[Scan]
initial_time=2016-01-18T18:59:02
final_time=2016-01-18T18:59:23
ip_count=19
run=1024
dataset=4
scan=291
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.12368E-2
qbias_imon=-3.75429E-6
ql1_vset=
ql1_vmon=-8.80028E1
ql1_imon=-7.51376E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=1.43044E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-2.35049E-9
ql4_vset=
ql4_vmon=5.00679E-4
ql4_imon=1.58482E-8
mult1=-1.96257E-8
mult2=-2.47309E-9
rf_tmon=-4.84889E-3
rf_agc=3.27147E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=5.55825E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69099E0
bslens_imon=2.51494E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19683E1
lens5a_imon=2.01837E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12461E2
lens4a_imon=2.04898E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53929E1
cs_ef1b_imon=2.8216E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04634E2
lens23_imon=1.02167E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04728E1
cs_ea1_imon=2.50893E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99467E0
lens1_imon=1.77875E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64338E1
os_ef1alow_imon=2.9654E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03838E1
cs_ea2_imon=1.50445E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8425E1
cs_ef1a_imon=2.9445E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.3464E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11093E1
os_restr1_imon=4.25995E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15028E1
os_ea1_imon=2.35673E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63533E1
os_ef1bup_imon=3.08397E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25682E0
cs_ionrep_imon=1.18696E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91963E2
cs_nozzle_imon=1.93374E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01947E1
cs_anode1_imon=2.97657E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=4.02578E-8
tplens_vset=1.4E-1
tplens_vmon=1.66739E0
tplens_imon=-2.67032E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.259E1
iondef3_imon=1.49277E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26386E1
iondef2_imon=1.55754E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02995E2
lens6_imon=2.98183E-4
ql6_vset=1.0E-1
ql6_vmon=9.53436E-2
ql6_imon=9.07254E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28926E0
ionrepsh_imon=1.7745E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33681E1
lens5b_imon=2.18543E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74561E1
cs_ef2b_imon=3.12866E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49691E0
os_ea2_imon=-7.51931E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00648E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.16002E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03774E0
os_ef2alow_imon=-2.57626E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.18447E-1
os_ef2bup_imon=-5.19994E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11256E1
os_restr2_imon=3.43608E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.283E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01605E1
cs_anode2_imon=2.2511E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72997E1
iondef1_imon=1.09671E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6852E1
iondef4_imon=1.09242E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.22759E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.83958E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15777E0
cs_ionaccel_imon=-1.82663E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02127E2
cs_ionfocb_imon=1.47295E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56441E1
einzel_imon=7.85002E-6
window_vset=0.0E0
window_vmon=2.47976E-1
window_imon=-8.1752E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82699E2
mask1_imon=2.39102E-4
mask2_vset=0.0E0
mask2_vmon=-1.86584E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.03831E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93688E3
defgrida_imon=7.00291E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=6.87549E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53253E0
defgridb_imon=6.08267E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33371E1
os_fil1_imon=9.41753E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07149E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65873E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30743E1
cs_fil1_imon=9.94744E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62246E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67191E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.45852E-2
os_fil2_imon=-2.75006E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92308E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.95714E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34831E-1
cs_fil2_imon=-2.61792E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.51793E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22446E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.02396E-1
chamber_ion_pmon=1.20122E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.56599E-1
res40_imon=-2.51859E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.164E3	0.0E0	1.47E2	4.1E1	-7.22418E-2	-8.80026E1	-3.8147E-4	-8.80008E1	2.14577E-4	4.31538E-3	9.57251E-2	2.73546E1	-3.26703E1	-3.26148E1	2.68453E1	1.19861E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00563E-1
2.0E0	1.10856E5	8.7E1	3.16E2	1.6E2	-7.21643E-2	-8.80025E1	-2.14577E-4	-8.80009E1	2.6226E-4	3.93391E-3	9.55343E-2	2.73216E1	-3.26793E1	-3.25905E1	2.67907E1	1.20004E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.01995E-1
3.0E0	9.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80029E1	-6.19888E-4	-8.80008E1	4.76837E-4	4.05312E-3	9.52721E-2	2.73364E1	-3.26484E1	-3.26425E1	2.68134E1	1.19913E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.00563E-1
4.0E0	2.4204E4	7.0E0	6.55E2	3.98E2	-7.21643E-2	-8.80029E1	-3.8147E-4	-8.80009E1	3.8147E-4	4.14848E-3	9.53436E-2	2.73198E1	-3.26549E1	-3.26248E1	2.6819E1	1.20174E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9926E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80025E1	-2.86102E-4	-8.8001E1	6.19888E-4	4.07696E-3	9.5439E-2	2.73302E1	-3.26615E1	-3.26413E1	2.68352E1	1.19953E-7	2.51525E-3	2.51525E-3	6.33977E-3	3.01738E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80027E1	-4.29153E-4	-8.80007E1	6.4373E-4	4.24385E-3	9.54628E-2	2.72974E1	-3.26455E1	-3.2593E1	2.6843E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80032E1	-2.14577E-4	-8.80011E1	9.53674E-4	4.00543E-3	9.52721E-2	2.73429E1	-3.26621E1	-3.25984E1	2.68615E1	1.20106E-7	2.51525E-3	2.51525E-3	6.35059E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.80028E1	-5.96046E-4	-8.80007E1	7.62939E-4	4.48227E-3	9.52244E-2	2.73442E1	-3.26759E1	-3.25996E1	2.68106E1	1.20122E-7	2.51116E-3	2.51116E-3	6.32936E-3	3.00824E-1
1.2E1	9.0E1	0.0E0	4.85E2	3.23E2	-7.36328E-2	-8.80027E1	-5.00679E-4	-8.80011E1	4.76837E-4	4.60148E-3	9.51767E-2	2.73411E1	-3.26386E1	-3.2635E1	2.68112E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.9978E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80029E1	-6.67572E-4	-8.8001E1	6.19888E-4	4.41074E-3	9.5439E-2	2.73305E1	-3.26667E1	-3.26325E1	2.68454E1	1.20383E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.01609E-1
1.4E1	3.592E3	1.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80029E1	-4.52995E-4	-8.80009E1	6.67572E-4	4.29153E-3	9.5129E-2	2.73277E1	-3.2664E1	-3.26272E1	2.67944E1	1.20278E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.9874E-1
1.5E1	1.02E2	1.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80027E1	-1.43051E-4	-8.8001E1	3.8147E-4	4.05312E-3	9.54866E-2	2.7321E1	-3.26537E1	-3.26349E1	2.67986E1	1.19965E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01609E-1
1.6E1	5.03E2	0.0E0	6.47E2	4.41E2	-7.17007E-2	-8.80027E1	-3.8147E-4	-8.80008E1	3.57628E-4	4.1008E-3	9.54628E-2	2.73511E1	-3.26874E1	-3.25877E1	2.69007E1	1.19913E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00824E-1
1.7E1	1.122E3	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80028E1	-2.6226E-4	-8.80008E1	-1.43051E-4	3.67165E-3	9.52959E-2	2.73296E1	-3.26578E1	-3.26676E1	2.68869E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99941E-1
1.8E1	4.689E3	2.0E0	7.27E2	5.0E2	-7.201E-2	-8.80026E1	-3.09944E-4	-8.80007E1	4.05312E-4	3.86238E-3	9.53436E-2	2.7344E1	-3.26714E1	-3.2626E1	2.66737E1	1.19757E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00824E-1
1.9E1	2.29E3	0.0E0	7.68E2	5.29E2	-7.286E-2	-8.80028E1	-3.8147E-4	-8.80006E1	3.57628E-4	3.98159E-3	9.55343E-2	2.73177E1	-3.26675E1	-3.26074E1	2.68809E1	1.20278E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01609E-1
2.0E1	2.6691E4	2.8E1	8.08E2	5.58E2	-7.21643E-2	-8.80027E1	-6.19888E-4	-8.80007E1	1.43051E-4	4.05312E-3	9.53913E-2	2.73369E1	-3.26332E1	-3.26386E1	2.68496E1	1.20069E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.00563E-1
2.1E1	7.0E1	1.0E0	8.49E2	5.88E2	-7.18554E-2	-8.80029E1	-3.57628E-4	-8.80008E1	1.43051E-4	4.22001E-3	9.55343E-2	2.73315E1	-3.26573E1	-3.26452E1	2.69947E1	1.19757E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.9926E-1
2.2E1	2.017E3	2.0E0	8.89E2	6.17E2	-7.09279E-2	-8.80027E1	-3.57628E-4	-8.8001E1	3.57628E-4	4.19617E-3	9.55582E-2	2.73287E1	-3.26331E1	-3.26166E1	2.67662E1	1.20414E-7	2.5131E-3	2.5131E-3	6.32896E-3	2.99686E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.12368E-2	-8.80028E1	-5.72205E-4	-8.80011E1	5.00679E-4	4.41074E-3	9.53436E-2	2.72997E1	-3.26386E1	-3.259E1	2.6852E1	1.20122E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.02396E-1