=1.0E-1
ql6_vmon=9.54866E-2
ql6_imon=9.11164E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25944E0
ionrepsh_imon=1.7672E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33688E1
lens5b_imon=2.16645E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74591E1
cs_ef2b_imon=3.11893E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48043E0
os_ea2_imon=-7.51598E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00612E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.15785E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06657E0
os_ef2alow_imon=-2.51138E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.20249E-1
os_ef2bup_imon=-5.19994E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11436E1
os_restr2_imon=3.43428E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.29083E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01959E1
cs_anode2_imon=2.23235E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73177E1
iondef1_imon=1.11084E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68382E1
iondef4_imon=1.09098E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.20282E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=7.85421E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14636E0
cs_ionaccel_imon=-1.76536E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.47349E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56621E1
einzel_imon=7.72748E-6
window_vset=0.0E0
window_vmon=2.53382E-1
window_imon=-8.57164E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82684E2
mask1_imon=2.39153E-4
mask2_vset=0.0E0
mask2_vmon=-1.86242E1
mask2_imon=-7.13005E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.4024E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.38499E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=7.42811E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43726E0
defgridb_imon=6.10217E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33324E1
os_fil1_imon=9.43267E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06717E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65724E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30714E1
cs_fil1_imon=9.95897E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62696E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67201E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.37084E-2
os_fil2_imon=-2.5999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91107E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.93579E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35737E-1
cs_fil2_imon=-2.58788E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.59912E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22364E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.9874E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.41272E-1
res40_imon=-2.57986E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.226E3	2.0E0	1.47E2	4.1E1	-7.23189E-2	-8.80028E1	-3.57628E-4	-8.80008E1	8.34465E-4	4.26769E-3	9.55105E-2	2.73558E1	-3.26762E1	-3.26266E1	2.6852E1	1.19766E-7	2.51804E-3	2.51804E-3	6.31858E-3	2.98554E-1
2.0E0	1.09846E5	1.1E2	3.16E2	1.6E2	-7.15461E-2	-8.80027E1	4.76837E-5	-8.80008E1	4.52995E-4	4.05312E-3	9.54151E-2	2.73201E1	-3.26536E1	-3.26056E1	2.68424E1	1.20158E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.9841E-1
3.0E0	1.1E1	0.0E0	4.85E2	2.79E2	-7.15461E-2	-8.8003E1	-2.86102E-4	-8.80006E1	5.00679E-4	4.22001E-3	9.53674E-2	2.73399E1	-3.26638E1	-3.2659E1	2.68505E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00563E-1
4.0E0	2.4164E4	1.3E1	6.55E2	3.98E2	-7.18554E-2	-8.80031E1	-1.66893E-4	-8.8001E1	1.04904E-3	4.26769E-3	9.55343E-2	2.73352E1	-3.26649E1	-3.26166E1	2.68857E1	1.20055E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.01738E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.18554E-2	-8.80028E1	-3.33786E-4	-8.80012E1	9.77516E-4	4.24385E-3	9.52482E-2	2.73381E1	-3.26512E1	-3.26116E1	2.67013E1	1.19697E-7	2.51632E-3	2.51632E-3	6.29128E-3	3.02769E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80028E1	-5.96046E-4	-8.80009E1	8.34465E-4	4.31538E-3	9.54151E-2	2.72943E1	-3.2644E1	-3.26242E1	2.68917E1	1.19757E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.18554E-2	-8.8003E1	-6.4373E-4	-8.80009E1	7.15256E-4	4.41074E-3	9.54151E-2	2.73081E1	-3.26945E1	-3.26284E1	2.68146E1	1.20158E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.98156E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.15461E-2	-8.80031E1	-4.52995E-4	-8.80012E1	8.10623E-4	4.29153E-3	9.53436E-2	2.73231E1	-3.26585E1	-3.2617E1	2.68196E1	1.20278E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00302E-1
1.2E1	1.32E2	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80031E1	-2.6226E-4	-8.8001E1	6.91414E-4	4.31538E-3	9.52482E-2	2.73129E1	-3.2626E1	-3.26242E1	2.68057E1	1.20017E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00041E-1
1.3E1	2.0E1	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.8003E1	-2.6226E-4	-8.80011E1	5.24521E-4	4.43459E-3	9.52959E-2	2.7346E1	-3.26825E1	-3.2614E1	2.68508E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00041E-1
1.4E1	3.456E3	4.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80029E1	-2.38419E-5	-8.8001E1	3.8147E-4	4.43459E-3	9.56297E-2	2.73123E1	-3.26747E1	-3.26098E1	2.68388E1	1.19913E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01347E-1
1.5E1	9.2E1	0.0E0	6.06E2	4.11E2	-7.21643E-2	-8.8003E1	-2.86102E-4	-8.8001E1	7.39098E-4	4.3869E-3	9.5129E-2	2.73568E1	-3.26585E1	-3.25984E1	2.68064E1	1.2033E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.01871E-1
1.6E1	5.27E2	1.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80029E1	-1.19209E-4	-8.80009E1	6.4373E-4	4.60148E-3	9.5129E-2	2.7285E1	-3.26437E1	-3.26608E1	2.6843E1	1.19965E-7	2.52757E-3	2.52757E-3	6.29645E-3	3.02659E-1
1.7E1	1.103E3	0.0E0	6.87E2	4.7E2	-7.18554E-2	-8.8003E1	-2.86102E-4	-8.8001E1	5.24521E-4	4.43459E-3	9.5439E-2	2.73454E1	-3.26801E1	-3.26008E1	2.68382E1	1.20017E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.99E-1
1.8E1	4.637E3	4.0E0	7.27E2	5.0E2	-7.30146E-2	-8.80027E1	-1.90735E-4	-8.80008E1	6.19888E-4	4.52995E-3	9.53674E-2	2.73381E1	-3.26717E1	-3.26392E1	2.67908E1	1.198E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.01223E-1
1.9E1	2.259E3	1.0E0	7.68E2	5.29E2	-7.20871E-2	-8.80029E1	-3.57628E-4	-8.8001E1	5.00679E-4	4.17233E-3	9.53913E-2	2.73488E1	-3.2636E1	-3.25959E1	2.69181E1	1.20069E-7	2.52428E-3	2.52428E-3	6.29645E-3	3.01609E-1
2.0E1	2.6559E4	2.0E1	8.08E2	5.58E2	-7.18554E-2	-8.80029E1	-2.86102E-4	-8.80009E1	6.91414E-4	4.33922E-3	9.52959E-2	2.73405E1	-3.26413E1	-3.26236E1	2.68395E1	1.20209E-7	2.51417E-3	2.51417E-3	6.28056E-3	3.01738E-1
2.1E1	5.6E1	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80031E1	-1.43051E-4	-8.80011E1	7.39098E-4	4.69685E-3	9.54151E-2	2.73267E1	-3.26506E1	-3.25972E1	2.6816E1	1.19965E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01085E-1
2.2E1	1.882E3	1.0E0	8.89E2	6.17E2	-7.18554E-2	-8.80026E1	-3.8147E-4	-8.80012E1	7.86781E-4	4.48227E-3	9.54151E-2	2.73381E1	-3.2641E1	-3.26494E1	2.69049E1	1.20226E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01085E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80027E1	-6.4373E-4	-8.80011E1	5.24521E-4	4.72069E-3	9.54866E-2	2.73177E1	-3.26729E1	-3.26182E1	2.68382E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9874E-1