[Scan]
initial_time=2016-01-18T19:00:26
final_time=2016-01-18T19:00:47
ip_count=19
run=1024
dataset=4
scan=294
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.77221E-6
ql1_vset=
ql1_vmon=-8.80028E1
ql1_imon=-7.81524E-10
ql2_vset=
ql2_vmon=-2.86102E-4
ql2_imon=1.36157E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.26049E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.58639E-8
mult1=-1.92641E-8
mult2=-1.71396E-9
rf_tmon=-1.37473E-2
rf_agc=2.59884E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=5.44441E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68416E0
bslens_imon=2.32867E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19646E1
lens5a_imon=1.99965E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12509E2
lens4a_imon=2.0523E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53991E1
cs_ef1b_imon=2.8522E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02258E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0464E1
cs_ea1_imon=2.52994E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98788E0
lens1_imon=1.55E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64863E1
os_ef1alow_imon=2.97453E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03552E1
cs_ea2_imon=1.49784E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84475E1
cs_ef1a_imon=2.93665E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.34023E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11488E1
os_restr1_imon=4.28226E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15137E1
os_ea1_imon=2.35438E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63687E1
os_ef1bup_imon=3.05724E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22626E0
cs_ionrep_imon=1.17989E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91927E2
cs_nozzle_imon=1.93723E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02064E1
cs_anode1_imon=2.99295E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20401E0
olens4_imon=4.00832E-8
tplens_vset=1.4E-1
tplens_vmon=1.66547E0
tplens_imon=-1.22703E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26714E1
iondef3_imon=1.50578E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.25257E1
iondef2_imon=1.55733E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0304E2
lens6_imon=2.98184E-4
ql6_vset=1.0E-1
ql6_vmon=9.56297E-2
ql6_imon=9.48906E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27433E0
ionrepsh_imon=1.77362E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33586E1
lens5b_imon=2.1799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74391E1
cs_ef2b_imon=3.11736E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49723E0
os_ea2_imon=-5.84137E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0611E2
lens4b_imon=2.00464E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71356E1
cs_ef2a_imon=3.14829E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05745E0
os_ef2alow_imon=-2.42167E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.03023E-1
os_ef2bup_imon=-5.33741E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11535E1
os_restr2_imon=3.43187E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23035E2
cs_ionfoca_imon=6.29207E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01271E1
cs_anode2_imon=2.25897E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72225E1
iondef1_imon=1.09229E-5
iondef4_vset=2.691E1
iondef4_vmon=2.66809E1
iondef4_imon=1.10449E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.26154E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81832E-1
olens1_imon=7.81084E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13767E0
cs_ionaccel_imon=-1.85868E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02109E2
cs_ionfocb_imon=1.47383E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5648E1
einzel_imon=7.8894E-6
window_vset=0.0E0
window_vmon=2.71552E-1
window_imon=-8.33481E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82721E2
mask1_imon=2.39091E-4
mask2_vset=0.0E0
mask2_vmon=-1.86332E1
mask2_imon=-6.1454E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.67121E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.46355E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.3035E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50683E0
defgridb_imon=5.94443E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33336E1
os_fil1_imon=9.42049E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07057E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65997E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30725E1
cs_fil1_imon=9.95007E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62296E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67014E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42194E-2
os_fil2_imon=-2.48963E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88919E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.85772E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3502E-1
cs_fil2_imon=-2.37379E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31577E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22577E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.20959E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.67315E-1
res40_imon=-2.49813E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=219
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.166E3	0.0E0	1.47E2	4.1E1	-7.18554E-2	-8.8003E1	-3.33786E-4	-8.80009E1	4.76837E-4	4.36306E-3	9.51052E-2	2.73291E1	-3.26717E1	-3.26236E1	2.67373E1	1.19913E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01085E-1
2.0E0	1.1048E5	1.0E2	3.16E2	1.6E2	-7.29374E-2	-8.80026E1	-6.19888E-4	-8.8001E1	4.76837E-4	4.55379E-3	9.52482E-2	2.73087E1	-3.26573E1	-3.26224E1	2.68262E1	1.20017E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01347E-1
3.0E0	1.8E1	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80034E1	-6.19888E-4	-8.80008E1	7.39098E-4	4.81606E-3	9.54628E-2	2.73175E1	-3.26708E1	-3.26107E1	2.68256E1	1.20174E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.03712E-1
4.0E0	2.3977E4	5.0E0	6.55E2	3.98E2	-7.23964E-2	-8.80032E1	-2.86102E-4	-8.80008E1	5.24521E-4	4.88758E-3	9.55105E-2	2.73237E1	-3.26579E1	-3.26074E1	2.68959E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.8003E1	-2.86102E-4	-8.80009E1	3.8147E-4	4.8399E-3	9.52959E-2	2.73198E1	-3.26585E1	-3.26189E1	2.67475E1	1.19809E-7	2.52318E-3	2.52318E-3	6.3514E-3	2.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80029E1	-3.33786E-4	-8.80009E1	6.19888E-4	4.79221E-3	9.55105E-2	2.73303E1	-3.26549E1	-3.26242E1	2.68951E1	1.20158E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.98665E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17007E-2	-8.8003E1	-1.43051E-4	-8.8001E1	8.34465E-4	4.8399E-3	9.57251E-2	2.73255E1	-3.2641E1	-3.26278E1	2.68016E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80028E1	-3.57628E-4	-8.80008E1	5.48363E-4	4.62532E-3	9.5439E-2	2.73039E1	-3.26434E1	-3.26086E1	2.68815E1	1.20122E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.9978E-1
1.2E1	1.04E2	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80028E1	-5.00679E-4	-8.80011E1	0.0E0	4.72069E-3	9.52482E-2	2.73222E1	-3.26644E1	-3.25971E1	2.66694E1	1.20069E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.02133E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.8003E1	-2.86102E-4	-8.80011E1	4.05312E-4	4.57764E-3	9.5129E-2	2.73429E1	-3.26543E1	-3.26188E1	2.66514E1	1.198E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.03027E-1
1.4E1	3.495E3	0.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80028E1	-3.57628E-4	-8.8001E1	1.90735E-4	4.62532E-3	9.51052E-2	2.73201E1	-3.26591E1	-3.26338E1	2.68028E1	1.19819E-7	2.51693E-3	2.51693E-3	6.30182E-3	3.01209E-1
1.5E1	1.02E2	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80029E1	-5.96046E-4	-8.80007E1	2.14577E-4	4.55379E-3	9.53436E-2	2.73532E1	-3.26723E1	-3.26032E1	2.68899E1	1.19902E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.00966E-1
1.6E1	4.79E2	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80031E1	-3.09944E-4	-8.8001E1	1.66893E-4	4.19617E-3	9.5129E-2	2.73466E1	-3.26639E1	-3.26314E1	2.67325E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01085E-1
1.7E1	1.131E3	1.0E0	6.87E2	4.7E2	-7.23189E-2	-8.80027E1	-1.90735E-4	-8.8001E1	6.4373E-4	4.41074E-3	9.55582E-2	2.73508E1	-3.26434E1	-3.26446E1	2.69367E1	1.19861E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00302E-1
1.8E1	4.729E3	4.0E0	7.27E2	5.0E2	-7.38649E-2	-8.80028E1	-6.19888E-4	-8.8001E1	7.39098E-4	4.24385E-3	9.53436E-2	2.73369E1	-3.26334E1	-3.2634E1	2.67896E1	1.19913E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.00563E-1
1.9E1	2.329E3	4.0E0	7.68E2	5.29E2	-7.40192E-2	-8.80025E1	-1.90735E-4	-8.80011E1	3.8147E-4	4.3869E-3	9.54628E-2	2.73263E1	-3.26431E1	-3.26301E1	2.68292E1	1.2035E-7	2.51581E-3	2.51581E-3	6.31858E-3	2.99613E-1
2.0E1	2.6998E4	1.5E1	8.08E2	5.58E2	-7.30918E-2	-8.80029E1	-3.09944E-4	-8.8001E1	2.86102E-4	4.52995E-3	9.55582E-2	2.73291E1	-3.26771E1	-3.25816E1	2.70785E1	1.19953E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.00966E-1
2.1E1	4.8E1	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80029E1	-2.14577E-4	-8.80009E1	4.29153E-4	4.43459E-3	9.55105E-2	2.73139E1	-3.26927E1	-3.26402E1	2.67625E1	1.19978E-7	2.52139E-3	2.52139E-3	6.3074E-3	3.01475E-1
2.2E1	1.835E3	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80028E1	-5.72205E-4	-8.80007E1	3.57628E-4	4.43459E-3	9.55105E-2	2.73159E1	-3.26458E1	-3.26134E1	2.66744E1	1.20747E-7	2.51182E-3	2.51182E-3	6.32858E-3	3.01104E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80028E1	-2.86102E-4	-8.80007E1	2.38419E-4	4.57764E-3	9.56297E-2	2.72225E1	-3.25257E1	-3.26714E1	2.66809E1	1.20959E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00041E-1