[Scan]
initial_time=2016-01-18T18:59:58
final_time=2016-01-18T19:00:19
ip_count=19
run=1024
dataset=4
scan=293
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.12368E-2
qbias_imon=-3.79383E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-7.24828E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=1.38679E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-2.32441E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=1.58736E-8
mult1=-2.73146E-8
mult2=-2.72914E-9
rf_tmon=7.40648E-4
rf_agc=3.9798E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=6.15871E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66734E0
bslens_imon=2.10876E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19364E1
lens5a_imon=2.02561E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12546E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54044E1
cs_ef1b_imon=2.84421E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04653E2
lens23_imon=1.01959E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04658E1
cs_ea1_imon=2.57176E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98127E0
lens1_imon=1.4779E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64649E1
os_ef1alow_imon=2.96966E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03312E1
cs_ea2_imon=1.45603E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84498E1
cs_ef1a_imon=2.94846E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.35334E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11419E1
os_restr1_imon=4.26072E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15035E1
os_ea1_imon=2.39331E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63485E1
os_ef1bup_imon=3.07357E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2551E0
cs_ionrep_imon=1.20116E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91919E2
cs_nozzle_imon=1.93633E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01931E1
cs_anode1_imon=2.98043E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20372E0
olens4_imon=4.01832E-8
tplens_vset=1.4E-1
tplens_vmon=1.68349E0
tplens_imon=5.75444E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26856E1
iondef3_imon=1.51118E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26307E1
iondef2_imon=1.52344E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03022E2
lens6_imon=2.98382E-4
ql6_vset=1.0E-1
ql6_vmon=9.53436E-2
ql6_imon=9.03368E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26472E0
ionrepsh_imon=1.77543E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3352E1
lens5b_imon=2.15214E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.12918E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5441E0
os_ea2_imon=-5.40878E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00522E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7142E1
cs_ef2a_imon=3.15976E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06209E0
os_ef2alow_imon=-2.4877E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96652E-1
os_ef2bup_imon=-5.24358E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1143E1
os_restr2_imon=3.42353E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22977E2
cs_ionfoca_imon=6.28054E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0167E1
cs_anode2_imon=2.25237E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72827E1
iondef1_imon=1.12798E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69019E1
iondef4_imon=1.0965E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.33202E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.82032E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13072E0
cs_ionaccel_imon=-1.73357E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47348E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56521E1
einzel_imon=7.79557E-6
window_vset=0.0E0
window_vmon=2.42592E-1
window_imon=-8.89085E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82701E2
mask1_imon=2.39098E-4
mask2_vset=0.0E0
mask2_vmon=-1.8635E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92704E3
multa_neg_imon=8.02089E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9366E3
defgrida_imon=6.22922E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=6.95382E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56999E0
defgridb_imon=6.20399E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33354E1
os_fil1_imon=9.41082E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07121E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65942E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30721E1
cs_fil1_imon=9.95603E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63032E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67107E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52512E-2
os_fil2_imon=-2.70973E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89498E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.78812E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33522E-1
cs_fil2_imon=-2.35062E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.7983E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22323E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.97647E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.1982E-1
res40_imon=-2.50855E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.177E3	4.0E0	1.47E2	4.1E1	-7.17007E-2	-8.80028E1	-6.19888E-4	-8.80011E1	7.86781E-4	4.43459E-3	9.56297E-2	2.72644E1	-3.26685E1	-3.26484E1	2.67782E1	1.19757E-7	2.5188E-3	2.5188E-3	6.29098E-3	3.00824E-1
2.0E0	1.09584E5	9.4E1	3.16E2	1.6E2	-7.26282E-2	-8.80028E1	-3.57628E-4	-8.80014E1	8.34465E-4	4.24385E-3	9.53674E-2	2.73535E1	-3.26572E1	-3.26487E1	2.68531E1	1.19809E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01085E-1
3.0E0	2.1E1	0.0E0	4.85E2	2.79E2	-7.13915E-2	-8.8003E1	-4.05312E-4	-8.80012E1	5.96046E-4	4.24385E-3	9.55343E-2	2.73341E1	-3.26561E1	-3.26359E1	2.6719E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00041E-1
4.0E0	2.4108E4	8.0E0	6.55E2	3.98E2	-7.21643E-2	-8.80029E1	-4.52995E-4	-8.8001E1	5.24521E-4	4.64916E-3	9.54866E-2	2.73153E1	-3.262E1	-3.25882E1	2.66651E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.02253E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80028E1	-4.05312E-4	-8.80011E1	6.4373E-4	4.31538E-3	9.54151E-2	2.73316E1	-3.26343E1	-3.26419E1	2.68905E1	1.20055E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.80029E1	-4.76837E-4	-8.80013E1	9.77516E-4	4.62532E-3	9.5439E-2	2.72799E1	-3.27161E1	-3.26254E1	2.68142E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80028E1	-3.8147E-4	-8.80011E1	3.33786E-4	4.48227E-3	9.52959E-2	2.73586E1	-3.26404E1	-3.26068E1	2.69091E1	1.20158E-7	2.51954E-3	2.51954E-3	6.33436E-3	2.98665E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80024E1	-5.24521E-4	-8.80012E1	4.29153E-4	4.48227E-3	9.5439E-2	2.73275E1	-3.26467E1	-3.26054E1	2.6801E1	1.19653E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9978E-1
1.2E1	1.16E2	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80027E1	-2.38419E-4	-8.80011E1	1.19209E-4	4.50611E-3	9.5582E-2	2.73358E1	-3.26644E1	-3.26183E1	2.688E1	1.19851E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.01223E-1
1.3E1	2.6E1	1.0E0	5.25E2	3.53E2	-7.21643E-2	-8.80026E1	-2.6226E-4	-8.80009E1	4.29153E-4	4.31538E-3	9.55343E-2	2.73411E1	-3.26549E1	-3.26086E1	2.66875E1	1.19902E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.02769E-1
1.4E1	3.544E3	1.0E0	5.66E2	3.82E2	-7.23189E-2	-8.80024E1	-3.33786E-4	-8.80011E1	3.33786E-4	4.3869E-3	9.53674E-2	2.73225E1	-3.26524E1	-3.26506E1	2.68569E1	1.19861E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.02396E-1
1.5E1	1.06E2	0.0E0	6.06E2	4.11E2	-7.16233E-2	-8.80024E1	-3.57628E-4	-8.80011E1	2.38419E-4	4.55379E-3	9.53674E-2	2.73117E1	-3.26621E1	-3.26182E1	2.68797E1	1.20122E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9952E-1
1.6E1	5.23E2	0.0E0	6.47E2	4.41E2	-7.17779E-2	-8.80023E1	-4.29153E-4	-8.80011E1	2.14577E-4	4.62532E-3	9.53913E-2	2.73339E1	-3.26639E1	-3.26434E1	2.68755E1	1.20069E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.9952E-1
1.7E1	1.184E3	0.0E0	6.87E2	4.7E2	-7.16233E-2	-8.80026E1	-5.72205E-4	-8.8001E1	4.76837E-4	4.64916E-3	9.55105E-2	2.7358E1	-3.2647E1	-3.26278E1	2.68112E1	1.20137E-7	2.52697E-3	2.52697E-3	6.33538E-3	3.00676E-1
1.8E1	4.693E3	3.0E0	7.27E2	5.0E2	-7.17779E-2	-8.80026E1	-9.05991E-4	-8.80008E1	5.24521E-4	4.43459E-3	9.55105E-2	2.73069E1	-3.26567E1	-3.25995E1	2.69488E1	1.198E-7	2.51417E-3	2.51417E-3	6.29665E-3	3.01738E-1
1.9E1	2.246E3	0.0E0	7.68E2	5.29E2	-7.20871E-2	-8.80025E1	-6.4373E-4	-8.8001E1	6.19888E-4	4.69685E-3	9.51529E-2	2.73461E1	-3.26517E1	-3.26487E1	2.68154E1	1.19809E-7	2.51771E-3	2.51771E-3	6.3514E-3	3.03449E-1
2.0E1	2.6669E4	9.0E0	8.08E2	5.58E2	-7.201E-2	-8.80024E1	-5.24521E-4	-8.80009E1	5.72205E-4	4.98295E-3	9.4986E-2	2.73604E1	-3.26645E1	-3.26284E1	2.678E1	1.20226E-7	2.52099E-3	2.52099E-3	6.29098E-3	3.00041E-1
2.1E1	5.4E1	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80027E1	-4.76837E-4	-8.80011E1	2.38419E-4	4.98295E-3	9.50813E-2	2.73281E1	-3.26301E1	-3.26408E1	2.68603E1	1.2054E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.01347E-1
2.2E1	1.831E3	1.0E0	8.89E2	6.17E2	-7.0464E-2	-8.80025E1	-4.05312E-4	-8.80009E1	5.48363E-4	4.43459E-3	9.53197E-2	2.73635E1	-3.26484E1	-3.26349E1	2.67848E1	1.20004E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.00197E-1
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.12368E-2	-8.80026E1	-7.86781E-4	-8.80011E1	4.05312E-4	4.55379E-3	9.53436E-2	2.72827E1	-3.26307E1	-3.26856E1	2.69019E1	1.20158E-7	2.52169E-3	2.52169E-3	6.30202E-3	2.97647E-1